脉冲激光沉积法制备的纳米硅薄膜的结构与光学性质

采用二次阳极氧化法,制备了多孔氧化铝模板。在真空背景下,用脉冲激光沉积法,在多孔氧化铝模板上沉积一层硅,制成了硅与多孔氧化铝的复合膜,然后用盐酸将多孔氧化铝模板完全腐蚀掉,制备均匀分布着硅纳米线的硅膜。用扫描电子显微镜、X射线衍射、光致发光对纳米硅的结构和光学性质进行了测试分析。结果表明:硅纳米线的直径约为67.5nm,长度约为100nm,数密度约10¹¹/cm²。光致发光谱是可见光范围内的一个宽发射峰,上面叠加了许多具有精细结构的尖峰,尖峰之间的波长间隔不相等,但能量间隔相等。分析了样品的结构特点,利用量子限制模型和表面发光中心模型对光谱进行了解释,提出了一个新的能级模型,求出了各个尖峰对应激发态能级的量子数。为探讨纳米硅的发光机制和实现硅发光器件的制备提供了实验依据。     

原子力显微镜在PLD法制备ZnO薄膜表征中的应用

利用脉冲激光沉积(PLD)法在氧压为16 Pa、衬底温度为400~700 ℃时,在单晶Si(100) 衬底上制备ZnO薄膜,并通过原子力显微镜(AFM)、X射线衍射(XRD)谱和光致发光谱对制得的薄膜样品进行表面形貌、结构特性和发光性质研究。其中通过原子力显微镜对样品的二维、三维以及剖面线图进行了分析。结果表明衬底温度700 ℃时得到的薄膜样品表面较均匀致密,晶粒生长较充分,结晶质量较高,相对发光强度高。控制氧压为5.7 Pa,在衬底温度为600 ℃,沉积时间分别为10,20,45 min制备ZnO薄膜样品;利用原子力显微镜对样品进行表面形貌观察,得知只有沉积时间足够长才能使薄膜表面晶粒充分生长。     

脉冲钛宝石激光器的双波长运转

报道了脉冲钛宝石激光器的双波长可调谐运转，双汉总能量达到４１．８ｍＪ，调谐范围大于１００ｎｍ并且研究了双波长运转时的竞争效应，增益损耗的影响，时域特性等。     

超短脉冲准分子激光淀积类金刚石薄膜的实验研究

利用ＫｒＦ超短脉冲激光器开展了超短脉冲激光淀积金刚石薄膜实验研究,薄膜生长速率０．０２ｎｍ／ｐｕｌｓｅ,厚度０．５－０．６μｍ,显微硬度５５ＧＰａ,光学透过率优于９０％,采用等离子本的时间－空间分辨的发射光谱技术,给出了等离子体的粒子成份以及等离子体的时间－空间的演化图像,以及在不同激光参数条件下等离子体特性的变化,发现超短脉冲激光的等离子体有能量高、持续时间短（高通量）的特点,适合类金刚石薄膜的     

Pulsed Laser Deposition ZnS Buffer Layers for CIGS Solar Cells

采用脉冲激光沉积(PLD)技术,在20、200、400和600 oC下制备出了高质量的ZnS薄膜．XRD分析结果表明,PLD法制备的ZnS多晶薄膜为立方闪锌矿结构而并非Murali报道的六方的纤锌矿结构,并沿(111)方向择优取向生长．Raman光谱进一步证明了在350 cm-1出现了立方相ZnS薄膜的A1振动模式．通过ZnS薄膜的SEM平面和断面图可观察到采用PLD技术生长出了非常密实、光滑、均匀的薄膜．PLD生长的ZnS薄膜的颗粒远小于化学浴沉积的CdS颗粒,这也是影响其电池效率的主要原因．XRF化学组成分析结果表明ZnS薄膜符合化学计量比,但略微富S．最后通过光吸收谱测得不同温度下的ZnS薄膜的光学带隙在3.2～3.7 eV,并随薄膜沉积温度的升高,光学带隙反而增加．采用宽带隙的ZnS缓冲层材料,与CdS(2.4 eV)相比,可以增加电池蓝波段的响应．     

