空心阴极直流放电的二维自洽模型描述和阴极溅射分析

建立了空心阴极放电的二维自洽理论模型,理论研究了气压为50—120Pa,电压为150—300V的范围内Ar空心阴极放电特性、粒子密度和电离速率空间分布,特别考察了影响阴极溅射分布有关因素:阴极面上的电场、离子流和离子密度的沿阴极截面的空间分布.研究结果不仅证实了在所讨论的范围内,空心阴极效应明显存在而且发现归一化电离速率的空间分布形状强烈依赖于气压.通过研究电场、离子流和离子密度的空间分布解释了空心阴极溅射型离子激光器中不均匀阴极溅射的现象来源于阴极面附近的电场、离子流和离子密度的不均匀分布 关键词： 空心阴极放电 自洽模型 气体激光 阴极溅射     

用于团簇负离子的共线光电子速度成像仪

描述了包含共线的光电子速度成像仪,以及与双阀激光溅射团簇源联用的时间飞行质谱装置．为了避免预混气体,两个脉冲阀和一个反应通道被用来产生反应负离子．共线的光电子成像仪采用了改进的速度成像透镜系统,它的能量分辨率优于3%．此外还报道了Si₄^-团簇在532和355 nm,以及Si₃C^- 团簇在532 nm的光电子速度成像．从实验图像中可以获得光电子能谱和各向异性参数．从Si₄^-团簇能谱上获得了中性的Si₄团簇的基态和第一激发态的振动频率分别为330和312 cm^-1．初步的实验结果证明这套光电子成像装置对研究团簇负离子的电子结构以及光脱附动力学非常有效.     

大口径辅助阳极型辉光放电溅射源的设计与研究

辉光放电原子发射光谱分析技术可对金属样品表面进行沿深度方向的逐层分析与表征,具有溅射速率快、分析效率高、可大面积溅射的优点。另外,辉光放电等离子体能量较低,材料逐层溅射激发过程中不易引起材料本身组织结构的变化,能够实现沿样品深度方向逐层剥蚀制样。将辉光放电溅射源与扫描电镜、光谱分析检测仪器等联用,可作为金属材料高通量定量表征的有效手段。为了高通量地获取材料表面的成分分布信息,需要对材料表面在多尺寸、大面积溅射条件下进行辉光放电等离子体溅射。因此在传统辉光溅射源的基础上,改进了阳极筒结构,设计了4种直径为cm级的(15、 20、 30和40 mm)大口径阳极筒,并对其进行COMSOL数值模拟仿真和实际溅射效果研究。大尺寸溅射面可获得材料表面更为丰富的信息,但在相同溅射条件下,阳极口径增大也带来溅射速率下降、溅射面中心区域离子化率降低、影响溅射均匀性和坑型平整度等问题。为解决这些问题,设计了可应用于大口径直流辉光放电溅射源的辅助阳极结构,通过改变放电空间的电场分布情况调控等离子体分布,增强了阳极中心区域离子化率。详细阐述了辅助阳极结构的设计原理,并对传统阳极和辅助阳极进行了数值模拟仿真研究和实际溅射效果对比实验。结果表明增设辅助阳极对大口径溅射源溅射速率的提升效果明显,对阳极口径30 mm溅射源的溅射速率提升33%～48%,对阳极口径40 mm溅射源的溅射速率提升34%～57%。采用大口径辅助阳极型溅射源对紫铜样品进行了溅射激发,并用光学相干断层扫描仪(OCT)测试了溅射坑形貌,结果表明增设辅助阳极可有效改善溅射均匀性和坑型平整度。     

负离子源引出系统束光学的数值模拟

根据在表面-等离子体型负离子源中,负离子主要由转换电极表面产生这一特点,参考正离子源引出系统数值计算程序,建立了负离子源引出系统的数值计算模型和计算程序;对表面-等离子体型桶式负离子源引出系统束光学的性质进行了数值模拟。对计算结果的检验和分析表明,这个计算模型和程序反映了负离子源引出系统束光学的基本特性。     

