N+2离子在氮直流辉光放电中碰撞离解的作用

采用氮辉光放电等离子体快电子和各种重粒子（N＋２，N＋，Nf）的混合Monte Carlo模型，从不同放电条件的离解碰撞率，快原子态粒子（N+，Nf）在阴极鞘层区的输运过程及轰击阴极的能量及角分布三个方面研究了 N＋２+N２→N+＋N+N2f反应在氮气直流辉光放电中的作用.该过程在电压较高时为阴极鞘层区的重要离解过程， 且主要发生在阴极附近，其碰撞率随电压和气压增加而增加；阴极表面附近的活性粒子（N＋，Nf）主要由该离解过程产生（而不是e--N2离解电离过程），而且这些粒子具有中等的平均能量且小角入射，是 关键词： 氮直流辉光放电 Monte Carlo模拟 N＋２-N２碰撞离解     

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采用PIC-MC自洽模型,模拟了氮气电容性耦合射频放电的微观等离子体过程及带电粒子(e,N2+,N+)的行为。结果表明,离子(N2+,N+)的运动状态滞后瞬时射频电场的变化;在两极附近,N2+具较高密度,但能量较低,N+具较低的密度但能量较高,两者的密度差6倍左右。两种离子轰击射频电极的能量分布变化规律类似,随放电参数变化,离子(N2+,N+)能量变化显著,其密度变化不明显。模拟的电子能量几率分布与测量结果一致。     

H2对N2直流辉光放电电子行为的影响

通过用Monte Carlo方法模拟N₂-H₂ 混合气体直流辉光放电等离子体快电子行为，从不同H₂浓度的电子能量分布函数，电子密度以及e_f-N₂碰撞率等方面，研究了加H₂对氮辉光放电等离子体过程的影响. 研究结果表明: 随着H₂浓度的升高，电子的平均能量增加, 电子密度及e_f-N₂的各种非弹性碰撞率减小; 但在 关键词： 2-H₂辉光放电')" href="#">N₂-H₂辉光放电 Monte Carlo模拟 2碰撞率')" href="#">e-N₂碰撞率     

电子与H2+离子碰撞中的巴耳末α,β发射

对电子与H₂⁺离子碰撞过程中所产生的激发态进行了实验研究,测得巴耳末α,β发射光谱,研究了激发截面随能量变化的依赖关系,并定性讨论了分解复合机制。 关键词：     

氮分子离子N+2和氮原子离子N+与Ne原子碰撞激发的比较

用发射光谱法研究了同种元素氮的分子离子N⁺₂和原子离子N⁺与Ｎｅ原子碰撞产生的激发态，获得了靶激发、入射分子离子的分解激发、入射原子离子的激发以及两种离子与靶之间的电荷转移激发等信息．计算了各发射谱线的发射截面．对两种离子引起的谱线发射截面的差异进行了分析，得出一些初步结论，并对此作了些定性解释     

氮直流辉光放电活性粒子(N~+,N)的产生率

在氮直流辉光放电等离子体中采用快电子和离子(N+2,N+)混合的蒙特卡罗模型,模拟研究了e+N2→N+ N+N+2e e和N+2+N2→N++N+N2过程中粒子(N+,N)产生率的轴向分布随放电参数(工作气压、放电电压和温度)的变化规律。结果表明:两种离解过程中氮活性粒子(N+,N)的产生率都随气压和电压的增加而增大,随放电气体温度的升高而降低;但N+2-N2离解碰撞主要发生在阴极附近。电压较高时,阴极处的离子N+主要由N+2-N2离解过程产生;电压较低时,N+2-N2离解过程可忽略。中性原子N主要由电子碰撞离解过程产生。     

蒙特卡罗模拟在辉光放电鞘层离子输运研究中的应用

利用蒙特卡罗方法模拟氩气直流辉光放电鞘层内离子的运动过程.模拟基于离子与中性原子的电荷转移和弹性散射两种主要的散射过程，考虑了碰撞截面与能量相关和不相关两种情况，在弹性散射中采用了势场相互作用模型和刚性球碰撞两种模型.通过模拟得到不同气压和不同放电电压下离子入射阴极的能量分布和角度分布，并对几种模型的模拟结果进行了比较和讨论. 关键词： 辉光放电 等离子体鞘层 蒙特卡罗模拟     

等离子体金属表面氮化中放电温度对氮原子态粒子的影响

采用快电子和重粒子(N₂⁺,N⁺,N_f)混合的Monte Carlo模型,研究了氮直流辉光放电等离子体金属表面氮化过程中.e-N_2s及N₂⁺-N_2s两种碰撞离解过程产生的原子态粒子(N⁺,N)的产生率和氮化粒子(N⁺,N_f)轰击靶表面的能量、粒子数密度及入射角分布随气体温度的变化规律.结果表明,使阴极靶处活性粒子(N⁺,N_f)的能量高且粒子数密度大,存在一个最佳放电温度;粒子(N⁺,N)的产生率及在靶表面的密度数都随着放电气体温度的升高而减少;有大量中性快原子N_f在工件表面小角入射,且粒子(N⁺,N_f)角分布受温度的影响很小.     

