Characteristics of an atmospheric‐pressure radio frequency‐driven Ar/H2 plasma discharge with copper wire in tube

This paper investigates a plasma discharge driven by a 13.56 MHz radio frequency (RF) power supply at atmospheric pressure, in which a copper wire is inserted in the discharge tube for the deposition of Cu films. The results show that the jet plasma formation originates from the discharge between the copper wire and induction coil because of its electrostatic field. The axial distribution of the plasma parameters in the RF plasma jet, namely the gas temperature, excitation temperature, and electron number density, is determined by diatomic molecule OH fitting, Boltzmann slope, and H_β Stark broadening, respectively. The discharge current significantly declines when a small amount of hydrogen is added to the argon as the plasma‐forming gas, and the gas temperature of discharge plasma increases considerably.     

三种电极的大气压氩等离子体射流光学特性

采用铜片-单匝线圈电极、螺旋缠绕电极和双铜片电极3种结构的放电装置,以氩气作为工作气体,在正弦波激励下获得了大气压等离子体射流。利用电学方法测量了放电电流以及电荷量,并对放电脉冲和放电功率进行了研究;利用发射光谱法对射流的等离子体参量进行了空间分辨测量,并根据ArⅠ 763.5 nm和Ar Ⅰ 772.4 nm的光强计算了电子激发温度。结果发现：在外加电压的正负半周期内,电流脉冲的个数和幅值呈现非对称的变化趋势;随着外加电压的增加,3种结构电极的放电功率从1.7 W逐渐增加到6.0 W;在相同的外加电压情况下,电极面积越小,等离子体射流的长度越长;3种等离子体射流的电子激发温度在1 348.5~3 212.1 K之间,并且随着气体流量的增加,各位置的电子激发温度总体上呈下降趋势,而等离子体的电子密度呈上升趋势。实验结果表明：外加电压对放电功率有一定影响;射流长度与电极面积有关;气体流量对电子激发温度和电子密度的空间分布起重要作用。     

Combination of spark discharge and nanoparticle-enhanced laser-induced plasma spectroscopy

A combination of spark discharge and nanoparticle-enhanced laser-induced plasma spectroscopy is investigated. Depositing Au nanoparticles at the surface of a brass target can enhance the coupling of the target and the laser. More atoms in the brass sample are excited. As a secondary excitation source, spark discharge reheats the generated plasma, which further amplifies the enhancement results of nanoparticles. The spectral intensity with the spark discharge increases more obviously with nanoparticle concentration increasing than without the spark discharge. Also, plasma temperature and electron density are calculated by the Boltzmann plot and Stark broadening. The changes in the plasma temperature and electron density are consistent with the spectral emission changes.     

微波瑞利散射法测定空气电火花激波等离子体射流的时变电子密度

大气压空气电火花激波等离子体射流的电子密度在亚微秒时间尺度上瞬变,其电子密度的测定很难.基于微波瑞利散射原理,本文测量了空气电火花冲击波流注放电等离子体射流的时变电子密度.实验结果表明:测量系统的标定参数A为1.04 × 105 V·Ω·m–2;空气流注放电等离子体射流的电子密度与等离子体射流的半径和长度有关,结合高速放电影像展示的等离子体射流的等效半径和等效长度,测定的电子密度在1020 m–3的量级,且随时间先快速增长至峰值再成指数衰减.此外,本文还探讨了等离子体射流的不同等效尺度对测定结果的影响;分析结果表明,采用时变等效半径和时变等效长度的计算结果最有效,且第1个快速波峰是由光电离的电离波导致的.     

Deposition of copper coatings in a magnetron with liquid target

Copper coatings were deposited on monocrystalline Si substrates using a magnetron discharge with a liquid cathode in the metal vapour plasma. During the deposition, the bias voltage in the range from 0 V to–400 V was applied to the substrate. The prepared films were investigated by a scanning electron microscope, and their adhesive properties were studied using a scratch tester. It was demonstrated that the adhesion of the deposited films strongly depends on the bias voltage and varies in a wide range.

