气体放电阴极鞘层氩离子的自洽蒙特卡罗模拟

建立了气体放电阴极鞘层离子的自洽蒙特卡罗模拟模型,考虑了离子与中性原子的电荷交换碰撞和弹性散射,用到了精确依赖于离子能量的电荷交换和动量输运截面。模拟了氩离子在阴极鞘层中的运动,得到了不同气压下自治电场分布,离子的能量分布和角分布,发现:离子由鞘层边界向阴极运动过程中,离子能量分布的高能部分逐渐增大,角分布向小角度部分压缩,鞘层中的强电场加速和聚焦了离子;在鞘层边界附近的电场呈非线性。     

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采用蒙特卡罗模型对氮空心阴极放电等离子体鞘层离子(N2 、N )的输运过程进行了模拟研究,计算了阴极鞘层中氮离子(N2 、N )的能量及角分布的空间变化和粒子密度及平均能量随放电参数的变化规律。研究结果表明:空心阴极放电产生的氮离子,在鞘层输运过程中,N2 是密度几乎不变的低能粒子;N 是密度逐渐减少的高能粒子。随着电压增加,N 密度减小,平均能量增加;N2 密度和平均能量变化不明显。能量及入射角的相对分布规律与平板电极氮直流辉光放电基本类似,但圆筒空心阴极放电更有利于氮离子的产生。     

ECR微波等离子体离子输运的数值模拟

建立了ECR微波等离子体源离子输运的平板和圆柱模型,对离子历经的空间区域的输运过程进行了数值研究。采用Monte Carlo(M-C)方法模拟了存在外磁场情况下,离子离开开放电室后历经中性区、鞘层区、最后被加负偏压的工作表面吸收的全过程,考虑了离子与中性粒子的电荷交换碰撞玫弱性散性,统一处理了中性区和鞘层区电势的衔接,采用曲线拟合,电势自洽迭代方法把中性区和鞘层区衔接起来,得到了光滑自治的电势分布曲线和鞘层区不同位置处的速度分布、能量分布及角分布。     

氮气辉光放电阴极鞘层重粒子输运过程研究

采用蒙特卡罗模拟对氮气辉光放电等离子体阴极鞘层内离子(N₂⁺,N⁺)和快中性分子(N_2f)的输运过程进行了研究,计算了阴极鞘层中离子(N₂⁺,N⁺)和快中性分子的能量及角分布的空间变化,较好地解释了实验结果.得到了氮气辉光放电等离子体阴极附近主要存在着能量较低的荷能分子、密度较低的高能原子离子及密度和能量居中的分子离子.诸粒子状态随放电条件而变化.模拟结 关键词：     

等离了体源离子注入球靶的蒙特—卡罗模拟

建立了在球形靶鞘层中蒙特－卡罗模拟模型，考虑了离子与中性粒子的电荷交换碰撞和弹性散射，以及精确依赖于入射离子能量的电荷交换碰撞截面和动量输运截面。模拟了不同气压下，在鞘层扩展过程中，氮离子Ｎ＾＋２到达靶表面的能量分布和入射分布，研究了它们的变化规律。     

等离子体源离子注入球形靶的蒙特-卡罗模拟

建立了在球形靶鞘层中离子的蒙特-卡罗模拟模型,考虑了离子与中性粒子的电荷交换碰撞和弹性散射,以及精确依赖于入射离子能量的电荷交换碰撞截面和动量输运截面。模拟了不同气压下,在鞘层扩展过程中,氮离子N_2~+到达靶表面的能量分布和入射角分布,研究了它们的变化规律。     

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基于OOPIC软件,对平面直流磁控溅射放电等离子体进行了二维自洽粒子模拟,重点研究了磁场、阴极电势和气压等工作参数对磁控放电特性的影响。模拟发现,在一定的工作参数范围内,随着磁场的增强,鞘层厚度变窄,鞘层电势降减小,阴极离子密度增大,但是分布变窄;随着阴极电势的增加,鞘层厚度稍微变窄,鞘层电势降增大,阴极离子密度增大,分布变宽;随着气压的升高,鞘层厚度基本不变,鞘层电势降会增大,阴极离子密度先增大后减小,分布略微变宽。     

