干涉光谱仪动镜倾斜误差容限分析

本文从调制度和相位误差角度,系统分析了双光束干涉光谱仪中,当光束孔径为圆形和矩形时,动镜运动过程中发生倾斜的影响,讨论了动镜倾斜容限以及减小动镜倾斜误差的方法.     

Fringe Locking in a Laser Diode Interferometer under Both Mirror Vibration and Injection Current Modulation

We have found that the fringes in a laser diode interferometer can be locked even in the presence of mirror vibration and injection current modulation. A theoretical analysis explains the fringe locking phenomenon. The dependence of wavelength change on both PZT (piezoelectric transducer) mirror vibration and the injection current variation are calculated using a model of coupled resonators consisting of the laser cavity and the interferometer. The fringe phase change caused by the vibration and modulation of the current is derived from this model, and was proven to be suppressed within much less than 2ϖ in excess of an integer multiple of 2ϖ.     

Fringe Locking in a Laser Diode Interferometer by Optical Feedback During Modulation of Injection Current

A fringe locking phenomenon in a two beam interferometer using a semiconductor laser subject to optical feedback was, whose injection current is modulated. When a path difference of the interferometer is sufficient, fringes taken by a charge coupled device camera are seen to be stationary and the rms fluctuations of fringe phase is reduced to as low as 0.2ϖ radians from more than 8ϖ radians without the optical feedback. The rms phase fluctuation is independent of frequency and amplitude of the current modulation. The fringe locking has also been observed in the presence of both injection current modulation and piezoelectric transducer mirror vibration.     

Estimation of frequency characteristics of the Tonpilz piezoelectric transducer with a bending piezoelectric disk

A Tonpilz piezoelectric transducer which has a bending piezoelectric disk on the radiation surface for widening the frequency band to improve sonar detection performance in shallow water has been proposed. Variance of transmitting voltage response of this transducer depend on the phase difference between signals which applies to the ring-stack and the bending-disk piezoelectric resonators. Thus, an estimation of an optimal phase difference, which can be applied for obtaining the maximum value of transmitting voltage response, is important factor to assemble sonar array with sonar transducers. In this paper, we applied three methods to estimate transmitting voltage response at an arbitrary phase difference from a few measurements, and the estimation errors of those methods affected by internal impedances of power sources and/or noise are investigated to select the best method. The effectiveness of the best method was verified by water-pool experiments.     

Calibration of a low-cost piezoelectrical mirror for DSPI

A cheap piezoelectrically driven mirror can be easily constructed in the laboratory. It can be located in one arm of a DSPI interferometer in order to introduce a controlled phase step. A procedure to calibrate this device is shown, that is based on the evaluation of the fringes obtained with the interferometer, by mean of the cross-correlation between profiles of the fringes. To evaluate the performance of the calibrated device, the phase map of a simulated plane object is calculated, using the four-step algorithm for the images of a speckle interferogram.     

相位恢复测量长焦距镜面

针对长焦距光学镜面检测中测量光路长,振动干扰较大,不容易用干涉仪进行面形检测的难题,提出了一种基于相位恢复技术的测量方法.该方法用相干点光源照射被测镜,采集一系列焦点附近的衍射光强图像,然后运用相位恢复算法得到镜面面形误差分布.利用衍射光学理论建立了测量模型,并用基于Gerchberg-Saxton算法的迭代算法求解模型.然后仿真验证了光场传播模型的可靠性和测量算法的有效性,并用该方法测量了一块曲率半径8 700 mm,口径145 mm的球面镜.通过对光强图像位置进行优化,并选择适当离焦位置的图像,最终恢复出了镜面面形.相位恢复测量的结果与动态干涉仪测量结果基本一致,并且测量装置简单,对环境要求低.     

相位恢复测量长焦距镜面(英文)

针对长焦距光学镜面检测中测量光路长,振动干扰较大,不容易用干涉仪进行面形检测的难题,提出了一种基于相位恢复技术的测量方法.该方法用相干点光源照射被测镜,采集一系列焦点附近的衍射光强图像,然后运用相位恢复算法得到镜面面形误差分布.利用衍射光学理论建立了测量模型,并用基于Gerchberg-Saxton算法的迭代算法求解模型.然后仿真验证了光场传播模型的可靠性和测量算法的有效性,并用该方法测量了一块曲率半径8700mm,口径145mm的球面镜.通过对光强图像位置进行优化,并选择适当离焦位置的图像,最终恢复出了镜面面形.相位恢复测量的结果与动态干涉仪测量结果基本一致,并且测量装置简单,对环境要求低.     

