沿面型介质阻挡放电喷枪的发光特性及气体温度研究

利用氩气作为工作气体,采用正弦电压驱动沿面型等离子体喷枪,在大气压空气环境中产生了均匀的等离子体羽。电学和光学测量结果表明,等离子体羽放电只存在于外加峰值电压的正半周期,并且正半周期的放电脉冲个数随气体流量的增加而增加。通过对正半周期不同位置的发光脉冲信号进行比较,发现等离子体羽均按子弹形式传播,其中每一个发光脉冲均对应一次等离子体子弹传播过程。通过对比放电电流和等离子体羽的发光信号,发现等离子体羽的发光脉冲滞后于放电电流脉冲,且该延迟时间基本服从正态分布。该延迟时间随着外加电压峰值及气体流量的增大而减小。利用光纤测温仪测量了等离子体羽的气体温度,发现气体温度随外加峰值电压的增大而升高,随工作气体流量的增大而降低。通过分析放电过程,对上述现象进行了定性解释。     

XPS investigations achieved on the first cycle of V2O5 thin films used in lithium microbatteries

Vanadium pentoxide thin films, usable as positive electrode in microbatteries, have been prepared by radio frequency magnetron sputtering in a pure argon or mixed argon/oxygen plasma. Depending on the oxygen pressure in the discharge gas, we have obtained either crystallized or amorphous thin films. These two kinds of thin films having different electrochemical behavior, an extensive X-ray photoelectron spectroscopy (XPS) study (especially suited for thin films analysis) was carried out. The main redox processes occurring during the first discharge–charge cycle were identified. In addition, depending on the crystalline or amorphous character of the samples, we have noticed some differences concerning the kinetic of reduction. Furthermore, the growth of a surface layer between the cathode and the liquid electrolyte was evidenced upon the discharge as well as its partial dissolution upon the charge.     

单晶硅微纳构件加工表面性能的时变性研究

采用蒙特卡罗方法和分子动力学方法相结合, 模拟单晶硅微纳构件加工表面的时效过程, 研究其对加工表面质量和构件力学性能的影响. 模拟结果表明: 在时效过程中, 单晶硅微纳构件加工变质层的有序度显著提高, 残余应力大幅降低, 表面粗糙度略有增加, 此外还发现加工变质层中非晶硅原子在时效过程中大幅减少, 部分非晶硅出现了再结晶现象, 其中部分BCT5-Si以及金属相(Si-Ⅱ)结构原子转化为金刚石结构(Si-I). 时效作用对加工后单晶硅微纳构件表面性能具有重要的影响, 同时可以提高微纳构件的拉伸力学性能. 关键词： 蒙特卡罗方法 纳米加工 表面性能 时变性     

负偏压离子鞘及气体压强影响表面波放电过程的粒子模拟

由于表面电磁波沿着介质-等离子体分界面传播,而很难通过对传统的表面波等离子体(SWP)源施加负偏压实现金属材料溅射,因此限制了SWP源的使用范围.近期,一种基于负偏压离子鞘导波的SWP源克服了这个问题,且其加热机理是表面等离激元(SPP)的局域增强电场激励气体放电产生.但是该SWP源放电过程的影响因素并未研究清晰,导致其最佳放电条件没有获得.本文采用粒子(PIC)和蒙特卡罗碰撞(MCC)相结合的模拟方法,探讨了负偏压离子鞘及气体压强影响SWP电离发展过程的放电机理.模拟结果表明,负偏压和气体压强的大小影响了离子鞘的厚度、SPP的激励和波模的时空转化,从而表现出不同的放电形貌.进一步分析确定,在负偏压200 V左右和气体压强40 Pa附近,该SWP源的放电效果最佳.     

