Influence of the catalyst type on the growth of carbon nanotubes via methane chemical vapor deposition

The preparation of the catalyst is one of the key parameters which governs the quality of carbon nanotubes (CNTs) grown by catalyzed chemical vapor deposition (CVD). We investigated the influence of three different procedures of catalyst preparation on the type and diameter of CNTs formed under identical growth conditions via methane CVD. In the first one, chemically synthesized colloidal iron oxide or iron molybdenum alloy nanoparticles were used, which were homogeneously deposited on silicon substrates by spin coating to prevent them from coalescence under CVD growth conditions. The obtained multiwall CNTs (MWNTs) exhibited diameters corresponding to the catalyst particle size, whereas no formation of single-wall CNTs (SWNTs) was observed. In the second method, commercial porous alumina nanoparticles were used in association with iron and molybdenum salts and the Fe/Mo catalyst was formed in situ. We determined that the alumina concentration significantly influenced the morphology of the catalyst and that below a critical value of the range of 1 g/L no CNTs were formed. While yielding nearly defect-free SWNTs, their diameter could not be controlled using this procedure, resulting in a large distribution of tube sizes. In a third, new preparation method, associating alumina and iron-based nanoparticles, SWNTs of a different size and narrower diameter distribution as compared to the second method were obtained. Our results are evidence of the essential role of alumina particles in the formation of SWNTs, and the newly developed method opens up a way to the synthesis of diameter-controlled SWNTs via catalyzed CVD.     

A rapid synthesis of iron phosphate nanoparticles via surface-mediated spontaneous reaction for the growth of high-yield, single-walled carbon nanotubes

The direct formation of iron phosphate nanoparticles on hydroxyl-terminated SiO(2)/Si substrates with a narrow size distribution (average diameter = 2.2 nm) is achieved by a simple room temperature spontaneous reaction of ferric chloride and phosphoric acid. Single-walled carbon nanotubes (SWNTs) are grown in high yield from the synthesized iron phosphate nanoparticles by the thermal chemical vapor deposition (CVD) method, as confirmed by atomic force microscopy (AFM) and Raman spectroscopy. Furthermore, three-terminal, p-type, nanotube network field effect transistor (FET) devices are successfully fabricated using the synthesized SWNTs via the photolithography technique. The reduced solubility of Fe(III) ions when they form iron phosphate salts in aqueous media is the main driving force for the nanoparticle formation. Systematic control experiments reveal that the surface property, concentration, and pH of the reaction solution play equally important roles in the formation of nanoparticles.     

Identification of the structures of superlong oriented single-walled carbon nanotube arrays by electrodeposition of metal and Raman spectroscopy

In this Communication, we have demonstrated a facile and effective approach to identify the structure of the superlong well-aligned single-walled carbon nanotubes (SWNTs) by the combination of electrodeposition of metal (Ag) with Raman spectroscopy. The suitable density and the visibility of the Ag-deposited long oriented nanotubes make it possible to acquire Raman spectra from isolated individual nanotubes very easily. The results reveal that the well-oriented SWNT arrays on SiO2/Si wafer fabricated by EtOH chemical vapor deposition using Fe/Mo nanoparticles as catalyst exhibit a low percentage of metallic SWNTs (5%). Among other SWNTs about 62.3% are semiconducting SWNTs, and a small amount of nanotubes are quasimetallic. About 32% are a so-called quasi-insulator, which is caused inevitably by the defects during growth. Furthermore, the structural uniformity of the long SWNTs can be also evaluated by the deposition of Ag along the length and Raman spectroscopy. This method also provides an approach to deposit other metals on long SWNTs, which could have various potential applications such as for use as sensors, etc. More importantly, this facile method can be applied to long SWNT arrays fabricated from other different catalytic systems so that the relationship between the growth conditions and the structures of SWNTs are expected to be ruled out.     

利用Fe3O4/DR膜作为催化剂前体在硅片上生长多壁碳纳米管

Fe3O4纳米粒子与正离子性的重氮树脂在硅基底的表面形成稳定自组装膜,还原后可通过化学气相沉积(CVD)法在硅基底的表面生长多壁碳纳米管.以聚丙烯酸包裹Fe3O4纳米颗粒能够有效地防止纳米粒子的团聚,并提高组装效率,得到均匀的纳米粒子自组装膜,从而获得在硅基底上均匀分布的多壁碳纳米管.     