     

白碳纳米晶薄膜及其场致电子发射特性

利用微波等离子体化学气相沉积方法,以甲烷、氢混合气体为反应气体,具有钛镀层的玻璃作为衬底,制备了具有sp¹杂化结构的白碳纳米晶薄膜。利用X射线衍射、俄歇电子能谱,以及扫描电子显微镜对薄膜结构进行了表征。以白碳纳米晶薄膜为阴极,以镀有ITO透明导电薄膜玻璃为阳极,采用二极管结构,测试了白碳纳米晶薄膜的场致电子发射特性。开启电场为2.5 V/μm,在电场为5 V/μm时的电流密度为200μA/cm²。对白碳纳米晶薄膜生长机理,以及其场致电子发射机制进行了讨论。     

大气压下绝缘毛细管内等离子体放电及其特性研究

在石英毛细管内利用两个边缘锋利的中空针型电极间的放电形成了63 cm长的大气压弧光等离子体.通过记录放电图片和测量电流-电压特征波形及伏安特性曲线的方法对管内等离子体从反常辉光状态过渡至超长弧光状态的过程做了细致的研究,发现管内等离子体在弧光状态下的电子密度不低于10¹⁴ cm^-3.另外,还进一步考察了两电极的间距和电源工作频率对放电伏安特性的影响以及通过发射光谱法测得的等离子体气体温度随外加电压的变化规律.当活性气体(氧气)按一定比例混合到氩等离子体中时,通过 关键词： 大气压等离子体 反常辉光放电 弧光放电 发射光谱     

High power self-controled volume discharge based molecular lasers

An investigation was made of the characteristics of the formation of a selfcontroled volume discharge for the pumping of CO₂ lasers, i.e. self-sustained volume discharge (SSVD), which involved a preliminary filling of a discharge gap by an electron flux from an auxiliary-discharge plasma. We have found that this method was suitable for large interelectrode gaps, that distortion of the electric field in the gap by the space charge of the electron flux played an important role in the formation of the discharge and that the electrodes could be profiled dynamically during propagation of an electron flux through the discharge gap and a SSVD could form in systems with a strongly inhomogeneous field. High power SSVD based CO₂ laser systems have been created and investigated. Another type of self-controled volume discharge without pre-ionization, i.e. a selfinitiated volume discharge (SIVD), in nonchain HF lasers with SF₆−C₂H₆ mixtures was investigated as well in our review. We have established that, after the primary local electrical breakdown of the discharge gap, the SIVD spreads along the gap in directions perpendicular to that of the electric field by means of the successive formation of overlapping diffuse channels under a discharge voltage close to its quasi-steady state value. It is shown that, as new channels appear, the current flowing through the channels formed earlier decreases. The volume occupied by the SIVD increases with increase in the energy deposited in the plasma and, when the discharge volume is confined by a dielectric surface, the discharge voltage increases simultaneously with increase in the current. The possible mechanisms which explain the observed phenomena, namely the dissociation of SF₆ molecules and electron attachment SF₆ molecules, are examined. A simple analytical model, which makes it possible to describe these mechanisms at a qualitative level, was developed. High power SIVD based HF(DF) lasers have been developed and tested.     

一种新型大气压毛细管介质阻挡放电冷等离子体射流技术

介绍一种结构设计简单、操作运行方便的新型毫米量级大气压冷等离子体射流发生技术.这种射流可以在大气压条件下，利用多种工作气体(如Ar,He,N₂)，通过毛细管介质阻挡放电(DBD)的方式实现.使用频率为33kHz，峰值电压为1—12kV的双向脉冲电源，利用Ar,He,N₂等工作气体，在毛细管内形成了稳定的冷等离子体射流.放电区域的光辐射空间分布利用商用CCD摄像机记录，从中研究放电形态和空间分布，观察到了在DBD区域的流动气体放电和在毛细管出口处形成的等离子体射流 关键词： 冷等离子体射流 毛细管介质阻挡放电 射流射程 射流激发温度     

Temperature and electron density of soil plasma generated by LA-FPDPS

Electron temperature and electron number density are important parameters in the characterization of plasma. In this paper the electron temperature and electron number density of soil plasma generated by laser ablation combined with nanosecond discharge spark at different discharge voltages have been studied. Saha-Boltzmann plot and Stark broadening are used to determine the temperature and electron number density. It is proved that local thermal equilibrium is fulfilled in the nanosecond spark enhanced plasma. The enhanced optical emission, signal to noise ratio and the stability in term of the relative standard deviation of signal intensity at different spark voltages were investigated in detail. A relative stable discharge process was observed with use of a 10 kV discharge voltage under the carried experimental configuration.     

Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

In this paper, an experimental study is presented to characterize a commercially available atmospheric pressure plasma jet (APPJ) kINPen which can be used for local surface modification, e.g. changing the wettability as well as for thin film deposition with silicon-organic and metal-organic precursors to enhance scratch resistance or to lower the gas permeability. Characterization of the jet discharge has been carried out by three methods: (i) measurement of the energy influx from the jet plasma to a substrate by a calorimetric probe, (ii) spatial resolved investigation of the plasma beam by optical emission spectroscopy (OES) and (iii) observation of the plasma jet by video imaging. The deposited SiO _x and AlO _x films were analyzed by XPS measurements.     

