勾形磁场下提拉法生产单晶硅的数值模拟

本文给出了提拉单晶硅时,勾形磁场强度的计算公式,并对单晶硅在有无勾形磁场情况下熔体内流场和氧的浓度分布进行了数值模拟,计算出磁场作用下磁场强度和洛伦兹力及有无磁场时流函数、垂直截面处的速度场和氧的浓度分布.通过分析表明,勾形磁场能使流动更为平稳,能有效地降低熔体内及生长界面氧的浓度,并对产生这一现象的机理作了理论分析.     

Three dimensional simulation of melt flow in Czochralski crystal growth with steady magnetic fields

Three-dimensional transient numerical simulations were carried out to investigate the melt convection and temperature fluctuations within an industrial Czochralski crucible. To study the magnetic damping effects on the growth process, a vertical magnetic field and a cusp magnetic field were considered. Due to our special interest in the melt convection, only local simulation was conducted. The melt flow was calculated by large-eddy simulation (LES) and the magnetic forces were implemented in the CFD code by solving a set of user-defined scalar (UDS) functions. In the absence of magnetic fields, the numerical results show that the buoyant plumes rise from the crucible to the free surface and the crystal–melt interface, which indicates that the heat and mass transfer phenomena in Si melt can be characterized by the turbulent flow patterns. In the presence of a vertical magnetic field, the temperature fluctuations in the melt are significantly damped, with the buoyant plumes forming regular cylindrical geometries. The cusp magnetic field could also markedly reduce the temperature fluctuations, but the buoyant plumes would break into smaller vortical structures, which gather around the crystal as well as in the center of the crucible bottom. With the present crucible configurations, it is found that the vertical magnetic field with an intensity of 128 mT can damp the temperature fluctuations more effectively than the 40 mT cusp magnetic field, especially in the region near the growing crystal.     

Numerical investigation of magnetic field effect on pressure in cylindrical and hemispherical silicon CZ crystal growth

The effect of axial magnetic field of different intensities on pressure in silicon Czochralski crystal growth is investigated in cylindrical and hemispherical geometries with rotating crystal and crucible and thermocapillary convection. As one important thermodynamic variable, the pressure is found to be more sensitive than temperature to magnetic field with strong dependence upon the vorticity field. The pressure at the triple point is proposed as a convenient parameter to control the homogeneity of the grown crystal. With a gradual increase of the magnetic field intensity the convection effect can be reduced without thermal fluctuations in the silicon melt. An evaluation of the magnetic interaction parameter critical value corresponding to flow, pressure and temperature homogenization leads to the important result that a relatively low axial magnetic field is required for the spherical system comparatively to the cylindrical one.     

Combined effects of crucible geometry and Marangoni convection on silicon Czochralski crystal growth

In order to understand the influence of crucible geometry combined with natural convection and Marangoni convection on melt flow pattern, temperature and pressure fields in silicon Czochralski crystal growth process, a set of numerical simulations was conducted. We carry out calculation enable us to determine temperature, pressure and velocity fields in function of Grashof and Marangoni numbers. The essential results show that the hemispherical geometry of crucible seems to be adapted for the growth of a good quality crystal and the pressure field is strongly affected by natural and Marangoni convection and it is more sensitive than temperature. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

不同磁场对大直径单晶硅生长中的动量与热量输运影响的数值分析

本文采用紊流模型对大直径单晶硅在垂直磁场及勾形磁场作用时熔体内动量及热量输运作了数值模拟.采用有限体积法离散控制方程,采用SIMPLE((Semi-implicit Method for Pressure Linked Equations)算法耦合压力和速度场.对无磁场、垂直磁场及勾形磁场作用下熔体内的传输特性进行了比较.数值计算结果表明,垂直磁场对动量及热量的分布具有双重效应.垂直磁场强度过大,不利于晶体生长.随着勾形磁场强度的增加,熔体内子午面上的流动减弱,并且紊流强度也相应降低.     

旋转磁场对空间浮区内流场及浓度场的影响

采用全浮区模型数值研究了旋转磁场作用下熔区内热毛细对流流动特性,分析了磁场强度对流场及浓度场的影响.研究发现,无磁场时,熔体内杂质浓度场和流场呈现三涡胞对称振荡特征;温度场主要由扩散作用决定,呈对称分布.旋转磁场作用下,Ma数基本保持不变.当磁场强度B0≤1 mT时,熔体内杂质浓度场和流场与无磁场时结构类似,但旋转磁场的搅拌作用使得熔体内周期性振荡提前出现,且当旋转磁场产生的洛伦兹力相对较大时,表面张力产生的三维振荡对流得到很好地抑制.B0=5 mT时,周向波动被完全抑制,熔区内流场和浓度场呈二维轴对称分布.旋转磁场对熔体流动产生的轴向抑制作用和周向搅拌作用,都有助于熔体流动的稳定性、浓度分布以及温度分布的均匀性,从而有利于高质量晶体的生长.     

