Traveling wave ultrasonic motor: coupling effects in free stator

Generally a stator of traveling wave ultrasonic motor (TWUM) consists of piezoelectric transducers (annular plate or rods) coupled by the way of a metallic ring. These transducers divided into halves are excited independently by two electrical signals with different phases of about 90 degrees. So an elastic traveling wave propagates along the circumference of the ring and a rotor pressed on this vibrating surface is then driven by the stator via contact forces. Many difficulties appear in developing TWUM because the contact between the stator and the rotor via a frictional material is very important. However that may be, the first stage consists in obtaining a vibrating stator with optimum characteristics with two symmetrical phases. The aim of this paper is to discuss some coupling effects in a free stator through an enhanced equivalent circuit model. A simple experimental method based on impedance measurements is performed to estimate the coupling characteristics at a low driving voltage. This paper reports results obtained with the free stator of the well known piezoelectric ultrasonic motor "USR60" by Shinsei Co. Ltd. Since the stator behaves as an elastic body, interactions between the two electrical inputs might be described by the introduction of a coupling oscillator. The comparison of experimental and theoretical results leads to validate the new equivalent circuit of the free stator. The presence of coupling impedance could imply a change of electrical supply condition to optimize the TWUM efficiency. The effects of unbalanced features for each electrical input and the applicability of the proposed model to actual operating condition are discussed in the paper.     

Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process

For medical high frequency acoustic imaging purposes the reduction in size of a single transducer element for one-dimensional and even more for two-dimensional arrays is more and more limited by fabrication and cabling technology. In the fields of industrial distance measurement and simple object recognition low cost phased arrays are lacking. Both problems can be solved with micromachined ultrasound transducers (MUTs). A single transducer is made of a large number of microscopic elements. Because of the array structure of these transducers, groups of elements can be built up and used as a phased array. By integrating parts of the sensor electronics on chip, the cabling effort for arrays can be reduced markedly. In contrast to standard ultrasonic technology, which is based on massive thickness resonators, vibrating membranes are the radiating elements of the MUTs. New micromachining technologies have emerged, allowing a highly reproducible fabrication of electrostatically driven membranes with gap heights below 500 nm. A microelectronic BiCMOS process was extended for surface micromechanics (T. Scheiter et al., Proceedings 11th European Conference on Solid-State Transducers, Warsaw, Vol. 3, 1997, pp. 1595-1598). Additional process steps were included for the realization of the membranes which form sealed cavities with the underlying substrate. Membrane and substrate are the opposite electrodes of a capacitive transducer. The transducers can be integrated monolithically on one chip together with the driving, preamplifying and multiplexing circuitry, thus reducing parasitic capacities and noise level significantly. Owing to their low mass the transducers are very well matched to fluid loads, resulting in a very high bandwidth of 50-100% (C. Eccardt et al., Proceedings Ultrasonics Symposium, San Antonio, Vol. 2, 1996, pp. 959-962; P.C. Eccardt et al., Proceedings of the 1997 Ultrasonics Symposium, Toronto, Vol. 2, 1997, pp. 1609-1618). In the following it is shown how the BiCMOS process has been modified to meet the demands for ultrasound generation and reception. Bias and driving voltages have been reduced down to the 10 V range. The electromechanical coupling is now almost comparable with that for piezoelectric transducers. The measurements exhibit sound pressures and bandwidths that are at least comparable with those of conventional piezoelectric transducer arrays.     

Study on the compound multifrequency ultrasonic transducer in flexural vibration

A new type of compound multifrequency ultrasonic transducer is analyzed in this paper. The compound multifrequency ultrasonic transducer consists of two sandwiched ultrasonic transducers and a rectangular radiator. In virtue of the coupling between longitudinal vibration of the sandwiched ultrasonic transducers and flexural vibration of the rectangular radiator, the compound multifrequency ultrasonic transducer can produce several resonance frequencies. Some compound multifrequency ultrasonic transducers are designed and simulated by finite element method (ANSYS), and modal shapes and harmonic response are analyzed. The compound multifrequency ultrasonic transducers are designed and manufactured. The resonance frequencies are measured and compared with the numerical results. The effect of the geometrical dimensions of the compound multifrequency ultrasonic transducer and the location of two sandwiched ultrasonic transducers on the compound multifrequency ultrasonic transducer is discussed. It is shown experimentally and numerically that the compound multifrequency ultrasonic transducer has several resonance frequencies.     

