应用于气体传感器的具有铝/金电极的单模式两端对声表面波谐振器

为改善气体传感器性能,通过器件优化设计获得了一种应用于气体传感器的具有低损耗、高品质因子(Q)的单模式两端对声表面波(SAW)谐振器。该谐振器由两个换能器、分置于换能器两边的短路栅反射器以及在换能器之间分布的用于敏感膜镀膜的约2.5mm金属薄层构成。谐振器采用铝/金双层电极以降低测试气体环境的腐蚀影响。利用经典耦合模(COM)理论对器件性能进行了仿真以提取优化的结构设计参数。基于仿真结果,实验研制了基于300MHz频率的新型铝/金电极SAW两端对谐振器,测试结果显示所研制器件具有较低损耗(〈7dB),较高Q值(-3000)以及单一谐振模式的特点,并且,以所研制的新型谐振器为频率控制单元的谐振器型振荡器表现出良好的频率稳定度(t15Hz/h),这对于改善气体传感器的检测下限及稳定性等性能指标具有重要意义。     

evelopment of two-port surface acoustic wave resonator with A1/Au electrodes for gas sensing

Simple and efficient surface acoustic wave （SAW） two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas sensing. It was composed of two shorted grating reflectors and adjacent intedigital transducers （IDT）, and an active metal film in the cavity between the IDTs for the sensitive film coating. The devices are expected to provide good protection towards metal electrode for gas sensors application in chemically reactive environments. Excellent device performance as low insertion loss, high Q factor and single-mode are achieved by carefully selecting the metallic electrode thickness, cavity length and acoustic aperture. Prior to fabrication, the coupling of modes （COM） model was performed for device simulation to determine the optimal design parameters. The fabricated single-mode SAW resonator at operation frequency of 300 MHz range exhibits matched insertion loss of ~6.5 dB and loaded Q factor in the 3000 range. Using the fabricated resonator as the feedback element, a duaresonator-oscillator with excellent frequency stability （0.1 ppm） was developed and evaluated experimentally, and it is significant for performance improvement of SAW gas sensor.     

Development of a surface acoustic wave wireless and passive temperature sensor incorporating reflective delay line

based on optimal design on the core element of the sensor,a wireless and passive surface acoustic wave(SAW)temperature sensor integrated with ID Tag was presented.A reflective delay line,which consists of a transducer and eight reflectors on YZ LiNbO3 substrate.Was fabricated as the sensor element,in which,three reflectors were used for temperature sensing,and the other five were for the ID Tag using phase encoding.Single phase unidirectional transducers(SPUDTs)and shorted grating were used to structure the sAW device,leading to excellent signal to noise ratio(SNR).The performance of the SAW device was simulated by the coupling of modes(COM)prior to fabrication.Using the network analyzer,the response in time domain of the fabricated 434 MHz SAW sensor was characterized,the measured S11 agrees well with the simulated one,sharp reflection peaks,high signal/noise,and low spurious noise between the reflection peaks were observed.Using the radar system based on FSCW as the reader unit.the developed SAW temperature sensors were evaluated wirelessly.Excellent1 inearity and good resolution of士1℃ were observed.     

Behavior of Al/Cu/Ti electrodes in surface acoustic wave filter at high power

Driven by the need for high data-rates and continuous reduction in device size, surface acoustic wave filters are required to work under increasingly high power. In this work, a series of 2.7 GHz surface acoustic wave filters with Al/Cu/Ti three-layered electrode were fabricated and loaded with high power. Those three-layered electrodes showed weaker texture but higher stability than Al-Cu alloy electrode at high power. Morphologies, microstructures and elements distribution in cross section of fingers were analyzed carefully before and after high power loading. Results show that the circular-arc-shaped outline of fingers were appeared in most samples after high power loading, and the number of gains in the finger cross section changed from some into several with much larger volume. The features of distribution of Cu atoms also coincided with these microstructures. By finite element method and phase diagram analysis, the higher stability of Al/Cu/Ti three-layered electrodes are attributed to precipitation of θ-CuAl₂ in the bottom edge of electrode finger and Cu-doped α-Al in the center top.     

