谱分裂对集成光学陀螺灵敏度影响

为寻求谐振式集成光学陀螺可实现灵敏度的优化,基于调频光谱原理,应用双频率组合调制的闭环控制结构,在对通过陀螺核心敏感器件谐振腔的结构参数优化、调制频率选择等措施实现决定于谐振腔谐振特性一阶微分最大值的最佳灵敏度情形的理论分析基础上,研究了谐振峰分裂对陀螺灵敏度的影响。相关实验表明,对于给定结构的谐振式集成光学陀螺,理论上的最佳参数,并不能保证理论最佳灵敏度的实现。通过双频率组合调制下无源环形谐振腔谐振特性的测量,发现了谐振腔谐振峰分裂现象,分裂程度随腔长增加而趋明显;谐振峰的分裂,导致透射谱展宽;透射谱展宽后一阶微分谱最大值的下降,将使陀螺灵敏度随之劣化。为应对这种劣化,需要对系统调制频率进行相应调整,并控制腔长,以抑制峰分裂程度,进而控制对陀螺灵敏度的影响。     

集成光学陀螺的最佳腔长

作为谐振式光学陀螺的核心敏感器件,无源环形谐振腔(PRR)结构参数的选择,对陀螺灵敏度具有决定性作用.腔长正是这重要结构参数之一.基于多光束干涉理论的理论分析表明,谐振腔长的增加,一方面通过决定腔内干涉光程,优化PRR谐振特性,另一方面,又通过对腔光传输损耗的影响,决定着谐振条件的耦合比要求,从而成为腔内光传输总损耗重要决定因素,导致谐振特性劣化.根据谐振式光学陀螺的调频光谱测量原理,在陀螺灵敏度决定过程中,腔长的上述两方面影响所起的截然相反作用,从而决定了以陀螺最佳灵敏度为判据存在最佳腔长.仿真与实验结果与理论分析良好一致性,不仅证明了理论分析的正确性.也显示了其在集成光学陀螺结构设计与性能优化中的应用价值.     

宽谱光源谐振式光纤陀螺谐振特性分析

为优化宽谱光源谐振式光纤陀螺（RFOG）谐振腔设计,进行了RFOG谐振特性分析。首先,根据光场传输理论完成了宽谱RFOG光场传输特性分析,建立了宽谱RFOG谐振频差曲线模型,给出了谐振特性参数表达式。理论证明了宽谱RFOG的陀螺精细度和半高全宽约为谐振腔光谱曲线的1/2和2倍。其次,基于宽谱RFOG光场理论模型,分析了耦合器交叉耦合系数、附加损耗和谐振腔腔长等谐振腔关键光学参数对陀螺精细度和极限灵敏度的影响。最后,实验验证了谐振特性理论分析的正确性,并通过优化谐振腔参数实现陀螺零偏不稳定性0.059°/h,对谐振式光纤陀螺工程设计具有理论指导意义。     

谐振光学陀螺小型化半导体光源温控模块设计

半导体激光器以其窄线宽、驱动电路简单以及易于集成化等优势被广泛应用于谐振式光学陀螺 系统中。针对谐振光学陀螺小型化需求,设计了半导体激光器热电制冷器（TEC）温控模块。首先在 分析激光器管芯 TEC 模块传递函数特性的基础上,引入 PID 反馈模块,设计并确定合适的反馈参数。 结果表明补偿后闭环系统相位裕量为 76 °,增益裕量为 44.8 dB,具有较好的直流响应和动态性能,并 测得稳定工作时温度波动量小于 0.01℃。最后对激光器输出光学性能进行测试,中心频率漂移在 10 MHz 量级,激光器线宽为 3.1 kHz,结合谐振式光学陀螺的典型参数计算得到谐振腔精细度为 33, 极限灵敏度为 0.14 °/h。满足高性能谐振式光学陀螺中小型化光源的使用需求。     

谐振式光学陀螺用激光器双电流源混合驱动方法

针对谐振式光学陀螺对半导体激光器的窄线宽、低频率噪声和高调谐速率的需求,开展了低噪声、高带宽激光器驱动控制技术研究,提出了双电流源混合驱动的设计方案。采用一个环路带宽被大幅度压缩的大电流恒定电流源和一个环路带宽满足调谐要求的小电流压控电流源并联的方式,在对激光器进行高速稳定调谐的同时保证了其具有理想的频率噪声和线宽性能。解决了利用同一电流源提供恒定电流和调谐电流所引入的控制精度损失,或者由高调谐速率所导致的频率噪声和线宽劣化,影响陀螺锁频控制精度的问题。实现了激光器输出频率噪声优于25 Hz/Hz~(1/2)@10 kHz,在整个调谐范围内线宽小于3.6 kHz,以直径60 mm波导谐振腔为敏感环的谐振式光学陀螺为例,陀螺的锁频精度达到3.72°/h(约为0.48 Hz)。     

