X射线形貌样品厚度的无损测量方法

本文介绍了几种Ｘ射线形貌样品厚度的无损测量方法的原理、技术和应用，可供Ｘ射线衍射形貌工作者根据样品的特殊情况选择使用，或进行多途径的综合测量和核对．     

X射线干涉仪实现扫描探针显微镜样板线间距纳米测量

X射线干涉仪以非常稳定的单晶硅晶格作为长度单位 ,可以实现亚纳米精度的微位移测量。提出了将 X射线干涉仪和扫描隧道显微镜结合起来 ,利用单晶硅的晶格尺度测量扫描探针显微镜样板节距的技术方案 ,并进行了实验研究     

X射线相衬成像

本文介绍了近年来X射线位相衬度成像技术的发展状况,详细论述了X射线干涉相衬、衍射增强相衬,类同轴相衬和数字位相重构等几种典型的成像原理,讨论了影响成像衬度与分辨率的若干因素,并对位相成像的发展趋势作了展望。     

基于X射线衍射的GaN薄膜厚度的精确测量

结合Williamson-Hall plot方法和线型分析方法的优点,提出了一种有效分离有限晶粒尺寸和非均匀应力等X射线衍射展宽效应的方法,可以用于GaN外延层厚度等参数的快速精确测量.用该方法对一系列在蓝宝石衬底上生长的厚度在0.7—4.2μm的GaN外延膜进行了测量,并与椭圆偏振光谱法测量结果进行了比较,结果表明其差别<4%,反应了这种方法的准确性. 关键词： GaN薄膜 厚度测量 X射线衍射     

X射线干涉仪实现扫描控针显微镜样板线间距纳米测量

X射线干涉仪以非常稳定的单晶硅晶格作为长度单位,可以实现亚纳米精度的微位移测量。提出了将X射线干涉仪和扫描隧道显微镜结合起来,利用单晶硅的晶格尺度测量扫描探针显微镜样板节距的技术方案,并进行了实验研究。     

X射线相衬成像

本文介绍了近年来X射线位相衬度成像技术的发展状况，详细论述了X射线干涉相衬、衍射增强相衬，类同轴相衬和数字位相重构等几种典型的成像原理，讨论了影响成像衬度与分辨率的若干因素，并对位相成像的发展趋势作了展望。     

晶体X射线衍射线形状的理论推导

考虑到不同深度的晶面对X射线吸收的差别,导出了X射线衍射线形状的曲线,获得了精确的衍射曲线形状的表达式,讨论了吸收对衍射峰形状的影响．最后还对理论与实验结果进行了比较．     

同步辐射X射线干涉的实验研究

介绍在北京同步辐射装置上进行的国内首次LLL型X射线干涉实验研究,在X光底片上观察到了Moire干涉条纹,为进一步利用X射线干涉技术实现纳米测量打下了初步基础.     

多层光学薄膜周期厚度的双晶X射线掠入射研究

阐述了掠入射Ｘ射线测量薄膜厚度的条件，讨论和分析了掠入射Ｘ射线测量多层薄膜厚度的干涉原理和方法。利用双晶Ｘ射线衍射仪对多层光学薄膜的周期厚度进行了掠入射小角度测量，获得了令人满意的结果，测量值与设计值极好地吻合。     

Advanced phase‐contrast imaging using a grating interferometer

Phase‐sensitive X‐ray imaging methods can provide substantially increased contrast over conventional absorption‐based imaging, and therefore new and otherwise inaccessible information. Differential phase‐contrast (DPC) imaging, which uses a grating interferometer and a phase‐stepping technique, has been integrated into TOMCAT, a beamline dedicated to tomographic microscopy and coherent radiology experiments at the Swiss Light Source. Developments have been made focusing on the fast acquisition and post‐processing of data to enable a high‐throughput of samples, with obvious advantages, also through increasing the efficiency of the detecting system, of helping to reduce radiation dose imparted to the sample. A novel aquarium design allows a vertical rotation axis below the sample with measurements performed in aqueous environment. Optimization of the data acquisition procedure enables a full phase volume (1024 × 1024 pixels × 1000 projections × 9 phase steps, i.e. 9000 projections in total) to be acquired in 20 min (with a pixel size of 7.4 µm), and the subsequent post‐processing has been integrated into the beamline pipeline for sinogram generation. Local DPC tomography allows one to focus with higher magnification on a particular region of interest of a sample without the presence of local tomography reconstruction artifacts. Furthermore, `widefield' imaging is shown for DPC scans for the first time, enabling the field of view of the imaging system to be doubled for samples that are larger than the magnification allows. A case study is illustrated focusing on the visualization of soft tissue features, and particularly the substantia nigra of a rat brain. Darkfield images, based on local X‐ray scattering, can also be extracted from a grating‐based DPC scan: an example of the advantages of darkfield contrast is shown and the potential of darkfield X‐ray tomography is discussed.     