Dendrimer-templated Fe nanoparticles for the growth of single-wall carbon nanotubes by plasma-enhanced CVD

A fourth-generation (G4) poly(amidoamine) (PAMAM) dendrimer (G4-NH2) has been used as a template to deliver nearly monodispersed catalyst nanoparticles to SiO2/Si, Ti/Si, sapphire, and porous anodic alumina (PAA) substrates. Fe2O3 nanoparticles obtained after calcination of the immobilized Fe3+/G4-NH2 composite served as catalytic "seeds" for the growth of single-wall carbon nanotubes (SWNTs) by microwave plasma-enhanced CVD (PECVD). To surmount the difficulty associated with SWNT growth via PECVD, reaction conditions that promote the stabilization of Fe nanoparticles, resulting in enhanced SWNT selectivity and quality, have been identified. In particular, in situ annealing of Fe catalyst in an N2 atmosphere was found to improve SWNT selectivity and quality. H2 prereduction at 900 degrees C for 5 min was also found to enhance SWNT selectivity and quality for SiO2/Si supported catalyst, albeit of lower quality for sapphire supported catalyst. The application of positive dc bias voltage (+200 V) during SWNT growth was shown to be very effective in removing amorphous carbon impurities while enhancing graphitization, SWNT selectivity, and vertical alignment. The results of this study should promote the use of exposed Fe nanoparticles supported on different substrates for the growth of high-quality SWNTs by PECVD.     

IR laser photodeposition of a-Fe/Si films developing nanograins of ferrisilicate, iron disilicide and rare hexagonal iron upon annealing

IR laser-induced gas-phase photolysis of Fe(CO)(5)-SiH(4) mixtures occurs as SiH(4)-photosensitized decomposition of Fe(CO)(5) is accelerated by products of this decomposition and it results in deposition of amorphous Si/Fe nanocomposite films. Analyses of the deposited and subsequently annealed solid films were made by FTIR, Raman and X-ray photoelectron spectroscopy, X-ray diffraction and electron microscopy. The deposited films are amorphous, contain crystalline nanostructures of iron silicide FeSi(2) and undergo atmospheric oxidation in topmost layers to iron oxide and hydrogenated silicon oxide. Upon annealing they develop nanocrystalline structures of ferrisilicate, Fe(1.6)SiO(4), carbon-encaged iron disilicide, FeSi(2), and very rare hexagonal (high-pressure) Fe surviving at ambient conditions. The mechanism of formation of these nanostructures is discussed in terms of gas-phase and solid-phase reactions.     

CVD growth of single-walled carbon nanotubes with narrow diameter distribution over Fe/MgO catalyst and their fluorescence spectroscopy

Single-walled carbon nanotubes (SWNTs) with a narrow diameter distribution are synthesized by thermal chemical vapor deposition (CVD) of methane over Fe/MgO catalyst on the basis of parametric study considering Fe loading, reaction temperature and time, methane concentration, and structure of a support material. We found that the porous MgO support gives the SWNTs with a narrow diameter distribution with the mean diameter and standard deviation of 0.93 and 0.06 nm, respectively, only when the Fe loading and reaction temperature are relatively low. The higher Fe loading and/or the higher reaction temperature enlarged the nanotube diameter, forming double-walled carbon nanotubes (DWNTs) in addition to SWNTs. This result indicates that only the diameter of Fe nanoparticles determines the growth of either SWNTs or DWNTs on the MgO support. The fluorescence and absorption spectra of the nanotube dispersion in D(2)O solution with sodium dodecyl sulfate (SDS) were studied to identify their chirality distribution. The fluorescence of the uniform-diameter SWNTs indicates the formation of the near armchair structures. On the other hand, the SWNTs synthesized over the catalyst with a high Fe loading, 3 wt %, showed a wide chirality distribution including the near zigzag structure. The synthesis of the SWNTs with a narrow diameter distribution could be applied to the selection of SWNTs with a specific chirality based on postsynthesis separation.     

Cobalt-filled apoferritin for suspended single-walled carbon nanotube growth with narrow diameter distribution

Cobalt-filled apoferritin (Co-ferritin) was, for the first time, used as a wet catalyst for the synthesis of single-walled carbon nanotubes (SWNTs) with narrow diameter distribution. Co-ferritins were spin-coated and converted to cobalt nanoparticles by calcination. Using chemical vapor deposition, suspended networks of SWNTs were formed on pillar-structured substrates. The suspended SWNTs show narrow tube diameter distribution with a relatively good graphite structure. By virtue of the low diffusion coefficient of cobalt, Co-ferritin might be more useful for narrow diameter SWNTs growth than ferritins, which encase iron particles.     