Low power gas discharge plasma mediated inactivation and removal of biofilms formed on biomaterials

The antibacterial activity of gas discharge plasma has been studied for quiet some time. However, high biofilm inactivation activity of plasma was only recently reported. Studies indicate that the etching effect associated with plasmas generated represent an undesired effect, which may cause live bacteria relocation and thus contamination spreading. Meanwhile, the strong etching effects from these high power plasmas may also alter the surface chemistry and affect the biocompatibility of biomaterials. In this study, we examined the efficiency and effectiveness of low power gas discharge plasma for biofilm inactivation and removal. Among the three tested gases, oxygen, nitrogen, and argon, discharge oxygen demonstrated the best anti-biofilm activity because of its excellent ability in killing bacteria in biofilms and mild etching effects. Low power discharge oxygen completely killed and then removed the dead bacteria from attached surface but had negligible effects on the biocompatibility of materials. DNA left on the regenerated surface after removal of biofilms did not have any negative impact on tissue cell growth. On the contrary, dramatically increased growth was found for these cells seeded on regenerated surfaces. These results demonstrate the potential applications of low power discharge oxygen in biofilm treatments of biomaterials and indwelling device decontaminations.     

圆柱模型下电子回旋共振微波等离子体离子输运过程的数值研究

在圆柱模型下，采用Ｍｏｎｔｅ Ｃａｒｌｏ方法模拟了电子回旋共振（ＥＣＲ）微波等离子体源中离子离开放电室后历经中性区、鞘层区以及工件表面二次电子发射形成的虚拟阴极“屏蔽区”，最后被加负偏压的工件表面吸收的全过程．研究了鞘层边界处的衔接问题，得到了光滑自洽的电势分布曲线及工件表面离子的能量分布和角分布，同时讨论了磁场、气压以及二次电子发射对鞘势的影响． 关键词：     

Air flow control around a cylindrical model induced by a rotating electric arc discharge in an external magnetic field. Part I

The structure and dynamics of a near-wall gas flow produced by a rotating electric arc discharge in an external magnetic field around a cylindrical model without an incoming flow has been investigated. The electric arc on the model has been produced by a combined electric discharge (low-current rf discharge + high-current pulse-periodic discharge). Permanent magnets with induction B ≈ 0.1 T have been placed inside the cylindrical models. Ring electrodes are arranged on the surface of the model. The structure and dynamics of the near-wall gas flow around the cylindrical model have been investigated using high-speed photography, as well as the shadowgraph and particle image velocimetry (PIV) methods.     

Experimental observation of negative differential characteristic of corona discharge in ultraviolet spectrum

Corona discharge is a self-sustained discharge which appears at electrodes with a small radius curvature in gas insulation. An almost invisible glow occurs just above the inception voltage. Corona phenomenon is mainly used in electro-technological processes to obtain space charge for electrostatic precipitation, separation of different particles, electrostatic liquid or solid coating, neutralization of space charge, etc. All of these processes rely on a strong nonhomogeneous electric field generated by a point – plate electrode system. When the critical value of the applied voltage is reached, the ionization processes near the point electrode start and give rise to the current between two electrodes. If the pointed electrode is positive, it is possible to observe an anomaly of the current – voltage (I-U) characteristic for the point-plate space. It means that while the voltage is raising the current density decreases in a narrow voltage area (2–3 kV). The anomaly was technically named as negative differential conductivity (dI/dU < 0). Unstable current can have a negative influence on electro-technological processes. The anomaly was detected for different shapes and materials of the electrode as well as for various temperatures and distances between electrodes. An oxidation layer, which appears on the metal electrode, also influences the ionization processes near the pointed electrode and causes a decrease of a current. In this paper measuring of the discharge activity in a point – plate electrode system is presented. Ionization of gas atoms and molecules in a high electric field and the following recombination of electrons and positive ions in the corona region can give rise to high-energy photons which produce new electrons in the field of discharge. Corona discharges are detected by DayCor Corona camera which can register UV emission generated by corona in a day light. The experiment was conducted with various shapes of the pointed electrode and distances between the high voltage and the grounded electrode under applied direct voltage with positive and negative polarity.     

