立方氮化硼薄膜的生长特性与粘附性研究

用X射线衍射技术、红外吸收光谱、扫描电子显微镜、X射线光电子能谱对热丝辅助射频等离子体化学汽相沉积法制备的立方氮化硼(c-BN)薄膜的生长特性和粘附性进行了研究.改变生长条件，在Si、不锈钢和Ni衬底上沉积c-BN薄膜，进而研究了c-BN薄膜的质量和生长条件与衬底之间的关系.实验发现，Ni衬底上生长的薄膜c-BN含量较高，且粘附性好.当Si衬底上溅射一层Ni过渡层，再生长c-BN薄膜，薄膜中c-BN含量提高，与Si衬底的粘附性也显著增强. 关键词：     

衬底材料对制备立方氮化硼薄膜的影响

较系统地研究了不同衬底材料对制备氮化硼薄膜的影响。用热丝增强射频等离子体CVD法,以NH3,B2H6和H2为反应气体,在Si,Ni,Co和不锈钢等衬底材料上,成功生长出高质量的立方氮化硼薄膜,还用13.56MHz的射频溅射系统将c-BN薄膜沉积在Si衬底上,靶材为h-BN(纯度为99.99％）,溅射气体为氩气和氮气的混合气体,所得到的氮化硼薄膜中立方相含量高于90%,用X射线衍射谱和傅里叶变换红谱对样品进行了分析表明,衬底材料与c-BN的晶格匹配情况,对于CVD生长立方氮化硼薄膜影响很大,而对溅射生长立方氮化硼薄膜影响不大。     

Yield strengths and stress induced crackles in copper films：effects of substrate and passivated layer

Yield strengths in unpassivated and 530 nm TiN passivated Cu films deposited on Ti, high-speed steel and Ni substrates have been measured by x-ray diffraction (XRD) in combination with the four-point bending method. The results show that, although the texture and average grain size, investigated by XRD and transmission electron microscopy respectively, do not vary with different substrate, the yield strength of the Cu film increases obviously when a thin passivated layer is present and varies slightly with substrates. Many crackles appear in the passivated Cu film on Ti substrate but do not appear in other samples. The experimental results have been explained satisfactorily with an expression for the yield strength of thin films given previously.     

LiFePO4 thin films grown by pulsed laser deposition: Effect of the substrate on the film structure and morphology

Well crystallized and homogeneous LiFePO₄/C (LFPO) thin films have been grown by pulsed laser deposition (PLD). The targets were prepared by the sol-gel process at 600 °C. The structure of the polycrystalline powders was analyzed with X-ray powder diffraction (XRD) data. The XRD patterns were indexed having a single phase olivine structure (Pnma). LFPO thin films have been deposited on three different substrates: aluminum (Al), stainless steel (SS) and silicon (Si) by pulsed laser deposition (PLD). The structure of the films was analyzed by X-ray diffraction (XRD), Raman spectroscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM) and atomic force microscopy (AFM). It is found that the crystallinity of the thin films depends on the substrate temperature which was set at 500 °C. When annealed treatments were used, secondary phases were found, so, one step depositions at 500 °C were made.Stainless steel is demonstrated to be the best choice to act as substrate for phosphate deposition. LiFePO₄ thin films grown on stainless steel plates exhibited the presence of carbon, inducing a slight conductivity enhancement that makes these films promising candidates as one step produced cathodes in Li-ion microbatteries.     

Formation of thin graphite films upon carbon diffusion through nickel

Experimental results on the synthesis of thin graphite films with the aid of annealing of nickel films on carbon substrate are presented. Highly oriented pyrolitic graphite is used as the substrate to provide structural quality of the deposited nickel film. It is shown that the cyclic annealing of the structure with intermediate cooling leads to crystallization of primary amorphous carbon into a film consisting of flakes of vertical graphene. The process of graphite formation is discussed.     

Effect of substrate temperature on the surface and interface oxidation of NiTi thin films

NiTi shape memory alloy thin films are deposited on pure Cu substrate at substrate ambient temperatures of 300 °C and 450 °C. The surface and interface oxidation of NiTi thin films are characterized by X-ray photoelectron spectroscopy (XPS). After a subsequent annealing treatment the crystallization behavior of the films deposited on substrate at different temperatures is studied by X-ray diffraction (XRD). The effects of substrate temperature on the surface and interface oxidation of NiTi thin films are investigated. In the film surface this is an oxide layer composed of TiO₂. The Ni atom has not been detected on surface. In the film/substrate interface there is an oxide layer with a mixture Ti₂O₃ and NiO in the films deposited at substrate temperatures 300 °C and 450 °C. In the films deposited at ambient temperature, the interface layer contains Ti suboxides (TiO) and metallic Ni.     