Melt stirring effect of a weak magnetic field on crystal growth

Melt stirring effect of a weak magnetic field for the natural convection of liquid metal in an electrically adiabatic cubic enclosure heated from one vertical wall and cooled from an opposing wall was studied by a fully transient three-dimensional numerical analyses and the reasoning for melt stirring effect was clarified from the numerical results. Similar techniques were applied for the melt convection in a cylindrical Czochralski crystal growing crucible with an application of a vertical magnetic field. In a static crucible, central fluid column rotated in a magnetic field and in a rotating crucible, central fluid column did not rotate in a magnetic field. These peculiar characteristics could have been explained due to the Lorentz force.     

Rotating magnetic fields: Fluid flow and crystal growth applications

Rotating or alternating magnetic fields are widely used in the industrial steel casting process or in metallurgical manufacturing. For the growth of single crystals, these techniques attracted a rapidly increasing attention within the last years: a well defined melt flow leads to a more homogeneous temperature and concentration distribution in the melt and consequently improves the growth process. Rotating magnetic fields (RMF) might be used instead of crucible and/or crystal rotation avoiding mechanically induced disturbances or might be added to conventional rotation mechanisms to gain a further flow control parameter. Compared to static magnetic fields, rotating ones are distinguished by a much lower energy consumption and technical effort. Furthermore, there are no reports on detrimental effects such as the generation of thermoelectromagnetic convection or coring effects in the grown crystals. One advantage of rotating magnetic fields is the possibility to apply them even to melts with a rather low electrical conductivity like e.g. aqueous solutions. High flow velocities are already generated with moderate fields. Therefore the field strength has to be adjusted with care because otherwise undesirable Taylor vortices might be induced. In the last years, the potential of rotating magnetic fields for crystal growth processes was demonstrated for model arrangements using e.g. gallium or mercury as a test liquid as well as for a variety of growth techniques like Float Zone, Czochralski, Bridgman, or Travelling Heater Methods: Fluctuations of the heat transport due to time-dependent natural convection have could be reduced by more than an order of magnitude or the mass transport could be improved with respect to the a better radial symmetry and/or a more homogeneous microscopic segregation.     

Time-dependent simulation of Czochralski silicon crystal growth

We have developed a detailed mathematical model and numerical simulation tools based on the streamline upwind/Petrov-Galerkin (SUPG) finite element formulation for the Czochralski silicon crystal growth. In this paper we consider the mathematical modeling and numerical simulation of the time-dependent melt flow and temperature field in a rotationally symmetric crystal growth environment. Heat inside the Czochralski furnace is transferred by conduction, convection and radiation, Radiating surfaces are assumed to be opaque, diffuse and gray. Hence the radiative heat exchange can be modeled with a non-local boundary condition on the radiating part of the surface. The position of the crystal-melt interface is solved by the enthalpy method. The melt flow is assumed to be laminar and governed by the cylindrically symmetric and incompressible Navier-Stokes equations coupled with the calculation of temperature.     

Modulating dopant segregation in floating-zone silicon growth in magnetic fields using rotation

The feasibility of modulating dopant segregation using rotation for floating-zone silicon growth in axisymmetric magnetic fields is investigated through computer simulation. In the model, heat and mass transfer, fluid flow, magnetic fields, melt/solid interfaces, and the free surface are solved globally by a robust finte-volume/Newton's method. Different rotation modes, single- and counter-rotations, are applied to the growth under both axial and cusp magnetic fields. Under the magnetic fields, it is observed that dopant mixing is poor in the quiescent core region of the molten zone, and the weak convection there is responsible for the segregation. Under an axial magnetic field, moderate counter-rotation or crystal rotation improves dopant uniformity. However, excess counter-rotation or feed rotation alone results in more complicated flow structures, and thus induces larger radial segregation. For the cusp fields, rotation can enhance more easily the dopant mixing in the core melt and thus improve dopant uniformity.     