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采用蒙特卡罗模型对氮空心阴极放电等离子体鞘层离子(N2 、N )的输运过程进行了模拟研究,计算了阴极鞘层中氮离子(N2 、N )的能量及角分布的空间变化和粒子密度及平均能量随放电参数的变化规律。研究结果表明:空心阴极放电产生的氮离子,在鞘层输运过程中,N2 是密度几乎不变的低能粒子;N 是密度逐渐减少的高能粒子。随着电压增加,N 密度减小,平均能量增加;N2 密度和平均能量变化不明显。能量及入射角的相对分布规律与平板电极氮直流辉光放电基本类似,但圆筒空心阴极放电更有利于氮离子的产生。     

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采用粒子模拟与蒙特卡罗模型相结合(PIC/MCC)的方法,建立了氮分子气体辉光放电自洽的混合模型,其中带电粒子在电场中的运动及其产生的自洽场由PIC方法的静电模型描述,粒子间的碰撞过程由MC方法描述。模拟了放电过程及带电粒子(e、N2+、N+)在整个放电空间的行为及与之对应的自洽电场和电势的分布,通过计算带电粒子在负辉区的几率分布函数,讨论了带电粒子(e、N2+、N+)在负辉区的行为和分布特征。计算的分子离子密度与实验结果一致。     

Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics: Correlation with optical emission spectroscopy

Plasma parameters from the discharge characteristics of a 13.56 MHz capacitively coupled radio frequency Ar plasma are evaluated on the basis of homogeneous discharge model for wide range of operating pressure. The homogeneous discharge model of capacitively coupled radio frequency discharge is modified to take into account the nonlinear plasma series resonance effect. The effect of drift velocity of the electron due to change in radio frequency electric field and operating pressure is also considered. Considerable dependent of plasma parameters on the drift velocity of the electron as well as on the plasma series resonance effect are observed in low pressure. An irregular variation of calculated plasma density with operating pressure is observed, which is reconfirmed with optical emission spectroscopy.     

Short-wavelength emission characteristics of a longitudinal bromine vapor glow discharge in a quartz tube

The output emission characteristics are presented in the spectral range 150–350 nm for a longitudinal bromine vapor glow discharge in a quartz tube (inner diameter 1.4 cm, interelectrode distance 10 cm). Pressure of the working mixtures: P = 0.2–1.0 kPa. The emission spectrum of the lamp based on an He-Br₂ mixture consists of the 163.3 nm and 157.6 nm spectral lines of the bromine atom and a system of molecular bromine bands (170–300 nm). The total power of UV-VUV emission of the lamp based on an He-Br₂ mixture is 5 W max for efficiency <10%. __________ Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 74, No. 6, pp. 816–819, November–December, 2007.     

He-O2高气压下电容耦合辉光放电数值分析

采用一维的等离子体流体力学模型研究了氦气-氧气高气压下电容耦合放电过程。分别给出了间隙为1.6,2.4和3.2 mm时外加电压的有效值与放电电流有效值特征曲线,并与已有的实验数据作对比,结果表明计算得到的电压-电流特征曲线与实验数据符合得很好。研究发现：氦气-氧气高气压下电容耦合放电过程中荷质比较大的离子在鞘层中的分布随着外电场的变化而变化,而荷质比较小的粒子在整个放电区域基本不随外电场变化而变化;同时杂质形成正负离子在主等离子体区域两端出现了峰值。     

Effects of N2 and glow discharge on growth behaviours of carbon nanotubes prepared by the hot filament chemical vapour deposition method

Carbon nanotubes (CNTs) are prepared by the hot filament chemical vapour deposition method using CH4 and H2 as reaction gases, and the growth behaviours are investigated by scanning electron microscopy and transmission electron microscopy. The results indicate that the CNTs prepared in the absence of N2 or glow discharge are bent; however, they are in an aligned state after introducing N2 into the chamber or forming glow discharge under a negative biased voltage. The results also indicate that the CNTs are of a bamboo-like structure when N2 is intruded as a reaction gas and the alignment degree of the CNTs grown under glow discharge is higher than that grown in N2. This illustrates that the nitric environment and glow discharge play important roles in the growth of CNTs. Combining with the theory related to alloy thermodynamics and collisions, we have analysed the growth mechanism of the CNTs in nitric environment and glow discharge.     

DC discharge experiment in an Ar/N2/CO2 ternary mixture: A laboratory simulation of the Martian ionosphere's plasma environment

A low-pressure DC plasma discharge sustained in a 1.6%Ar–2.7%N₂–95.3%CO₂ ternary mixture is studied. This plasma was generated in a total pressure range from 1.0 to 4.0 Torr, a power of 6.3 W and a 12 l/min flow rate of gases. The electron temperature was found to be 8.41 eV and the ion density, in the order of 10⁹ cm⁻³. The species observed in the plasma mixture were CO₂, CO₂⁺, CN, CO, CO⁺, O₂, O₂⁺, N₂, N₂⁺, NO, C⁺, Ar and Ar⁺. At the pressure range in the present study, the species observed do not change their intensity due to an increase in the pressure and they separate in two groups according to their emission intensity: the band of the first group (CO₂, CO₂⁺ and CN) is approximately a factor of 3 more intense than that of the second group (CO, CO⁺, O₂, O₂⁺, N₂, N₂⁺, NO, C⁺, Ar and Ar⁺). The behavior of the emission intensities may be correlated to the constant ion density and electron temperature measured. Also, we observed the same constant behavior in the ratios of the neutral and positive species intensities to that of the N₂ intensity, as a function of pressure. This may suggest that the different rate coefficients and cross sections of elastic collision, excitation and de-excitation of electronic or vibrational levels, inelastic and superelastic collisions of electrons with the gas phase and products, neutral–neutral interactions, resonant charged transfer processes, recombination, to mention some, to produce these species change in the same proportion, as a function of the pressure to keep the relative ratios of the species almost constant.