基于同频调制解调的谐振式光纤陀螺仪

谐振式光纤陀螺仪(RFOG)是一种基于Sagnac效应的高精度惯性角速度传感器,具有灵敏度高,全固态结构,有利于小型化等各种优点。为有效抑制各种噪声以提高陀螺检测精度,同时进一步降低系统的复杂度以便于集成,提出了一种基于同频调制解调技术的谐振式光纤陀螺方案,从理论上指导了大幅度改善顺逆时针光路的互易性,有效抑制激光器频率噪声和相位调制器残余强度调制影响的机理。在前期实验的基础上加入第二闭环,完成了采用23 m谐振腔的集成化RFOG样机的研制。常温测试结果表明,与Honeywell公司研制的基于三光源拍频方案,腔长为100 m的RFOG样机相比,零偏不稳定性基本相同,但在陀螺角度随机游走上具有明显优势。     

干涉式集成光学陀螺关键技术及应用前景分析

干涉式集成光学陀螺仪利用光电子集成技术实现陀螺系统的芯片化,在实现高性能的同时,可实现批量化生产,满足低体积、重量、功耗和成本（SWa P+C）指标,在无人领域具有重要应用前景。根据干涉式集成光学陀螺的发展脉络及趋势,设计了基于氮化硅的低损耗波导环和单偏振波导谐振腔、异质波导集成耦合结构等关键部件,搭建了基于无源芯片与光纤环的干涉式集成光学陀螺实验样机,实现精度0.03°/h(Allan方差),为目前国内已有报道同类陀螺系统的最优精度。最后,给出了干涉式集成光学陀螺的应用前景分析。     

核磁共振陀螺内嵌参量调制磁强计性能分析

核磁共振陀螺通过处于磁共振态的原子核进动频率在惯性系下的不变性实现载体角速度的敏感测量。为实现高灵敏度的核自旋磁矩测量，通常基于核磁共振陀螺气室构建原位参量调制磁强计，因此内嵌碱金属参量调制磁强计性能直接影响陀螺仪指标。开展核磁共振陀螺内嵌参量调制磁强计特性研究，分析了原子磁矩测量误差及其对陀螺性能的影响，并建立理论模型，仿真结果表明，泵浦光频率波动控制在1 GHz以内，探测光频率波动控制在0.1 GHz以内，可有效提高磁强计信噪比。研究结果对于提高碱金属磁强计灵敏度和信噪比、抑制核自旋磁矩测量误差具有理论指导意义。     

一种基于硅基波导的新型谐振式集成光学陀螺

介绍了一种基于单偏振波导环形谐振腔的新型集成光学陀螺及单偏振环形波导谐振腔的实现方法。其中单偏振光波导由SiO2衬底层、锗掺杂SiO2波导芯层和SiO2上包层组成,整个结构可用硅热氧化技术和PECVD技术生长在硅衬底上。用BPM(束传播法)对设计的单偏振环形谐振腔的传输特性进行仿真分析。结果表明,当入射光波长为1550nm时,此单偏振波导谐振腔对TM模式传输光的消光比是25dB/cm,而对TE模式传输光的传输损耗是0.05dB/cm,谐振腔的精细度可达到35。单偏振波导谐振腔的这些特点适于集成光学陀螺的应用要求,由其研制的集成光学陀螺的分辨率可达到16(°)/h。     

MOEMS陀螺的空间谐振腔微镜调节新方法

空间谐振腔是空间谐振式MOEMS陀螺的核心敏感器件,构成谐振腔的微镜的调节是实现谐振腔的关键。提出了一种基于耦合原理调节空间谐振腔竖直微镜的方法。针对使用微加工工艺制作的竖直微镜,运用耦合原理将以往避免的调节耦合量作为有益量完成对微镜的空间调节。通过相应的调节基本结构及调节方法,对由相应的结构构成的微谐振腔分别进行了MATLAB及ANSYS仿真和分析。结果证实了此调节方法的可行性,基于该调节方法和调节结构完全能够实现微镜的高精度空间调节,对MOEMS陀螺的空间谐振腔的调整具有可靠的调节稳定性及更高的集成度,为空间谐振式MOEMS陀螺的实现提供一条新的路线。     

Resonance Absorption of Gravity Waves

Fluid Dynamics - The problem of absorption by a resonator of a gravity wave that propagates on the surface of an incompressible fluid is solved. The resonator is small as compared with the...     

