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1.
The RF plasma induced polymerization of 1-vinyl-2-pyrrolidone was examined under variable duty-cycle pulsed-plasma conditions. Large-scale progressive changes in the composition of the resultant polymeric films were observed with sequential changes in the plasma duty cycle employed during polymerization, all other plasma variables held constant. The film compositional changes obtained are in the direction of increased retention of the lactam ring of the monomer in the resultant polymers as the duty cycles employed (i.e., the ratio of plasma on to plasma off times) were decreased. Particularly significant are the relatively linear polymeric structures obtained under the exceptionally low-average power deposition conditions made accessible with the pulsed plasma technique. XPS and FTIR spectroscopic examination of these latter films reveal compositions that are similar to those obtained by conventional (i.e., nonplasma) synthesis of the linear polymer. The film chemistry controllability demonstrated in the present study is achieved while maintaining the many advantages of the plasma polymerization approach for surface modifications. This work provides additional support for use of the pulsed operational mode as an effective means of film chemistry control, in particular extending the plasma polymerization technique to include synthesis of linear polymers, in lieu of the more highly crosslinked structures typically produced in conventional continuous-wave plasma polymerization processes. © 1998 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 36: 3121–3129, 1998  相似文献   

2.
Pulsed microwave power was used to polymerize a variety of monomers containing different functional groups. We examined the effects of pulse frequency and duty cycle on the deposition rates and the composition of the polymers. For monomers that do not contain oxygen we find that there is an increase in deposition rate with increasing pulse frequency and that the pulsed deposition rate is always less than the continuous power deposition rate. For monomers that contain oxygen, or for co-depositions of hydrocarbon monomers with O2 or CO, we find that there is a decrease in deposition rate with increasing frequency, however the deposition rate using pulsed power is greater than the rate using continuous power. This result is shown to be related to the amount of etching that takes place during the deposition process. Infrared studies reveal that pulsed power can alter the composition of plasma polymers of some oxygen-containing monomers. The presence or absence of vinyl unsaturation, nitrile groups, or a cyclic structure have no effect on the polymerization process.  相似文献   

3.
The deposition of diamondlike carbon (DLC) film and the measurements of ionic species by means of mass spectrometry were carried out in a CH4/N2 RF (13.56 MHz) plasma at 0.1 Torr. The film deposition rate greatly depended on both CH4/N2 composition ratio and RF power input. It was decreased monotonically as CH4 content decreased in the plasma and then rapidly diminished to negligible amounts at a critical CH4 content, which became large for higher RF power. The rate increased with increasing RF power, reaching a maximum value in 40% CH4 plasma. The predominant ionic products in CH4/N2 plasma were NH+ 4 and CH4N+ ions, which were produced by reactions of hydrocarbon ions, such as CH+ 3, CH+ 2, CH+ 5, and C2H+ 5 with NH3 molecules in the plasma. It was speculated that the production of NH+ 4 ion induced the decrease of C2H+ 5 ion density in the plasma, which caused a reduction in higher hydrocarbon ions densities and, accordingly, in film deposition rate. The N+ 2 ion sputtering also plays a major role in a reduction of film deposition rate for relatively large RF powers. The incorporation of nitrogen atoms into the bonding network of the DLC film deposited was greatly suppressed at present gas pressure conditions.  相似文献   

4.
The polymerization of aniline under continuous and pulsed RF-plasma conditions is studied using the same plasma reactor. The effects of input power, on and off-times, frequency and duty cycle variations on the growth kinetics and on the chemical structure of the obtained layers are examined. The chemical structure of the films is characterized using Fourier Transform Infra-Red, X-ray photoelectron and UltraViolet?CVisible spectroscopies. The thickness of the films is determined by profilometry. The results show a strong dependence of film chemistry and deposition rates on the discharge power and on-time. The film deposited by pulsed plasma grows mainly during the plasma-on period. Furthermore, this work shows that the retention of aromatic rings can be evaluated by Fourier transform infrared analysis whereas oxidation degree of plasma polyaniline can be determined by X-ray photoelectron and UV?CVis spectroscopies.  相似文献   

5.
Plasma polymerization of octafluoronaphthalene, naphthalene, and 1 : 1 mixtures of the two yielded thin films which were then analyzed by ESCA. Optical emission was recorded during deposition and the resultant spectra are shown. Deposition of the copolymer at 150°C resulted in a film whose composition was different from that deposited at room temperature and from the single plasma polymers. Copolymerization resulted in a lowering of CF2 functionalities and an increased retention of the aromatic nature of the monomers. Optical emission of CF2 during copolymerization was greatly reduced as was a peak at about 510 nm.  相似文献   

