首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 46 毫秒
1.
Gd2O3-doped CeO2 (Gd0.1Ce0.9O1.95, GDC) thin films were synthesized on (1 0 0) Si single crystal substrates by a reactive radio frequency magnetron sputtering technique. Structures and surface morphologies were characterized by X-ray diffraction (XRD), Atomic Force Microscopy (AFM) and one-dimensional power spectral density (1DPSD) analysis. The XRD patterns indicated that, in the temperature range of 200–700 °C, f.c.c. structured GDC thin films were formed with growth orientations varying with temperature—random growth at 200 °C, (2 2 0) textures at 300–600 °C and (1 1 1) texture at 700 °C. GDC film synthesized at 200 °C had the smoothest surface with roughness of Rrms=0.973 nm. Its 1DPSD plot was characterized with a constant part at the low frequencies and a part at the high frequencies that could be fitted by the f−2.4 power law decay. Such surface feature and scaling behavior were probably caused by the high deposition rate and random growth in the GDC film at this temperature. At higher temperatures (300–700 °C), however, an intermediate frequency slope (−γ2≈−2) appeared in the 1DPSD plots between the low frequency constant part and the high frequency part fitted by f−4 power law decay, which indicated a roughing mechanism dominated by crystallographic orientation growth that caused much rougher surfaces in GDC films (Rrms>4 nm).  相似文献   

2.
Bi3.15Nd0.85Ti2.8-xZr0.2MnxO12 (BNTZM) thin films with various Mn content (x = 0, 0.005, 0.01, 0.03, and 0.05) have been prepared on Pt/Ti/SiO2/Si (100) substrates by a chemical solution deposition (CSD) technique. The crystal structures of BNTZM thin film have been analyzed by X-ray diffraction (XRD). The dependence of Mn contents on the ferroelectric, dielectric properties, and leakage current of these BNTZM films have been thoroughly investigated. The XRD analysis demonstrated that all the BNTZM thin films were of typical bismuth-layer-structured ferroelectrics (BLSF) polycrystalline structure and exhibited a highly preferred (117) orientation. Among these BNTZM films, the BNTZM thin film with Mn content equal to 0.01 exhibits the maximum remnant polarization (2Pr) of 48μC/cm2 and a low coercive field (2Ec) of 177 kV/cm. In addition, the BNTZM thin film with x = 0.01 (Mn) showed a fatigue-free behavior up to 1 × 1010 read/write cycles.  相似文献   

3.
Undoped and Pd-doped titanium oxide thin films (0.5 wt.%) were prepared by the sol-gel technique (dip-coating) on glass and silicon substrates. The as-deposited thin films were compacted by subjecting them to different annealing temperatures (300 °C, 500 °C). The dependences of the electrical conductivity vs. inverse temperature were investigated in air and in vacuum. A study of the effects of Pd-doping, annealing temperature and ambient conditions on their electrical properties was performed. The sensing behavior of titanium oxide thin films exposed to some reducing gases (methane, acetone, ethanol, formaldehyde and liquefied petroleum gas) was carried out, by means of electrical conductivity measurements. All the studied films are most sensitive to formaldehyde, with a special remark for the Pd-doped ones deposited on silicon substrates.  相似文献   

4.
Thin films of LiCoO2 were prepared by pulsed laser deposition technique and the properties were studied in relation to the deposition parameters. The films deposited from a sintered composite target (LiCoO2+Li2O) in an oxygen partial pressure of 100 mTorr and at a substrate temperature of 300 °C exhibited preferred c-axis (0 0 3) orientation perpendicular to the substrate surface. The AFM data demonstrated that the films are composed of uniform distribution of fine grains with an average grain size of 80 nm. The grain size increased with an increase in substrate temperature. The (0 0 3) orientation decreased with increase in (1 0 4) orientation for the films deposited at higher substrate temperatures (>500 °C) indicating that the films’ growth is parallel to the substrate surface. The composition of the experimental films was analyzed using X-ray photoelectron spectroscopy (XPS). The binding energy peaks of Co(2p3/2) and Co(2p1/2) are, respectively, observed at 779.3 and 794.4 eV, which can be attributed to the Co3+ bonding state of LiCoO2. The electrochemical measurements were carried out on Li//LiCoO2 cells with a lithium metal foil as anode and LiCoO2 film as cathode of 1.5 cm2 active area using a Teflon home-made cell hardware. The Li//LiCoO2 cells were tested in the potential range 2.6-4.2 V. Specific capacity as high as 205 mC/cm2 μm was measured for the film grown at 700 °C. The growth of LiCoO2 films were studied in relation to the deposition parameters for their effective utilization as cathode materials in solid-state microbattery application.  相似文献   