Direct observation and numerical simulation of molten silicon flow during crystal growth under magnetic fields by x-ray radiography and large-scale computation

Control of melt flow during Czochralski (CZ) crystal growth by application of magnetic fields is an important technique for large-diameter (>300 mm) silicon single crystals. Melt convection under magnetic fields is an interesting problem for electromagnetic-hydrodynamics. This paper reviews the effects of a vertical magnetic field and a cusp-shaped magnetic field on melt flow during CZ crystal growth. Melt flow in vertical magnetic fields or cusp-shaped magnetic fields was investigated by the direct observation method based on X-ray radiography and by numerical simulation. The first part of this review shows the result of direct observation of molten silicon flow under magnetic fields. It also compares the results of experimental and numerical simulation. The second part shows the details of the numerical simulation of the behavior of molten silicon in magnetic fields.     

Large eddy simulation of Marangoni convection in Czochralski crystal growth

Large eddy simulation model is used to simulate the fluid flow and heat transfer in an industrial Czochralski crystal growth system. The influence of Marangoni convection on the growth process is discussed. The simulation results agree well with experiment, which indicates that large eddy simulation is capable of capturing the temperature fluctuations in the melt. As the Marangoni number increases, the radial velocity along the free surface is strengthened, which makes the flow pattern shift from circumferential to spiral. At the same time, the surface tension reinforces the natural convection and forces the isotherms to curve downwards. It can also be seen from the simulation that a secondary vortex and the Ekman layer are generated. All these physical phenomena induced by Marangoni convection have great impacts on the shape of the growth interface and thus the quality of the crystal. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Numerical investigation of heat transport and fluid flow during the seeding process of oxide Czochralski crystal growth Part 2: rotating seed

In this paper, the role of seed rotation on the characteristics of the two‐dimensional temperature and flow field in the oxide Czochralski crystal growth system has been studied numerically for the seeding process. Based on the finite element method, a set of two‐dimensional quasi‐steady state numerical simulations were carried out to analyze the seed‐melt interface shape and heat transfer mechanism in a Czochralski furnace with different seed rotation rates: ω_seed = 5‐30 rpm. The results presented here demonstrate the important role played by the seed rotation for influencing the shape of the seed‐melt interface during the seeding process. The seed‐melt interface shape is quite sensitive to the convective heat transfer in the melt and gaseous domain. When the local flow close to the seed‐melt interface is formed mainly due to the natural convection and the Marangoni effect, the interface becomes convex towards the melt. When the local flow under the seed‐melt interface is of forced convection flow type (seed rotation), the interface becomes more concave towards the melt as the seed rotation rate (ω_seed) is increased. A linear variation of the interface deflection with respect to the seed rotation rate has been found, too. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Application of rotating magnetic fields in Czochralski crystal growth

The physical principles of electromagnetic stirring with a rotating magnetic field are explained and a mathematical model to calculate the electromagnetic volume force, the fluid flow and the transport of heat and solutes is outlined. For the electromagnetic volume force and for the order of magnitude of the flow velocities approximative analytical expressions are given. A high flexibility in configuring the volume force in order to achieve a desired flow distribution is obtained by multi-frequency stirring that is by superposition of two or several magnetic fields with different frequencies and/or sense of rotation. Results of experimental investigation and mathematical simulation of multi-frequency stirring are given. Numerical simulation of the fluid flow, the temperature and the oxygen distribution in a Czochralski process crucible was performed including the effect of single mode and multi-frequency stirring. The results indicate that electromagnetic stirring should offer large potentials for the optimization of the flow configuration in a Czochralski process crucible. Finally examples from literature of practical application of rotating magnetic fields in crystal growth are presented.     

Modification of Fluid Flow and Heat Transport in Vertical Bridgman Configurations by Rotating Magnetic Fields

Applying a rotating magnetic field to an electrically conducting liquid, a Lorentz force is induced which generates a melt rotation of a certain angular velocity. A cylindrical gallium melt (aspect ratio 2.5) has been used as a model liquid. The melt has been heated from the bottom (Ra = 10⁶) or from the top (Ra = −10⁶) and the resulting temperature fluctuations in the melt have been measured in dependence on the rotating field strength (B_max = 30 mT). In the case of the unstable gradient 0.8 mT are sufficient to dominate the buoyancy driven convection and to reduce the amplitude of the buoyancy caused temperature oscillations for more than one order of magnitude. At the same time, the fluctuation frequency increases with the field strength. In the case of the stabilizing temperature gradient, low amplitude/high frequency temperature fluctuations are generated by the rotating magnetic field, indicating the transition to a time-dependent flow. In both cases we see an increase of the convective heat transport for magnetic inductions higher than approximately 5 m T. Applying the rotating magnetic field to the Bridgman growth of gallium doped germanium, the same behavior can be seen: Growing with a top-seeded arrangement, the intensity of the dopant striations is decreased and their frequency is increased. Growing with a bottom-seeded arrangement, the interface curvature changes from concave to convex and the flow becomes time-dependent.     

