基于混合漫射近似的空间分辨漫反射光学参量灵敏度的研究

根据空间分辨漫反射的双点源混合漫射近似模型, 推导了空间分辨漫反射率对生物组织吸收系数μ_a和有效散射系数μ'_s灵敏度的解析表示, 系统研究了在强吸收条件近光源区域吸收系数μ_a和有效散射系数μ'_s对漫反射光子分布的影响. 研究表明: 吸收系数的灵敏度随光源与探测器间距ρ的增加呈线性增长, 其斜率正比于(μ'_s/μ_a)^1/4, 比例系数约为1.4, 同时获得一个优化的探测距离ρ_opt, 距离光源约3.4个输运平均自由程, 在这个距离处有效散射系数的变化对测量吸收的影响最小. 这项研究对于生物组织的光学性质测量以及漫反射光谱技术的应用具有重要意义.     

用直接法测量血液的衰减系数μt存在的问题

用直接测量法测量人全血的衰减系数μ_t时,发现血液的衰减系数μ_t随样品厚度的增大而减小,随样品到探测器的距离增大而增大.因而用此测量方法测量衰减系数μ_t存在一些问题.本文通过研究光在血液中的散射,发现:采用足够薄的血样、适当减小限光光阑孔径、增大光探测器离样品的距离L_sd可减小轴向散射光的影响.并提出一种近似扣除轴向散射光的措施,能较准确地测量血液的衰减系数μ_t.     

石英微透镜阵列的制作研究

叙述了采用氩离子束刻蚀的方法制作线列长方形拱面石英微透镜阵列.所制单元石英微透镜底部的外形尺寸为(300×106)um²,平均冠高7.07μm,平均曲率半径202.19μm,平均焦距404.38μm,平均F₂数为3.82,平均光焦度2.47×10³屈光度,扫描电子显微镜和表面探针测试表明,所制线列石英微透镜阵列的图形整齐均匀,单元长方形拱面石英微透镜的轮廓清晰,表面光滑平整.所制微透镜阵列用于高T_c超导红外探测器阵列的实验证实,微透镜的引入可以显著改善超导探测器的光响应特性.     

表面热透镜技术测量3.8μm和2.8μm激光薄膜的微弱吸收

 采用表面热透镜技术，对3.8μm和2.8μm激光辐照下镀制在Si基底上的单层ZnS，YbF₃和YBC薄膜及不同膜系的YbF₃/ ZnS多层分光膜和多层高反膜，以及镀制在CaF₂基底上的增透膜进行了吸收测量，并对3.8μm和2.8μm 激光的测量结果进行了比较分析。实验结果表明，2.8μm波长下的吸收比3.8μm的大得多，两者之间约相差一个量级，测得的多层高反膜YbF₃/ZnS薄膜在的3.8μm处的最低吸收为4.57×10^－4，测量系统的灵敏度约为10^-5。     

PT-PEK-c电光聚合物薄膜的厚度和介电性质

研制了新的PT-PEK-c电光聚合物薄膜材料,用准波导耦合m线方法测量了PT-PEK-c电光聚合物薄膜的厚度,并测量了该聚合物薄膜在1×10²Hz到1×10⁷Hz频率范围内的室温介电常数.测量结果为:厚度d=2.328±0.315μm,在10KHz下,介电常数ε_r＝4023±0.063,介电损耗tanδ＝0.003.     