全光纤傅里叶变换光谱仪的关键技术研究

研究一种基于光纤Mach-Zehnder干涉仪结构的全光纤傅里叶变换光谱仪(fiber fourier transform spectrometer, FFTS)。设计了光程调制范围可达2 cm的压电陶瓷光纤相位调制器,代替传统傅里叶变换光谱仪中的动镜产生光程扫描。实验中采用1 310 nm DFB激光器作为参考光源,对测试光干涉图进行等光程间隔采样,以消除压电陶瓷非线性光程调制产生的误差。通过对测试光干涉图做傅里叶逆变换得到测试光光谱图。利用该FFTS系统测量了ASE宽带光源的光谱,并将测量结果和光栅光谱仪测量结果进行了对比,结果表明两者所测ASE光谱线型一致。最后,利用光纤光栅作为样品,对FFTS系统的光谱分辨率进行了检测,光谱分辨率达到了0.78 cm-1。     

Self-calibration of a phase-shifting adapter for Fizeau interferometers

Phase-shifting interferometers with three piezoelectric transducers (PZTs) on their phase-shifting adapter (PSA) are widely used in precision measurement. The guarantee of the PSA to stretch as a flat is very important to the accuracy of the measurement. In this paper, we propose a systematic self-calibration method to calibrate the different displacements of the PZTs so that the PSA can be moved evenly as a flat. The proposed method uses only the interference patterns to calibrate the three PZTs and information about the exact position of the PZTs and the instrument parameters of the interferometer are not required. Experimental results show that, after calibration by the proposed method, the deviation of the measured phase shift error could be reduced about 43.1 times from 3.492 to 0.081°.     

A sinusoidal phase-modulating fiber-optic interferometer insensitive to the intensity change of the light source

In a conventional laser-diode sinusoidal phase-modulating (LD-SPM) interferometer, the wavelength of the LD is modulated by varying its injection current. The intensity modulation concurrent with the wavelength modulation leads to measurement errors. A photothermal-modulation method has been proposed to decrease the intensity change of the LD; however, this method cannot be used to measure vibration with a high frequency, and the beam diameter is too large to be used to measure minute objects. In this paper, we propose LD-SPM fiber-optic interferometer, in which the effect of the intensity change of the light source on measurement is eliminated. The diameter of the light beam is less than 0.5 mm. Using this interferometer, we measured displacements of a mirror driven by a piezoelectric transducer. The measurement repeatability is less than 1 nm.     

Common path interferometer based on the modified Michelson configuration using a reflective grating

A common-path interferometer using the modified Michelson system with a reflective grating is proposed for quantitative phase imaging. The frequency spectrum of the object beam is split into two beams using a beam splitter. One beam is diffracted into +1, 0, and −1 orders by the reflective grating to act as an object beam, and the other beam is low-filtered and diffracted by a pinhole mirror to act as a reference beam. Three phase-shifted interferograms can be simultaneously captured using the proposed interferometer, and the specimen phase can then be reconstructed from the three interferograms. Experiments are carried out to prove the precision, real-time ability, and stability of the proposed method.     

Spherical mirror estimation with phase diversity method

In order to verify the phase diversity wavefront detector system by using its own light source to complete the wavefront estimation task independently, this paper sets up estimation spherical mirror shape of experiment platform with the method of phase diversity. Phase diverisity method collects shorter exposure image at the same time in the focal plane and away from the focal plane, calculates the distribution of wavefront solutions and recovers the target based on known defocus, so as to realize the estimation of large mirror aberration. In order to further validate the phase diversity measurement method, the phase diversity measurement results with high accuracy ZYGO interferometer measurement results are compared. Experimental results demonstrate that agreement is obtained among the errors distribution, PV value and RMS value of ZYGO interferometer, so the phase diversity method can effectively estimate the mirror aberration, which shows the feasibility and accuracy of phase diversity method.     