5.
The effects of deposition rate on the microstructure and thermoelectric (TE) properties of Ca3Co4O9 thin films fabricated by pulsed laser deposition (PLD) technique were investigated. X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HR-TEM) revealed that a fast deposition rate resulted in not only low crystallinity but also the existence of the CaxCoO2 secondary phase. Formation of CaxCoO2 was inevitable during the thin film growth, and this was discussed from both structural and compositional point of view. With longer deposition interval or with sufficient oxygen at a lower deposition rate, the CaxCoO2 phase was able to transit into the desired Ca3Co4O9 phase during the coalescence process. The quality of the thin films was further analyzed by electrical properties measurements. The Ca3Co4O9 thin film fabricated at a slower deposition rate was found to exhibit a low electrical resistivity of 9.4 mΩ cm and high Seebeck coefficient of 240 μV/K at about 700 °C, indicating a good quality film.  相似文献   

6.
Ta2O5, Ta-Nb-O, Zr-Al-Nb-O, and Zr-Al-O mixture films or solid solutions were grown on Si(1 0 0) substrates at 300 °C by atomic layer deposition. The equivalent oxide thickness of Ta2O5 based capacitors was between 1 and 3 nm. In Zr-Al-O films, the high permittivity of ZrO2 was combined with high resistivity of Al2O3 layers. The permittivity, surface roughness and interface charge density increased with the Zr content and the equivalent oxide thickness was between 2.0 and 2.5 nm. In the Zr-Al-Nb-O films the equivalent oxide thickness remained at 1.8-2.0 nm.  相似文献   

7.
Colorless and transparent Na3VO2B6O11 (NVB) crystal has been grown by the top seeded solution growth method using NaVO3 as the flux at cooling rates of 0.8–1.5 °C/day, in the temperature range 610–650 °C. A well-developed morphology of the crystals was observed and analyzed. The grown crystals were characterized by powder X-ray diffraction (PXRD), infrared spectroscopy and second harmonic generation (SHG) test.  相似文献   

8.
T. Serin  N. Serin  H. Sar?  O. Pakma 《Journal of Non》2006,352(3):209-215
This study investigated the effect of the substrate temperature on the structural, optical, morphological, and electrical properties of undoped SnO2 films prepared by a spray deposition method. The films were deposited at various substrate temperatures ranging from 300-500 °C in steps of 50 °C and characterized by different optical and structural techniques. X-ray diffraction studies showed that the crystallite size and preferential growth directions of the films were dependent on the substrate temperature. These studies also indicated that the films were amorphous at 300 °C and polycrystalline at the other substrate temperatures used. Infrared and visible spectroscopic studies revealed that a strong vibration band, characteristic of the SnO2 stretching mode, was present around 630 cm−1 and that the optical transmittance in the visible region varied over the range 75-95% with substrate temperature, respectively. The films deposited at 400 °C exhibited the highest electrical conductivity property.  相似文献   

9.
Tin oxide (SnO2) thin films were deposited on UV fused silica (UVFS) substrates using filtered vacuum arc deposition (FVAD). During deposition, the substrates were at room temperature (RT). As-deposited films were annealed at 400 and 600 °C in Ar for 30 min. The film structure, composition, and surface morphology were determined as function of the annealing temperature using X-ray diffraction (XRD), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). The XRD patterns of the SnO2 thin films deposited on substrates at RT indicated that the films were amorphous, however, after the annealing the film structure became polycrystalline. The grain size of the annealed films, obtained from the XRD analysis, increased with the annealing temperature, and it was in the range 8-34 nm. The AFM analysis of the surface revealed an increase in the film surface average grain size from 15 nm to 46 nm, and the surface roughness from 0.2 to 1.8 nm, as function of the annealing temperature. The average optical transmission of the films in the visible spectrum was >80%, and increased by the annealing ∼10%. The films’ optical constants in the 250-989 nm wavelength range were determined by variable angle spectroscopic ellipsometry (VASE). The refractive indexes of as-deposited and annealed films were in the range 1.83-2.23 and 1.85-2.3, respectively. The extinction coefficients, k(λ), of as-deposited and annealed films were in the range same range ∼0-0.5. The optical energy band gap (Eg), as determined by the dependence of the absorption coefficient on the photon energy at short wavelengths, increased with the annealing temperature from 3.90 to 4.35 eV. The lowest electrical resistivity of the as-deposited tin oxide films was 7.8 × 10−3 Ω cm, however, film annealing resulted in highly resistive films.  相似文献   

10.
Lihua Jiang  Xiao Zhang 《Journal of Non》2011,357(10):2187-2191
The effects of the annealing temperature on photoluminescence (PL) of non-stoichiometric silicon nitride (SiNx) thin films deposited by plasma enhanced chemical vapor deposition (PECVD) using ammonia and silane mixtures at 200 °C were investigated. The optical property and the chemical composition of the films annealed at different temperatures were investigated by PL spectroscopy and Fourier transform infrared absorption spectroscopy (FTIR), respectively. Based on the PL results and the analyses of the bonding configurations of the films, the light emission is attributed to the quantum confinement effect of the carriers inside silicon nanoparticles and radiative defect-related states. These results provide a better understanding of optical properties of silicon nanoparticles embedded in silicon nitride films and are useful for the application of nanosize silicon semiconductor material.  相似文献   