Experimental and finite element modelling studies on single-layer and multi-layer 1-3 piezocomposite transducers

Finite element modelling (FEM) using ATILA code and experimental studies have been carried out on 1-3 piezocomposite transducers. FEM study was initially carried out on a piezocomposite infinite plate and then extended to transducers of finite size. The infinite-plate model results agree well with that of a simple analytical model and experiments. The acoustic performance of multi-layer finite-size piezocomposite transducers was also studied. Transducer stacks were fabricated with different number of layers. The transducer characteristics such as the electrical impedance, the transmitting voltage response (TVR) and the receiving sensitivity (RS) of the 1-3 piezocomposite transducers were evaluated as functions of frequency, ceramic volume fractions and the number of layers. TVR increases and RS decreases with increase in ceramic volume fractions. The model results are found to agree with the experimental data, especially when the number of layers is less.     

Lens-focused transducer modeling using an extended KLM model

The goal of this work was to develop an extended ultrasound transducer model that would optimize the trade-off between accuracy of the calculation and computational time. The derivations are presented for a generalized transducer model, that is center frequency, pulse duration and physical dimensions are all normalized. The paper presents a computationally efficient model for lens-focused, circular (axisymmetric) single element piezoelectric ultrasound transducer. Specifically, the goal of the model is to determine the lens effect on the electro-acoustic response, both on focusing and on matching acoustic properties. The effective focal distance depends on the lens geometry and refraction index, but also on the near field limit, i.e. wavelength and source radius, and on the spectrum bandwidth of the ultrasound source. The broadband (80%) source generated by the transducer was therefore considered in this work. A new model based on a longitudinal-wave assumption is presented and the error introduced by this assumption is discussed in terms of its maximum value (16%) and mean value (5.9%). The simplified model was based on an extension of the classical KLM model for transducer structures and on the related assumptions. The validity of the implemented extended KLM model was evaluated by comparison with finite element modeling, itself previously validated analytically for the one-dimensional planar geometry considered. The pressure field was then propagated using the adequate formulation of the Rayleigh integral for both the extended KLM and finite element results. The simplified approach based on the KLM model delivered the focused response with good accuracy, and hundred-fold lower calculation time in comparison with a mode comprehensive FEM method. The trade-off between precision and time thus becomes compatible with an iterative procedure, used here for the optimization of the acoustic impedance of the lens for the chosen configuration. An experimental comparison was performed and found to be in good agreement with such an extension of the KLM model. The experiments confirm the accuracy of such a model in a validity domain up to −12 dB on the pulse-echo voltage within a relative error of 9% between experiment and modeling. This extended KLM model can advantageously be used for other transducer geometries satisfying the assumption of a predominantly longitudinal vibration or in an optimization procedure involving an adequate criteria for a particular application.     

Vibration of piezoelectric elements surrounded by fluid media

In this paper we analyse vibrational characteristics of piezoceramic shells surrounded by acoustic media. Main results are presented for radially polarized piezoceramic PZT5 elements of hollow cylindrical shapes. The coupling in the radial direction between the solid and the acoustic media is accounted for indirectly, via impedance boundary conditions. The model based on such impedance boundary condition approximations offers a robust simplified alternative to a full scale fluid-solid interaction modelling. By using this model, we analyse numerically the influence of the boundary conditions imposed in the axial direction for long, medium, and short (disk-like) piezoceramic elements.     