圆柱模型下电子回旋共振微波等离子体离子输运过程的数值研究

在圆柱模型下，采用Ｍｏｎｔｅ Ｃａｒｌｏ方法模拟了电子回旋共振（ＥＣＲ）微波等离子体源中离子离开放电室后历经中性区、鞘层区以及工件表面二次电子发射形成的虚拟阴极“屏蔽区”，最后被加负偏压的工件表面吸收的全过程．研究了鞘层边界处的衔接问题，得到了光滑自洽的电势分布曲线及工件表面离子的能量分布和角分布，同时讨论了磁场、气压以及二次电子发射对鞘势的影响． 关键词：     

衬底偏压对ECR等离子体鞘层和离子行为的影响

介绍了电子回旋共振微波放电等离子体中离子向衬底输运的蒙特卡罗模型,该模型考虑了精确依赖于离子能量的电荷交换和动量转移截面以及中性区与鞘层的衔接。     

碰撞效应对入射到射频偏压电极上离子能量分布和角度分布的影响

考虑了离子与中性粒子的弹性碰撞和电荷交换碰撞效应,建立了一套描述射频等离子体鞘层动力学特性的自洽模型,并利用MonteCarlo模拟方法研究了入射到电极上的离子的能量分布和角度分布.数值结果表明:随着放电气压增加,入射到电极上离子的能量分布逐渐地由双峰分布变成单峰分布,而且低能离子的数目也逐渐地增加.入射到电极上的离子呈小角分布,而且放电气压等参数对角度分布的影响不是太明显. 关键词： 射频放电 等离子体 离子 鞘层     

蒙特卡罗模拟在辉光放电鞘层离子输运研究中的应用

利用蒙特卡罗方法模拟氩气直流辉光放电鞘层内离子的运动过程.模拟基于离子与中性原子的电荷转移和弹性散射两种主要的散射过程，考虑了碰撞截面与能量相关和不相关两种情况，在弹性散射中采用了势场相互作用模型和刚性球碰撞两种模型.通过模拟得到不同气压和不同放电电压下离子入射阴极的能量分布和角度分布，并对几种模型的模拟结果进行了比较和讨论. 关键词： 辉光放电 等离子体鞘层 蒙特卡罗模拟     

ECR微波放电氩离子输运过程的研究

建立了电子回旋共振（ＥＣＲ）微波放电等离子体中离子输运过程的蒙特卡罗模型，考虑了离子与中性原子的电荷交换碰撞和弹性碰撞，以及精确依赖于离子能量的电荷交换和动量转移截面，模拟了源于氩气ＥＣＲ微波放电的氩离子向衬底输运的过程，得到与实验报道相符的模拟结果。     

On the energy spectra of secondary ions emitted from silicon and graphite single crystals

Secondary ion emission from silicon and graphite single crystals bombarded by argon ions with energies E ₀ varied from 1 to 10 keV at various angles of incidence α has been studied. The evolution of the energy spectra of C⁺ and Si⁺ secondary ions has been traced in which the positions of maxima (E _max) shift toward higher secondary-ion energies E ₁ with increasing polar emission angle θ (measured from the normal to the sample surface). The opposite trend has been observed for ions emitted from single crystals heated to several hundred degrees Centigrade; the E _max values initially remain unchanged and then shift toward lower energies E ₁ with increasing angle θ. It is established that the magnitude and position of a peak in the energy spectrum of secondary C⁺ ions is virtually independent of E ₀, angle α, and the surface relief of the sample (in the E ₀ and α intervals studied). Unusual oscillating energy distributions are discussed, which have been observed for secondary ions emitted from silicon (111) and layered graphite (0001) faces. Numerical simulations of secondary ion sputtering and charge exchange have been performed. A comparison of the measured and calculated data for graphite crystals has shown that C⁺ ions are formed as a result of charge exchange between secondary ions and bombarding Ar⁺ ions, which takes place both outside and inside the target. This substantially differs from the ion sputtering process in metals and must be taken into account when analyzing secondary ion emission mechanisms and in practical applications of secondary-ion mass spectrometry.     