A laser feedback interferometer with an oscillating feedback mirror

A method is proposed to solve the problem of direction discrimination for laser feedback interferometers.By vibrating the feedback mirror with a small-amplitude and high-frequency sine wave,laser intensity is modulated accordingly.The modulation amplitude can be extracted using a phase sensitive detector(PSD).When the feedback mirror moves,the PSD output shows a quasi-sine waveform similar to a laser intensity interference fringe but with a phase difference of approximately ±π/2.If the movement direction of the feedback mirror changes,the phase difference sign reverses.Therefore,the laser feedback interferometer offers a potential application in displacement measurement with a resolution of 1/8 wavelength and in-time direction discrimination.Without using optical components such as polarization beam splitters and wave plates,the interferometer is very simple,easy to align,and less costly.     

采用环路径向剪切干涉法测量液晶电视的相位调制特性

提出了一种测量液晶电视相位调制特性的新方法,并对液晶电视在该干涉仪中形成的条纹图进行了解释,对EPSONP13VM125液晶电视的相位调制特性进行了实际测量,结果表明该测试方法能实现液晶电视相位调制特性的全场、快速和准确测量.     

A speckle-shearing interferometer: A tool for measuring derivatives of surface displacements

A speckle-shearing interferometer is developed using a sheared Michelson interferometer. The tool, like speckle interferometry, utilizes the speckle effect of coherent light. However, while speckle interferometry measures surface displacements, the speckle-shearing interferometer determines the derivatives of the surface displacements. Hence, it eliminates the necessity of differentiating the measured displacements to obtain strain.     

迭代最小二乘法用于非线性移相器的标定

针对移相干涉仪中移相器的非线性会影响测量结果准确性的问题,提出了一种基于迭代最小二乘拟合的标定干涉仪移相器的新方法。对移相器加电压并采集若干幅干涉图后,通过在帧间和帧内迭代开展最小二乘拟合可计算出干涉图间移相值,从而得出了电压值与移相值的对应关系曲线,通过对曲线作非线性拟合并对电压值进行精密调整,完成移相器的精确标定。在改造后的干涉仪上对此标定方法进行验证,与Zygo干涉仪相比,相同元件下两者测量结果之差的RMS值为1.726 nm。该标定方法可以降低高精度面形测量干涉仪对移相器线性度的要求。     

Lissajous figures in the application of micro-vibration measurement

Based on Michelson interferometer and phase generated carrier (PGC) homodyne demodulation technique, an optical interferometer system is built, and a novel method using the central angles of Lissajous figures to measure micro-vibration displacement is proposed. The Lissajous figures are obtained by synthesizing two interferometric signals that their vibration directions are orthogonal and their intensities are equal. Through theoretical analysis, software simulation and experimental test, it is concluded that the central angles of Lissajous figures have a linear relationship with the phase modulation coefficients and the micro-vibration displacements when the phase modulation coefficients are small. So the micro-vibration displacements can be directly obtained by measuring the central angles of Lissajous figures. The method is simple and convenient. The experimental results indicate that the micro-vibration displacements measuring range can reach 5-775 nm, with a resolution of about 5 nm.     

Photonic microwave phase shifter/modulator based on a nonlinear optical loop mirror incorporating a Mach-Zehnder interferometer

We realize a novel photonic microwave phase shifter/modulator based on a nonlinear optical loop mirror incorporating a Mach-Zehnder interferometer. A near-linear phase shifter exceeding 180 degrees and a phase modulation with 2.5 Gbit/s baseband signal are obtained for a 10 GHz microwave signal by this proposed device.     

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.     

Changing photo-written Bragg wavelengths of fiber gratings via one phase mask and four mirrors

A phase mask interferometer is developed to photo-write long gratings with arbitrary Bragg wavelengths. In this system, the fiber Bragg grating is photo-written by UV interference stripes of 193 nm reflected from two rotatable mirrors and two fixed mirrors, where the phase mask is not only used as a beam splitter, but also initialized the reference quantity of Bragg wavelength; the fixed mirrors are used for reducing the incident angle; the rotatable mirrors are used for adjusting the corresponding photo-written Bragg wavelength. It is worth noting that the photo-written length is fourfold as high as the length in the Talbot interferometer with the same mirror size.