Preparation of horizontally aligned single-walled carbon nanotubes with floating catalyst

A strategy to prepare horizontally aligned single-walled carbon nanotubes(SWNTs) at moderate temperatures(≤600 ℃) were developed.Using ferocene as the catalyst precursor,Fe nanoparticles are formed in the gaseous phase and catalyze the nucleation and growth of SWNTs in situ.Then the resultant SWNTs are deposited onto the substrates downstream and aligned by the surface lattice of the ST-cut single crystal quartz.The preparation of SWNT arrays at moderate temperatures is important for combining the tube growth with device fabrication.     

高温煅烧Mo改性的Fe／MgO催化剂用于制备管径分布均一的单壁碳纳米管

研究了在以甲烷化学气相沉积法制备单壁碳纳米管的过程中高温煅烧预处理(900℃煅烧10h)对Mo改性Fe/MgO催化剂的作用.发现这种预处理有利于Fe在催化剂中的稳定和分散,从而制备出管径均一的单壁碳纳米管.采用能谱元素分析、高分辨透射电镜、X射线衍射、比表面积测量、拉曼光谱和热重分析对样品进行了表征.结果表明,在碳纳米管生长的过程中,铁元素在催化剂表面富集,单壁碳纳米管生长于富集铁的纳米颗粒上,并存在碳管直径与铁颗粒尺寸的依赖关系.Mo存在时可煅烧形成FeMoO4复合氧化物,后者比MgFe2O4相更加稳定.Mo/Fe比例对提高单壁碳纳米管的生长密度、纯度与管径均一性等均有明显影响.上述研究对进一步精确控制制备单壁碳纳米管有重要意义.     

Selective matching of catalyst element and carbon source in single-walled carbon nanotube synthesis on silicon substrates

We have studied the compatibility of various catalysts for ethylene and ethanol chemical vapor deposition (CVD) syntheses of single-walled carbon nanotubes (SWNTs) on Si substrates. A strong selectivity between the catalyst elemental species and carbon source was found; SWNT yield for Fe (Co) catalysts was much higher for ethylene (ethanol) CVD than for ethanol (ethylene) CVD. This strong and completely opposite selectivity implies significantly different SWNT growth mechanisms for ethanol and ethylene CVD on Si substrates.     

Fabrication of superparamagnetic macroporous Fe3O4 and its derivates using colloidal crystals as templates

In this paper, we reported the preparation of superparamagnetic macroporous Fe(3)O(4) and its derivates using organic colloidal crystal as templates and their catalytic activity for chemical vapor deposition. The poly(styrene-methyl methacrylate-acrylic acid) (P(St-MMA-AA)) copolymer colloids were deposited in an orderly manner onto the silicon surface, together with the infiltration of the Fe(3)O(4) nanoparticles into the interspaces of the colloids. The formed hybrid colloidal crystal subsequently was immersed in tetrahydrofuran to remove the organic components fully to obtain a macroporous Fe(3)O(4) framework with three-dimensional porous structure. The macroporous Fe(3)O(4) exhibits superparamagnetism due to the magnetic coupling of Fe(3)O(4) nanoparticles in the structure. Macroporous Fe(2)O(3) and Fe materials were obtained based on oxidization and reduction of the macroporous Fe(3)O(4), respectively. It was demonstrated that the macroporous Fe(3)O(4) materials possess catalytic activity and can induce growth of carbon nanotubes.     

单晶硅上化学气相沉积铜薄膜的机理研究

A versatile metal-organic chemical vapor deposition (MOCVD) system was designed and constructed. Copper films were deposited on silicon (100) substrates by chemical vapor deposition (CVD) using Cu(hfac)2 as a precursor. The growth of Cu nucleus on silicon substrates by H2 reduction of Cu(hfac)2 was studied by atomic force microscopy and scanning electron microscopy. The growth mode of Cu nucleus is initially Volmer-Weber mode (island), and then transforms to Stranski-Rastanov mode (layer-by-layer plus island).The mechanism of Cu nucleation on silicon (100) substrates was further investigated by X-ray photoelectron spectroscopy. From Cu2p, O1s, F1s, Si2p patterns, the observed C=O, OH and CF3/CF2 should belong to Cu(hfac) formed by the thermal dissociation of Cu(hfac)2. H2 reacts with hfac on the surface, producing OH. With its accumulation, OH reacts with hfac, forming HO-hfac, and desorbs, meanwhile, the copper oxide is reduced, and thus the redox reaction between Cu(hafc)2 and H2 occurs.     