Effect of movability of the resonator center on the operation of a hemispherical resonator gyro

It was established in [2] that resonator deformation according to the second mode shape of a thin hemispherical shell results in a displacement of the center of mass if the resonator is unbalanced, i.e., if the distribution of mass over the surface of the hemisphere deviates from axial symmetry. In the same paper, it was shown that this displacement of the center of mass makes the instrument sensitive to linear vibrations. The present paper deals with linear vibration caused in the presence of unbalance by the working vibrations themselves and by the forces used to maintain the latter. The linear vibration is considered in the form of beam vibrations of the resonator stem. The study is aimed at determining the influence of the coupling between the working and beam vibrations on the instrument readings. We obtain a formula relating the hemispherical resonator gyro drift to the unbalance and the eccentricity, which, in particular, can be caused by the gravity component normal to the sensitivity axis. The drift considered here is essentially caused by the fact that deformation of the resonator supports also results in deformation of the electric control field in the gap between the electrodes. The resulting additional forces cause the effect studied in this paper. The drift magnitude depends on how the control of the phase state of the resonator is chosen. In what follows, to be definite, we consider the control in fast-time mode, i.e., at the natural vibration frequency. A similar effect takes place for any other type of control of waves in the resonator.     

Primary resonance of a beam-rigid body microgyroscope

We present the non-linear dynamical features of a beam-rigid-body microgyroscope operating under the electrostatic force. A comprehensive system of discretized governing equations is solved using the method of multiple scales and the shooting method. For an amplitude-modulation gyro, the effects of the quality factor, AC voltage, and the rotation rate on the response are investigated and the fold-bifurcation points are identified. A frequency-modulation gyro is examined and in addition to the bifurcation points, the entrainment region is identified. The effects of a positive and a negative internal detuning parameter on the frequency-response of a frequency-modulation gyro are investigated.     

Modal analysis and harmonic response of resonators: An extension of a mapped orthogonal functions technique

A mapped orthogonal functions technique is extended for solving three-dimensional acoustical wave problems with taking into account electrical sources. For validation and illustration purposes, it is applied to the determination of the frequency spectrum of a piezoelectric disc resonator. Formulation is given for the calculation of the electric input admittance along with specializations for open- and short-circuit boundary conditions. In view of validation, normal frequencies and electric input admittance are obtained for specific geometries where a one-dimensional analytical model is working and compared against results from the analytical approach. Illustrative results, dispersion curves for a PZT5A resonator and electromechanical coupling coefficients as a function of the diameter to thickness ratio for the first radial mode of a respectively PZT5A, AlN and SiC resonator are also given.     

激光器光谱线宽对布里渊光纤谐振腔谐振特性的影响

针对激光器光谱线宽不可能严格为零的问题,在激光相干理论的基础上,采用光波场叠加的方法计算了布里渊光纤谐振腔的循环光强,详细分析了激光器光谱线宽对布里渊光纤谐振腔谐振谱线宽度和精细度的影响,并进一步分析了光谱线宽对谐振腔受激布里渊散射阈值的影响,最后,引入了线宽压缩的概念分析了布里渊光纤陀螺的灵敏度。分析表明,除了耦合器插入损耗外,激光器光谱线宽也是影响精细度的重要因素,具体影响程度与激光器光谱线宽及谐振腔本征谱线宽度间的相对大小有关,受激布里渊散射阈值随激光器线宽的增加而近似线性增加,另外在其他参数相同的情况下,布里渊光纤陀螺的灵敏度比谐振式光纤陀螺高大约三个数量级。本文为布里渊光纤陀螺的光源选择及光路参数的优化设计过程提供了理论依据。     

THICKNESS-SHEAR VIBRATION OF CIRCULAR CRYSTAL PLATE IN CYLINDRICAL SHELL AS PRESSURE SENSOR

Based on the theory for small fields superposed on relatively larger fields in an electroelastic body, & theoretical analysis is performed on a circular plate thickness-shear crystal resonator sealed in a circular cylindrical shell for pressure measurement. A simple expression is obtained for pressure induced frequency shifts in the resonator, which is examined for design optimization. Numerical results show that the frequency shifts depend linearly on the pressure, and that a pressure sensor with a softer outer shell or a smaller thickness ratio of the crystal plate to the outer shell has higher sensitivity.     