双光子吸收的Franz-Keldysh效应

从实验上证实Hg_0.695Cd_0.305Te 光电二极管空间电荷区中存在双光子吸收的Franz-Keldysh效应.利用一个皮秒Nd:YAG激光器抽运的光学参量产生器和差频产生器作为激发光源，测量了入射波长为λ₀=7.92μm的脉冲激光所激发的光响应随入射光强的变化关系.脉冲光响应峰值强度随入射光强的增大呈现二次幂函数增强趋势.采用等效RC电路模型将脉冲光伏信号峰值与入射光强相关联，得到空间电荷区中强电场下单光束     

Evaluation of downstream-mixing scheme for 9.4-µm CO2 gasdynamic laser

A theoretical analysis of a downstream-mixing 16-μm CO₂ gasdynamic laser revealed the possibility of utilizing the downstream-mixing scheme for the generation of 9.4-μm radiation using a CO₂ gasdynamic laser. The flow-field has been analyzed using complete two-dimensional, unsteady laminar form of Navier-Stokes equations coupled with the finite rate vibrational kinetic equations. The analysis showed that integrated small-signal gain of 11.5m⁻¹ for Lorentzian broadening and 4.8m⁻¹ considering Voigt function can be obtained for N₂ reservoir temperature of 2000°K and velocity ratio 1:1 between the CO₂ and N₂ mixing streams. These results (presented in graphs) clearly highlight the large potential of downstream-mixing CO₂ gasdynamic laser for 9.4-μm laser generation.     

声悬浮条件下黏性液滴的扇谐振荡规律研究

采用单轴式声悬浮方法研究了黏度μ =0.94-75.65 mPa·s的甘油-水溶液液滴的扇谐振荡规律. 发现一定阶数的振荡模式存在一定的临界黏度μ_c, 只有当μ < μ_c时, 该阶扇谐振荡才能被激发. 实验测定了声场调制幅度η = 0.23 时, l =2-9 阶扇谐振荡的临界黏度, 发现ln μ_c与l近似呈线性递减关系. 采用参数共振理论分析了黏性液滴的扇谐振荡过程, 发现激发扇谐振荡的液滴赤道半径扰动阈值h_c正比于液滴黏度μ, 并随l增大而增大, 因此扇谐振荡难以在高黏度和高阶模式下发生. 实验还发现, 各阶扇谐振荡的振幅和共振频率宽度随液滴黏度增大而减小, 黏度对液滴本征频率无明显影响.     

Correlation between work hardening and stress relaxation in polycrystalline nickel

Stress-relaxation rates at a constant strain in A-grade nickel polycrystals has been reported to depend in a peculiar manner on the initial stress levelσ ₀ at which relaxation is allowed to start. For large grains (D>75μm),s varies withσ ₀ linearly over the entire stress strain curve. For small grains (D<75μm),s-σ ₀ curve undergoes a change in its slope at a critical value of plastic strainɛ, which decreases as grain size increases. The observation referred to are found to correlate well with the work-hardening behaviour of the nickel polycrystals.     

超光滑表面无损检测轮廓仪

本文所述的超光滑表面无损检测轮廓仪,无需标准参考面;利用双焦干涉作非接触无损检测;利用干涉及电子共模抑制技术可有效地抑制各类噪音;计算机控制测量,即时给出表面粗糙度参数,与WYKO比对,结果吻合。仪器特别适合于均方根值R_q为纳米及亚纳米量级的软质金属材料及膜层表面测试。其横向分辨率为1μm,纵向分辨率为0.1nm。     

基于神经网络的反射式表面粗糙度光纤传感器

本文提出了一种新型表面粗糙度光纤传感器,阐述了它的结构、工作原理,给出了测 试结果。利用神经网络很强的输入-输出映射能力,将实验数据交给神经网络处理,减小了测量误差,提高了测量精度,扩大了测量范围。本系统能准确地识别Ra分别为0.012μm, 0.025μm,0.5μm,0.1μm的被测表面。     

Roughness measurement of metals using a modified binary speckle image and adaptive optics