Reproducible patterning of single au nanoparticles on silicon substrates by scanning probe oxidation and self-assembly

This paper describes a rational approach for reproducibly patterning single Au nanoparticles, 15-20-nm diameter, on silicon wafer substrates. The approach uses scanning probe oxidation (SPO) to pattern silicon oxide nanodomain arrays on silicon substrates modified with octadecyltrimethoxysilane (OTS). It was usually found using aminopropyltrimethoxysilane (APS) that Au nanoparticles only assembled at the domain boundaries probably because of asymmetrically distributed hydroxyl groups. To generate uniformly distributed hydroxyl groups on oxide domains, we employed a two-step treatment to etch and oxidize the substrate. With this treatment, oxide domains consistently attached Au nanoparticles to maximum capacity. Single Au nanoparticles were readily patterned by fabricating oxide nanodomains with a diameter below 30 nm. We also investigated the deposition of APS on OTS monolayers, which resulted in the assembly of Au nanoparticles outside of the oxide domains, and proposed two alternative methods to inhibit it.     

Role of subsurface diffusion and Ostwald ripening in catalyst formation for single-walled carbon nanotube forest growth

Here we show that essentially any Fe compounds spanning Fe salts, nanoparticles, and buckyferrocene could serve as catalysts for single-walled carbon nanotube (SWNT) forest growth when supported on AlO(x) and annealed in hydrogen. This observation was explained by subsurface diffusion of Fe atoms into the AlO(x) support induced by hydrogen annealing where most of the deposited Fe left the surface and the remaining Fe atoms reconfigured into small nanoparticles suitable for SWNT growth. Interestingly, the average diameters of the SWNTs grown from all iron compounds studied were nearly identical (2.8-3.1 nm). We interpret that the offsetting effects of Ostwald ripening and subsurface diffusion resulted in the ability to grow SWNT forests with similar average diameters regardless of the initial Fe catalyst.     

Raman spectroscopy of individual single-walled carbon nanotubes from various sources

Resonance Raman spectroscopy/microscopy was used to study individualized single-walled carbon nanotubes (SWNTs) both in aqueous suspensions as well as after spin-coating onto Si/SiO2 surfaces. Four different SWNT materials containing nanotubes with diameters ranging from 0.7 to 1.6 nm were used. Comparison with Raman data obtained for suspensions shows that the surface does not dramatically affect the electronic properties of the deposited tubes. Raman features observed for deposited SWNTs are similar to what was measured for nanotubes directly fabricated on surfaces using chemical vapor deposition (CVD) methods. In particular, individual semiconducting tubes could be distinguished from metallic tubes by their different G-mode line shapes. It could also be shown that the high-power, short-time sonication used to generate individualized SWNT suspensions does not induce defects in great quantities. However, (additional) defects can be generated by laser irradiation of deposited SWNTs in air, thus giving rise to an increase of the D-mode intensity for even quite low power densities (approximately 10(4) W/cm2).     

Optimizing coverage of metal oxide nanoparticle prepared by pulsed laser deposition on nonenzymatic glucose detection

Metal oxide nanoparticles prepared by pulsed laser deposition (PLD) were applied to nonenzymatic glucose detection. NiO nanoparticles with size of 3 nm were deposited on glassy carbon (GC) and silicon substrates at room temperature in an oxygen atmosphere. Transmission electron microscope (TEM) image showed nanoparticles with the size of 3 nm uniformly scattered on the Si(0 0 1) substrate. Unlike co-sputtering nanoparticle and carbon simultaneously, the PLD method can easily control the surface coverage of nanoparticles on the surface of substrate by deposition time. Cyclic voltammetry was performed on the samples deposited on the GC substrates for electrochemical detection of glucose. The differences between peak currents with and without glucose was used to optimize the coverage of nanoparticles on carbon electrode. The results indicated that optimal coverage of nanoparticles on carbon electrode.     