Formation of the charge and energy distributions of heavy ions in a material in the diffusion model

We investigate the formation of the charge and energy distributions of ions that slow down and randomly change their charges in collisions with particles of the medium. We study the influence that the spread of ions in charge has on the shape of the Bragg curve. The suggested diffusion approximation for the kinetic equation of heavy ions allows the parameters of the ion charge and energy distributions to be easily determined in the entire ion path. The parameters of the ion charge distribution are shown to be related to the ionization-recombination cross sections. The ion distributions calculated in the suggested analytical model are compared with the results of numerical calculations. We have obtained good agreement between the analytical, numerical, and experimental results.     

Spektroskopische Untersuchung unelastischer Stöße zwischen Ionen oder metastabilen Atomen der Edelgase und Alkalimetallatomen bei thermischen Stoßenergien

The present work deals with the spectroscopic investigation of Penning ionization and nonresonant charge exchange due to thermal-energy collisions of metastable atoms or ions of the inert gases He, Ne with atoms of alkali metals K, Rb, Cs in a low temperature plasma of the corresponding binary mixtures. The rate constants of these reactions and partial rate constants of exciting several alkali metal ion levels were determined by the kinetics of the decay of ionized and excited particles in the afterglow of a pulsed discharge. Measured Penning and charge exchange constants are in order of 10^10-9 cm³ sec^?1. Partial Penning constants in the He? Cs system exhibit a small dependence of the energy defect of reaction, whereby an important part of collisions results in excited Cs⁺-states. On the contrary, energy transfer by charge exchange in He? Rb, Cs systems distinguishes by a significant energy defect dependence. Charge exchange from He⁺ to Rb₀ leads above all to He(2³S₁)-atoms and normal Rb⁺-ions. It follows from the metal ion spectrums, that Penning ionization and charge exchange of the investigated systems under utilized conditions represent as processes of selective excitation of alkali metal ions in afterglow and stationary discharge.     

Distributions of ions in a cluster plasma created by a laser pulse

Energy and charge distributions of ions are calculated for a cluster beam irradiated by a high-power ultrashort laser pulse. It is shown that the self-consistent field of a cluster ionized by the laser beam strongly affects the characteristics of the ion distributions obtained after the cluster explodes. The mean concentration of atoms bound into clusters in a beam, the cluster size distribution, and the focal-spot diameter are found to have a weak effect on both energy and charge distributions of the ions, whereas the energy spectrum of the produced ions is determined by the mean cluster size.     

Evidence of post field ionization and observation of novel features in the energy distribution of field evaporated ions

Ion energy distributions in low temperature field evaporation obtained by pulsed-laser time-of-flight atom-probe, in general, show a FWHM of the spatial zone of ion formation to be 0.3–0.5 Å; post field ionization is not responsible for the ion formation. However, when ions of two or more charge states coexist a low energy tail can be found for the higher charge state ions, similar to those found for gas ions in field ionization. This tail can extend as far as 10 Å above the surface. Ions in the tail can only be produced by post field ionization. Double peak structures are found in the energy distributions of some ion species such as Mo²⁺; the origin of which is not yet understood. At a constant rate of field evaporation, as the field is gradually reduced by continued field evaporation and the laser power density appropriately increased, the charge states shift to the lower ones. For Mo, however, Mo²⁺₂ ions are formed before Mo⁺ ions can be detected. The narrowness of the energy distributions shows that they are stable. This finding has an important implication to the study of the stability or Coulomb explosion of multiple charged cluster ions, and also the theory of field evaporation. Under intense laser irradiation, higher charge state ions can reappear and a large fraction of ions may have an excess energy of a few hundred eV. These may be produced by multiphoton ionization and also by interaction with the over-heated electrons in laser-solid interactions.