Design, simulation and structural optimization of a longitudinal acoustic resonator for trace gas detection using laser photoacoustic spectroscopy (LPAS)

The design of the acoustic resonator is critical for the optimization of the sensitivity of laser photoacoustic spectroscopy (LPAS) in trace gas detection applications. In this paper, an LC circuit model is used for the simulation of a 1D acoustic resonator. This acoustic resonator is designed for CO photoacoustic spectroscopy. The effects of the structural parameters, quality factor and resonant frequency on the performance of the device are theoretically analyzed. The role of the buffer volume as an acoustic filter is investigated and optimized dimensions of the buffer volume, to achieve minimum noise transmission coefficient, are calculated. The effects of the ambient temperature, variety of pressure and gas flow velocity on the resonant frequency of photoacoustic resonator and PA signal are simulated. The temperature dependence of the microphone sensitivity is also introduced.     

Comparison of 1D transfer matrix method and finite element method with tests for acoustic performance of multi-chamber perforated resonator

Multi-chamber perforated resonator (MCPR) is a kind of typical silencer element which can both attenuate broadband noise and satisfy specific installation requirements. The one-dimensional transfer matrix method (TMM) and finite element method (FEM) are widely used to predict the transmission loss of the resonators. This paper mainly focuses on the comparison between 1D TMM and FEM in which detailed perforation modeling is applied for the acoustic modeling of MCPRs. Five resonators with different acoustic attenuation frequency ranges are built for simulation and test. In order to verify the results of the above methods, a transmission loss test facility is designed based on two-load method. Through adjusting the distance between microphones, the facility’s effective measurement frequency can be changed. The results show that despite of the complex modeling and calculation, FEM with detailed perforation modeling shows good consistency with test results in both frequency and amplitude within entire frequency range. In comparison, TMM is limited by the cut-off frequency when calculating transmission losses. Besides, accuracy of TMM in low frequency range is also affected by perforation conditions. However, TMM is time-saving in calculation and structure optimization. In MCPRs’ development process, TMM can be used to quickly design and optimize structure parameters while FEM can be used to verify the acoustic performance before prototyping.     

PEEM study of work function changes in Cu, Au and Pd metal surfaces with surface acoustic wave propagation

The effects of surface acoustic wave (SAW) on the work function of Cu, Au and Pd metal surfaces with different surface structures were studied by photoelectron emission microscopy (PEEM). SAW propagation produced bright PEEM images for Cu, Au and Pd metal surfaces consisting of high-index planes and step sites, whereas it yielded dark images for the metals exposing low-index planes, indicating that the SAW enhanced photoemission from rough metal surfaces containing coordinatively-unsaturated metal atoms and lowered that from densely packed smooth metal surfaces. Changes in the PEEM images with SAW-on and SAW-off were reversible and were associated with decreases and increases in the work function of the metal surfaces, respectively. The SAW caused periodic and vertical lattice displacement, and it was demonstrated that large lattice displacement was responsible for work function changes from coincidence between the patterns of photoemission and lattice displacement. A mechanism for work function changes is proposed on the basis of effects on the spatial structures and electronic properties of metal surfaces.     

Tetrahedral amorphous carbon films as a frequency-increasing interlayer of surface acoustic wave devices with a ZnO/Si configuration

Tetrahedral amorphous carbon (ta-C) films deposited using filtered cathodic vacuum arc technology have been applied to the interlayer of surface acoustic wave devices with a ZnO/Si configuration. The phase velocity in the multilayered structure was analyzed in the first instance by theoretical calculations and was then measured by means of a network analyzer. It has been shown that the ta-C interlayer between piezoelectric film and Si substrate can strikingly increase the phase velocity of the surface acoustic wave. The greater the interlayer thickness is and the higher the content of the sp³ hybridization is, the faster surface acoustic wave propagates. However, the increment of phase velocity gradually decreases with increasing interlayer thickness. It was confirmed in this paper that the measured values of the phase velocity as a function of the interlayer thickness agree with the theoretical calculations.     

Structural, electrical and piezoelectric properties of LiNbO3 thin films for surface acoustic wave resonators applications

In this work, 0.30 μm thick LiNbO₃ layers have been deposited by sputtering on nanocrystalline diamond/Si and platinised Si substrates. The films were then analyzed in terms of their structural and optical properties. Crystalline orientations along the (0 1 2), (1 0 4) and (1 1 0) axes have been detected after thermal treatment at 500 °C in air. The films were near-stoichiometric and did not reveal strong losses or diffusion in lithium during deposition or after thermal annealing. Pronounced decrease of the roughness on top of the LiNbO₃ layer and at the interface between LiNbO₃ and diamond was also observed after annealing, compared to the bare nanocrystalline diamond on Si substrate. Furthermore, ellipsometry analysis showed a better density and a reduced thickness of the surface layer after post-deposition annealing. The dielectric constant and losses have been measured to 50 and less than 3.5%, respectively, for metal/insulator/metal structures with 0.30 μm thick LiNbO₃ layer. The piezoelectric coefficient d₃₃ was found to be 7.1 pm/V. Finally, we succeeded in switching local domain under various positive and negative voltages.     

