Determination of the thermal conductivity of polycrystalline diamond films by means of the photoacoustic effect

A new method of determining the heat-conducting properties of diamond films is proposed, based on the photoacoustic effect. This method is used to study diamond polycrystalline films grown on silicon by chemical vapor deposition in a microwave discharge plasma. The thermal conductivity obtained was approximately half that for single-crystal diamond. Zh. Tekh. Fiz. 69, 97–101 (April 1999)     

Photoacoustic spectroscopy of diamond powders and polycrystalline films

Photoacoustic spectroscopy is used to study optical absorption in diamond powders and polycrystalline films. The photoacoustic spectra of diamond powders with crystallite sizes in the range from ∼100 μm to 4 nm and diamond films grown by chemical vapor deposition (CVD) had a number of general characteristic features corresponding to the fundamental absorption edge for light with photon energies exceeding the width of the diamond band gap (∼5.4 eV) and to absorption in the visible and infrared by crystal-structure defects and the presence of non-diamond carbon. For samples of thin (∼10 μm) diamond films on silicon, the photoacoustic spectra revealed peculiarities associated with absorption in the silicon substrate of light transmitted by the diamond film. The shape of the spectral dependence of the amplitude of the photoacoustic signal in the ultraviolet indicates considerable scattering of light specularly reflected from the randomly distributed faces of the diamond crystallites both in the polycrystalline films and in the powders. The dependence of the shape of the photoacoustic spectra on the light modulation frequency allows one to estimate the thermal conductivity of the diamond films, which turns out to be significantly lower than the thermal conductivity of single-crystal diamond. Fiz. Tverd. Tela (St. Petersburg) 39, 1787–1791 (October 1997)     

Determination of thermal conductivity of CVD diamond films via photoacoustic measurements

A novel method of determination of polycrystalline diamond films’ thermoconductive properties using the photoacoustic effect is proposed. By this method, we studied the diamond films grown on silicon substrates using chemical vapor deposition technique. A value of thermal conductivity obtained for the films was less than half that for diamond single crystal. The decrease of thermal conductivity, as well as characteristic features of optical properties of the films, is explained by the presence of a large amount of intercrystallite boundaries and other structure defects and admixures detected using Raman and photoluminescent spectroscopies. Received: 22 October 1998 / Accepted: 27 January 1999 / Published online: 28 April 1999     

氮气氛下(100)织构金刚石薄膜的成核与生长研究

利用热丝化学气相沉积法研究了氮气浓度对金刚石薄膜成核和生长的影响.实验发现氮气的 加入对金刚石成核密度影响不大,但促进了已形成的金刚石核的长大.适量的氮气不仅使金 刚石生长速率得到很大的提高,而且稳定了金刚石薄膜(100)面的生长,使金刚石薄膜具有 更好的(100)织构.利用原位光发射谱对衬底附近的化学基团进行了研究.研究表明,氮气的 引入使得金刚石生长的气相化学和表面化学性质发生了很大变化.含氮基团的萃取作用提高 了金刚石表面氢原子的脱附速率,从而提高了金刚石膜的生长速率.而含氮基团的选择吸附 使金刚石 关键词： 氮气 金刚石薄膜 织构 原位光发射谱     

Influence of heat treatment on the electrophysical properties of thin films of copper-indium diselenide

An investigation of the structural, electrical, optical, and thermophysical properties is carried out on thin polycrystalline films of the ternary semiconductor CuInSe₂, which is potentially useful for fabricating solar cells. The thin films were obtained by thermal evaporation of CuInSe₂ and Se powder from two independent sources and by high-vacuum deposition in a closed cell (quasiequilibrium deposition). The influence of annealing in air on the parameters of the thin films is analyzed, and the dynamics of variation in the properties of the films are investigated as a function of the annealing time. Temperature dependences of the electrical conductivity, mobility, and thermal conductivity of CuInSe₂ thin films are given together with the spectral dependence of the short-circuit photocurrent of a photosensitive Au-CuInSe₂-Au structure. Zh. Tekh. Fiz. 67, 34–38 (March 1997)     

