Electron cyclotron resonance breakdown studies in a linear plasma system

Electron cyclotron resonance (ECR) plasma breakdown is studied in a small linear cylindrical system with four different gases — hydrogen, helium, argon and nitrogen. Microwave power in the experimental system is delivered by a magnetron at 2.45 ± 0.02 GHz in TE₁₀ mode and launched radially to have extra-ordinary (X) wave in plasma. The axial magnetic field required for ECR in the system is such that the fundamental ECR surface (B = 875.0 G) resides at the geometrical centre of the plasma system. ECR breakdown parameters such as plasma delay time and plasma decay time from plasma density measurements are carried out at the centre using a Langmuir probe. The operating parameters such as working gas pressure (1 × 10⁻⁵−1× 10⁻² mbar) and input microwave power (160–800 W) are varied and the corresponding effect on the breakdown parameters is studied. The experimental results obtained are presented in this paper.      

Fokker-planck study of tokamak electron cyclotron resonance heating

A Fokker－Planck study is carried out for tokamak electron cyclotron resonance heating by writing the quasi-linear diffusion operator into a form adaptive to the collision operator and considering the wave absorption characteristics of both the O-mode and the X-mode in different magnetic surfaces. Though the Fokker－Planck code is non-relativistic in nature, however, if the relativistic resonance condition for the nearly perpendicularly propagating waves is treated suitably, we can obtain correct results. The energy loss mechanism through anomalous transport is also modelled using a suitable loss term. In the heating phase, the electron distribution deviates from the Maxwellian distribution substantially, which leads to non-linear absorption characteristics. The wave damping rate is non-linear and changes with time. The electron pressure is usually anisotropic under different conditions: p_{e⊥}/p_{e‖}>2 for different D_0 and τ_e.     

Study of runaway electron behaviour during electron cyclotron resonance heating in the HL-2A Tokamak

During the current flat-top phase of electron cyclotron resonance heating discharges in the HL-2A Tokamak, the behaviour of runaway electrons has been studied by means of hard x-ray detectors and neutron diagnostics. During electron cyclotron resonance heating, it can be found that both hard x-ray radiation intensity and neutron emission flux fall rapidly to a very low level, which suggests that runaway electrons have been suppressed by electron cyclotron resonance heating. From the set of discharges studied in the present experiments, it has also been observed that the efficiency of runaway suppression by electron cyclotron resonance heating was apparently affected by two factors: electron cyclotron resonance heating power and duration. These results have been analysed by using a test particle model. The decrease of the toroidal electric field due to electron cyclotron resonance heating results in a rapid fall in the runaway electron energy that may lead to a suppression of runaway electrons. During electron cyclotron resonance heating with different powers and durations, the runaway electrons will experience different slowing down processes. These different decay processes are the major cause for influencing the efficiency of runaway suppression. This result is related to the safe operation of the Tokamak and may bring an effective control of runaway electrons.     

电子回旋共振微波等离子体刻蚀α:CH薄膜的工艺

为了刻蚀出图形完整、侧壁陡直、失真度小的α:CH薄膜微器件,研究了有铝和无铝掩膜、气体流量比、工作气压对刻蚀速率的影响,并对纯氧等离子体刻蚀稳定性进行了研究。研究结果表明：在相同条件下,刻蚀速率随刻蚀时间变化不大;a:CH薄膜上有铝和无铝掩膜时,刻蚀速率相同;流量一定时,刻蚀速率随氩气和氧气体积比的增大而降低,当用纯氩气时,几乎没刻蚀作用;刻蚀速率随工作气压的增大而降低。实验中,得到最佳刻蚀条件是：纯氧气,流量4 mL·s-1,工作气压9.9×10-2 Pa,微波源电流80 mA,偏压-90 V。     

材料表面处理用强流电子回旋共振离子源

介绍一台2.45 GHz永磁强流电子回旋共振离子源,其外径160mm,高90 mm,放电室直径70 mm,高50 mm。微波馈入采用介质耦合方式,微波窗由一块f50 mm10 mm柱形BN和两块f30 mm10 mm的柱形陶瓷构成。离子源工作在脉冲模式下,采用三电极引出系统,最高引出电压达到100 kV,在微波输入功率300 W、进气量0.4 mL/min时,可引出峰值超过30 mA的氮离子束,在距离离子源引出孔1200 mm位置处的束流均匀区直径大于200 mm。     