空心阴极辉光放电包覆铜纳米粉末

 简要叙述了自悬浮定向流方法制备铜纳米粉末的原理和包覆层薄膜的生长机理，采用空心阴极辉光放电对铜纳米粉末进行有机包覆，实验中CH4和H2的流量分别为6 ml/min和12 ml/min，工作电压为450 V，衬底与空心阴极的底端距离为2 cm，背景真空和工作气压分别为6 Pa和100 Pa，沉积速率为7.5 nm/min。用透射电镜(TEM)对铜纳米粉末进行了观察和分析，结果表明：铜纳米粉末呈球状，其粒径分布在10～100 nm之间, 平均粒径大小为50 nm；其包覆层的厚度大约为15 nm，而且该厚度可以通过调节空心阴极辉光放电的参数来控制。     

同轴电极结构下真空放电等离子体生成及传播特性

采用放电电流为100~300 A、持续时间为13 s的单脉冲电源,设计了两种同轴电极结构作为放电阳极,分别为筒状电极、喷嘴状电极。利用MAXWELL 3D电场仿真软件对两种电极结构下的电场分布进行了仿真分析,并采用探针法对放电生成的等离子体的参数进行了测量,分析讨论了同轴电极结构对真空放电等离子体生成特性的影响。选取喷嘴状电极结构作为阳极,分别测量了采用铅、铝、铜三种材质的阴极时生成的等离子体的扩散速度及能量。实验与仿真结果表明:当阳极为喷嘴状电极时阴极尖端的电场强度较大,测得放电电流较大,击穿电压较低,等离子体密度也较大;采用铝材质阴极时生成的等离子体扩散速度最快,采用铅材质阴极时生成的等离子体的离子动能最大。     

Characterization of a spark discharge for dust cloud ignition

Spark discharges are widely used to ignite flammable gases, liquids, or dust. For a better understanding of the interaction between the spark discharge and the ignited media (gas, liquid, or dust), it is necessary to measure some key parameters of the spark, especially the space‐time variation of its temperature. Determination of temperature gradients would allow a more precise and realistic simulation of the ignition process. In fact, electrons and particles in the discharge zone get their energy with increasing temperature before interacting with particles of the media to ignite the flame. In this study, optical emission spectroscopy of the spark discharge between two tungsten electrodes was performed. Assuming excitation balance between the WI lines, a Boltzmann plot after an Abel inversion gives the excitation temperature and its space‐time variation. For a 100‐μs time discharge, at 80‐μs delay, we measured 7,000 K at the centre of the column zone, 4,100 K at the centre of the cathode zone, and 3,600 K at the centre of the anode zone. Assuming a singly ionized tungsten plasma and excitation equilibrium, we used also the Saha–Boltzmann equation to calculate the plasma composition. The electron density at the column zone was about 3 × 10¹⁷ cm^?3, which is two orders of magnitude higher than in the rest of the spark.     

亚大气压六相交流电弧等离子体射流特性研究:实验测量

以临近空间高超声速飞行器以及航天器再入大气环境飞行过程"黑障"问题的研究为背景,进行了多相交流电弧放电实验装置的物理设计,建立了六相交流电弧等离子体实验平台(MPX-2015),在背景压力为500 Pa的亚大气压条件下获得了最大直径和长度分别达到14.0 cm和60.0 cm的等离子体射流.研究了工作气体流量、真空腔压强、电极间距以及弧电流等因素对等离子体自由射流和冲击射流特性的影响规律.结果表明:在实验参数范围内,真空腔压强对等离子体的射流特性影响最为显著,等离子体自由射流的长度和直径以及冲击钝体条件下的鞘套有效工作长度和厚度均随着压强的降低而增大;提高沿电极环缝注入的工作气体流量或弧电流亦有利于等离子体鞘套尺寸的增加.上述工作有助于进一步开展临近空间飞行器与其周围复杂介质环境间复杂的气动热效应和"黑障"问题的研究.     

