Microstructure of Epitaxial GaN Layers Synthesized on Nanoprofiled Si(001) Substrates

Crystallography Reports - The microstructure of gallium nitride epitaxial layers synthesized by hydride vapor phase epitaxy (HVPE) and metalorganic chemical vapour deposition (MOCVD) on...     

在Si(100)上以AlN作过渡层低温外延生长ZnO薄膜

采用脉冲激光沉积(PLD)方法在Si(100)上成功生长了高度c轴取向的AlN薄膜,并以此为衬底,实现了ZnO薄膜的低温准外延生长.通过X射线衍射(XRD)、原子力显微镜(AFM)以及荧光分光光度计表征ZnO薄膜的结构、表面形貌和发光性能.结果表明,ZnO薄膜能在AlN过渡层上沿c轴准外延生长,采用AlN过渡层后,其荧光强度也有大幅提高.     

硅基片上异质外延SiC的机理研究

本文利用低压高温MOCVD系统,成功地在Si(111)基片上外延出了具有高质量的SiC薄膜,并对其反应机理做了一些初步的研究.大部分观点认为,SiC/Si的异质外延,其最初的状态应该为Si衬底中Si的扩散.但是,本文通过在不同流量比的条件下,SiC薄膜在Si基片以及Al2O3基片上外延的比较,发现在SiC/Si的异质外延过程中起重大作用的并非Si衬底中Si的扩散,而是很大程度上作用于C向Si衬底的扩散.同时,还发现反应速率的快慢受SiH4流量所限制.当SiH4流量增加时,反应速率会明显加快,但是结晶质量会相对变差.     

A study of structural perfection of interfaces in Si/SiGe superlattices

A complex investigation into the structural perfection of the Si/SiGe superlattices grown by molecular-beam epitaxy at different temperatures of the Si substrate has been carried out by high-resolution X-ray diffraction analysis, secondary ion mass spectrometry (SIMS), and transmission electron microscopy (TEM). It is demonstrated that the combination of these methods makes it possible to describe in sufficient detail the distributions of the strains and Ge concentrations in the elastically strained superlattices and also to evaluate the sharpness of the layer interfaces. It is shown that the densitometry of electron microscope images of the superlattice cross-sections permits characterization of the relative sharpness of the layer interfaces and a qualitative representation of the Ge distribution throughout the thickness of the SiGe layers.     

基于Si衬底的CdSe薄膜蒸镀工艺研究

采用真空蒸发技术在Si(100)基底上制备了CdSe纳米晶薄膜,利用X射线衍射仪(XRD)、膜厚测试仪、原子力显微镜(AFM)方法对不同蒸发电流下制备的薄膜的结晶情况、表面形貌进行分析表征.结果表明:蒸发电流对CdSe薄膜的结晶性能和表面形貌有显著影响.当蒸发电流为75 A时,CdSe薄膜沿(002)方向的衍射峰相对较强,沿c轴取向择优生长优势明显,薄膜厚度约为160 nm,晶粒尺寸约为40 nm,颗粒均匀;薄膜表面平整光滑,表面粗糙表面粗糙度(5.63 nm)相对较低,薄膜结晶质量较好.     

RHEED Studies of MBE-grown Aluminium Layers on {111}-Oriented Silicon Substrates

Thin Al-layers were prepared by Knudsen-type evaporation of Al onto {111} Si in a custom built UHV-reactor. Epitaxial growth was found on clean substrate surfaces with (7 × 7) reconstruction. In situ RHEED provides the epitaxial relationship The epitaxial films show a twelve-fold symmetry axis according to the combination of the 4-fold and 3-fold symmetry of the {001} deposit plane and of the substrate surface, respectively.     

Preparation,Morphology and Structure of Cadmium Telluride Epitaxial Layers on Germanium Substrates

Growth conditions of cadmium telluride single crystal layers on germanium (111), (110), (100), (112) substrates in quasi-closed “sandwich” system in a hydrogen atmosphere, were investigated in this paper. The peculiarities of layer morphology for the different orientations are presented.     

金刚石膜在Si(100)衬底上的选择沉积

采用自行设计的微波等离子体化学气相沉积系统,利用铜网作为模板实现了在Si(100)衬底上金刚石膜的选择沉积.用场发射扫描电子显微镜(SEM)、Raman散射谱对样品进行了表征与分析.并与同样生长条件下未采用模板时得到的金刚石样品进行了比较.结果发现,采用模板后,金刚石膜的成核密度和质量都得到很大提高.     