6.
Weakly ionized, radio-frequency, glow-discharge plasmas formed from methyl ether or the vapors of a series of dimethyl oligo(ethylene glycol) precursors (general formula: H-(CH2OCH2)n-H;n=1 to 4) were used to deposit organic thin films on polytetrafluoroethylene. X-ray photoelecton spectroscopy (XPS) and static secondary ion mass spectrometry (SIMS) of the thin films were used to infer the importance of adsorption of molecular species from the plasma onto the surface of the growing, organic film during deposition. Films were prepared by plasma deposition of each precursor at similar deposition conditions (i.e., equal plasma power (W), precursor flow rate (F), and deposition duration), and at conditions such that the specific energy (energy/mass) of the discharge (assumed to be constrained byW/FM, whereM=molecular weight of the precursor) was constant. At constantW/FM conditions, two levels of plasma power (and, hence, twoFM levels) and three substrate temperatures were examined. By controlling the energy of the discharge (W/FM) and the substrate temperature, these experiments enabled the study of effects of the size and the vapor pressure of the precursor on the film chemistry. The atomic % of oxygen in the film surface, estimated by XPS, and the intensity of theC-O peak in the XPS Cls spectra of the films, were used as indicators of the degree of incorporation of precursor moieties into the plasma-deposited films. Analysis of films by SIMS suggested that these two measures obtained from XPS were good indicators of the degree of retention in the deposited films of functional groups from the precursors. The XPS and SIMS data suggest that adsorption of intact precursor molecules or fragments of precursor molecules during deposition can have a significant effect on film chemistry. Plasma deposition of low vapor pressure precursors provides a convenient way of producing thin films with predictable chemistry and a high level of retention of functional groups from the precursor.  相似文献   

7.
The UV induced photopolymerization of Langmuir-Blodgett films of lead salt of 2-docosynoic acid (CH3(CH2)18C=CCOOH) is studied using IR and Raman spectroscopy. It is found that the films are a highly ordered system with trans-configuration of alkyl chains and a bridged complex generated between the carboxyl group and the lead ion. Based on a change in the absorption band intensity in the IR spectra corresponding to the triple bond vibration, the degree of polymerization depending on the irradiation time is determined. In the Raman spectra, a peak at ∼1635 cm−1 appears during polymerization, which corresponds to the C=C double bond. The formation of conjugated double bonds in these systems is observed for the first time. During polymerization, methylene chains of molecules retain trans-configuration; the structural ordering of molecules in the film is observed.  相似文献   

8.

The atmospheric pressure radiofrequency (RF) plasma polymerization of furan was carried out with the objective of synthesizing polyfuran thin film. The structure, compositions and morphology of the plasma deposited polyfuran film were investigated by Fourier transform infrared (FTIR), atomic force microscopy (AFM), ultraviolet‐visible absorption spectroscopy (UV‐vis) and thermogravimetric analysis (TGA). The formation of polyfuran was confirmed using FTIR and UV‐visible analysis. The properties of plasma‐deposited polyfuran were compared with those of chemically synthesized polyfuran. Although the plasma deposited thin film polyfuran shows lower thermal stability than that of chemically synthesized polyfuran. It has better solubility in CHCl3, also. Thin uniform polyfuran films are obtained in plasma assisted polyfuran deposition, while particles are obtained in chemical polyfuran polymerization.  相似文献   

9.
The aim of the present work is the synthesis and characterization of new perfluorinated monomers bearing, similarly to Nafion®, acidic groups for proton transport for potential and future applications in proton exchange membrane (PEM) fuel cells. To this end, we focused our attention on the synthesis of various molecules with (i) sufficient volatility to be used in vacuum polymerization techniques (e.g., PECVD)), (ii) sulfonic, phosphonic, or carboxylic acid functionalities for proton transport capacity of the resulting membrane, (iii) both aliphatic and aromatic perfluorinated tags to diversify the membrane polarity with respect to Nafion®, and (iv) a double bond to facilitate the polymerization under vacuum giving a preferential way for the chain growth of the polymer. A retrosynthetic approach persuaded us to attempt three main synthetic strategies: (a) organometallic Heck-type cross-coupling, (b) nucleophilic displacement, and (c) Wittig–Horner reaction (carbanion approach). Preliminary results on the plasma deposition of a polymeric film are also presented. The variation of plasma conditions allowed us to point out that the film prepared in the mildest settings (20 W) shows the maximum monomer retention in its structure. In this condition, plasma polymerization likely occurs mainly by rupture of the π bond in the monomer molecule.  相似文献   