This paper proposes an integrated roughness measurement system that is based on adaptive optics (AO) and binary analysis of speckle pattern images. The aim of this study was to demonstrate the necessity for AO compensation in regions containing both heat and fluid flow turbulences. A speckle image was obtained by projecting a laser beam onto the specimen surface, and the laser pattern image reflected from the surface was binarized to experimentally correlate the intensity with the surface roughness. In the absence of the AO correction scheme, induced turbulences can severely increase the residual rms error from 0.14 to 1.4 μm. After a real-time closed-loop AO correction, we can reduce the wavefront root mean square (rms) error to 0.12 μm, which not only compensates for the aberration error from induced disturbances but also improves the overall performance of the optical system. In addition, an AO system having different gains was investigated, and a threshold gain value was found to be able to steadily compensate for the wavefront errors in less than 2 s. Measurement results of five steel samples having roughness ranging from 0.2 to 3.125 μm (0.3λ and 5λ, where λ is the diode laser wavelength) demonstrate an excellent correlation between the intensity distribution of binary images and average roughness with a correlation coefficient of 0.9982. Furthermore, the proposed AO-assisted system is in good agreement with the stylus method and less than 9.73% error values can be consistently obtained.     

干涉显微镜中相移误差分析

相移误差是影响干涉显微镜测量表面形貌精度的主要因素之一。介绍了四帧算法、五帧算法、四帧免疫算法、五帧免疫算法的原理和计算公式 ,并对其特点进行了分析比较。利用自行研制的带旋转检偏器的干涉显微测量系统 ,分别用四种算法对Ra=0 35μm和Ra=0 .0 9μm粗糙度样块进行了实测。结果表明 ,五帧算法的重复测量精度优于0 5nm ,五帧免疫算法的重复测量精度优于 0 3nm。同时对在普通干涉显微镜上进一步提高其测量精度做了初步探讨     

Displacement measurement system for inverters using computer micro-vision

We propose a practical system for noncontact displacement measurement of inverters using computer micro-vision at the sub-micron scale. The measuring method of the proposed system is based on a fast template matching algorithm with an optical microscopy. A laser interferometer measurement (LIM) system is built up for comparison. Experimental results demonstrate that the proposed system can achieve the same performance as the LIM system but shows a higher operability and stability. The measuring accuracy is 0.283 μm.     

Rapid optical measurement of surface roughness of BiFeO<Subscript>3</Subscript> films for nonvolatile memory application

An optical inspection system for rapid surface roughness measurement of BiFeO₃ (BFO) thin films is developed. It is found that y = −121.45 x + 212.81 is a trend equation for characterizing the surface roughness of BFO thin films. The incident angle of 60◦ is a good candidate for measuring the surface roughness of BFO thin films. The maximum measurement error rate of the optical inspection system developed is less than 2.6%. The savings in inspection time of the surface roughness of BiFeO₃ thin films is up to 90%.     

Influence of surface topography and pore architecture of alkali-treated titanium on in vitro apatite deposition

Alkali-treated titanium surfaces have earlier shown to induce bone-like apatite deposition. In the present study, the effect of surface topography of two-dimensional and pore architecture of three-dimensional alkali-treated titanium substrates on the in vitro bioactivity was investigated. Titanium plates with a surface roughness of R_a = 0.13 μm, 0.56 μm, 0.83 μm, and 3.63 μm were prepared by Al₂O₃ grit-blasting. Simple tetragonal and face-centered Ti6Al4V scaffolds with spatial gaps of 450-1100 μm and 200-700 μm, respectively, were fabricated by a three-dimensional fiber deposition (3DFD) technique. After alkali treatment, the titanium plates with a surface roughness of R_a = 0.56 μm were completely covered with hydroxyapatite globules after 7 days in simulated body fluid (SBF), while the coverage of the samples with other surface roughness values remained incomplete. Similarly, face-centered Ti₆Al₄ scaffolds with spatial gaps of 200-700 μm exhibited a full surface coverage after 21 days in SBF, while simple tetragonal scaffolds with spatial gaps of 450-1100 μm were only covered for 45-65%. This indicates the importance of surface topography and pore architecture for in vitro bioactivity.     