Influence of Microdefects on the Generation of Dislocations in Homoepitaxial Gallium Phosphide Layers Grown on LEC Substrates

GaP LEC substrates doped with sulphur (N_D – N_A roughly (3–7) × 10¹⁷ cm⁻³) were characterized by transmission electron microscopy. This material was found to contain microdefects such as perfect perismatic dislocation loops, and spherical precipitates. Cross-sectional TEM investigations perfomed have shown that above all perfect dislocation loops lying directly at the substrate/layer interface are sources for the formation of extended dislocations propagating through the epitaxial layer. Using the methods of selective photoetching and AB-etching on (110) cleavage faces this phenomenon was observed, too.     

Effects of the Substrate Crystals upon the Structure of Thermal Oxide Layers on Si

Comparisons of Bragg reflections from thermal oxide thin films on Si wafers were made for five sets of samples with various kinds of substrates. The intensities of the reflections for the samples with the substrate of better quality were stronger than those of poor one, indicating that the structures of the crystalline SiO₂ in the oxide layer were related with the quality of the Si substrates. It is also shown that no diffraction peaks were observed from the oxide layers grown on Si substrates by chemical vapor deposition.     

裂纹对Si衬底GaN基LED薄膜应力状态的影响

本文通过XRD和PL等分析方法研究了在Si衬底生长的GaN基LED外延薄膜n型GaN层和InGaN阱层的应力状态,以及裂纹对其应力状态的影响.XRD结果表明:在Si衬底生长的GaN基LED外延薄膜n型GaN层受到张应力,在受到一定的外加应力后会以裂纹及裂纹增生的方式释放.随着裂纹数量的增加,n型GaN层受到的张应力逐渐减小,但仍处于张应力状态;n型GaN层张应力的减小使得InGaN阱层受到的压应力增大.PL分析进一步表明:InGaN阱层受到的压应力增大使得量子限制Stark效应更加明显,禁带宽度减小,发光波长表现为红移.     

不同缓冲层对ZnO薄膜的性能影响

用射频反应磁控溅射法在玻璃基底上分别以SnO2、SiO2和Al2O3为缓冲层制备ZnO薄膜.利用X射线衍射仪(XRD)、扫描电镜(SEM)、紫外-可见分光光度计和荧光分光光度计对薄膜的结构和光学性能进行了表征.XRD和SEM的分析结果表明,在SiO2和Al2O3缓冲层上生长的ZnO薄膜具有较好的c轴择优取向,薄膜表面光滑平整,薄膜的结晶质量得到改善;透射光谱表明所有样品在可见光范围内的平均透过率超过70;;通过对薄膜光致发光谱的分析,认为422 nm左右的紫峰来自于电子从晶粒边界的界面缺陷能级到价带的辐射跃迁;PL谱中蓝光和绿光的发光机制与薄膜中的本征缺陷有关.     

SiCN薄膜在Si衬底上的沉积

本文采用微波等离子体化学气相沉积(MPCVD)系统,在单晶Si衬底上制备出了SiCN薄膜.所采用的源气体为高纯CH4和N2,而Si源来自于Si衬底、SiH4和Si棒.用场发射扫描电镜(SEM)、X射线光电子能谱(XPS)和X射线衍射谱(XRD)对样品进行了表征与分析.结果表明,外加Si源、高的衬底温度、高流量N2有助于提高样品的成膜质量.所得到SiCN样品是新型的六方结构三元化合物.     

MEMS用Si台面及SiO2/Si衬底上3C-SiC的LPCVD生长

本文报道用在Si台面及热氧化SiO2衬底上3C-SiC薄膜的LPCVD生长,反应生长使用的气体为SiH4和C2H4,载气为H2,采用光学显微镜、X射线衍射（XRD）、X射线光电子能谱（XPS）、扫描电镜（SEM）、以及室温Hall测试对所生长的3C—SiC材料进行了测试与分析,结果表明在3C-SiC和SiO2之间没有明显的坑洞形成。     

不同衬底表面上大晶粒多晶Si薄膜的制备

利用高频感应加热化学气相沉积(HFCVD)工艺,以H2稀释的SiH4作为反应气体源,分别在n-(111)Si衬底上常规热生长的SiO2层、织构的SiO2层和纳米晶粒多晶Si薄膜表面上,制备了具有均匀分布的大晶粒多晶Si膜.采用扫描电子显微镜(SEM)和X射线衍射(XRD)等检测手段,测量和分析了沉积膜层的表面形貌、晶粒尺寸、密度分布与择优取向等结构特征.结果表明,多晶Si膜中Si晶粒的尺寸大小和密度分布不仅与衬底温度、SiH4浓度与反应气压等工艺参数有关,而且强烈依赖于衬底的表面状态.本实验获得的最好的薄膜中,Si晶粒平均尺寸约为2.3 μm,密度分布约为3.8×107/cm2.对薄膜的沉积机理分析表明,衬底表面上Si原子基团的吸附、迁移、成核与融合等热力学过程支配着大晶粒多晶Si膜的生长.     