10.
Zou  X. P.  Kang  E. T.  Neoh  K. G.  Cui  C. Q.  Lim  T. B. 《Plasmas and Polymers》2000,5(3-4):219-234
Surface modification of poly(tetrafuoroethylene) (PTFE) film by plasma polymerzation and deposition of glycidyl methacrylate (GMA), in the presence and absence of Ar or O2 plasma pre-activation, was carried out to enhance the adhesion with polyimides (PI) film in the presence of an epoxy adhesive. For deposition carried out at low RF power, a high epoxide concentration was preserved in the plasma-polymerized GMA (pp-GMA) layer on PTFE (pp-GMA-PTFE). However, high adhesion strength of the PI/pp-GMA-PTFE laminate was obtained only in the presence of O2 plasma pre-activation of the PTFE substrates prior to plasma polymerization and deposition of GMA. In the absence of any plasma pre-activation or in the presence of Ar plasma pre-activation, the deposited pp-GMA layer on the PTFE surface could be readily removed by solvent extraction. The adhesion enhancement of the PI/pp-GMA-PTFE laminates in the presence of O2 plasma pre-activation was attributed to the preservation of the epoxide functional groups in the pp-GMA layer, the curing of the GMA chains into the matrix of the epoxy adhesive, and the covalent bonding of the pp-GMA layer on the PTFE surface.  相似文献   

11.
Methane and fluoromethanes (CHnF4−n, 1 ≤ n ≤ 3) were subjected to an rf glow discharge plasma. All the fluoromethanes (including methane) polymerized in the plasma and formed thin films. The deposition rate of the fluoromethanes depended on their monomer structure: CH2F2, of which the F/H ratio is unity, showed the greatest deposition rate. The elimination of H and F atoms as H—F was found to be a key factor for the polymerization of fluoromethanes. The chemical composition of the polymerized film, measured with X-ray photoelectron spectroscopy and glow discharge emission spectroscopy, was also found to be strongly dependent on monomer structure. © 1998 John Wiley & Sons, Inc. J. Polym. Sci. A Polym. Chem. 36: 2043–2050, 1998  相似文献   

12.
The low temperature RF plasma treatment was used to control the surface chemistry and optical property of TiO2 thin films deposited by RF magnetron sputtering with a very good uniformity at 300 °C substrate heating temperature. The XRD pattern indicates the crystalline structure of the film could be associated to amorphous structure of TiO2 in thin film. The plasma treatment of TiO2 film can increase the proportion of Ti3+ in Ti2p and decrease in carbon atoms as alcohol/ether group in C1s at the surface. The optical transmittance of the film was enhanced by 50% after the plasma treatment. The surface structure and morphology remain the same for untreated and low-pressure plasma-treated films. Therefore, increase in the optical transmission could be due to change in surface chemistry and surface cleaning by plasma treatment.  相似文献   

13.
In this work, we have calculated the thermodynamic parameters of the polymerization of some derivatives of the species CH2X (X = CH2, NH, O), using ab initio methods of quantum chemistry and the usual formalism of statistical thermodynamics. It is shown that the Gibbs functions ΔG(l, c) corresponding to CH2NOCH3, CNCHNCN, CF2O and all the percyano derivatives are largely positive which indicates that the spontaneous (radical or ionic) chain polymerization of these monomers is thermodynamically prohibited.  相似文献   

14.
This paper investigates DC plasma polymerization kinetics by combining plasma parameters with film deposition rate in different conditions. The monomers hexamethyldisiloxane (HMDSO) and pyrrole were used. Both single and double Langmuir probes were used to measure the plasma parameters in pulsed power and continuous discharges. In order to avoid probe tip contamination, the probe was heated. Plasma density and electron temperature are reported. The electron current wave form is obtained in pulse power conditions. From the data, a plasma polymerization model is proposed. The conclusion is that the monomer molecules and free radicals adsorbed on the substrate surface react with activated sites produced by high energy ions bombarding the film, resulting in polymerization at the film surface.  相似文献   

15.
Recently, surface plasmon resonance (SPR) has been successfully implemented to characterize the film stability in real time: a radio frequency (RF) plasma polymerized film was monitored by swelling or extracting behaviors in aqueous solution. The high-resolution SPR revealed that film stability strongly depended on the monomers, plasma mode, and substrate locations as well as plasma polymerization conditions: incident power and working pressure. By Fourier transform infrared (FTIR), the possible reasons of film stabilization affected by plasma conditions and sample locations are explained. It is recommended that as an adhesive layer for future applications the plasma polymerized polymer shall be prepared in low working pressure pulsed plasma.  相似文献   

