Understanding delamination in microelectronic devices using AES,XPS and chemometrics

The recent development of XPS instrumentation with near‐micron spatial resolution has advanced the capability of elemental and chemical‐state imaging accompanied by small‐area analysis (down to 15 µm). In this paper, the combined use of X‐ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) at enhanced spatial resolution is shown to have significantly improved the understanding of interfacial delamination and related problems encountered in the production of electronic devices in the field of microelectronics. An example of the application of surface analysis for ITO/Mo adhesion problems will be presented. The mathematical procedure using principal component analysis (PCA) in the reduction of noise in XPS images will also be described. The dramatic improvements in the image contrast and chemical component determination from multispectral image data sets will be presented. This study is intended to explore the contributions given by advanced surface analysis tools to solve real‐world problems. Copyright © 2007 John Wiley & Sons, Ltd.     

PMMA colloid particles armored by clay layers with PDMAEMA polymer brushes

Poly[2‐(dimethylamino) ethyl methacrylate] (PDMAEMA) brushes on the surfaces of clay layers were prepared by in situ free‐radical polymerization. Poly (methyl methacrylate) (PMMA) colloid particles stabilized and initiated by clay layers with PDMAEMA polymer brushes were prepared by Pickering emulsion polymerization. Transmission electron microscopy was used to characterize the structure and morphology of the colloid particles. The X‐ray diffraction (XRD) results indicated that the intercalated structures of the clay layers were almost destroyed in Pickering emulsion polymerization, and clay layers with exfoliated structures were created. The surface of the colloid particles was analyzed by using X‐ray photoelectron spectroscopy (XPS). The XPS results provide direct evidence that the clay layers with PDMAEMA chains cover the PMMA colloid particles. © 2008 Wiley Periodicals, Inc. JPolym Sci Part A: Polym Chem 46: 2632–2639, 2008     

Sample rotation improves gas cluster sputter depth profiling of polymers

X‐ray photoelectron spectroscopy (XPS) was used in conjunction with gas cluster ion source etching to analyze polystyrene and polyvinylpyrrolidone multilayer samples, total thickness ~15 μm, to establish optimal conditions for depth profiles over many μm in depth. Using standard conditions, these samples demonstrate a reduction in depth resolution and sputtering yield, which is shown to be partly due to X‐ray–induced damage and partly due to roughening of the sputtered surface. By limiting the X‐ray exposure, it was possible to retain depth resolution to a depth of approximately 5 μm; to obtain useful depth profiles beyond this depth, it was necessary to use sample rotation. The use of optimized conditions allowed the chemical integrity of the polymer layers to remain intact during the etching process with relatively sharp interfaces over the full depth of the films. Both the elemental intensities in XPS and the line shape of the C 1s peak could be used to determine the differences in chemical structure of the films in the depth profile. Detailed analysis suggests that a “stepwise” rotation scheme can maintain depth resolution better than continuous rotation during sputtering.     

Investigation into the surface relief grating mechanism via XPS in new azobenzene based optical material

Research into azobenzene and its compounds focuses on the molecules ability to cis‐trans isomerize, this photoisomerization enables surface relief gratings (SRGs) to be formed on the azobenzene functionalized polymer films. SRG allows information to be written and then erased, an essential requirement of most modern electrical products. The interest into SRG photofabrication is thus rapidly increasing and is emerging at the forefront of photonic and nanotechnology research. The surface relief grating mechanism, however, is not fully understood, a photoplasticization process is postulated, which is thought to occur via the azo‐chromophores photoisomerization, so encouraging polymer chain migration to the surface. In comparison, suggestions have shown the SRG process does not involve a change in the film surface profile but in the local refractive index. Currently, no research has yet established the surface relief grating mechanism, this paper sets out to determine the mechanism and investigate those theories already postulated by observing the thin film surfaces prior to and after SRG using X‐ray photoelectron spectroscopy (XPS). By identifying the surface components, greater insight and understanding of the SRG mechanism can be achieved. In this paper, poly(4‐(N‐(2‐methacryloyloxyethyl)‐N‐ethylamino)‐4′‐nitroazobenzene)₉₀‐co‐(methylmethacrylate)₁₀ 50 : 50 PMMA blend was exposed to SRGs. Using XPS the surface composition was determined prior to and after SRG. Following SRG, the spectra for O 1s, N 1s and C 1s using XPS expressed a change in the components at the surface. This is most evident in the N 1s spectra, with PMMA not containing nitrogen, the N 1s becomes the determining factor. The nitrogen absence combined with a significant increase in the carbon and oxygen peak intensity concludes the azobenzene lies not on the surface but, in fact, within the bulk after SRG. The initial light irradiation process must be a consideration. However, on X‐ray analysis the sample showed the same spectra as the one prior to SRG. Copyright © 2002 John Wiley & Sons, Ltd.     