Phase Separation in GaMnAs Layers Grown by Laser Pulsed Deposition

GaMnAs layers grown by pulsed laser deposition were studied by magneto-optical transversal Kerr effect spectroscopy, spectral ellipsometry, resistivity and the Hall effect measurements, and magnetometry. The growth regimes for magnetically inhomogeneous layers containing Mn-enriched ferromagnetic regions with different composition and sizes were established. The layers grown at a temperature of 300°C exhibit a ferromagnetic behavior at temperatures below 80 K, which is conditioned by the presence of local ferromagnetic (Ga,Mn)As regions in the paramagnetic matrix. The nature of peculiarities in the TKE spectrum of these layers is discussed.     

Size and Interface Control of Novel Nanocrystalline Materials Using Pulsed Laser Deposition

We have developed a novel method based upon pulsed laser deposition to produce nanocrystalline materials with an accurate grain size and interface control. Using this method, the grain size in the case of Cu thin films was controlled by introducing a few monolayers of insoluble elements having high surface energy such as W, which increases interfacial energy and provides more nucleation sites. The grain size is determined by the thickness of Cu layer and the substrate temperature at which it transforms into islands (nanocrystalline grains) of fairly uniform size which we desgnate as self-assembling approach. Using this approach, the grain size was reduced from 160nm (Cu or Si (100) substrate) to 70–80nm for a simple W layer (Cu/W/Si (100)) to 4nm for a multilayer (Cu/W/Cu/W/Si (100)) thin film. The hardness of these films was evaluated using a nanoindentation technique, a significant increase in hardness from 2.0GPa for coarse-grained 180nm to 12.5GPa for 7nm films was observed. However, there is decrease in hardness below 7nm for copper nanocrystals. The increase in hardness with the decrease in grain size can be rationalized by Hall–Petch model. However, the decrease in slope and eventually the decrease in hardness below a certain grain size can be explained by a new model based upon grain-boundary deformation (sliding). We also used a similar materials processing approach to produce quantum dots in semiconductor heterostructures consisting of Ge and ZnO dots or nanocrystals in AlN or Al₂O₃ matrix. The latter composites exhibit novel optoelectronic properties with quantum confinement of phonons, electrons, holes and excitons. Similarly, we incorporated metal nanocrystals in ceramics to produce improved mechanical and optical properties.     

脉冲激光沉积PMN-PT薄膜及其性能研究

以较低温度烧结获得的PMN-PT块材料为靶,采用脉冲激光沉积方法在石英衬底上制备了PMN-PT薄膜,研究了后续退火处理对PMN-PT薄膜的结构及光学特性的影响.结果显示,采用脉冲激光沉积可获得质量较好的钙钛矿结构的PMN-PT薄膜,优化的后续退火温度大约在550℃～750℃之间.     

飞秒脉冲激光沉积钕掺杂薄膜特性研究

采用脉冲激光沉积(PLD)技术在Si(100)衬底上生长了Nd∶YAG薄膜以及Nd∶Glass薄膜,利用扫描电子显微镜(SEM)、能谱仪(EDS)、傅里叶变换红外光谱仪(FTIR)、光学掺量振荡器(OPO)以及光栅光谱仪等测试装置分析了薄膜的表面和断面结构形貌、组成成分、光学吸收谱以及光致发光谱。结果表明：在室温衬底温度下生长的Nd∶YAG薄膜以及Nd∶Glass薄膜均呈无规则非定型结构,没有明显的取向性微晶生长;PLD生长的Nd∶YAG薄膜中存在0.15 at.%化学计量比的Nd元素;Nd∶YAG块体靶材在750和808 nm有两个明显的吸收峰,而薄膜没有明显的吸收峰;Nd∶YAG薄膜在808 nm波长泵浦光下没有明显的光致发光谱峰,而Nd∶Glass薄膜在877和1 064 nm波长处有明显的光致发光谱峰。说明在室温衬底温度下生长的Nd∶Glass薄膜中Nd元素以Nd3+光学活性离子形式掺杂进玻璃基质中,而Nd∶YAG薄膜中的Nd元素没有以Nd3+光学活性离子形式掺杂进YAG基质中。     