微波电子回旋共振等离子体阴极电子束的实验研究

介绍了实验室研制的微波电子回旋共振(ECR)等离子体阴极电子束系统及初步研究结果，该系统包括微波ECR 等离子体源、电子束引出极、聚焦线圈等。通过测量水冷靶电流和靶上的束斑尺寸，实验研究了微波ECR 等离子体阴极电子束的流强、聚束性能等随电子束系统工作条件的变化。结果表明：微波输入功率越高、引出电压越高，引出电子束流强越大；工作气压对电子束流强的影响较复杂，随气压增加呈现出先降低后升高的特点；在7×10⁻⁴Pa 的极低气压下电子束流强可达75mA，引出电压9kV；能量利用率可达0.6；调整聚焦线圈的驱动电流，电子束的束斑直径从20mm 减小到13mm，电子束流强未有明显变化。     

Characteristics of electron cyclotron resonance plasma formed by lower hybrid current drive grill antenna

A 3.7 GHz system, which is meant for LHCD experiments on ADITYA tokamak, is used for producing ECR discharge. The ECR discharge is produced by setting the appropriate resonance magnetic field of 0.13 T, with hydrogen at a fill pressure of about 5 × 10⁻⁵ Torr. The RF power, up to 10 kW (of which ∼50% is reflected back), with a typical pulse length of 50 ms, is injected into the vacuum chamber of the ADITYA tokamak by a LHCD grill antenna and is used for plasma formation. The average coupled RF power density (the RF power/a typical volume of the plasma) is estimated to be ∼5 kW/m³. When the ECR appears inside the tokamak chamber for the given pumping frequency (f = 3.7 GHz) a plasma with a density (n _e) ∼ 4 × 10¹⁶ m⁻³ and electron temperature ∼8 eV is produced. The density and temperature during the RF pulse are measured by sets of Langmuir probes, located toroidally, on either side of the antenna. H_α signals are also monitored to detect ionization. An estimate of density and temperature based on simple theoretical calculation agrees well with our experimental measurements. The plasma produced by the above mechanism is further used to characterize the ECR-assisted low voltage Ohmic start-up discharges. During this part of the experiments, Ohmic plasma is formed using capacitor banks. The plasma loop voltage is gradually decreased, till the discharge ceases to form. The same is repeated in the presence of ECR-formed plasma (RF pre-ionization), formed 10 ms prior to the loop voltage. We have observed that (with LHCD-induced) ECR-assisted Ohmic start-up discharges is reliably and repeatedly obtained with reduced loop voltage requirement and breakdown time decreases substantially. The current ramp-up rates also decrease with reduced loop voltage operation. These studies established that ECR plasma formed with LHCD system exhibits similar characteristics as reported earlier by dedicated ECR systems. This experiment also addresses the issue of whether ECR plasma formed with grill antenna exhibits similar behavior as that formed by single waveguide ECR antenna. Our experimental observations suggest that the characteristics of (LHCD system-induced) ECR-assisted Ohmic start-up discharges show similar properties, reported earlier with normal ECR-assisted Ohmic start-up discharges and hence LHCD system may be used as ECR system at reduced toroidal magnetic field for other applications like wall conditioning.      

Electron temperature fluctuation in the HT-7 Tokamak plasma observed by electron cyclotron emission imaging

The fluctuation of the electron temperature has been measured by using the electron cyclotron emission imaging in the Hefei Tokamak-7 (HT-7) plasma. The electron temperature fluctuation with a broadband spectrum shows that it propagates in the electron diamagnetic drift direction, and the mean poloidal wave-number $\bar{k}_{\theta}$is calculated to be about 1.58 cm^-1, or \bar{k}_θ ρ_s≈ 0.34. It indicates that the fluctuation should come from the electron drift wave turbulence. The linear global scaling of the electron temperature fluctuation with the gradient of electron temperature is consistent with the mixing length scale qualitatively. Evolution of spectrum of the fluctuation during the sawtooth oscillation phases is investigated, and the fluctuation is found to increase with the gradient of electron temperature increasing during most phases of the sawtooth oscillation. The results indicate that the electron temperature gradient is probably the driver of the fluctuation enhancement. The steady heat flux driven by electron temperature fluctuation is estimated and compared with the results from power balance estimation.     