用SiCl4/H2气源沉积多晶硅薄膜光照稳定性的研究

对以SiH₄/H₂及SiCl₄/H₂为源气体、采用 等离子体增强化学气相沉积技术制备的非晶硅薄膜和多晶硅薄膜进行了光照稳定性的研究.实验表明，制备的多晶硅薄膜并没有出现 非晶硅中的光致衰减现象，其光电导、暗电导在光照过程中没有下降反而有所上升且电导率 变化快慢受氢稀释度的制约.多晶硅薄膜的光照稳定性可能来源于高的晶化度及Cl元素的存在. 关键词： 多晶硅薄膜 稳恒光电导效应 晶界 光致衰退效应     

Study of microwave plasma-assisted chemical vapor deposition of poly-and single-crystalline diamond films

We study conditions for microwave plasma-assisted chemical vapor deposition of high-quality single-crystal diamond films in a CVD reactor. These conditions are studied using the results of homoepitaxial growth of polycrystalline diamond films on diamond substrates and on the basis of numerical simulation of the microwave discharge in a CVD reactor. A high-quality single-crystal diamond layer is synthesized on a synthetic, type Ib diamond substrate. The properties of the obtained monolayer are studied by means of Raman and X-ray diffraction spectroscopy as well as optical and atomic-force microscopy.     

金属与金刚石薄膜接触的电学特性研究

用热丝辅助化学汽相沉积技术在Si衬底上合成了含少量受主型杂质的近于本征的金刚石薄膜，并研究了三种金属（Cu，Ag和Al）与它接触的电学特性，以及退火对接触特性的影响．结果表明Cu，Ag与金刚石薄膜接触的电学特性比较类似，而Al则明显不同；而且退火对它们的接触特性影响很大 关键词：     

Microstructure and tribological performance of self-lubricating diamond/tetrahedral amorphous carbon composite film

In order to smooth the rough surface and further improve the wear-resistance of coarse chemical vapor deposition diamond films, diamond/tetrahedral amorphous carbon composite films were synthesized by a two-step preparation technique including hot-filament chemical vapor deposition for polycrystalline diamond (PCD) and subsequent filtered cathodic vacuum arc growth for tetrahedral amorphous carbon (ta-C). The microstructure and tribological performance of the composite films were investigated by means of various characterization techniques. The results indicated that the composite films consisted of a thick well-grained diamond base layer with a thickness up to 150 μm and a thin covering ta-C layer with a thickness of about 0.3 μm, and sp³-C fraction up to 73.93%. Deposition of a smooth ta-C film on coarse polycrystalline diamond films was proved to be an effective tool to lower the surface roughness of the polycrystalline diamond film. The wear-resistance of the diamond film was also enhanced by the self-lubricating effect of the covering ta-C film due to graphitic phase transformation. Under dry pin-on-disk wear test against Si₃N₄ ball, the friction coefficients of the composite films were much lower than that of the single PCD film. An extremely low friction coefficient (∼0.05) was achieved for the PCD/ta-C composite film. Moreover, the addition of Ti interlayer between the ta-C and the PCD layers can further reduce the surface roughness of the composite film. The main wear mechanism of the composite films was abrasive wear.     

高导热金刚石薄膜的研究

分析了影响金刚石膜热导率的主要因素，指出声子的散射是造成金刚石膜热导率降低的主要原因．采用光热偏转法实现了金刚石薄膜热导率的测试，测量误差小于5%，从减少杂质和晶界对导热声子的散射入手，研究了在不同的制备方法下碳源气体和金刚石膜内晶粒取向对其热导率的影响．结果表明在低碳源气体浓度下采用微波等离子体化学汽相沉积方法制备的具有较高程度（400）晶粒取向的金刚石薄膜具有高的热导率性质．优化的工艺条件制备出热导率为15.2W/（K·cm）左右的金刚石膜． 关键词：     

Thermal conductive performance of deposited amorphous carbon materials by molecular dynamics simulation