强流RFQ的固态功率源模块故障分析

用于中科院近代物理研究所的ADS项目中的射频四极加速器(RFQ) 的新RF系统在2017年初升级,原来的电子四极放大器被两个新的固态功放(SSA) 所替换,它们是两台相同的额定功率为80 kW的功率源,通过两个相同的耦合器在腔内合成至少100 kW的功率。但是对于SSA来说,为了功率组合,太多的功率模块的振幅和相位进行了调整和优化,一个或几个损坏的环形器(包括吸收负载) 可能导致整个射频系统的失效。特别是,根据实验和仿真,发生失配问题后,如果两级合成器之间的传输线电长度满足某一特定条件时,系统的散射参数会有很大的波动,甚至切断。详细介绍了北京北广科技股份有限公司用于模拟多级合成放大的模拟方法、放大链路的故障分析及相关实验情况。     

100 GW快脉冲直线型变压器功率源

基于已经研制完成的100 kV/100 kA快脉冲直线型变压器驱动源（LTD）原型模块,设计研制了输出电压/电流分别为1 MV/100 kA（功率为100 GW）的快脉冲LTD装置。装置由10级100 kV/100 kA快脉冲LTD模块串联而成,总储能为20 kJ,装置直径约1.5 m,长度约2.2 m。最终在85 kV充电电压下,二极管负载上获得的电流约为116 kA,电压约为1.1 MV,电压上升时间53 ns,电压脉宽146 ns,二极管阻抗约为9.4 。     

100 GW快脉冲直线型变压器功率源

基于已经研制完成的100 kV/100 kA快脉冲直线型变压器驱动源（LTD）原型模块,设计研制了输出电压/电流分别为1 MV/100 kA（功率为100 GW）的快脉冲LTD装置。装置由10级100 kV/100 kA快脉冲LTD模块串联而成,总储能为20 kJ,装置直径约1.5 m,长度约2.2 m。最终在85 kV充电电压下,二极管负载上获得的电流约为116 kA,电压约为1.1 MV,电压上升时间53 ns,电压脉宽146 ns,二极管阻抗约为9.4 。     

Interferences in Photodetachment of a Negative Molecular Ion Model

By employing a two-center model, the total and differential cross sections in the photodetachment of ``a negative molecular ion" are studied theoretically and obtained for the case of light polarization parallel to the molecular axis. We find that in contrast to the smooth behavior of the total cross section for perpendicular polarized light, the cross section for parallel polarized light shows an interesting oscillatory structure. The oscillations in the total cross section may provide a method to determine the distance between the two centers. We explain the oscillation in the total cross section as an interference effect using closed-orbit theory. We also calculated the detached-electron flux distributions on a screen placed at a large distance from the negative molecular ion. The distributions display multiple-ring-like interference patterns. Such interference patterns are similar to those in the photodetachment microscopy experiments.     

Interferences in Photodetachment of a Negative Molecular Ion Model

By employing a two-center model, the total and differential cross sections in the photodetachment of ＂a negative molecular ion＂ are studied theoreticedly and obtained for the case of light polarization paredlel to the molecular axis. We find that in contrast to the smooth behavior of the total cross section for perpendicular polarized light, the cross section for parallel polarized light shows an interesting oscillatory structure. The oscillations in the toted cross section may provide a method to determine the distance between the two centers. We explain the oscillation in the toted cross section as an interference effect using closed-orbit theory. We also cedculated the detached-electron flux distributions on a screen placed at a large distance from the negative molecular ion. The distributions display multiple-ring-like interference patterns. Such interference patterns are similar to those in the photodetachment microscopy experiments.     

一种真空离子溅射镀膜设备控制软件的设计

目前国内外的真空离子镀膜控制软件,都不具有重构功能,导致设备的功能有限,也不能任意修改镀膜程序,且自动化程度也不高;针对这种情况,设计了一种控制软件,以工业计算机为核心,使用Visual Basic.net编程语言编制软件,采用专家系统结构,在Windows操作系统环境下,通过计算机标准接口,控制真空设备中各种常用的部件,可根据产品的需求灵活配置真空镀膜设备;建立了控制指令集,可支持用户自选的光学膜厚仪,具有自主编程功能,可按不同工艺重构镀膜程序;该控制软件已经成功的应用于真空离子溅射镀膜设备,实现了计算机对镀膜设备的自动化智能控制,以及镀膜过程的24小时无人值守。     