Ultrasonic transducers using electron-irradiated vinylidene fluoride-trifluoroethylene copolymers

Single-element, planar transducers have been fabricated using electron-irradiated poly(vinylidene fluoride-trifluoroethylene) 80/20 mol% copolymers with different electron dosage. Electrical field-induced strain response of copolymer film with 100 Mrad dosage has been studied at 5 kHz and the electrostrictive coefficient was calculated. The transmitting response of the air-backing and epoxy-backing transducers was evaluated with the application of high DC bias voltages. Clear ultrasonic amplitudes and high frequency spectrum (>20 MHz) were observed when driven from a standard ultrasonic voltage source through a decoupling circuit. It has also showed that larger generation of ultrasonic waves will be induced under high DC bias field, which is due to the increase of induced d(33) piezoelectric coefficient. Two different polar bias voltages, positive and negative, were applied to the transducers and inverse waveforms were received, which was coincident with the theoretical analysis of the strain response of electrostrictive film.     

The influence of the thickness of non-piezoelectric pieces on pre-stressed piezotransducers

The mechanical pre-stress applied in piezotransducers used to generate high power ultrasound is needed to avoid ceramics fracture on traction cycle. Pre-stress levels inferior to 50 MPa can yield resonance shifting due to effectiveness of acoustic coupling between transducer pieces. Symmetrical transducers with different thickness of passive parts were submitted to axial mechanical pre-stress up to 50 MPa and their resonances were measured. The experimental results show the increasing of the resonances frequencies with the level of applied pre-stress. Similar effect is verified in simulations by using a model based on Mason's equivalent electric circuit. Due to the similarity of these effects, a relation between applied pre-stress and pieces coupling was proposed for the transducer assembled. In addition, the dependence of the thickness of non-piezoelectric pieces on the coupling effectiveness between them is discussed. The results show that transducers with small thickness present more expressive shifting resonance ratio.     

The characterization of capacitive micromachined ultrasonic transducers in air

Surface micromachined, capacitive ultrasonic transducers have been fabricated using a low thermal budget, CMOS-compatible process. They exhibit interesting properties for transduction in air at frequencies in excess of 1 MHz, when driven from a standard ultrasonic voltage source. Experiments are described using 1 mm square devices in air, operating in both pitch-catch and pulse-echo modes. The dependence on d.c. bias voltage is examined, together with calibration measurements using 1/8 in. microphones. The radiated beam profile, and the farfield directivity pattern, have been measured for both broad bandwidth and one-burst excitation, using a scanned miniature receiver. A 16 element square array is also presented, which has been used to measure the beam cross-sections from a focussed source.     

Thin-disc piezoceramic ultrasonic motor. Part II: system construction and control

Design and performance evaluation of an ultrasonic motor was discussed in [Wen et al., Thin-disc piezoelectric ultrasonic motor. Part I: design and performance evaluation, Ultrasonics]. Higher precision position control of piezoceramic ultrasonic motor depends on mechanical design and servo control of a very precise and adequate metrology. This paper proposes the design of a driving circuit and controller to deal with non-linearities behavior in the model of piezoceramic-driving ultrasonic motor. The performance of the driver and the effectiveness of the proposed controller are demonstrated by command inputs of sinusoidal and step signals. For comparison purpose, the ultrasonic motor is controlled using two methods: i.e., proportional-integral-derivative (PID) and sliding-mode control (SMC). It was proven that SMC would compensate automatically for unmodeled behaviors such as piezoceramic non-linearities and mechanical stick-slip phenomena. Furthermore, SMC scheme has been successfully applied to position tracking to demonstrate the excellent robust performance in noise rejection.     

Harmonic analysis of lossy, piezoelectric composite transducers using the plane wave expansion method

Periodic composite ultrasonic transducers offer many advantages but the periodic pillar architecture can give rise to unwanted modes of vibration which interfere with the piston like motion of the fundamental thickness mode. In this paper, viscoelastic loss is incorporated into a three-dimensional plane wave expansion model (PWE) of these transducers. A comparison with experimental and finite element data is conducted and a design to damp out these lateral modes is investigated. Scaling and regularisation techniques are introduced to the PWE method to reduce ill-conditioning in the large matrices which can arise. The identification of the modes of vibration is aided by examining profiles of the displacements, electrical potential and Poynting vector. The dispersive behaviour of a 2-2 composite transducer with high shear attenuation in the passive phase is examined. The model shows that the use of a high shear attenuation filler material improves the frequency band gap surrounding the fundamental thickness mode.     