A series of diamond-like carbon (DLC) films with different microstructure were prepared by depositing carbon atoms on diamond surface with incident energy ranging from 1 to 100 eV. The thermal conductivity of the deposited films and the Kapitza resistance between the film and the diamond substrate were investigated. Results show that the average density, the average fraction of sp³ bonding and the thermal conductivity of the DLC films increase first, reaching a maximum around 20–40 eV before decreasing, while the Kapitza resistance decreases gradually with increased deposition energy. The analysis suggests that the thermal resistance of the interface layer is in the order of 10^?10 m²K/W, which is not ignorable when measuring the thermal conductivity of the deposited film especially when the thickness of the DLC film is not large enough. The fraction of sp³ bonding in the DLC film decreases gradually normal to the diamond surface. However, the thermal conductivity of the film in normal direction is not affected obviously by this kind of structural variation but depends linearly on the average fraction of sp³ bonding in the entire film. The dependence of the thermal conductivity on the fraction of sp³ bonding was analysed by the phonon theory.     

Optical,structural, and photocatalytic properties of the nanosized titanium dioxide films deposited in magnetron discharge plasma

The conditions of the optimum and controlled deposition of titanium dioxide nanolayers in the cylindrical gas discharge plasma of a magnetron having a unique design are found and described. The examination of the grown films by Raman spectroscopy is used to determine the conditions of deposition of the amorphous and polycrystalline phases of titanium dioxide. The films deposited on a cold substrate are amorphous, and the films deposited on a heated substrate consist of polycrystalline anatase. The evolution of the spectral lines of argon, oxygen, and titanium and the discharge voltage drop are studied as a function of the magnitude and the direction of changing the discharge current. The results obtained are shown to be applied for contactless optical monitoring. The refractive index of the films n is shown to have a nonlinear dependence on the layer thickness, and the layers that have a high photocatalytic activity and can be used to remove inorganic pollutants from the environment are shown to be grown.     

吸收辐射复合金刚石膜的制备及光学研究

采用微波等离子体化学气相沉积（MW-PCVD）和直流热阴极辉光放电等离子体化学气相沉积（DC-PCVD）两种方法相结合,制备出一种吸收辐射的复合金刚石膜,它对宽光谱范围的光辐射具有99%—99.2%的吸收率,同时具有较低的反射率和透过率.随着黑色吸收辐射金刚石层厚度的增加,复合金刚石膜的热导率将小幅度降低,但黑色金刚石膜层厚度小于15 μm时,复合金刚石膜的热导率都在16 W·cm^-1·K^-1以上,这满足吸收辐射复合金刚石膜的高导热需求.用热阴极DC-PCVD方 关键词： 吸收辐射 光学材料 金刚石 热导率     

Luminescent properties of diamond single crystals of pyramidal shape

The luminescence properties of needle-like crystals of diamond, obtained by selective oxidation of textured polycrystalline diamond films, are studied. Diamond films were grown by chemical vapor deposition from a methane–hydrogen mixture activated by a DC discharge. The spectra of photo- and cathodoluminescence and the spatial distribution of the intensity of radiation at different wavelengths are obtained for individual needle-like crystals. Based on the spectral characteristics, conclusions are made about the presence of optically active defects containing nitrogen and silicon impurities in their structure, as well as the significant effect of structural defects on their luminescence spectra.     

不同织构CVD金刚石膜的Hall效应特性

采用热丝化学气相沉积法在p型硅衬底上制备了不同织构的多晶金刚石膜,使用XRD表征了CVD金刚石膜的结构特征, 研究了退火后不同织构金刚石膜的电流特性, 使用Hall效应检测仪研究了金刚石膜的霍尔效应特性及随温度变化的规律, 结果表明所制备的金刚石膜是p型材料, 载流子浓度随着温度的降低而增加, 迁移率随着温度的降低而减小. 室温下[100]织构金刚石薄膜的载流子浓度和迁移率分别为4.3×10⁴ cm^-3和76.5 cm²/V·s.     