Effect of Incident Intensity on Films Growth in Pulsed Laser Deposition

Incident intensity, defined by the amount of particles deposited per pulse, is an important parameter in the film growth process of pulsed laser deposition （PLD）. Different from previous models, we investigate the irreversible and reversible growth processes by using a kinetic Monte Carlo method and find that island density and film morphology strongly depend on pulse intensity. At higher pulse intensities, lots of adatoms instantaneously diffuse on the substrate surface, and then nucleation easily occurs between the moving adatoms resulting in more smaller-size islands. In contrast, at the lower pulse intensities, nucleation event occurs preferentially between the single adatom and existing islands rather than forming new islands, and therefore the average island size becomes larger in this case. Additionally, our results show that substrate temperature plays an important role in film growth. In particular, it can determine the films shape and weaken the effect of pulse intensity on film growth at the lower temperatures by controlling the mobility rate of atoms. Our results can match the related theoretical and experimental results.     

A New Dynamics Expansion Mechanism for Plasma during Pulsed Laser Deposition

The dynamics expansion mechanisms for plasma plume generated by pulsed laser radiation are studied in detail, taking account of plasma ionization effect. Based on the consideration of local conservations of mass, momentum, collected as the assumption that plasma can be viewed as compressible ideal fluid and high temperature-high pressure ideal gas, we develop a new dynamics expansion mechanism for plasma produced by pulsed laser radiation. Using the analytical method, the space number density and pressure evolvement of plasma in cylindrical coordinate are obtained, the dynamics evolvement equations are also derived. The results from the present model indicate that the plasma dynamic expansion behaviour can be evidently influenced by the ionization fraction η. Its effect is similar to a new dynamic source for plasma expansion and increases the expansion acceleration in all directions. The predictions of the expansion of the plasma is affected by the temperature, the average atoms mass and the ionization degree of the plasma are consistent with the experimental results.     

XeCl（308nm）脉冲准分子激光淀积类金刚石薄膜

利用ＸｅＣｌ（３０８ｎｍ）脉冲准分子激光淀积技术在功率密度５×１０８Ｗ／ｃｍ２、室温、真空度１０－３Ｐａ的条件下，制备出不含氢成分的类金刚石薄膜，研究了类金刚石薄膜的特性及其随制备工艺条件的变化规律。研究了激光诱导的碳等离子体发射光谱，探讨了类金刚石薄膜的形成机理。     

脉冲激光沉积法(PLD)生长Co掺杂ZnO薄膜及其磁学性能

采用脉冲激光沉积(PLD)法在单晶Si(100)及石英衬底上生长Co掺杂ZnO薄膜,并且比较了不同生长条件下薄膜的性能。实验观察到了700℃、0.02Pa氧压气氛下生长的Co掺杂ZnO薄膜显示室温磁滞回线。采用XRD、SEM等手段对Co掺杂ZnO薄膜的晶体结构及微观形貌进行了分析,得到的ZnO薄膜具有高度的c轴择优取向,结构比较致密,表面平整度较高,并且没有发现Co的相关分相,初步表明Co有效地掺入了ZnO的晶格当中。霍尔测试表明Co掺杂ZnO薄膜样品保持了半导体的电学性能,电阻率为0.04Ω·cm左右,载流子浓度约为1018/cm3,迁移率都在18.7cm2/V·s以上。实验结果表明材料保持了ZnO半导体的性能,并具有室温铁磁性。     