Numerical study on surface acoustic wave method for determining Young's modulus of low-k films involved in multi-layered structures

The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the brittle low dielectric constant (low-k) thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on different structures of low-k/SiO₂/Si substrate, SiO₂/low-k/Si substrate, low-k/Si substrate, and low-k/Cu/Si substrate are investigated to instruct an accurate and facile fitting process for determining Young's modulus of low-k films. The dependence of dispersion relation on the film thickness, elastic modulus of low-k materials as well as frequency are provided and discussed in detail. The study shows an obvious influence of layered structure on the dispersion relation of SAWs. For a fixed structure, the dispersion curvature increases with the decrease of Young's modulus of low-k films.     

Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing

Tin dioxide (SnO₂) thin films were deposited by plasma enhanced-atomic layer deposition (PE-ALD) on Si(1 0 0) substrate using dibutyl tin diacetate (DBTA) ((CH₃CO₂)₂Sn[(CH₂)₃-CH₃]₂) as precursor. The process parameters were optimized as a function of substrate temperature, source temperature and purging time. It is observed that the surface phenomenon of the thin films was changed with film thickness. Atomic force microscopy (AFM) images and X-ray diffraction (XRD) pattern were used to observe the texture and crystallanity of the films. The films deposited for 100, 200 and 400 cycles were characterized by XPS to determine the chemical bonding properties. XPS results reveal that the surface dominant oxygen species for 100, 200 and 400 cycles deposited films are O₂⁻, O⁻ and O²⁻, respectively. The 200 cycles film has exhibited highest concentration of oxygen (O⁻) species before and after annealing. Conductivity studies revel that this film has best adsorption strength to the oxygen ions forming on the surface. The sensor with 200 cycles SnO₂ thin film has shown highest sensitivity to CO gas than other films. A correlation between the characteristics of Sn3d_5/2 and O1s XPS spectra before and after annealing and the electrical behavior of the SnO₂ thin films is established.     

Porous silicon with β-cyclodextrin modified surface for photoluminescence sensing of organic molecules in gas and liquid phase

Porous silicon surface was modified by photochemically activated hydrosilylation reaction with permethyl-6^I-alkenoylamino-6^I-deoxy-β-cyclodextrins terminated with linear alkenoyl spacers of various lengths. As compared to unmodified surface, derivatized surfaces revealed modified photoluminescence response in the presence of controlled amounts of various organic molecules in gas and liquid phase. For the selected set of analytes we observed most significant modification of photoluminescence response for aromatic compounds what corresponds to optimum molecular size for strong host–guest interaction with β-cyclodextrin cavity. Aliphatic compounds quenched photoluminescence from both unmodified and surface modified porous silicon. For low gas phase concentrations of aromatic analytes β-cyclodextrin modified porous silicon revealed photoluminescence enhancement, at higher concentrations common photoluminescence quenching was observed. The size-dependent host–guest interaction between β-cyclodextrin cavity and detected molecule was observed in photoluminescence quenching in the presence of aliphatic molecules in liquid phase. The role of the strength of host–guest interactions between detected analytes and β-cyclodextrin cavity on photoluminescence sensor response is discussed.     

The surface of TiO2 gate of 2DEG-FET in contact with electrolytes for bio sensing use

In order to apply two-dimensional electron-gas-field-effect-transistors (2DEG-FETs) for cell-viability sensors, we investigated the chemical/electrical properties of TiO₂ thin films (13-17 nm) prepared with the sol-gel technique on the gate surface of AlGaAs/GaAs 2DEG-FETs. Photochemical/electrochemical reactions on GaAs surface in electrolytes, which induce the degradation of 2DEG-FET performance, are effectively suppressed by introducing a TiO₂ thin film on the gate area of 2DEG-FETs. Compared to conventional ion-selective FETs (ISFETs), the TiO₂/2DEG-FETs in this study exhibit a high sensitivity (410 mV/mM) for H₂O₂ detection. TiO₂ surfaces show better biocompatibility than GaAs surfaces as demonstrated by direct cell culture on these surfaces.