放电参数对爆燃模式下同轴枪强流脉冲放电等离子体的影响

同轴枪强流脉冲放电常见有爆燃模式和预填充模式两种放电模式,爆燃模式放电可以得到杂质少、准直性高、输运速度更快的等离子体射流.本实验主要对不同电压及进气量下同轴枪强流脉冲爆燃模式放电的等离子体特性进行了研究.结果表明,在相同放电电压下,进气量少时会有多团等离子体从枪口喷出.随着进气量的增加,同轴枪放电产生的等离子体密度增加,输运速度减小,最终等离子体只有一团从枪口喷出;而在相同进气量下,随着电压的增加,等离子体密度增加,输运速度增大,开始出现有多团等离子体从枪口喷出的现象.产生该现象的原因主要是在放电过程中,当气体持续进入枪底部时,同轴枪底部会产生新的电流通道向前运动,使得在同轴枪出口处观察到了多团等离子体喷出的现象;随着放电电压的增加,在放电过程中回路电流也增加.当电流增加到一定程度时,同轴枪底部就会产生新的电流通道,从而有多个等离子体团从枪口喷出.通过改变充电电容以及对磁探针信号的分析,进一步分析并验证了同轴枪底端多次放电的现象.     

ECR-PECVD制备SiO2薄膜中衬底射频偏压的作用

采用微波电子回旋共振等离子体增强化学气相沉积（ECR－PECVD）技术在单晶衬底上制备了SiO2薄膜,研究了射频偏压对薄膜特性的影响。通过X射线光电子能谱（XPS）、傅里叶变换红外线光谱（FTIR）、原子力显镜（AFM）和扫描隧道显微镜（STM）三维形貌图测量等手段,对成膜特性进行了分析。实验结果表明,通过改变射频偏压的参数来控制离子轰击能量,对ECR－PECVD成膜的内应力、溅射现象、微观结构和化学计量均有明显的影响。     

Characterization of sliding spark plasma source for direct trace spectronalysis

The sliding spark plasma – which is produced via ablation of a dielectric material enforced between a pair of electrodes by a pulsed high-voltage discharge propagating along the dielectric surface – has immense potential as a simple but novel spectroscopic source for direct in situ quantitative analysis of non-conducting samples, a ubiquitous theme in material characterization. The plasma-excited optical spectrum spans a broad spectral range Vacuum Ultra Violet-Near Infra Red (VUV-NIR) and carries the atomic and molecular signatures of the base matrix chemical composition. Since the analytical figures of merit for quantitative spectroanalysis are a function of the spark source and dielectric matrix ablation characteristics, we systematically studied the sliding spark plasma source, utilizing a charge-coupled device spectrometer with blazed holographic grating in order to find the combination of parameters that can tailor the source for trace spectroanalysis of dielectrics in air and atmospheric pressure. It was observed that in the UV–vis spectral range a unique set of sample matrix conditions, besides spark source parameters, exists for enhanced trace analyte spectral emission with low signal-to-noise ratios and where trace spectrochemical analysis of dielectrics depends multivariately on spark scan frequency, electrode geometry, plasma discharge current, spark source inductance, initial rate of applied voltage, mode of sample ablation, and specific capacitance of the dielectric surface.     

大气压氩气射流等离子体的光谱特性研究

等离子体喷枪是一种重要的等离子体源,已成为近几年低温等离子体研究的一个重要课题。本文利用钨针-钨丝网电极制作了直流喷枪装置,在大气压空气中产生了稳定的等离子体羽,并采用发射光谱的方法,对等离子体羽的等离子体参数进行了研究。在钨针电极与钨丝网电极之间放出耀眼的白光,钨丝网电极出口的气流下游有火苗形状的等离子体羽喷出。在电压保持不变的条件下(13.5 kV),等离子体羽长度随气体流量增加而增大;在气体流量保持不变的条件下(10 L·min-1),羽长度随外加电压的增大而增大。在气体流量一定的条件下,放电电压和放电电流呈反比例关系,即电压随着电流的增大而减小,说明放电属于辉光放电。采集了该喷枪在300～800 nm范围内的放电发射光谱,通过玻尔兹曼方法对放电等离子体电子激发温度进行了测量。结果表明,电子的激发温度随外加电压的增大而降低,随着工作气体流量的减小而升高。利用放电的基本理论对上述现象做了解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

Research of microstructural characteristics on nanocrystalline diamond by microwave plasma CVD

In this study, the nanocrystalline diamond (NCD) films were carried out by microwave plasma chemical vapor deposition (CVD) with CH₄/Ar/H₂ gas concoction on Si substrate at moderate temperatures. The characteristics of NCD films were evaluated using scanning electron microscopy, Raman spectroscopy, transmission electron microscopy, optical emission spectroscopy and optical contact angle meter. The analytical results revealed that C₂ radial was the dominant species in the deposited process. From TEM observation, the NCD films were formed via the etching of hydrocarbons and a small amount of H₂ content additive into gas mixture has improved the aggregation of the nucleation film to form the NCD films. The more hydrophobic surfaces imply that NCD films are the potential biomaterial in the application of article heart valve or stent.