气流对氮气介质阻挡放电气体温度及放电模式的影响

利用光谱测量和高速照相的方法,对大气压氮气介质阻挡放电进行了研究.在气流的帮助下,2mm气隙中的均匀放电可以长时间得以维持.根据放电电流波形和1μs曝光时间的放电图像,这种均匀放电被判定为汤森放电.用氦氖激光器对实验中所用的光谱仪带来的谱线轮廓展宽进行了标定,并将得到的仪器展宽数据输入Specair软件,计算了不同气体温度下氮分子二正系0—2谱带的谱线轮廓.通过用计算谱线轮廓去拟合实验谱线轮廓,确定了氮分子的转动温度并将其近似为气体温度.结果表明:大气压氮气介质阻挡汤森放电并不能使气体温度大幅上升(ΔTg≤50K),气体温度的小幅上升不会引起热不稳定性而导致放电发展成为细丝放电.气流确实可以降低放电气体温度,但这不是使汤森放电得以维持的原因.通过比较加入气流前后的放电光谱可知,气流降低了气隙中杂质氧的含量,使得更多的氮分子亚稳态N2(A3Σu+)的寿命延长到下一次放电的起始时刻,为汤森放电提供了必需的大量种子电子.     

金属目标表面气体放电单元放电过程的PIC-MCC模拟

 对目标表面的浮地导体边界的存在及其对单元气体放电过程所产生的影响进行了研究,针对导体边界条件,应用高斯定理和电荷守恒定律推导出这种边界条件的数值处理方法,得到了有界等离子体空间电势的数值分布。电场的数值计算表明,浮地导体的电势随着内部场的变化而变化,其大小介于两个电极的电势之间,对放电区域的电场分布产生较大的影响。 对金属目标表面放电单元的放电过程的PIC-MCC模拟结果表明, 浮地导体的存在能够改变放电空间的电场结构,形成不均匀场,有利于气体的电离和等离子体区域的形成,同时将使虚阳极所形成的电势平台在边界附近下陷,导致等离子体壳层的厚度变小。     

介质阻挡放电中单双层气隙内微放电通道的等离子体参量研究

采用H型放电间隙的介质阻挡放电装置,在氩气和空气的混合气体中,得到了三种新颖的等离子体发光斑图。较于传统获得的斑图,这三种发光斑图是产生在单层气隙与双层气隙结合的气隙装置之中。通过相机拍摄到的斑图照片,可以发现单层气隙和双层气隙中微放电通道呈现的发光亮度、颜色、放电面积等状态有所不同,这表明微放电通道所处的等离子体状态可能各不相同。通过分析这三种等离子体发光斑图, 利用发射光谱法首次研究了单层气隙和双层气隙内微放电通道的等离子体参量。实验通过采集氮分子第二正带系(C3Π_u→B3Π_g)的发射谱线计算了单层气隙和双层气隙内微放电丝的分子振动温度,并进一步利用氩原子696.57 nm(2P₂→1S₅)谱线的展宽分析了单层气隙和双层气隙内微放电丝的电子密度。结果发现： 在左右相同厚度的双层气隙中,耦合微放电丝的分子振动温度基本相同,电子密度也趋于一致,单层气隙内微放电丝的分子振动温度要高于双层气隙内微放电丝,电子密度则小于双层气隙内微放电丝。单层气隙和双层气隙中不同微放电通道等离子体状态的差异性使之形成多种折射率的等离子体光子晶体,其周期性排布将具有更加丰富的带隙结构。     

共焦显微拉曼光谱在界面研究中的应用

本研究的重点是拓宽共焦显微拉曼光谱技术在液／气、液／固界面研究中的应用。通过合理地设计实验,利用共焦显微拉曼光谱技术高的纵向分辨率研究了液／气界面水溶性的卟啉（ＴＳＰＰ）的聚集行为,发现ＴＳＰＰ在本体中和在界面上的行为有着显著的区别。同时,对甲醇电化学氧化过程中电极表面附近的溶液成分进行了剖层分析。利用其高的横向分辨率,借助表面增强效应对沉积在玻碳上的金薄层进行拉曼成像研究,发现光学成像和拉曼成像     