EAST 电子回旋共振加热效果的数值模拟和分析

为了给EAST 电子回旋共振加热物理实验提供理论依据和模拟预测,从电子热输运方程出发,运用 CRONOS 输运程序对不同等离子体和波参数下,电子回旋加热效果进行了数值模拟计算。给出不同电子回旋波功率、入射角、电子密度和纵场等参数对电子回旋加热效果的影响,预测在不同参数下,电子温度、等离子体总内能和能量约束时间的变化,分析了其原因,并与实验结果进行了初步的比较。     

微型电子回旋共振离子推力器离子源结构优化实验研究

微型电子回旋共振(ECR)离子推力器可满足微小航天器空间探测的推进需求. 为此, 本文开展直径20 mm的微型ECR离子源结构优化实验研究. 根据放电室内静磁场和ECR谐振区的分布特点, 研究不同微波耦合输入位置对离子源性能的影响, 结果表明环形天线处在高于ECR谐振强度的强磁场区域时, 微波与等离子体实现无损耦合, 电子共振加热效果显著, 引出离子束流较大. 根据放电室电磁截止特性, 结合微波电场计算, 研究放电容积对离子源性能的影响, 实验表明过长或过短的腔体长度会导致引出离子束流下降甚至等离子体熄灭. 经优化后离子源性能测试表明, 在入射微波功率2.1 W、氩气流量14.9 μg/s下, 可引出离子束流5.4 mA, 气体放电损耗和利用率分别为389 W/A和15%.     

Unstable plasma characteristics in mirror field electron cyclotron resonance microwave ion source

Electron cyclotron plasma reactor are prone to instabilities in specific input power [3–7] region (150–450 watts). In this region power absorption by gas molecules in the cavity is very poor and enhanced input power gets reflected substantially without increasing ion density. There are abrupt changes in plasma characteristics when input power was decreased from maximum to minimum, it was observed that reflected power changed from <2% to ∼50%. Minimum two jumps in reflected power were noticed in this specific power region and these appear to be highly sensitive to three stub tuner position in the waveguide for this particular input power zone. Unstable plasma region of this source is found to be dependent upon the magnetic field strength. Some changes in reflected power are also noticed with pressure, flow and bias and they are random in nature.     

Far-infrared cyclotron resonance study of neutral impurity scattering in GaAs

Far-infrared laser cyclotron resonance with the help of photoexcitation enables us to separate the electron-neutral donor and electron-neutral acceptor scattering rates in GaAs. Allowing for the complication due to the coexistence of donors and acceptors, inaccuracy due to unknown contribution of phonon scatterings etc., one finds that the electron-neutral donor scattering cross-section is 2.9×10^–11 cm² at 4.2 K, that is 23 times as large as the electron-acceptor scattering cross-section.     

Si—OH基团对SiCOH低k薄膜性能的影响与控制

研究了十甲基环五硅氧烷(D5)的电子回旋共振等离子体沉积的SiCOH薄膜中Si—OH基团对介电性能和漏电流的影响.结果表明Si—OH含量的增大会导致介电常数k的增大、漏电流的降低和介电色散的增强.由于Si—OH结构的强极化补偿了薄膜密度减小带来的介电常数降低，导致总的介电常数k增大.高Si—OH含量下漏电流的降低是由于封端的Si—OH基团降低了薄膜中Si—O网络的连通概率p而导致网络电导下降的缘故.介电色散的增强与Si—OH封端结构的快极化过程有关.改变放电参数以提高电子能量，从而提高源的电离程度，使更多的Si—OH基团断裂并通过缩合反应形成Si—O—Si网络，可以进一步降低薄膜的介电常数. 关键词： SiCOH薄膜 Si—OH结构 介电性能 ECR放电等离子体     

托卡马克等离子体不同运行模式下的电子回旋波电流驱动

在给定等离子体密度分布下，从电子、离子的能量方程出发，根据不同运行模式下等离子体的热传导率不同，分别求出了中心负剪切模式，常规剪切H模式和L模式下的等离子体温度分布，然后通过求解波迹方程与相对论情况下的Fokker-Planck方程，分别计算了这些模式下的电子回旋波电流驱动和波功率沉积.得到在中心负剪切下，驱动电流最大，驱动效率最高，功率沉积和电流分布区间跨度大；在常规剪切H模式下，驱动电流较小，分布区间跨度比较窄，驱动效率相对较低；在常规剪切L模式，驱动电流效率最低，分布区间跨度也非常集中. 关键词： 托卡马克 电子回旋波电流驱动 中心负剪切 常规剪切     