Study of the first nucleation steps of thin films by XPS inelastic peak shape analysis

The initial steps in the formation of thin films have been investigated by analysis of the peak shape (both inelastic background and elastic contributions) of X‐ray photoelectron spectra. Surface coverage and averaged height of the deposited particles have been estimated for several overlayers (nanometre range) after successive deposition cycles. This study has permitted the assessment of the type of nucleation and growth mechanisms of the films. The experiments have been carried out in situ in the preparation chamber of an XPS spectrometer. To check the performance of the method, several materials (i.e. cerium oxide, vanadium oxide and cadmium sulfide) have been deposited on different substrates using a variety of preparation procedures (i.e. thermal evaporation, ion beam assisted deposition and plasma enhanced chemical vapour deposition). It is shown that the first deposited nuclei of the films are usually formed by three‐dimensional particles whose heights and degree of surface coverage depend on the chemical characteristics of the growing thin film and substrate materials, as well as the deposition procedure. It is concluded that XPS peak shape analysis can be satisfactorily used as a general method to characterize morphologically the first nanometric moieties that nucleate a thin film. Copyright © 2006 John Wiley & Sons, Ltd.     

Differentiating calcium carbonate polymorphs by surface analysis techniques—an XPS and TOF‐SIMS study

Calcium carbonate has evoked interest owing to its use as a biomaterial, and for its potential in biomineralization. Three polymorphs of calcium carbonate, i.e. calcite, aragonite, and vaterite were synthesized. Three conventional bulk analysis techniques, Fourier transform infrared (FTIR), X‐ray diffraction (XRD), and SEM, were used to confirm the crystal phase of each polymorphic calcium carbonate. Two surface analysis techniques, X‐ray photoelectron spectroscopy (XPS) and time‐of‐flight secondary ion mass spectroscopy (TOF‐SIMS), were used to differentiate the surfaces of these three polymorphs of calcium carbonate. XPS results clearly demonstrate that the surfaces of these three polymorphs are different as seen in the Ca(2p) and O(1s) core‐level spectra. The different atomic arrangement in the crystal lattice, which provides for a different chemical environment, can explain this surface difference. Principal component analysis (PCA) was used to analyze the TOF‐SIMS data. Three polymorphs of calcium carbonate cluster into three different groups by PCA scores. This suggests that surface analysis techniques are as powerful as conventional bulk analysis to discriminate calcium carbonate polymorphs. Copyright © 2008 John Wiley & Sons, Ltd.     

Photoelectron spectroscopy on organic surfaces: X‐ray degradation of oxygen‐plasma‐treated and chemically reduced poly(propylene) surfaces in comparison to conventional polymers

The X‐ray‐induced sample damage during mono XPS analysis of an oxygen‐plasma‐oxidized and subsequently wet‐chemically reduced poly(propylene) film was investigated as a showcase for plasma‐modified or plasma‐deposited samples. By doing this, the degradation index approach as introduced by Beamson and Briggs in the Scienta ESCA300 high‐resolution XPS database of organic polymers has been adopted. As to be expected, the sample degrades by loosing oxygen as revealed by observation of decreasing O/C and C OR/C_sum ratios. However, the X‐ray degradation indices are definitely higher than those of conventional reference polymers. Moreover, the C OR/C_sum degradation index is significantly higher in comparison with one obtained for the O/C ratio. In that context, there is no difference between the plasma sample and a conventional poly(vinyl alcohol) polymer. It is concluded that for reliable quantitative surface chemical analysis, the quality of spectra in terms of acquisition times must be optimized aimed to a minimization of X‐ray degradation. Finally, it is proposed to describe the photon flux of an X‐ray gun in an XPS experiment, which defines the degradation rate at the end, by using the sample current simply measured with a carefully grounded sputter‐cleaned reference silver sample. Copyright © 2009 John Wiley & Sons, Ltd.     