Medical imaging using capacitive micromachined ultrasonic transducer arrays

We are investigating the use of capacitive micromachined ultrasonic transducers (cMUT's) for use in medical imaging. We propose an ultrasound probe architecture designed to provide volumetric ultrasound imaging from within an endoscope channel. A complete automated experimental system has been implemented for testing the imaging performance of cMUT arrays. This PC-based system includes custom-designed circuit boards, a software interface, and resolution test phantoms. We have already fabricated 1D and 2D cMUT arrays, and tested the pulse-echo imaging characteristics of 1D arrays. Beamforming and image formation algorithms that aim to reduce the complexity of data acquisition hardware are tested via numerical simulations and using real data acquired from our system.     

Design and analysis of vibration isolation systems for hard disk drives

Hard disk drives (HDD) are increasingly being used in mobile applications and consumer electronic devices in potentially harsh dynamic environments. In mission-critical applications such as in computers on board trains and military vehicles, the vibration experienced by the operating HDD can be very severe. An effective suspension system is necessary to isolate the HDD from the strong vibration transmitted from the ground, vehicle engine, etc. This paper gives details on how to design, test and evaluate vibration isolation systems for operating HDD subjected to very severe random vibrations based on military specifications MIL-STD-810E. One design is presented and evaluated based on well-defined criteria. Design principles on how to achieve the required degree of vibration isolation is described. A computer simulation model of an example design is formulated and correlated with experiments. It is shown that a low-cost, vibration isolation system can indeed be made that will allow an HDD to operate well when subjected to strong input vibration.     

Micromachined ultrasonic transducers and arrays based on piezoelectric thick film

This paper reports on the design, fabrication, and characterization of diaphragm-type piezoelectric micromachined ultrasonic transducer (pMUT) and arrays. A combination of piezoelectric composite thick film techniques and silicon micromachining has been proven to be a promising approach for a batch production of pMUTs, especially pMUT transmitter arrays for ultrasound radiation. In this paper, some important issues related to the pMUT element design and micromachining processes are addressed. Thanks to the well-developed processing technology, pMUTs and arrays operating at different resonance frequencies by dimension variation have been successfully fabricated with a high yield for possible mass manufacturing. The characterization of piezoelectric composite thick film will be briefly reported. The performance of the prototype devices has been characterized in terms of vibration modes, dependency of the resonance frequency on bias voltage, nonlinearity, electromechanical coupling efficiency, equivalent circuit, output sound pressure level and directivity of a two-dimensional pMUT array. PACS 85.50.-n; 85.85.+j     

面向水下应用的电容式微机械超声换能器*

电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器。该文针对图像声呐系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965 MHz,6 dB相对带宽达到109.4%,在1 MHz、2 MHz和3 MHz频率时的接收灵敏度分别为-218.29 d B、-219.39 dB和-218.11 dB。该文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。     

Finite element modelling of dense and porous piezoceramic disc hydrophones

The acoustic characteristics of dense and porous piezoceramic disc hydrophones have been studied by finite element modelling (FEM). The FEM results are validated initially by an analytical model for a simple disc of dense piezoceramic material and then it is extended to a porous piezoceramic disc replicating a foam-reticulated sample. Axisymmetric model was used for dense piezoceramic hydrophone due its regular geometric shape. 3-dimensional model was used for the porous piezoceramics, since the unit cell model is inadequate to fully represent transducers of finite lateral dimensions. The porous PZT discs have been synthesised by foam-reticulation technique. The electrical impedance and the receiving sensitivity of the hydrophones in water are evaluated in the frequency range 10-100 kHz. The model results are compared with the experimental data. The receiving sensitivity of piezocomposite hydrophones is found to be reasonably constant over the frequency range studied. The sharp resonance peaks observed for the dense piezoceramic hydrophone has broadened to a large extent for porous piezoceramic hydrophones, indicating higher losses. The flat frequency response suggests that the 3-3 piezocomposites are useful for wide-band hydrophone applications.     