11.
B. Ko?cielska 《Journal of Non》2008,354(14):1549-1552
The studies of electrical conductivity of NbN-SiO2 films are reported. To obtain these films, sol-gel derived xNb2O5-(100 − x)SiO2 (where x = 100, 90, 80, 70, 60, 50 mol%) coatings were nitrided at 1200 °C. The nitridation process leads to the formation of some disordered structures, with NbN metallic grains dispersed in insulating SiO2 matrix. The structure of the samples was studied using X-ray diffraction (XRD) and atomic force microscopy (AFM). The electrical conductivity was measured with the conventional four-terminal method in the temperature range from 5 to 280 K. The superconducting transition was not observed even for the sample that does not contain silica. All the samples exhibit negative temperature coefficient of resistivity. The results of conductivity versus temperature may be described on the grounds of a model proposed for a weakly disordered system.  相似文献   

12.
We report the deposition of thin titanium dioxide films on Si(1 0 0) and silica glass at low temperatures between 200 and 350 °C by a technique of ultraviolet-assisted injection liquid source chemical vapor deposition (UVILS-CVD) with 222 nm radiation. The composition and optical properties of the films deposited have been studied using a variety of standard characterisation methods. A strong absorption peak around 438 cm−1, corresponding to Ti-O stretching vibration, was observed by Fourier transform infrared spectroscopy for different deposition temperatures. Nanostructured films on Si wafers were observed by atomic force microscopy while X-ray diffraction results showed that crystalline TiO2 layers could be formed at deposition temperatures as low as 210 °C. The deposition kinetics and influence of the substrate temperature on the film are discussed. The activation energy for this photo-CVD process at temperatures between 200 and 350 °C was found to be 0.435 eV. This is much lower than the value (Ea=5.64 eV) obtained by conventional thermal CVD. The thicknesses of the films grown, from several nanometers to micrometers can be accurately controlled by changing the number of drops introduced by the injection liquid source. Under optimum deposition conditions, refractive index values as high as 2.5 and optical transmittance of between 85% and 90% in the visible region of the spectrum can be obtained.  相似文献   

13.
SnO2 films have been deposited on Y-stabilized ZrO2 (YSZ) (1 0 0) substrates at different substrate temperatures (500–800 °C) by metalorganic chemical vapor deposition (MOCVD). Structural, electrical and optical properties of the films have been investigated. The films deposited at 500 and 600 °C are epitaxial SnO2 films with orthorhombic columbite structure, and the HRTEM analysis shows a clear epitaxial relationship of columbite SnO2(1 0 0)||YSZ(1 0 0). The films deposited at 700 and 800 °C have mixed-phase structures of rutile and columbite SnO2. The carrier concentration of the films is in the range from 1.15×1019 to 2.68×1019 cm−3, and the resistivity is from 2.48×10−2 to 1.16×10−2 Ω cm. The absolute average transmittance of the films in the visible range exceeds 90%. The band gap of the obtained SnO2 films is about 3.75–3.87 eV.  相似文献   

14.
Radiation-induced defects generated by successive gamma irradiation have been investigated in V2O5-doped phosphate glasses of three basic compositions, namely, sodium metaphosphate, lead metaphosphate and zinc metaphosphate. Glasses were prepared from chemically pure materials. Melting was carried at 900°-1100 °C for 1 h and with several stirrings of the melt to achieve homogeneity. The glassy samples were annealed at 200°-250 °C and left to cool to room temperature at a rate of 20 °C/h. Polished samples from undoped and V-doped samples of equal thickness. ~ 2 mm were measured in a double beam UV-visible spectrophotometer at 200-1000 nm before and after gamma irradiation. Induced defects were analyzed for these three phosphate glass systems. Infrared absorption spectra were measured for the prepared undoped and V-doped samples by the KBr technique before irradiation and after being subjected to a high dose of 7 M Rads (7 × 104 Gy). The cumulative effects of gamma irradiation on the UV-visible spectra are correlated with the intrinsic and extrinsic defects within the various three glasses. Some shielding behavior for the various glasses towards successive gamma irradiation are observed and realized in relation to the different partner anions studied. The effect of gamma irradiation on IR spectra indicates the persistence of the main characteristic bands due to phosphate network and the minor changes are correlated with the possible changes in the bond lengths and/or bond angles of the building units during the irradiation process. The effect of V2O5 on the IR spectra is correlated with the depolymerization effect of the glass network.  相似文献   