Synthesis and characterization of iron silicon boron (Fe5Si2B) and iron boride (Fe3B) nanowires

Single-crystal iron silicon boron (Fe(5)Si(2)B) and iron boride (Fe(3)B) nanowires were synthesized by a chemical vapor deposition (CVD) method on either silicon dioxide (SiO(2)) on silicon (Si) or Si substrates without introducing any catalysts. FeI(2) and BI(3) were used as precursors. The typical size of the nanowires is about 5-50 nm in width and 1-20 mum in length. Different kinds of Fe-Si-B and Fe-B structures were synthesized by adjusting the ratio of FeI(2) vapor to BI(3) vapor. Single-crystal Fe(5)Si(2)B nanowires formed when the FeI(2) sublimator temperature was kept in the range of 540-570 degrees C. If the FeI(2) sublimator temperature was adjusted in the range of 430-470 degrees C, single-crystal Fe(3)B nanowires were produced. Fe(3)B nanowires grow from polycrystalline Fe(5)SiB(2) particles, while Fe(5)Si(2)B nanowires grow out of the Fe(5)Si(2)B layers, which are attached to triangle shaped FeSi particles. Both the ratio of FeI(2) vapor to BI(3) vapor and the formation of the particles (Fe(5)SiB(2) particles for the growth of Fe(3)B nanowires, FeSi particles for the growth of Fe(5)Si(2)B nanowires) are critical for the growth of Fe(3)B and Fe(5)Si(2)B nanowires. The correct FeI(2) vapor to BI(3) vapor ratio assures the desired phase form, while the particles provide preferential sites for adsorption and nucleation of Fe(3)B or Fe(5)Si(2)B molecules. Fe(3)B or Fe(5)Si(2)B nanowires grow due to the preferred growth direction of <110>.     

Influences of organometallic polymer‐derived catalyst dispersion on SWNT growth

Catalyst formation kinetics of a ferrocene‐containing homopolymer, polyferrocenylethylmethylsilane (PFEMS), is investigated as it relates to the catalysis of single walled carbon nanotubes (SWNTs) through a chemical vapor deposition (CVD) process. The formation and efficiency of the PFEMS‐based iron catalyst is compared with that of the corresponding polystyrene (PS)‐b‐PFEMS diblock copolymer. The PFEMS homopolymer contains 23 wt % iron, while PS‐b‐PFEMS, with a 25 vol % PFEMS content, is only 6% iron. Despite its lower iron content, spin‐cast PS‐b‐PFEMS films on SiO₂/Si substrates produce more active iron sites than spin‐cast PFEMS films during CVD growth of SWNTs. This is related to the self‐assembly of the block copolymer, where PFEMS domains are well dispersed in the PS matrix, which degrades at a CVD temperature of 920 °C to leave catalytically active elemental iron behind. On the contrary, the pure PFEMS films contain a high percentage of iron and silicon, which tend to transform into ceramic‐coated iron at this high temperature, thus rendering the iron inactive towards SWNT growth. © 2007 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 45: 758–765, 2007     

Tuning of redox properties of iron and iron oxides via encapsulation within carbon nanotubes

We report the tuning of the redox properties of iron and iron oxide nanoparticles by encapsulation within carbon nanotubes (CNTs) with varying inner diameters. Raman spectroscopy was employed to investigate the interaction of the encapsulated nanoparticles with the CNTs. A red shift of the Fe-O mode is observed in the nanoparticles deposited on the outer CNT surfaces with respect to bulk Fe2O3. However, this mode is found to be stepwise blue-shifted with decreasing inner diameter in the CNT-encapsulated Fe2O3 nanoparticles, suggesting an enhanced interaction of Fe2O3 with the inner CNT surface as its curvature increases. The autoreduction of the encapsulated Fe2O3 is significantly facilitated inside CNTs with respect to the outside nanoparticles. Interestingly, it becomes more facile with decreasing CNT channel diameter as evidenced by temperature programmed reaction, in situ XRD, and Raman spectroscopy. The oxidation of encapsulated metallic Fe nanoparticles on the other hand is retarded in comparison to that of the outside Fe particles as shown by in situ XRD and gravimetrical measurements with an online microbalance. We attribute this tunable redox behavior of transition metal nanoparticles inside CNTs to a particular electronic interaction of the encapsulates with the interior CNT surface, which stabilizes the metallic state of Fe.