Simulation of temperature and flow fields in an inductively heated melt growth system

The goal of the research presented here is to apply a global analysis of an inductively heated Czochralski furnace for a real sapphire crystal growth system and predict the characteristics of the temperature and flow fields in the system. To do it, for the beginning stage of a sapphire growth process, influence of melt and gas convection combined with radiative heat transfer on the temperature field of the system and the crystal‐melt interface have been studied numerically using the steady state two‐dimensional finite element method. For radiative heat transfer, internal radiation through the grown crystal and surface to surface radiation for the exposed surfaces have been taken into account. The numerical results demonstrate that there are a powerful vortex which arises from the natural convection in the melt and a strong and large vortex that flows upwards along the afterheater side wall and downwards along the seed and crystal sides in the gas part. In addition, a wavy shape has been observed for the crystal‐melt interface with a deflection towards the melt. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

数值模拟自然对流对直拉单晶硅的影响

在直拉单晶硅生长的过程中,自然对流对晶体界面的形状、温度场及应力分布影响很大。本文采用二维模型对熔体内自然对流对单晶硅的影响作了数值模拟,在低雷诺数时采用层流模型,高雷诺数时采用紊流模型,Gr的变化范围从3×106到3×1010,这样涵盖了从小尺寸到大尺寸的直拉单晶硅生长系统。数值结果表明熔体的流动状态不仅与熔体的Gr有关,还与熔体高度和坩埚半径的比值密切相关。当Gr>108时,熔体内确实存在紊流现象,层流模型不再适合,随着Gr的增大,紊流现象加剧,轴心处的等温线变得更为陡峭,不利于晶体生长。     

Melt Convection in a Czochralski Crucible

2d-axisymmetric of natural and forced convection in the melt of a Czochralski equipment has been performed. The influence of the flow on the shape of the interface has been studied.     

Influence of transverse magnetic field on thermocapillary flow in liquid bridge

For exploring the optimizing convection control technique by external magnetic field in floating zone crystal growth of semiconductor under microgravity, thermocapillary flow in a floating half‐zone model is simulated numerically, and the influences of both the transversal uniform magnetic field and the magnetic field generated by transversal four coils on thermocapillary flow are investigated. The results indicate that the transversal uniform magnetic field is likely to break the axisymmetrical structure of thermocapillary flow, which is unfavorable to the growth of high‐quality crystal; under the magnetic field generated by transversal four coils, both the mean and the maximum velocities increase with the increment of the distance between coils or the decrement of coil radius; and the convection tends to be more axisymmetrical with increasing coil radius. Compared to the transversal uniform magnetic field, the magnetic field generated by transversal four coils of appropriate radius and relative distance may not only suppress convection, but also enhance the axisymmetry of convection at the same time, and finally, the better convection control can be achieved. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Influence of the crucible bottom shape on the heat transport and fluid flow during the seeding process of oxide Czochralski crystal growth

For the seeding process of oxide Czochralski crystal growth, influence of the crucible bottom shape on the heat generation, temperature and flow field of the system and the seed‐melt interface shape have been studied numerically using the finite element method. The configuration usually used in a real Czochralski crystal growth process consists of a crucible, active afterheater, induction coil with two parts, insulation, melt, gas and seed crystal. At first, the volumetric distribution of heat inside the metal crucible and afterheater inducted by the RF‐coil was calculated. Using this heat generation in the crucible wall as a source the fluid flow and temperature field of the entire system as well as the seed‐melt interface shape were determined. We have considered two cases, flat and rounded crucible bottom shape. It was observed that using a crucible with a rounded bottom has several advantages such as: (i) The position of the heat generation maximum at the crucible side wall moves upwards, compared to the flat bottom shape. (ii) The location of the temperature maximum at the crucible side wall rises and as a result the temperature gradient along the melt surface increases. (iii) The streamlines of the melt flow are parallel to the crucible bottom and have a curved shape which is similar to the rounded bottom shape. These important features lead to increasing thermal convection in the system and influence the velocity field in the melt and gas domain which help preventing some serious growth problems such as spiral growth. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)