Enhancing the thermal conductivity of polymer-assisted deposited Al2O3 film by nitrogen doping

<正>Polymer-assisted deposition technique has been used to deposit Al₂O₃ and N-doped Al₂O₃（AlON） thin films on Si（100） substrates.The chemical compositions,crystallinity,and thermal conductivity of the as-grown films have been characterized by X-ray photoelectron spectroscopy（XPS）,X-ray diffraction（XRD）,and 3-omega method,respectively. Amorphous and polycrystalline Al₂O₃ and AlON thin films have been formed at 700℃and 1000℃.The thermal conductivity results indicated that the effect of nitrogen doping on the thermal conductivity is determined by the competition of the increase of Al-N bonding and the suppression of crystallinity.A 67%enhancement in thermal conductivity has been achieved for the samples grown at 700℃,demonstrating that the nitrogen doping is an effective way to improve the thermal performance of polymer-assisted-deposited Al₂O₃ thin films at a relatively low growth temperature.     

Considerable increase in thermal conductivity of a polycrystalline CVD diamond upon isotope enrichment

We measured the temperature dependence of thermal conductivity of a polycrystalline CVD diamond with natural isotope composition and an isotope enriched (99.96% ¹²C) sample at temperatures from 5 to 420 K. The isotope enriched diamond demonstrates a considerable growth of thermal conductivity at temperatures above 80 K compared to the diamond with natural composition of isotopes. At room temperature the thermal conductivity reaches 24.3 W·cm^?1K^?1, and the isotope effect makes up not less than 34%.     

Field electron emission in graphite-like films

Results of investigation of carbon films deposited with the use of gas-phase chemical reactions in the plasma of a dc discharge are presented. Films obtained at different parameters of the deposition process varied widely in their structure and phase composition, from polycrystalline diamond to graphite-like material. Comparative study of the structure and phase composition of the films using Raman spectroscopy, cathodoluminescence, electron microscopy, and diffractometry, as well as the obtained field electron emission characteristics, have shown that the threshold value of the electric field strength for electron emission decreases with a decrease in the size of diamond crystallites and growth of the fraction of non-diamond carbon. The lowest threshold fields (less than 1.5 V/μm) are obtained for films consisting mainly of graphite-like material. A model based on the experimental data is proposed, which explains the mechanism of field electron emission in carbon materials.     

Comparative study of textured diamond films by thermal conductivity measurements

Superior thermal conductivity, high resistance, high breakdown voltage and wide band gap make diamond an attractive material for a variety of applications in electronics. One of its most appealing applications is as a buried dielectric in silicon-on-diamond (SOD) technology. This paper presents thermal conductivity measurements conducted on a series of diamond films (grown by the microwave plasma chemical vapor deposition technique) as a function of the sample morphology and thickness, for eventual incorporation in the SOD structures. Results show that there is a significant difference in the measured thermal conductivity between samples with fiber texture and samples with sheet texture. Also, measurements performed on a 160-μm-thick diamond sample before and after reactive ion etching of approximately 10 μm of the nucleation layer show no significant change in the measured value of the thermal conductivity. PACS 81.05.Uw; 65.40.-b; 61.72.-y     

Investigation of the thermal conductivity of diamond film on aluminum nitride ceramic

Diamond films were successfully synthesized on aluminum nitride(AlN) ceramic substrates by hot-filament chemical vapor deposition (HFCVD) method. The thermal conductivity of the diamond film/aluminum nitride ceramic (DF/AlN) composites was studied by photothermal deflection (PTD) technique. It has reached 2.04 W/cm K, 73% greater than that of AlN ceramic. Compared with the measurement of scanning electron microscopy (SEM) and Raman spectroscopy, the influence of diamond films on the thermal conductivity of the composites was pointed out. The adhesion and the stresses were also studied. The unusual stability and very good adhesion of the diamond film on AlN ceramic substrate obtained is attributed to the formation of aluminum carbide. Received: 24 March 1998 / Accepted: 8 March 1999 / Published online: 5 May 1999