Rapid surface roughness measurements of silicone thin films with different thicknesses

A rapid optical measurement system for rapid surface roughness measurement of polycrystalline silicon (poly-Si) thin films was developed in this study. Two kinds of thickness of poly-Si thin films were used to study rapid surface roughness measurements. Six different incident angles were employed for measuring the surface roughness of poly-Si thin films. The results reveal that the incident angle of 20° was found to be a good candidate for measuring the surface roughness of poly-Si thin films. Surface roughness (y) of poly-Si thin films can be determined rapidly from the average value of reflected peak power density (x) measured by the optical system developed using the trend equation of y = ?0.1876x + 1.4067. The maximum measurement error rate of the optical measurement system developed was less than 8.61%. The savings in measurement time of the surface roughness of poly-Si thin films was up to 83%.     

Preparation and in vitro characterization of aerosol-deposited hydroxyapatite coatings with different surface roughnesses

Hydroxyapatite (HA) coatings with different surface roughnesses were deposited on a Ti substrate via aerosol deposition (AD). The effect of the surface roughness on the cellular response to the coating was investigated. The surface roughness was controlled by manipulating the particle size distribution of the raw powder used for deposition and by varying the coating thickness. The coatings obtained from the 1100 °C-heated powder exhibited relatively smooth surfaces, whereas those fabricated using the 1050 °C-heated powder had network-structured rough surfaces with large surface areas and were superior in terms of their adhesion strengths and in vitro cell responses. The surface roughness (R_a) values of the coatings fabricated using the 1050 °C-heated powder increased from approximately 0.65 to 1.03 μm as the coating thickness increased to 10 μm. The coatings with a rough surface had good adhesion to the Ti substrate, exhibiting high adhesion strengths ranging from 37.6 to 29.5 MPa, depending on the coating thickness. The optimum biological performance was observed for the 5 μm-thick HA coating with an intermediate surface roughness value of 0.82 μm.     

Development of a novel scattered triangulation laser probe with six linear charge-coupled devices (CCDs)

The objective of this paper is to develop an inexpensive, robust, and precise scattered-type triangulation laser probe system with six linear charge-coupled devices (CCDs), that can be used to measure simultaneously the distance and inclination angle of a workpiece surface. The developed system has been configured and assembled based on Scheimpflug's principle. Through the specific arrangement of the six linear CCDs, four different measurement modules for the developed system were possible, namely the standard triangulation probe module, the double triangulation probe module, the pentagon-like triangulation probe module, and an approximately circular triangulation probe module. Angular measurements of an inclined surface were possible using the double triangulation probe module. The measuring range of the developed laser probe was ±2 mm and the resolution was 2 μm/pixel. The performance tests among the different measurement modules of the developed probe and the commercial circular triangulation laser probe OTM3-03 have been carried out. The measurement uncertainty of the developed laser probe system, with respect to different surface roughness and slope, was generally smaller than ±20 μm within the measuring range using the pentagon-like triangulation probe module with the statistical methodology of skewness (S_k) and kurtosis (K_u) analysis by setting the appropriate threshold values for S_k and K_u, respectively. The developed probe has been integrated with a PC-based 3-axis micro-positioning stage to construct an automatic non-contact 3D measurement system and to digitize the 3D profile of a small complex object.     

用激光分子束外延在Si衬底上外延生长高质量的TiN薄膜

采用激光分子束外延技术,利用两步法,在Si单晶衬底上成功地外延生长出TiN薄膜材料.原子力显微镜分析结果显示, TiN薄膜材料表面光滑,在10 μm×10 μm范围内,均方根粗糙度为0842nm.霍耳效应测量结果显示,TiN薄膜在室温条件下的电阻率为36×10^-5Ω·cm,迁移率达到5830 cm²/V·S,表明TiN薄膜材料是一种优良的电极材料.X射线θ—2θ扫描结果和很高的迁移率均表明,高质量的TiN薄膜材料被外延在Si衬底 关键词： 激光分子束外延 TiN单晶薄膜 外延生长