Using corona and glow discharges for improving strength properties and corrosion resistance of steel

The effect of glow and corona discharges on the strength and physicochemical properties of steels has been considered. It has been found that the thickness of the hardened layer and the negative potential of the surface of the steel samples depend on the current intensity and the time of treatment in a corona discharge. The variation of the surface potential correlated with changes of the strength characteristics of steel. It has been shown that variation of the strength characteristics of steel after its treatment in a corona discharge was connected with a rearrangement of the defect structure. The variation of the strength characteristics of steel after its treatment in a glow discharge was due to implantation of nitrogen atoms in surface layers of the material.     

Dynamics of pulsed magnetron discharge in high-current electron guns

High-speed video filming is applied to investigate low-pressure (argon 0.053–0.133 Pa) pulsed gas discharge dynamics in a planar magnetron built-in the explosive emission cathode of a high-current electron gun. It has been found that, in the beginning, the discharge starts at the side surface of the cathode and then spreads to its face. The stability of the discharge ignition instant at the cathode face as a function of the working pressure of the gas and the cathode design has been studied. It has been found that the pulsed longitudinal magnetic field results in the discharge switching over in the axial direction onto the electron gun collector. A qualitative explanation of the observed discharge behavior has been given.     

Optical emission spectroscopy of point-plane corona and back-corona discharges in air

Results of spectroscopic investigations and current-voltage characteristics of corona discharge and back discharge on fly-ash layer, generated in point-plane electrode geometry in air at atmospheric pressure are presented in the paper. The characteristics of both discharges are similar but differ in the current and voltage ranges of all the discharge forms distinguished during the experiments. Three forms of back discharge, for positive and negative polarity, were investigated: glow, streamer and low-current back-arc. In order to characterize ionisation and excitation processes in back discharge, the emission spectra were measured and compared with those obtained for normal corona discharge generated in the same electrode configuration but with fly ash layer removed. The emission spectra were measured in two discharge zones: near the tip of needle electrode and near the plate. Visual forms of the discharge were recorded with digital camera and referred to current-voltage characteristics and emission spectra. The measurements have shown that spectral lines emitted by back discharge depend on the form of discharge and the discharge current. From the comparison of the spectral lines of back and normal discharges an effect of fly ash layer on the discharge morphology can be determined. The recorded emission spectra formed by ionised gas and plasma near the needle electrode and fly ash layer are different. It should be noted that in back arc emission, spectral lines of fly ash layer components can be distinguished. On the other hand, in needle zone, the emission of high intensity N₂ second positive system and NO _γ lines can be noticed. Regardless of these gaseous lines, also atomic lines of dust layer were present in the spectrum. The differences in spectra of back discharge for positive and negative polarities of the needle electrode have been explained by considering the kind of ions generated in the crater in fly ash layer. The aim of these studies is to better understand the discharge processes encountered in electrostatic precipitators.     

介质阻挡均匀大气压辉光放电数值模拟研究

通过数值求解一维电子、离子连续性方程和动量方程，以及电流连续性方程，计算了氦气介 质阻挡大气压辉光放电电子、离子密度和电场在放电空间的时空分布，以及放电电流密度和 绝缘介质板充电电荷密度随时间的变化. 分析讨论所加电压频率、幅值及介质板性质等对均 匀大气压辉光放电性质的影响. 当外加电压频率足够高时，大量离子被俘获在放电空间，空 间电荷场又引起足够多的电子滞留在放电空间. 这些种子电子使得在大气压下发生汤森放电 ，放电空间结构类似于低气压辉光放电，即存在明显的阴极位降区、负辉区、法拉第暗区和 等离子体正柱 关键词： 大气压辉光放电 介质阻挡 数值模拟 等离子体     