XPSSurfA: An open collaborative XPS data repository using the CMSShub platform

X‐ray photoelectron spectroscopy (XPS) is a widely used surface analysis technique employed in fundamental research, applied research, service laboratories, and industry. Good‐quality analytical outcomes depend critically on spectral references. Many examples of XPS reference databases exist, including print editions, sets of spectral peak positions drawn from the literature, and digital archives and libraries. We report the development of a new digital XPS database comprising survey spectra and region spectra for a range of materials types, collected under a common set of analytical conditions. Each material is described using spectra collected at multiple pass energies with all photoelectron and X‐ray induced Auger transitions represented. Detailed metadata are provided for each material and each spectrum, presented using a schema that incorporates the ISO 16243 and 14976 standards and extensions developed in this work. Spectra are shared under a Creative Commons International (4.0) attribution, non‐commercial licence (CC BY‐NC) in Kratos (.dset), VAMAS (.vms), and XML (.xml) formats. It is intended that reference spectra be imported directly into XPS data analysis software packages for reference and comparison purposes, matching either the peak or transition of interest and the instrument pass energy. The database is flexible and scalable in structure and has the potential to become a core XPS reference resource.     

Growth and characterization of ultrathin carbon films on electrodeposited Cu and Ni

Ultrathin carbon films were grown on different types of metallic substrates. Free‐standing foils of Cu and Ni were prepared by electroforming, and a pure Ni film was obtained by galvanic displacement on a Si wafer. Commercial foil of Ni 99.95% was used as a reference substrate. Carbon films were grown on these substrates by chemical vapour deposition in a CH₄‐H₂ atmosphere. Obtained films were characterized by Raman spectroscopy, X‐ray photoelectron spectroscopy (XPS), Auger electron spectroscopy, and ultraviolet photoemission spectroscopy. The XPS at grazing collection angle was used to determine the thickness of carbon films. Depending on the deposition parameters, the films of graphene or graphite were obtained on the different substrates. The uniformity of graphene and its distribution over the sample area were investigated from Raman data, optical images, and XPS chemical maps. The presence of graphene or graphite in the films was determined from the Raman spectra and Auger peak of C KVV. For this purpose, the D parameter, which is a fingerprint of carbon allotropes, was determined from C KVV spectra acquired by using X‐rays and electron beam. A formation of an intermediate layer of metal hydroxide was revealed in the samples with graphene overlayer.     

Surface and interface analysis of electrochemically synthesized ferromagnetic/semiconducting Ni/GaAs(001) thin film

Thin film of ferromagnetic (FM) metal (Ni) on a semiconducting substrate (GaAs), i.e. Ni/GaAs(001), has been synthesized using electrochemical method. The structural, chemical and magnetic properties at the surface and interface have been investigated using X‐ray diffraction (XRD)/grazing incidence X‐ray reflectivity (GIXRR), X‐ray photoelectron spectroscopy (XPS) and magneto‐optical Kerr effect (MOKE) techniques, respectively. A crystalline peak observed at 44.4º in the XRD pattern, corresponding to Ni(111) Bragg peak, confirms the monocrystalline nature of the film. The atomic force microscopy image shows small‐sized spherical crystallites uniformly deposited over the substrate. The fitted GIXRR pattern confirms a smooth Ni/GaAs(001) film surface with roughness of less than ~5 ± 0.4 Å. The micro‐structural parameters, such as film thickness, surface and interface roughness, and electron density, are found to be ~230 ± 5 Å, ~4.5 ± 1 Å, ~0.5 ± 0.02 Å and ~6.38 ± 0.5 (Å^?2), respectively. The chemical nature of the film at the surface and interface, investigated using a depth profile XPS technique, shows no diffusion of metallic Ga and As into Ni layer or vice versa, confirming a sharp FM/semiconducting Ni/GaAs(001) interface. The magnetization behavior investigated using MOKE technique at room temperature shows a soft FM nature of the film with coercivity of ~75 Oe at the film surface. However, coercivity was found to be ~35 Oe at the interface. In addition, the saturation magnetization is also found to decrease at the interface with decreasing Ni layer thickness. The observed magnetization behavior is correlated with structural and chemical changes that occur at the interface of Ni/GaAs(001) film. Copyright © 2013 John Wiley & Sons, Ltd.     