Electronic and structural properties of graphene-based transparent and conductive thin film electrodes

We demonstrate that graphene-based transparent and conductive thin films (GTCFs), fabricated by thermal reduction of graphite oxide, have very similar electronic and structural properties as highly oriented pyrolytic graphite (HOPG). Electron spectroscopy results suggest that the GTCFs are also semi-metallic and that the individual graphene sheets of the film are predominantly oriented parallel to the substrate plane. These films may therefore be considered as a technologically relevant analogue to HOPG electrodes, which cannot be easily processed into thin films.     

FTIR法研究BCN薄膜的内应力

采用射频磁控溅射技术,用六角氮化硼和石墨为溅射靶,以氩气(Ar)和氮气(N₂)为工作气体,在Si(100)衬底上制备出硼碳氮(BCN)薄膜。利用傅里叶变换红外光谱(FTIR)考察了不同沉积参数(溅射功率为80～130 W、衬底温度为300～500 ℃、沉积时间为1～4 h)条件下制备的薄膜样品。实验结果表明,所制备薄膜均实现了原子级化合。并且沉积参数对BCN薄膜的生长和内应力有很大影响,适当改变沉积参数能有效释放BCN薄膜的内应力。在固定其他条件只改变一个沉积参数的情况下,得到制备具有较小内应力的硼碳氮薄膜的最佳沉积条件：溅射功率为80 W、衬底温度为400 ℃、沉积时间为2 h。     

Characterisation of Ni-C films obtained in PVD/CVD process

The work presents the results of the scanning electron microscopy (SEM) and Raman spectrometry studies of carbonaceous nanostructures containing nickel nanocrystallites. The films were obtained using a two-step method. In the first phase the Physical Vapour Deposition (PVD) method was applied, whereas in the second Chemical Vapour Deposition (CVD) method was used. The paper presents results for samples with various Ni content obtained with different parameters of the two-phase technological process. The research confirms that the thin films obtained by PVD method contain Ni nanocrystallites distributed in a carbonaceous matrix. The matrix is composed of various carbon allotropes (amorphous carbon, graphite, fullerene). The thin films made by CVD method make a matrix when multiwalled, carbonaceous nanotubes are obtained. Depending on the technological process parameters of each phase, we obtain multiwall nanotubes with a various degree of defects.     

用YAG激光制备类金刚石薄膜及其光学折射率研究

用高功率的Ｎｄ＾３＋：ＹＡＧ脉冲激光轰击真空室内的石墨靶，形成激光等离子体雾状物质，在硅衬底上沉积形成类金刚石薄膜，用椭圆偏振光谱法测量不同衬底温度下制备的系列样品的厚度和折射率，发现随着衬底温度的升高，薄膜的厚度减小而的折射率增大，这种可以控制折射率米化的薄膜，可能为光学增透增反膜的制备提供一种新方法。     

Influence of substrate activation process on structural and optical properties of ZnS thin films

ZnS thin films were deposited on glass substrates by a chemical bath deposition method using a substrate activation process in which aluminum ions become “contaminants” that act as a nucleation center for active components within the deposition solution. The structure and morphology results demonstrate that the films have a ZnS sphalerite crystal structure with a particle size less than 15 nm, and the films consist of small homogeneous grains. The effects of the substrate activation process on the band gap energies and donor-acceptor pair luminescence process were also investigated. A green emission centered at 502 nm was produced due to donor-acceptor transitions from the aluminum acceptor to the ionized and substitution aluminum centers (Al³⁺).     

Distribution of Clusters Formed by sp2- and sp3-Bonds in a Carbon Diamond-like Thin Film

Technical Physics - Experimental studies of carbon thin films obtained by condensation of carbon from the vapor–gas phase onto a metal substrate are presented. Evaporation of graphite targets...     

Method for producing graphite and alumina thin films

A simple comprehensible method for producing graphite and alumina films has been suggested. The optical properties of a graphite suspension in toluene and a suspension of natural clay with a high content of alumina particles in water have been studied. It has been found that the optical density of the suspensions varies from layer to layer, and the lowest optical density has been observed in upper layers. Graphite and aluminum films have been prepared by taking samples from different depths. The microstructure of the films has been examined. It has turned out that alumina particles coalesce into regularly shaped objects in the form of snowflakes. In addition, alumina films obtained from samples taken from different depths of the suspension have different thicknesses. In thin and thick films, the particle size is 0.29 and 2.81 μm or more, respectively.     