多靶强流铯溅射离子源的研制

多靶强流铯溅射离子源是多种加速器中常用的离子源之一,在科学研究和工业生产领域的应用十分广泛。但是,目前商业化应用的该种离子源由欧美几个国家垄断,国内还没有厂家能够生产。为了提高加速器运行和建造中的自主化水平,研制了一种多靶强流铯溅射离子源。该离子源主要由离子源腔、换靶装置、冷却系统、控制箱等组成,根据功能需求对其关键部件进行结构设计,采用了全新的伺服电机驱动换靶方式,提供靶位微调功能和远程控制模式,并使用Opera-3D软件模拟优化结构参数和束流光路。经过测试,该离子源在中国原子能科学研究院的400 kV小型加速器质谱(AMS)装置上应用情况良好,换靶定位精准,供束稳定,束流参数达到进口离子源的参数指标,实现了预期目标。     

双离子束溅射沉积薄膜的光学特性与激光损伤研究

对氧化物薄膜的双离子束溅射沉积作用了系统地实验研究。考察了离子束溅射工艺参数对薄膜光学特性的影响。制备了折射率接近于块材料的ＴｉＯ２和ＺｒＯ２薄膜，显著降低了ＴｉＯ２，ＺｒＯ２和ＳｉＯ２薄膜的光吸收损耗，ＴｉＯ２和ＺｒＯ２薄膜的抗激光损伤阈值得到显著提高。用双离束溅射沉积１．０６μｍ多层高反，是到了大于９９．５％的高反射率，经高温退火处理的双离子束溅射沉积高反膜的抗激光损伤阈值同热蒸发沉积的高反膜     

Ion source scaling laws

Simple theory and basic plasma physics experiments are used to deduce scaling laws for ion source discharges.     

Negative Ion Kinetics in RF Glow Discharges

Using temporally and spatially resolved laser spectroscopy, we have determined the identities, approximate concentrations, effects on the local field, and kinetics of formation and loss of negative ions in RF discharges. Cl- and BCl3- are the dominant negative ions found in low-frequency discharges through Cl2 and BCl3, respectively. The electron affinity for Cl is measured to be 3.6118 ± 0.0005 eV. Negative ion kinetics are strongly affected by application of the RF field. Formation of negative ions by attachment of slow electrons in RF discharges is governed by the extent and duration of electron energy relaxation. Similarly, destruction of negative ions by collisional detachment and field extraction is dependent upon ion energy modulation. Thus, at low frequency, the anion density peaks at the beginning of the anodic and cathodic half-cycles after electrons have attached but before detachment and extraction have had time to occur. At higher frequencies, electrons have insufficient time to attach before they are reheated and the instantaneous anion density in the sheath is greatly reduced. When the negative ion density is comparable to the positive ion density, the plasma potential is observed to lie below the anode potential, double layers form between sheath and plasma, and anions and electrons are accelerated by large sheath fields to electrode surfaces.     

A Study of a Confined Hydrogen Negative Ion

The ground and three low-excited states of the hydrogen negative ion confined by a spherical harmonic oscillator potential are studied employing the adiabatic hyperspherical approach method. Total energies are obtained as a function of the confined potential radii. We find that the confinement may cause accidental degeneracies between levels with different low-excited states and the inversion of the energy values.     

Interferences in Photodetachment of a Negative Molecular Ion

The photodetachment of a negative molecular ion is studied theoretically using a two-center model. The detached electron wave function is obtained as a superposition of two coherent waves originating from each center. The photo-detached electron flux is evaluated on a screen placed at a large distance from the negative molecular ion. The electron flux on the screen displays strong interferences, the peak positions are related to the distance between the two centers in the negative molecular ion. We also obtained a simple analytical formula for the total photodetachment cross section. It approaches one and two times of the cross section for the one-center system in the high and low photon energy limits respectively.     

Interferences in Photodetachment of a Negative Molecular Ion

The photodetachment of a negative molecular ion is studied theoretically using a two-center model. The detached electron wave function is obtained as a superposition of two coherent waves originating from each center. The photo-detached electron flux is evaluated on a screen placed at a large distance from the negative molecular ion. The electron flux on the screen displays strong interferences, the peak positions are related to the distance between the two centers in the negative molecular ion. We a/so obtained a simple analytical formula for the total photodetachment cross section. It approaches one and two times of the cross section for the one-center system in the high and lowphoton energy limits respectively.