不同衬底制备硅薄膜的微结构研究

本文用等离子体增强化学气相沉积(PECVD)技术,在普通玻璃衬底、未织构的氧化锌掺铝(AZO)覆盖的普通玻璃衬底和石英衬底上室温下制备了微晶硅薄膜.然后用快速光热退火炉(RTP)在600℃下对样品进行了7min的退火处理, 借助Raman和SEM对退火前后硅薄膜微结构进行了研究,并用声子限域理论和纳晶表面效应对实验现象进行了分析.结果表明:(1) 薄膜沉积过程中,衬底结构对薄膜微结构有重要影响,相对来说石英衬底上沉积的硅薄膜最容易晶化,其次是玻璃衬底,再其次是未织构的AZO覆盖的玻璃衬底.初步分析认为,主要是因为衬底的无序结构与硅的晶体结构的失配程度不同造成的影响;(2)退火后,薄膜晶粒尺寸均增大.进一步推测, AZO薄膜微结构随退火的变化将导致硅薄膜微结构受到牵连影响.     

Phase diagram of growth mode for the SiGe/Si heterostructure system with misfit dislocations

The strain, surface and interface energies of the SiGe/Si (SiGe grown on Si) heterostructure system with and without misfit dislocations were calculated for the Frank–van der Merwe (FM), Stranski–Krastanov (SK) and Volmer–Weber (VW) growth modes essentially based on the three kinds of fundamental and simple structures. The free energies for each growth mode were derived from these energies, and it was determined as a function of the composition and layer thickness of SiGe on Si. By comparison of the free energies, the phase diagrams of the FM, SK and VW growth modes for the SiGe/Si system were determined. The (1 1 1) and (1 0 0) reconstructed surfaces were selected for this calculation. From the phase diagrams, it was found for the growth of SiGe on Si that the layer-by-layer growth such as the FM mode was easy to be obtained when the Ge composition is small, and the island growth on a wetting layer such as the SK mode was easy to be obtained when the Ge composition is large. The VW mode is energetically stable in the Ge-rich compositional range, but it is difficult for the VW mode to appear in the actual growth of SiGe on Si because the VW region is right above the SK region. The regions of the SK and VW modes for the (1 1 1) heterostructure are larger than those for the (1 0 0) one because the strain energy of the (1 1 1) face is larger than that of the (1 0 0) face. The regions of the SK and VW modes for the heterostructure with misfit dislocations are narrower than those for the one without misfit dislocations because the strain energy is much released by misfit dislocations. The phase diagrams roughly explain the behavior of the FM and SK growth modes of SiGe on Si.     

The Influence of the Dispersion and Vertical Divergence on the Reflection Curve of a Double-crystal Arrangement

The influence of the dispersion and vertical divergence on the half width of the reflection curves was investigated using a double-crystal arrangement where the second crystal could be rotated about an axis parallel to the beam reflected by the first crystal. The experimentally measured dependence of the half width of the reflection curves on the angle of rotation φ is accurately confirmed by geometrical considerations.     

过渡层结构和生长工艺条件对Si基GaN的影响

为了提高MOCVD外延硅基GaN材料的质量，在硅（111）衬底上以HT-AlN为缓冲层，在缓冲层上再生长变组份过渡层后外延生长GaN。过渡层为多层复合结构，分为高温变组分AlGaN、GaN、低温AlN、高温变组分AlGaN。在高温生长AlGaN和GaN层中插入一层低温生长AlN以缓解降温过程中应力对厚GaN层的影响，为了缓慢释放热应力、采用合适的慢降温工艺。当外延层的厚度小于1．7微米时GaN外延层无龟裂，而厚度不断增加时，GaN外延层产生龟裂。本文研究了AlN缓冲层生长温度、高温变组分AlGaN生长过程中生长时间的变化对所生长GaN材料的影响。采用三维视频显微镜、高分辨率双晶X射线衍射（DCXRD）、扫描电子显微镜（SEM）、原子力显微镜（AFM）和室温光致荧光光谱（RT-PL）对样品进行了测试分析。测试结果表明所研制的硅基GaN表面光亮、平整，过渡层的引入有利于降低外延层中应力，提高GaN结晶质量。     

Growth and Electron Microscopical Investigations of (CaBa)F2 Epitaxial Layers on GaAs and InP Substrates

(CaBa)F₂ layers have been grown on (100)-oriented GaAs and InP substrates by flash evaporation technique. They were investigated by means of electron microscopical methods (RHEED, TED, TEM). Epitaxial growth was found at temperatures in the range of 725 to 825 K for GaAs substrates and 700 to 800 K for InP substrates, respectively. The films showed a fine-grained structure and consisted of two phases always with a composition of approximately Ca_0.99Ba_0.01F₂ and Ca_0.08Ba_0.92F₂. This is in accordance with the occurrence of a miscibility gap observed in the binary CaF₂ BaF₂ system.