15.
Epitaxial (La0.07Sr0.93)SnO3 [LSSO] films were deposited on CaF2 substrates by pulse laser deposition. The (1 0 0)c orientation of LSSO films was observed only on (1 1 0)CaF2, whereas (1 1 0)c orientation was found on (1 1 1)CaF2 and (1 0 0)CaF2. (0 0 1) polar axis oriented tetragonal Pb(Zr0.35Ti0.65)O3 films were grown on the fabricated (1 0 0)cLSSO∥(1 1 0)CaF2 by pulsed metal organic chemical vapor deposition. The (0 0 1)Pb(Zr0.35Ti0.65)O3∥(1 0 0)cLSSO∥(1 1 0)CaF2 stack structure exhibited about 70% transparency with an adsorption edge of approximately 330 nm.  相似文献   

16.
17.
The sol-gel route has been applied to obtain ZnO-TiO2 thin films. For comparison, pure TiO2 and ZnO films are also prepared from the corresponding solutions. The films are deposited by a spin-coated method on silicon and glass substrates. Their structural and vibrational properties have been studied as a function of the annealing temperatures (400-750 °C). Pure ZnO films crystallize in a wurtzite modification at a relatively low temperature of 400 °C, whereas the mixed oxide films show predominantly amorphous structure at this temperature. XRD analysis shows that by increasing the annealing temperatures, the sol-gel Zn/Ti oxide films reveal a certain degree of crystallization and their structures are found to be mixtures of wurtzite ZnO, Zn2TiO4, anatase TiO2 and amorphous fraction. The XRD analysis presumes that Zn2TiO4 becomes a favored phase at the highest annealing temperature of 750 °C. The obtained thin films are uniform with no visual defects. The optical properties of ZnO-TiO2 films have been compared with those of single component films (ZnO and TiO2). The mixed oxide films present a high transparency with a slight decrease by increasing the annealing temperature.  相似文献   

18.
Epitaxial thin films of TmFeCuO4 with a two-dimensional triangular lattice structure were successfully grown on yttria-stabilized-zirconia substrates by pulsed laser deposition and ex situ annealing in air. The films as-deposited below 500 °C showed no TmFeCuO4 phase and the subsequent annealing resulted in the decomposition of film components. On the other hand, as-grown films deposited at 800 °C showed an amorphous nature. Thermal annealing converted the amorphous films into highly (0 0 1)-oriented epitaxial films. The results of scanning electron microscopic analysis suggest that the crystal growth process during thermal annealing is dominated by the regrowth of non-uniformly shaped islands to the distinct uniform islands of hexagonal base.  相似文献   

19.
The Fe2O3/Ag core-shell composite nanoparticles were successfully prepared via a simple method at low temperature. X-ray diffraction data revealed the formation of core-shell composite nanoparticles, with Fe2O3 as the core and silver as the shell. The results from the transmission electron microscopy and scan electron microscopy further indicated that the composite nanoparticles were spherical with a core diameter and shell thickness of 26.0 nm and 13.5 nm, respectively. Magnetic measurements showed that the composite nanoparticles exhibited a typical ferromagnetic behavior, a specific saturation magnetization of 0.95 emu/g and an intrinsic coercivity of 104.0 Oe at room temperature. For a standard two-probe analysis at room temperature, the composite nanoparticles showed a typical conductive behavior and its conductivity was about 3.41 S/m. Moreover, this present synthesis method of Fe2O3/Ag core-shell composite nanoparticles shows an easy processing and does not need high-temperature calcining to attain the final product, which can be applied in a variety of areas, including catalysis, medicine, photonics, and new functional device assemblies.  相似文献   

20.
The nanostructured 6CaO·6SrO·7Al2O3 (C6S6A7) thin films with cubic structure using calcium, strontium metals, aluminium isopropoxide and ethylene glycol monomethyl ether as stating materials has been fabricated via sol-gel route. Based on hydrolysis of Ca2+, Sr2+ and Al3+ in the sol-gel processing using ethylene glycol monomethyl ether as solvent have been employed as the precursor material. The films were coated on soda lime float glass by the dip coating technique and annealed at 450 °C in air atmosphere. The structure, morphology and composition of the films were investigated by Fourier transformed infrared spectroscopy, X-ray powder diffraction, scanning electron microscopy, atomic force microscopy and X-ray photoelectron spectroscopy indicating that the films were composed of C6S6A7 nanoparticles with cubic structure. The spectral transmittance of the films was measured in the wavelength range of 200-1100 nm using an UV-visible spectrometer. It has been found that the optical properties of the films significantly affected by precursor chemistry and annealing temperature due to the improvement of the crystallinity of the films with increasing annealing temperature and became stable when the annealing temperature is higher than 450 °C. The C6S6A7 films annealed at 450 °C had high transparency about 80% in wide visible range.  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号