16.
Cluster metal-containing monomers were obtained and characterized. Mono- and disubstituted products were obtained under mild conditions via the interaction of Rh6(CO)16 with 4-vinylpyridine (4-VPy) in the presence of trimethylamin-N-oxide. Substitution of labile acetonitrile ligand in Rh6(CO)15NCMe by allyldiphenylphosphine (AlPPh2) yields Rh6(CO)14(μ,η2-PPh2CH2CH=CH2) with formation of π-complex. The structures of Rh6(CO)15(4-VPy), Rh6(CO)14(μ,η2-PPh2CH2CH=CH2) and (μ-H)Os3(μ-OCNM2)(CO)9PPH2CH2CH=CH2 have been determined by single-crystal X-ray diffraction studies, as well as by IR-, 1H NMR spectroscopies. The Rh - Rh bond lengths are within 2.72÷2.80 Å. The copolymerization of cluster-containing monomers synthesized with traditional monomers has been studied. It was found that Rh6- and Os3-containing monomers did not change either the ligand surroundings or the structure of cluster monomer framework during polymerization reaction.  相似文献   

17.
Amorphous ultrafine tin-containing organic thin films have been prepared by means of radio frequency (RF) glow-discharge plasma polymerization of tetrabutyltin (TBT). After being annealed, the films turned into ultrafine SnOx thin films, which possessed high gas sensitivity. The influences of the thermal annealing process on the film's composition, microstructure, and gas sensitivity to such reductive gases as EtOH, H 2 , CH 4 , and CO were investigated, and the effects of doping silver into the film on its gas sensitivity were also discussed in detail. By doping with Ag, the sensitivity and selectivity of the film obviously increased, the optimum operating temperature decreased, and the film color apparently changed. Based on these facts, the catalysis mechanism of doped Ag is addressed.  相似文献   

18.
N,N‐dialkylaminoethyl methacrylate (DAEA) monomers are extensively used to prepare multi‐responsive polymers. However, these monomers face high risk of hydrolysis in their ester groups when being polymerized in water‐containing medias. Here, NMR spectroscopy was employed to continuously track the hydrolysis and solubility of four widely used DAEA monomers [CH2CH2R1COO(CH2)2N(R2)2; R1 = H or CH3; R2 = CH3, CH2CH3 or CH(CH3)2] under typical polymerization conditions. With this technique, the hydrolysis reactivity and absolute hydrolysis amount of these monomers are separately examined, and then their kinetic correlations with solubility, molecular structure, pH, and temperature are established, so that the hydrolysis of DAEA monomers and even other esters with similar cyclic structure can be predicted. The present efforts are expected to provide a general understanding for the hydrolysis of all the DAEA monomers, benefitting to the optimization of polymerization toward well‐defined DAEA copolymers, as well as the design of smart soft matter for specific applications. © 2018 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2018 , 56, 914–923  相似文献   

19.
This paper addresses the complex chemistry in the boundary later over a substrate in a chemical vapor deposition rector at atmospheric pressure. In this study, a highspeed plasma (140m/s) was created using a radio-frequency inductively coupled plasma torch for the deposition of diamond thin films. Growth rates on the order of 50 m/ h were obtained for well-faceted continuous films grown on molybdenum substrates positioned normal to the plasma flow. The highest growth rates were obtained at substrate temperatures of 1370 K and a feed gas ratio of 2.5% CH4 in H2. Growth rates are compared to predicted results obtained from numerical simulations, based on a one-dimensional stagnation-point flow, and are/mend to be in good agreement. Several other surface analysis techniques were used to characterize the deposited films, inchaling SEA/, Raman spectroscopy, transmission electron microscopy. Rutherfard backscattering spectroscopy, and hydrogen-forward recoil spectroscopy. Optical emission spectroscopy was used to characterize the RF plasma during the deposition process. Results from these studies form an important database for the validation and improvement of current models of the atmospheric-pressure diamond CVD environment.  相似文献   

20.
The chemical kinetic effects of RF plasma on the pyrolysis and oxidation of methane were studied experimentally and computationally in a laminar flow reactor at 100 Torr and 373 K with and without oxygen addition into He/CH4 mixtures. The formation of excited species as well as intermediate species and products in the RF plasma reactor was measured with optical emission spectrometer and Gas Chromatography and the data were used to validate the kinetic model. The kinetic analysis was performed to understand the key reaction pathways. The experimental results showed that H2, C2 and C3 hydrocarbon formation was the major pathways for plasma assisted pyrolysis of methane. In contrast, with oxygen addition, C2 and C3 formation dramatically decreased, and syngas (H2 and CO) became the major products. The above results revealed oxygen addition significantly modified the chemistry of plasma assisted fuel pyrolysis in a RF discharge. Moreover, an increase of E/n was found to be more beneficial for the formation of higher hydrocarbons while a small amount of oxygen was presented in a He/CH4 mixture. A reaction path flux analysis showed that in a RF plasma, the formation of active species such as CH3, CH2, CH, H, O and O (1D) via the electron impact dissociation reactions played a critical role in the subsequent processes of radical chain propagating and products formation. The results showed that the electronically excitation, ionization, and dissociation processes as well as the products formation were selective and strongly dependent on the reduced electric field.  相似文献   

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