Interaction of a surface glow discharge with a gas flow

A surface glow discharge in a gas flow is of particular interest as a possible tool for controlling the flow past hypersonic aircrafts. Using a hydrodynamic model of glow discharge, two-dimensional calculations for a kilovolt surface discharge in nitrogen at a pressure of 0.5 Torr are carried out in a stationary gas, as well as in a flow with a velocity of 1000 m/s. The discharge structure and plasma parameters are investigated near a charged electrode. It is shown that the electron energy in a cathode layer reaches 250–300 eV. Discharge is sustained by secondary electron emission. The influence of a high-speed gas flow on the discharge is considered. It is shown that the cathode layer configuration is flow-resistant. The distributions of the electric field and electron energy, as well as the ionization rate profile in the cathode layer, do not change qualitatively under the action of the flow. The basic effect of the flow’s influence is a sharp decrease in the region of the quasineutral plasma surrounding the cathode layer due to fast convective transport of ions.     

Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp

This paper reviews the production of silicon oxide thin films using a novel photoenhanced deposition technique incorporating a windowless nitrogen discharge lamp contained within the deposition vessel. This process has the potential to produce better semiconductor/insulator interfaces than those produced using conventional RF glow discharge techniques, since there is no damage to the growing film surface from energetic ions produced in the glow discharge plasma. The use of an internal lamp obviates the need for a window between the lamp and reaction chamber and thus overcomes the problems of attenuation of short wavelength ultraviolet radiation by the window. All the ultraviolet output of the lamp can now directly couple into the reaction gases, so the need for sensitising agents is also removed. Thin films of silicon oxide have been deposited onto single crystal silicon wafers from nitrous oxide-silane gas mixtures. The physical properties are comparable to those of high quality insulator films deposited by plasma enhanced techniques. The results of electrical measurements indicate that this material is of sufficiently high quality to be used as a low temperature deposited gate dielectric for thin film devices. To confirm this, thin film transistors (TFTs) have been fabricated using the material (and an active layer of amorphous silicon deposited in the same system) and characteristics of these TFTs are also presented.     

实验研究大气压多脉冲辉光放电的模式和机理

采用稍不平行电极进行大气压He气介质阻挡多脉冲辉光放电实验,通过增强电子耦合器件相机短时曝光照片,研究大气压多脉冲辉光放电在不同时刻的放电模式.通过气隙放电电流、表面电荷计算,理论分析了表面电荷、空间电荷、外加电压与气隙电场强度的关系,研究大气压辉光放电形成多脉冲的机理.实验结果表明,放电首先在间隙稍窄的电极左端开始;在第一个脉冲电流峰值,电极右端也开始放电;第一个电流脉冲经历了Townsend放电到辉光放电的过程;电流脉冲之间的时间内,间隙一直维持着微弱的辉光放电;随后的每个电流脉冲均是辉光放电.理论分析表明,大气压辉光放电的多个电流脉冲是表面电荷、空间电荷与外加电压共同演化的结果;除放电伊始出现Townsend放电外,同一半周期内的放电电流脉冲中不会再出现Townsend放电. 关键词： 介质阻挡放电 增强电子耦合器件 大气压辉光放电 多脉冲     

实验研究大气压多脉冲辉光放电的模式和机理

采用稍不平行电极进行大气压He气介质阻挡多脉冲辉光放电实验,通过增强电子耦合器件相机短时曝光照片,研究大气压多脉冲辉光放电在不同时刻的放电模式.通过气隙放电电流、表面电荷计算,理论分析了表面电荷、空间电荷、外加电压与气隙电场强度的关系,研究大气压辉光放电形成多脉冲的机理.实验结果表明,放电首先在间隙稍窄的电极左端开始;在第一个脉冲电流峰值,电极右端也开始放电;第一个电流脉冲经历了Townsend放电到辉光放电的过程;电流脉冲之间的时间内,间隙一直维持着微弱的辉光放电;随后的每个电流脉冲均是辉光放电.理论分析表明,大气压辉光放电的多个电流脉冲是表面电荷、空间电荷与外加电压共同演化的结果;除放电伊始出现Townsend放电外,同一半周期内的放电电流脉冲中不会再出现Townsend放电.