Fabrication of ZIF‐8@Polyphosphazene core‐shell structure and its efficient synergism with ammonium polyphosphate in flame‐retarding epoxy resin

A novel zeolitic imidazolate framework (ZIF‐8) nanoparticles@polyphosphazene (PZN) core‐shell architecture was synthesized, and then, ZIF‐8@PZN and ammonium polyphosphate (APP) were applied for increasing the flame retardancy and mechanical property of epoxy resin (EP) through a cooperative effect. Herein, ZIF‐8 was used as the core; the shell of PZN was coated to ZIF‐8 nanoparticles via a polycondensation method. The well‐designed ZIF‐8@PZN displayed superior fire retardancy and smoke suppression effect. The synthesized ZIF‐8@PZN observably raised the flame retardancy of EP composites, which could be demonstrated by thermogravimetric analysis (TGA) and a cone calorimeter test (CCT). The chemical structure of ZIF‐8@PZN was characterized by X‐ray diffraction (XRD), X‐ray photoelectron spectroscopy (XPS), and transmission electron microscopy (TEM). Compared with pure epoxy, with the incorporation of 3 wt% ZIF‐8@PZN and 18 wt% APP into the EP, along with 80.8%, 72.6%, and 64.7% decreased in the peak heat release rate (pHRR), the peak smoke production rate (pSPR), and the peak CO production rate (pCOPR), respectively. These suggested that ZIF‐8@PZN and APP generated an intumescent char layer, and ZIF‐8@PZN can strengthen the char layer, resulting in the enhancement in the flame resistance of EP.     

Reversible Addition‐fragmentation Chain Transfer Polymerization Grafted from Silicon Surface to Prepare Poly(methyl methacrylate) Brushes

通过共价键锚固链转移剂4-氰基-4-二硫代苯甲酰基戊酸琥珀酯于硅片表面,然后采用可逆加成-断裂链转移（RAFT）自由基聚合方法制备了聚甲基丙烯酸甲酯（PMMA）高分子刷. 聚合动力学研究表明,在反应进行2小时后,PMMA的厚度随聚合时间的增大而几乎呈线性增大,具有明显的活性聚合特征. 用椭圆偏光仪、X-光电子能谱（XPS）、原子力显微镜（AFM）及接触角测试对硅片表面的PMMA高分子刷进行了表征.     

Effect of Organic Nano Carboncapsule Incorporated Modified Clay on Fire‐Retardancy of PMMA Nanocomposites

Here we investigate a new type of highly flame retardant poly(methyl methacrylate) (PMMA) nanocomposite by bulk polymerization of methyl methacrylate (MMA) in the presence of organic nano carboncapsule (OCNC/NCNC)‐incorporated modified montmorillonites (CL120, CL42). The morphology of the modified clay was confirmed by X‐ray diffraction (XRD), and Fourier transform infrared (FT‐IR) spectroscopy was used to identify the functional groups in the clay. The nano morphological characterization of the clay in the PMMA matrix was confirmed by XRD and transmission electron microscopy (TEM). The thermal and mechanical properties of the PMMA nanocomposites were investigated by thermogravimetry and dynamic mechanical analysis, respectively. PMMA containing organo nano carboncapsule‐doped CL42 modified cocoamphodipropionate (K2) (P‐O‐CL42) could achieve very high thermal stability compared to pristine PMMA. The 5% thermal decomposition temperature (T _5d) increased by 63.2°C. Storage modulus of PMMA nanocomposites measured by DMA analysis. An enhancement of storage modulus and significant reduction in the peak heat release (PHR) rate were observed in the almost all PMMA nanocomposites as compared to pristine PMMA. Moreover, these results suggest that PMMA nanocomposites can have potential applications in the building industry and the medical field.     