A theoretical study of ultrasonic wave transmission through a fluid-solid interface

This article develops a model for the study of the transient ultrasonic waves radiated by a transducer in a liquid and transmitted into a solid through a plane interface. The method is an extension to the transient case, of the angular spectrum method previously developed for the monochromatic case. It is based on the decomposition of the ultrasonic field, in impulse plane waves. The radiated waveform is calculated at any point in the field by a simple summation of these impulse plane waves, where the propagation delay and the refraction have been taken into account. These plane waves are, first of all, delayed by an amount of time corresponding to the travel time up to the considered field point. The transmission through the plane interface is taken into account by using Snell refraction laws and transmission coefficients. In the obtained results all the waves previously described by other authors are highlighted: direct wave, edge waves, head waves as well as subsurface waves with a clear resolution between compression and shear waves.     

Correction of ultrasonic array images to improve reflector sizing and location in inhomogeneous materials using a ray-tracing model

The use of ultrasonic arrays has increased dramatically within recent years due to their ability to perform multiple types of inspection and to produce images of the structure through post-processing of received signals. Phased arrays offer many advantages over conventional transducers in the inspection of materials that are inhomogeneous with spatially varying anisotropic properties. In this paper, the arrays are focused on austenitic steel welds as a representative inhomogeneous material. The method of ray-tracing through a previously developed model of an inhomogeneous weld is shown, with particular emphasis on the difficulties presented by material inhomogeneity. The delay laws for the structure are computed and are used to perform synthetic focusing at the post-processing stage of signal data acquired by the array. It is demonstrated for a simulated austenitic weld that by taking material inhomogeneity and anisotropy into account, superior reflector location (and hence, superior sizing) results when compared to cases where these are ignored. The image is thus said to have been corrected. Typical images are produced from both analytical data in the frequency domain and data from finite element simulations in the time domain in a variety of wave modes, including cases with mode conversion and reflections.     

DPSM technique for ultrasonic field modelling near fluid-solid interface

Distributed point source method (DPSM) is gradually gaining popularity in the field of non-destructive evaluation (NDE). DPSM is a semi-analytical technique that can be used to calculate the ultrasonic fields produced by transducers of finite dimension placed in homogeneous or non-homogeneous media. This technique has been already used to model ultrasonic fields in homogeneous and multi-layered fluid structures. In this paper the method is extended to model the ultrasonic fields generated in both fluid and solid media near a fluid-solid interface when the transducer is placed in the fluid half-space near the interface. Most results in this paper are generated by the newly developed DPSM technique that requires matrix inversion. This technique is identified as the matrix inversion based DPSM technique. Some of these results are compared with the results produced by the Rayleigh-Sommerfield integral based DPSM technique. Theory behind both matrix inversion based and Rayleigh-Sommerfield integral based DPSM techniques is presented in this paper. The matrix inversion based DPSM technique is found to be very efficient for computing the ultrasonic field in non-homogeneous materials. One objective of this study is to model ultrasonic fields in both solids and fluids generated by the leaky Rayleigh wave when finite size transducers are inclined at Rayleigh critical angles. This phenomenon has been correctly modelled by the technique. It should be mentioned here that techniques based on paraxial assumptions fail to model the critical reflection phenomenon. Other advantages of the DPSM technique compared to the currently available techniques for transducer radiation modelling are discussed in the paper under Introduction.     

Design and construction of shaft-driving type piezoceramic ultrasonic motor

A new approach in design of shaft-driving type piezoceramic ultrasonic motor is proposed. The stator of motor consisted of a commercial available buzzer disk in which a piezoceramic membrane is adhered to a metal sheet. The wave propagation on the metal sheet was generated by extended-shrunk force from piezoceramic oscillation. Driving energy came from the vibration modes by mechanical-electrical oscillation of the metal sheet in corresponding to converse piezoelectric effect using a single-phase AC voltage power. Where the relative elliptic motion was occurred between the bearing seat and rotor in order to kinematical delivery, the rotor being driven was connected directly on the bearing seat to transmit the dynamic power with frictional contact force. In analysis of dynamic features, the system transfer function of admittance and equivalent circuit was obtained. The rotating speed of the prototype motor could be reached as high as 2000 rpm on the driving condition of 72 kHz, +/-10 V(pp), and 0.2 A. The maximum torque was less than 0.003 Nm. It could be utilized in the driver of CD, or the cooling fan in the computer CPU.