改建CVD系统制备金刚石薄膜

用一台常规的真空镀膜机改建为化学气相沉积 (CVD)系统 ,并用以制备金刚石薄膜 .采用SEM、XRD、Raman测试表明 ,金刚石薄膜质量较好 .     

改进CVD系统制备金刚石薄膜

用一台常规的真空镀膜机改建为化学相沉积（CVD）系统，并用以制备金刚石薄膜，采用SEM，XRD，Raman测试表明，金刚石薄膜质量较好。     

类金刚石薄膜和金刚石薄膜的制备

本文介绍了类金刚石薄膜和金刚石薄膜的制备原理和4种方法,同时指出了它们的应用前景。     

不锈钢衬底碳纳米管薄膜的场发射特性

不需要添加任何催化剂,直接在含有少量Ni和Cr成分的不锈钢衬底上,用微波等离子体化学气相沉积(MPCVD)方法沉积碳纳米管薄膜.在SEM下观察,生成的碳纳米管取向无序,但浓度大、杂质含量少、直径小且分布均匀,其直径在50～60 nm,为多壁碳纳米管.Raman光谱实验证实了此碳纳米管中存在大量缺陷.场发射实验表明,本样品的开启电压低,电子发射均匀,发射电流大.当用ITO玻璃作阳极且场强为11 V/μm时,电流密度可达到31 mA/cm2;当用荧光粉包覆的ITO玻璃作阳极且场强为6 V/μm时,电流密度可达到1.25 mA/cm2,这时的电子可稳定发射,使该样品变成良好的电子发射体.     

浅论气体压强对金刚石薄膜质量的影响

以甲烷、氢气做为气源,利用微波等离子气相沉积的方法在硅片上沉积金刚石薄膜。研究了不同压强对金刚石薄膜质量的影响。结果表明当气氛压强为9KPa时可获得高质量的金刚石薄膜。     

金刚石聚晶薄膜制备及其电子场的发射性能

微波等离子体化学气相沉积是制备微/纳米结构的方法之一,使用该方法在陶瓷衬底上制备微米金刚石聚晶材料薄膜。利用扫描电子显微镜表征了材料的表面形貌,单元尺寸一致,分布均匀。使用X射线衍射和拉曼光谱分析了薄膜的结构,测试了薄膜材料的电子场发射性能。数据表明:制备的薄膜材料开启电场为1.25V/μm,在2.55V/μm的电场下,其电子场发射电流密度达到6.3mA/cm2。     

金刚石薄膜的制备及其性能研究概述

金刚石薄膜是工业界继高温超导材料之后又一研究热点，近年来的研究工作已经取得了重大进展，文章对国内外学者在金刚石薄膜的制备，特性，生长机理以及摩擦特性等方面的研究进行了综合论述，以推动国内外金刚石薄膜基础研究和应用的发展，并提出要重视金刚石薄膜在摩擦学领域中的应用研究，使之为人类社会带来巨大的经济效益。     

低粗糙度金刚石薄膜的制备及其光学性能的表征

采用热丝化学气相沉积（HFCVD）方法,在反应气压、衬底温度一定的情况下,通过改变碳源浓度以制备低粗糙度金刚石薄膜.扫描电镜（SEM）和原子力显微镜（AFM）测试结果表明,随着碳源浓度适当增加（从2％增加到3％）,金刚石薄膜表面晶粒尺寸减小到纳米量级,平均粗糙度从45 nm降低到21 nm,同时光学透过率下降.椭圆偏振光谱拟合结果显示,随着碳源浓度的增加,薄膜折射率n稍有偏离理想值.拉曼散射光谱显示随着碳源浓度的增加,薄膜中非金刚石相含量增加,一定程度上影响了薄膜的光学质量.结果表明,在表面粗糙度相差不大的情况下,薄膜的质量决定了其光学性质.     

CVD金刚石膜场发射机制的探讨

通过分析CVD金刚石膜的结构,对CVD金刚石膜的场发射机制进行了研究,结果表明金刚石膜内含有一定数量的石墨,当电子通过石墨时从石墨的电场中获得能量增大了电子隧穿金刚石晶粒的系数,据此提出了金刚石膜内石墨相增强电子隧穿金刚石颗粒以增强金刚石膜场电子发射的机制,并且根据该机制解释了一些实验现象。     

多金属氧酸盐/中性红纳米复合膜的制备、表征和应用

采用层接层自组装方法(LbL),将多金属氧酸盐H3PMo12O40·2H2O,(PMo12)和中性红(NR)制备成纳米复合膜PMo12/NR,并通过紫外可见光谱,红外光谱和X-射线光电子能谱对复合膜进行表征.研究表明:UV光处理前后的复合膜,紫外可见光谱和红外光谱没有发生显著的变化.红外光谱显示:在UV光处理后来形成M...     