Electric admittance analysis of quartz crystal resonator in thickness-shear mode induced by array of surface viscoelastic micro-beams

The electric admittance of a compound system composed of a thicknessshear mode(TSM) quartz crystal resonator(QCR) and an array of surface viscoelastic micro-beams(MBs) is studied.The governing equations of the MBs are derived from the Timoshenko-beam theory in consideration of shear deformation.The electrical admittance is described directly in terms of the physical properties of the surface epoxy resin(SU-8) MBs from an electrically forced vibration analysis.It is found that both the inertia effect and the constraint effect of the MBs produce competitive influence on the resonant frequency and admittance of the compound QCR system.By further comparing the numerical results calculated from the Timoshenko-beam model with those from the Euler-beam model,the shear deformation is found to lead to some deviation of an admittance spectrum.The deviations are revealed to be evident around the admittance peak(s) and reach the maximum when a natural frequency of the MBs is identical to the fundamental frequency of the QCR.Besides,a higher order vibration mode of the MBs corresponds to a larger deviation at the resonance.     

Control of nonlinear vibrations of vibrating ring microgyroscope

The influence of the basement rotation on the variations in the spectrum of vibration frequencies of thin elastic shells and rings was known already at the end of the 19th century [1]. The physical phenomenon of inertness of elastic waves occurring free vibrations of an axisymmetric body, first explained in [2], were practically used in developing new types of gyros [2–6]. The foundations of the theory of wave gyros were laid in [2, 4], and the errors of such gyroscopes for various shapes of the vibrating resonator were studied in [2, 4, 7, 8]. It was shown that the error of the resonator manufacturing (the variable density, thickness, anisotropy of the material elastic properties, etc.) [2, 8] and the geometric nonlinearity of the resonator flexural vibrations studied in [2, 7] lead to splitting of the natural frequency of flexural vibrations [2], which is reflected in the wave picture of the resonator vibrations and characterizes the gyroscope precision.In the present paper, we study the errors of the vibrating microgyroscope which arise because of nonlinear elastic properties of the ring resonator material. We construct a control of the potential on the electrodes which allows one to maintain the prescribed amplitude of the normal resonator deflection and compensate for the gyroscope errors arising because of the nonlinear elastic properties of the material.     

Nonlinear dynamic analysis of a photonic crystal nanocavity resonator

A nonlinear dynamic model of a one-dimensional photonic crystal nanocavity resonator is presented. It considers the internal tensile stress and the geometric characteristics of a photonic crystal with rectangular(and circular) holes. The solution of the dynamic model shows that the internal tensile stress can suppress the hardening and softening behaviors of the resonator. However, the stress can reduce the amplitude, which is not conducive to an improvement of the sensitivity of the sensor. It is demonstrated that with an optimized beam length, the normalized frequency drift of the beam can be stabilized within 1% when the optical power increases from 2 mW to 6 mW. When the hole size of the resonator beam is close to the beam width, its increase can lead to a sharp rise of the resonant frequency and the promotion of hardening behavior. Moreover,the increase in the optical power initially leads to the softening behavior of the resonator followed by an intensification of the hardening behavior. These theoretical and numerical results are helpful in understanding the intrinsic mechanism of the nonlinear response of an optomechanical resonator, with the objective of avoiding the nonlinear phenomena by optimizing key parameters.     

Dynamic analysis of a dielectric elastomer-based microbeam resonator with large vibration amplitude

A non-linear vibration equation with the consideration of large amplitude, gas damping and excitation is developed to investigate the dynamic performance of a dielectric elastomer (DE)-based microbeam resonator. Approximate analytical solution for the vibration equation is obtained by applying parameterized perturbation method (PPM) and introducing a detuning variable. The analysis exhibits that active tuning of the resonant frequency of the resonator can be achieved through changing an applied electrical voltage. It is observed that increasing amplitude will increase the natural frequency while it will decrease the quality factor of the resonator. In addition, it is found that the initial pre-stretching stress and the ambient pressure can significantly alter the resonant frequency of the resonator. The analysis is envisaged to provide qualitative predictions and guidelines for design and application of DE-based micro resonators with large vibration amplitude.