Effect of magnesium dihydroxide nanoparticles on thermal degradation and flame resistance of PMMA nanocomposites

The influence of magnesium dihydroxide (MDH) nanoparticles on thermal degradation and fire behavior of poly(methyl methacrylate) (PMMA) has been investigated by thermogravimetric analysis (TGA), cone calorimeter, and pyrolysis‐combustion flow calorimeter (PCFC) tests, respectively. MDH nanoparticles with either lamellar or fibrous shape have been synthesized via a sol‐gel technique and characterized by transmission electron microscopy (TEM) and X‐ray diffraction analysis. PMMA–MDH nanocomposites have been prepared by melt blending the recovered MDH nanoparticles within PMMA at different loadings (5, 10, and 20 wt% MDH). According to TGA results, the incorporation of lamellar or fibrous MDH nanoparticles into PMMA leads to a significant improvement in PMMA thermal stability, both under air and inert atmosphere. The results obtained by PCFC and cone calorimeter tests show an important decrease in the peak of heat release rate (pHRR) concomitant with charring during the combustion. Lamellar MDH nanoparticles were found to be more efficient than fibrous MDH nanoparticles. Copyright © 2010 John Wiley & Sons, Ltd.     

X‐ray photoelectron microscopic imaging of the chemical bonding state of Si in a rock sample

A microscopic surface analytical technique is desirable for detailed studies of environmental and geochemical surface processes because most of the relevant solid components from natural sources are heterogeneous and have intricate microstructures. Recent advances in XPS instrumentation have allowed chemical mapping of surfaces. This paper demonstrates the imaging of the chemical bonding state of Si in a rock sample (granodiorite) by X‐ray photoelectron microscopy. An Si 2p photoelectron image of the granodiorite was acquired from the boundary between the quartz and biotite phases, and the image was deconvoluted into quartz and biotite components on the basis of the difference (chemical shift) between the Si 2p binding energies of the two minerals. The two phases were clearly distinguishable in the chemical‐bonding‐state images for Si. Copyright © 2004 John Wiley & Sons, Ltd.     

Observations on X‐ray enhanced sputter rates in argon cluster ion sputter depth profiling of polymers

Traditionally polymer depth profiling by X‐ray photoelectron spectroscopy (XPS) has been dominated by the damage introduced by the ion beam rather than the X‐rays. With the introduction of polyatomic and especially argon gas cluster ion‐beam (GCIB) sources for XPS instruments, this is no longer the case, and either source of damage may be important (or dominate) under particular conditions. Importantly, while ion‐beam damage is a near‐surface effect, X‐ray damage may extend micrometres into the bulk of the sample, so that the accumulation of X‐ray damage during long depth profiles may be very significant. We have observed craters of similar dimensions to the X‐ray spot well within the perimeter of sputter craters, indicating that X‐rays can assist GCIB sputtering very significantly. We have measured experimentally sputter craters in 13 different polymers. The results show that X‐ray exposure can introduce much more topography than might previously have been expected, through both thermal and direct X‐ray degradation. This can increase the depth of a crater by a remarkable factor, up to three in the case of poly‐L‐lactic acid and polychlorotrifluorothylene under reasonably normal XPS conditions. This may be a major source of the loss of depth resolution in sputter depth profiles of polymers. Copyright © 2012 John Wiley & Sons, Ltd.     