利用脉冲激光沉积法制备高Mg掺杂的六方相MgZnO薄膜

选用Mg0.2Zn0.8O陶瓷靶,利用脉冲激光沉积(PLD)法,在单晶Si(100)和石英衬底上生长了一系列MgZnO薄膜(MZO)。通过X射线衍射(XRD)、扫描电子显微镜(SEM)、X射线能谱(EDS)和紫外可见光透射光谱(UV-Vis)等实验手段,研究了在不同工作压强下生长的薄膜样品的晶体结构、微观形貌和光学性能的变化。结果表明:所有的薄膜样品都是单一的ZnO六方相,禁带宽度随生长压强的升高而增加,变化范围在3.83～4.05eV之间,最短吸收边接近300nm。     

Technical Report: In-situ Studies of Pulsed Laser Deposition Growth at CHESS

Recent advances in thin-film growth using advanced in-situ monitoring techniques have enabled materials engineering with atomic precision via the carefully controlled deposition of sequences of single atomic layers [1–4 Iijima, K., Terashima, T., Bando, Y., Kamigaki, K. and Terauchi, H. 1992. J. Appl. Phys., 72: 2840 Tabata, H., Tanaka, H. and Kawai, T. 1994. Appl. Phys. Lett., 65: 1970 Takahashi, R., Matsumoto, Y., Koinuma, H., Lippmaa, M. and Kawasaki, M. 2002. Appl. Surf. Sci., 197: 532 Tsurumi, T., Suzuki, T., Yamane, M. and Daimon, M. 1994. Jpn. J. Appl. Phys., 33: 5192 ]. Epitaxial oxide heterostructures are especially attractive due to the broad range of materials properties that are manifest with changes in stoichiometry, even within a single structure family. Researchers are beginning to search for new phenomena that occur when these dissimilar materials are joined at atomically smooth interfaces [5–8 Koster, G., Verbist, K., Rijnders, G., Rogalla, H., van Tendeloo, G. and Blank, D. H. A. 2001. Physica C, 353: 167 Lee, H. N., Christen, H. M., Chisholm, M. F., Rouleau, C. M. and Lowndes, D. H. 2005. Nature, 433: 395 Ohtomo, A. and Hwang, H. Y. 2004. Nature, 427: 423 Tsurumi, T., Harigai, T., Tanaka, D., Nam, S.-M., Kakemoto, H., Wada, S. and Saito, K. 2004. Appl. Phys. Lett., 85: 5016 ].     

透明KTN薄膜的PLD法制备及其铁电性能研究

用Sol Gel法制备KTN多晶粉末,在富氧气氛下烧结富钾KTN陶瓷,代替KTN单晶作为靶材,用PLD技术结合后期退火技术,在透明石英单晶(100)上制备出高取向的透明KTN薄膜,对薄膜厚度、折射率、伏～安(I～V)特性、介电特性进行了测试与分析.I～V特性表明,低电场强度下,I～V服从欧姆定律,高电场强度下,I～V服从平方关系,可用空间电荷限制电流模型解释.电容～测试电场频率(C～F)特性表明,低频电容色散大,高频色散小,10kHz时介电常数为12600.     

Au-BaTiO3复合薄膜的脉冲激光沉积制备及其非线性光学效应

利用脉冲激光沉积技术制备了掺杂金纳米颗粒的钛酸钡复合薄膜Au-BaTiO3,用高分辨透射电镜和X射线光电子能谱对薄膜进行了表征。从透射电镜照片可以看出,制备的样品中金颗粒大小约为2~3 nm,呈球形,均匀分布在载体介质中。X射线光电子能谱给出了Ba3d、Ti2p和Au4f电子芯能级结合能,结果表明载体介质是以BaTiO3的形式存在,而Au以金属的状态掺杂其中。330~800 nm范围的线性吸收谱表明样品中Au颗粒的共振吸收峰在500 nm附近。用单光束纵向扫描方法测量了样品的三阶非线性光学效应,使用的光源为调Q的YAG激光器,波长为532 nm,脉宽为10 ns,得到的非线性折射率和非线性吸收系数分别为-2.42×10-6esu和2.22×10-6m/W,表明了Au-BaTiO3复合薄膜有较大的非线性光学响应。