Preparation and characterization of nano-crystalline diamond films on glass substrate

Adherent nano diamond films were successfully deposited on glass substrate by microwave plasma assisted CVD method in H₂-CH₄ and Ar-CH₄ environment. Raman, AFM (Atomic Force Microscope), TEM (Transmission Electron Microscope), FTIR,and Nano Indentation techniques were used for characterization of the obtained nano diamond films. It was found that the average grain size was less than 100 nm with a surface roughness value as low as 2 nm. The nano diamond films were found to have excellent transparency in visible and IR spectrum range, and were as hard as natural diamond. Experimental results were presented.Mechanisms for nano diamond film deposition were discussed.     

Preparation of insoluble fibroin films and its tensile property

Silk fibroin is becoming a promising biomate-rial because of its excellent biocompatibility. However, theregenerated fibroin is usually soluble in water and its me-chanical properties should be improved. Although manymethods, such as adding other polymers or treating withmethanol, can ameliorate the mechanical properties andinsolubility, the biocompatibility of fibroin is usually dam-aged in these processes. In this article, it is first reported thatthe insoluble fibroin films are directly prepared withoutmethanol treatment. According to the results of Fouriertransform infrared spectroscope (FTIR) and the X-ray dif-fraction (XRD), the amount of IS-sheet conformation in-creased with the increasing of concentration. When fibroinfilms are dried from 15 wt% at 60℃, the films become in-soluble in water. More importantly, The tensile strength andelongation of the insoluble fibroin films dried from 15% so-lution at 60℃ reached 15.9 MPa and 49.4% respectively in the wet state, which is distinctly superior to the fibroin films treated with methanol.     

纳米氧化铟锡粉体的制备及其复合膜的红外性能研究

以己内酰胺为分散剂,InCl₃·4H₂O、SnCl₄·5H₂O和氨水为原料,采用化学共沉淀法制备了粒径约为20nm的氧化铟锡（ITO）粉体。利用热重分析、X-射线衍射、透射电镜、紫外-可见-近红外光谱等手段对其进行表征。结果表明加入适量的己内酰胺作为分散剂,在650℃煅烧3h能够得到结晶性良好并具有良好的近红外吸收特性的粉体,同时制备了红外屏蔽性能优异的纳米复合膜。     

干摩擦条件下金刚石复合膜摩擦学性能

在干摩擦条件下利用 SRV磨损试验机比较了在硬质合金基体上金刚石薄膜、石墨 /金刚石复合膜以及硬质合金 3种试样的摩擦学性能。利用扫描电子显微镜观察了试样和磨痕的表面形貌。利用表面形貌仪测试了磨损体积。研究了振动频率对试样的摩擦学性能影响。结果表明 ,在干摩擦条件下 ,金刚石薄膜与石墨 /金刚石复合膜的摩擦学性能差别不大 ,二者的磨损机理均为微断裂磨损。在干摩擦条件下 ,高频时金刚石薄膜的耐磨性是硬质合金耐磨性的 8～ 10倍 ,其原因是硬质合金的磨损机理存在着从粘着磨损到微断裂磨损的转变     

基于溶胶凝胶法ITO薄膜材料的制备与表征

基于溶胶凝胶法制备了掺铟二氧化锡(ITO)薄膜,探讨聚乙二醇(PEG)、退火温度、退火过程氧气浓度等因素对ITO薄膜性能的影响。实验结果表明:在相同实验条件下,添加PEG能够降低ITO薄膜表面粗糙度,退火温度会改变ITO薄膜的结晶度,提高含锡量和氧浓度会增加ITO薄膜的电阻率。本研究为ITO埋栅结构气敏传感器制备提供了实验基础。     

Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen

The H-terminated diamond films, which exhibit high surface conductivity, have been used in high-frequency and high-power electronic devices. In this paper, the surface conductive channel on specimens from the same diamond film was obtained by hydrogen plasma treatment and by heating under a hydrogen atmosphere, respectively, and the surface carrier transport characteristics of both samples were compared and evaluated. The results show that the carrier mobility and carrier density of the sample treated by hydrogen plasma are 15 cm2·V-1·s-1 and greater than 5×1012 cm-2, respectively, and that the carrier mobilities measured at five different areas are similar. Compared to the hydrogen-plasma-treated specimen, the thermally hydrogenated specimen exhibits a lower surface conductivity, a carrier density one order of magnitude lower, and a carrier mobility that varies from 2 to 33 cm2·V-1·s-1. The activated hydrogen atoms restructure the diamond surface, remove the scratches, and passivate the surface states via the etching effect during the hydrogen plasma treatment process, which maintains a higher carrier density and a more stable carrier mobility.     

金刚石粉阴极的均匀性及其场发射性能研究

目的研究金刚石场发射阴极处理工艺对场发射电流和阈值电压的影响。方法设计了一个将金刚石粉热粘到金属钛表面的工艺,用XRD和SEM分析不同的金刚石纳米粉超声分散液时热粘结的状况:研究样品的场发射性能。结果用丙酮分散时的粘结表面非常均匀;经氢等离子体处理的表面均匀样品场发射阈值电压为0．5V／μm。结论丙酮分散的纳米金刚石粉热粘接到钛金属表面构成的金刚石粉场发射阴极可以降低发射阈值电压;不同等离子体处理工艺可以改变场发射电流。