Core level studies of calcite and dolomite

Conventional X‐ray photoelectron spectroscopy (XPS) and synchrotron‐based X‐ray photoelectron spectroscopy (HRXPS) have been used to study Iceland spar calcite (CaCO₃) and dolomite (CaMg(CO₃)₂). The obtained full widths at half maximum (FWHMs) are mostly narrower than in the previous results, which together with the symmetry of the fitted peaks indicate effective neutralisation of surface charging. Some previously unidentified features observed in the Ca 2p, C 1s and O 1s spectra of calcite have been suggested to be bulk plasmons. Also, surface core level shifts in Ca 2p (in calcite) and Mg 2p (in dolomite) spectra have been obtained and found to be consistent between XPS and HRXPS measurements. A peak attributed to carbide (CaC₂) has been suggested to indicate beam‐assisted interaction with hydrocarbons found on the surface. Copyright © 2014 John Wiley & Sons, Ltd.     

Facile Chan‐Lam coupling using ferrocene tethered N‐heterocyclic carbene‐copper complex anchored on graphene

Ferrocene tethered N‐heterocyclic carbene‐copper complex anchored on graphene ([GrFemImi]NHC@Cu complex) has been synthesized by covalent grafting of ferrocenyl ionic liquid in the matrix of graphene followed by metallation with copper (I) iodide. The [GrFemImi]NHC@Cu complex has been characterized by fourier transform infrared (FT‐IR), fourier transform Raman (FT‐Raman), CP‐MAS ¹³C NMR spectroscopy, transmission electron microscopy (TEM), thermogravimetric analysis (TGA), energy dispersive X‐ray (EDX) analysis, X‐ray photoelectron spectroscopy (XPS), Brunauer–Emmett–Teller (BET) surface area analysis and X‐ray diffractometer (XRD) analysis. This novel complex served as a robust heterogeneous catalyst for the synthesis of bioactive N‐aryl sulfonamides from variety of aryl boronic acids and sulfonyl azides in ethanol by Chan‐Lam coupling. Recyclability experiments were executed successfully for six consecutive runs.     

Conductivity,morphology, interfacial chemistry,and stability of poly(3,4‐ethylene dioxythiophene)–poly(styrene sulfonate): A photoelectron spectroscopy study

X‐ray photoelectron spectroscopy (XPS) has been used to characterize poly(3,4‐ethylene dioxythiophene)–poly(styrene sulfonate) (PEDT/PSS), one of the most common electrically conducting organic polymers. A correlation has been established between the composition, morphology, and polymerization mechanism, on the one hand, and the electric conductivity of PEDT/PSS, on the other hand. XPS has been used to identify interfacial reactions occurring at the polymer‐on‐ITO and polymer‐on‐glass interfaces, as well as chemical changes within the polymer blend induced by electrical stress and exposure to ultraviolet light. © 2003 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 41: 2561–2583, 2003     

Surface characterization and radical decay studies of oxygen plasma‐treated PMMA films

Polymethylmethacrylate (PMMA) films were modified by RF oxygen plasma with various powers applied for different periods, and the effects of these parameters on the surface properties such as hydrophilicity, surface free energy (SFE), chemistry, and topography were investigated by water contact angle, goniometer, X‐ray photoelectron spectroscopy (XPS), and atomic force microscopy, and the types of the created free radicals and their decay were detected by electron spin resonance spectroscopy (ESR). SFE and contact angle results varied depending on the plasma parameters. Oxygen plasma treatment (100 W–30 min) enhanced the hydrophilicity of PMMA surface as shown by decreasing the water contact angle from 70° to 26°. XPS analysis showed the change in the amounts of the present functionalities as well as formation of new groups as free carbonyl and carbonate groups. The roughness of the surface increased considerably from ~2 nm to ~75 nm after 100 W–30 min oxygen plasma treatment. ESR analysis indicated the introduction of peroxy radicals by oxygen plasma treatment, and the intensity of the radicals increased with increasing the applied power. Significant decrease in radical concentration was observed especially for the samples treated with higher powers when the samples were kept under the atmospheric conditions. As a conclusion, RF plasma, causes changes in the chemical and physical properties of the materials depending on the applied parameters, and can be used for the creation of specific groups or radicals to link or immobilize active molecules onto the surface of a material. Copyright © 2012 John Wiley & Sons, Ltd.