Tilt-insensitive film thickness measurement using a double twin-path interferometer

A lock-in amplifier detection method for measuring the film thickness on a flat substrate has been developed by using a common-path interferometer. The signal due to the film thickness has been obtained without it being affected by the tilting of the substrate. The sensitivity was better than 0.5 nm.     

X射线干涉测量技术的最新进展

结合Ｘ射线干涉的基本特点，介绍了Ｘ射线干涉仪的几种基本形式。阐述了Ｘ射线干涉测量技术在纳米长度测量、小角度测量、ＳＰＭ的定标以及在其它测量领域内的最新进展，并对Ｘ射线干涉测量技术的发展作了展望。     

X‐ray grating interferometer for biomedical imaging applications at Shanghai Synchrotron Radiation Facility

An X‐ray grating interferometer was installed at the BL13W beamline of Shanghai Synchrotron Radiation Facility (SSRF) for biomedical imaging applications. Compared with imaging results from conventional absorption‐based micro‐computed tomography, this set‐up has shown much better soft tissue imaging capability. In particular, using the set‐up, the carotid artery and the carotid vein in a formalin‐fixed mouse can be visualized in situ without contrast agents, paving the way for future applications in cancer angiography studies. The overall results have demonstrated the broad prospects of the existing set‐up for biomedical imaging applications at SSRF.     

白光干涉测量超薄透明电极ITO薄膜的厚度

随着平板显示技术的发展,透明电极ITO膜的厚度越来越薄。为了测试这种极薄的ITO膜,本文通过改进已有的频域分析算法,以便测试膜厚在20~150 nm之间的ITO膜。与现有算法相比,该算法有效改进了各个波长的位相解析精度。实验结果表明,待测透明电极薄膜的厚度为90~104 nm,其结果和标定值一致,证明了该算法能够测量膜厚小于100 nm的透明电极ITO薄膜。     

A simple electronic speckle shearing interferometer

A new speckle shearing interferometer with simple setup is proposed. The interferometer can be converted easily from a speckle referenced speckle pattern interferometer into a speckle shearing interferometer and vice versa. A beamsplitter and a mirror are used to generate the shear. The amount of shear can be adjusted by simply rotating the mirror. The costs involved are low and it is particularly useful for fast inspection in non-destructive testing of structural integrity. Both the theoretical studies of the method of measurement and the experimental results are presented.     

Compact cyclic shearing interferometer: part two

A solid cyclic lateral shearing interferometer to be used with parallel beams of light for testing lenses is described. The interferometer can be modified into a polarization interferometer to be used in OTF measurement. The interferometer is compact and immune to environmental disturbance and less prone to misalignment.     

Continuous wave laser wavelength measurement using the travelling Michelson interferometer

The general design, operating principles, and accuracy limitations of cw laser wavemeters based on the Michelson interferometer are discussed. Device construction and operating practicalities are illustrated by reference to an automatic system built to monitor the wavelength of a Coherent 599-21 single-mode dye laser.     

X‐ray focusing by the system of refractive lens(es) placed inside asymmetric channel‐cut crystals

An X‐ray one‐dimensionally focusing system, a refracting–diffracting lens (RDL), composed of Bragg double‐asymmetric‐reflecting two‐crystal plane parallel plates and a double‐concave cylindrical parabolic lens placed in the gap between the plates is described. It is shown that the focal length of the RDL is equal to the focal distance of the separate lens multiplied by the square of the asymmetry factor. One can obtain RDLs with different focal lengths for certain applications. Using the point‐source function of dynamic diffraction, as well as the Green function in a vacuum with parabolic approximation, an expression for the double‐diffracted beam amplitude for an arbitrary incident wave is presented. Focusing of the plane incident wave and imaging of a point source are studied. The cases of non‐absorptive and absorptive lenses are discussed. The intensity distribution in the focusing plane and on the focusing line, and its dependence on wavelength, deviation from the Bragg angle and magnification is studied. Geometrical optical considerations are also given. RDLs can be applied to focus radiation from both laboratory and synchrotron X‐ray sources, for X‐ray imaging of objects, and for obtaining high‐intensity beams. RDLs can also be applied in X‐ray astronomy.     

Some considerations on a Michelson spatial interferometer in the far IR

The principle of Michelson spatial interferometer and considerations relating to its use in the FIR Astronomy are presented. A model of Michelson interferometer is proposed.