不同磁路电子回旋共振离子源引出实验

空间推进所用的电子回旋共振离子源(ECRIS)应具有体积小、效率高的特点. 本文研究的ECRIS使用永磁体环产生磁场, 有效减小了体积, 该离子源利用微波在磁场中加热电子, 电子与中性气体发生电离碰撞产生等离子体. 磁场在微波加热电子的过程中起关键作用, 同时影响离子源内等离子体的约束和输运. 通过比较四种磁路结构离子源的离子电流引出特性来研究磁场对10 cm ECRIS性能的影响. 实验发现: 在使用氩气的条件下, 特定结构的离子源可引出160 mA的离子电流, 最高推进剂利用率达60%, 最小放电损耗为120 W·A^-1; 所有离子源均存在多个工作状态, 工作状态在微波功率、气体流量、引出电压变化时会发生突变. 离子源发生状态突变时的微波功率、气体流量的大小与离子源内磁体的位置有关. 通过比较不同离子源的引出离子束流、放电损耗、气体利用率、工作稳定性的差异, 归纳了磁场结构对此种ECRIS引出特性的影响规律, 分析了其中的机理. 实验结果表明: 保持输入微波功率、气体流量、引出电压不变时, 增大共振区的范围、减小共振区到栅极的距离, 离子源能引出更大的离子电流; 减小共振区到微波功率入口、气体入口的距离能降低维持离子源高状态所需的最小微波功率和最小气体流量, 提高气体利用率, 但会导致放电损耗增大. 研究结果有助于深化对此类离子源工作过程的认识, 为其设计和性能优化提供参考.     

A wave approach to hollow cylindrical electron cyclotron masers

A wave method has been applied to analyze and derive the dispersion equation for hollow cylindrical ECM's, which features in simpler mathematics and clearer physical interpretation. Besides, the effects of space charge Columb field have been taken into account. For the time being, the result is more likely suitable for fundamental mode interaction.     

电子回旋共振微波等离子体技术及应用

电子回旋共振微波等离子体技术(ECR-MP)在表面处理、等离子体刻蚀和薄膜制备,尤其是高品质的激光惯性约束聚变薄膜靶的制备中有着重要的应用。综述了ECR-MP的基本原理、反应装置、实验研究、理论研究和应用情况的发展现状,同时分析了其今后可能的发展趋势。     

电子回旋共振微波等离子体技术及应用

 电子回旋共振微波等离子体技术(ECR-MP)在表面处理、等离子体刻蚀和薄膜制备，尤其是高品质的激光惯性约束聚变薄膜靶的制备中有着重要的应用。综述了ECR-MP的基本原理、反应装置、实验研究、理论研究和应用情况的发展现状，同时分析了其今后可能的发展趋势。     

电子回旋共振放电中电子与微波互作用特性的粒子模拟和蒙特卡罗碰撞模拟

对电子回旋共振（ECR）放电电离过程中的电子与微波互作用特性进行了理论分析与数值模拟.采用粒子模拟（PIC）方法描述带电粒子与微波的互作用,采用蒙特卡罗碰撞（MCC）方法描述粒子间碰撞过程及带电粒子与边界的相互作用.编写了准三维的PIC/MCC数值模拟程序,并对放电过程中电子能量与微波场随时间、空间的演化进行了数值诊断. 关键词： 电子回旋共振放电 粒子模拟 蒙特卡罗方法 电离     

不同磁路下微型ECR中和器电子引出的模拟研究

电子回旋共振(ECR)中和器是微型ECR离子推力器的重要组成部分,其引出的电子用于中和ECR离子源的离子束流,避免了航天器表面电荷堆积,并且电子引出性能对推力器的整体性能起着重要作用.为了分析影响微型ECR中和器电子引出的因素,本文建立了二维轴对称PIC/MCC计算模型,通过数值模拟研究不同磁路结构对中和器的电子引出,及不同腔体长度对壁面电流损失的影响.计算结果表明, ECR区位置和引出孔附近磁场构型对中和器的电子引出性能至关重要.当ECR区位于天线上游,电子在迁移扩散中易损失,并且电子跨过引出孔前电势阱所需的能量更高.如果更多磁力线平行通过引出孔,中和器引出相同电子电流所需电压较小.当ECR区被天线切割或位于下游时,电子更易沿磁力线迁移到引出孔附近,从而降低了收集板电压.研究了同一磁路结构下不同腔体长度对电子引出的影响,发现增加腔体长度,使得更多平行轴线的磁力线通过引出孔从而避免电子损失在引出板表面,增加了引出电子电流.研究结果有助于设计合理的中和器磁路和腔体尺寸.