生长条件对脉冲激光沉积制备ZnO：Al薄膜光电性能的影响

本文研究了脉冲激光沉积(PLD)生长过程中, 铝掺量、氧压及衬底温度等实验参数对ZnO:Al(AZO)薄膜生长的影响, 并利用扫描电子显微镜、原子力显微镜、X射线衍射、霍尔效应、光透射光谱等实验手段对其透明导电性能进行了探讨. 变温霍尔效应和光透射测量表明, 当靶材中铝掺量大于0.5 wt%时, 所制备AZO薄膜中铝施主在80 K时已完全电离, 因Bernstein-Moss (BM) 效应其带隙变大, 均为重掺杂简并半导体. 进一步系统研究了氧压和衬底温度对AZO薄膜透明导电性能的影响, 实验发现当氧压为1 Pa, 衬底温度为200 ℃时, AZO 导电性能最好, 其霍尔迁移率为28.8 cm²/V·s, 薄膜电阻率最小可达2.7×10^-4 Ω·cm, 且在可见光范围内光透过率超过了85%. 氧压和温度的增加, 都会导致薄膜电阻率变大. 关键词： 脉冲激光沉积法 ZnO：Al薄膜 透光性 导电性     

Nanoscopic surface patterns of diblock copolymer thin films

The surface topography of thin diblock copolymer films is studied by atomic force microscopy (AFM). With AFM an island-to-ribbon transition is observed for symmetric polystyrene-b-poly (4-vinylpyridine) (PS-b-P4VP) on mica with increasing solution concentration. Our study also demonstrates how the formation of the pattern strongly depends on the copolymer composition based on the volume fraction. The substrate and solvent used both have great effects on the morphology of the thin films. Only by using highly polar substrate (mica), can we gain regular pattern. The reason why the regular islands cannot be obtained with symmetric PS-b-P4VP on graphite is also explained. On mica using nonselective and selective solvents, a rather regular pattern can be obtained. The difference is only in the solution concentration for forming regular patterns.     

Solid state photoelectrochemical cells utilising graphite thin films counter electrode

This paper reports the use of graphite thin films as a counter electrode of a solid state photoelectrochemical cells of ITO/TiO₂/PVC-LiClO₄/graphite. The photoelectrochemical cells material was a screen-printed layer of titanium dioxide onto an ITO-covered glass substrate which was used as a working electrode of the device. The solid electrolyte used was PVC-LiClO₄ that was prepared by solution casting technique. The graphite films which serve as a counter electrode were prepared onto glass substrate by electron beam evaporation technique at substrate temperatures variation of 25, 50, 100, 150 and 200 °C. The dependence of sheet resistance and surface morphology of the graphite films on substrate temperature were studied. The films deposited at 25 °C shows the smoothest surface morphology and the smallest grain size. Bigger grain size, rougher surface morphology of graphite film counter electrode. The current-voltage characteristics of four devices utilising the graphite counter electrode with different substrate temperature in dark as well as under illumination of 100 mWcm⁻² light from a tungsten halogen lamp were recorded at room temperature and at 50 °C, respectively. It was found that the photovoltaic parameters of the device such as short-circuit current density, J_sc and open-circuit voltage, V_oc increases with the decreasing average grain size of the graphite counter electrode. The device whose graphite film counter electrode was deposited onto the glass substrate at 25 °C gave the highest J_sc of 0.32 μA/cm² and V_oc of 117 mV, respectively.     

Morphology, magnetic, magnetoresistance and optical properties of Co-Ni-Mo alloys thin films

We present in this paper several results concerning the preparation by means of electrolysis and characterization of Co-Ni-Mo thin films. Co-Ni-Mo thin films with different molybdenum content in the range 0-25 at% Mo were prepared from a complex solution containing ions of Co, Ni and Mo, using galvanostatic control, on aluminum substrates. The effects of applied current density on the morphology, magnetic, magnetoresistance, and optical properties of the electrodeposited Co-Ni-Mo films were investigated. The applied current density significantly influenced the film composition and their magnetic properties. The increase of molybdenum content in Co-Ni films (up to 25 at% Mo) enhances the resistivity, but it reduces the magnetoresistance effect. We report the first observation of magnetoresistance as high as 8% in Co-Ni-Mo thin films.     

有机纳米信息存储中的结构转变

采用真空热蒸发方法制备了有机单体薄膜对硝基苯腈p-nitrobenzonitrile(PNBN).利用扫描隧道显微镜(STM)在PNBN薄膜上进行信息记录点的写入,通过在STM针尖和高定向裂解石墨(HOPG)之间施加电压脉冲,直接观察到了信息记录点写入前后薄膜发生的局域结构转变.信息记录点的写入机制主要是这种纳米范围结构变化所导致的薄膜由高阻态向低阻态转变,高阻态对应0,低阻态对应1. 关键词： p-nitrobenzonitrile(PNBN) 扫描隧道显微镜(STM) 结构转变     

Thickness-dependent orientation evolution in nickel thin films grown on yttria-stabilized zirconia single crystals

Microstructure evolution along with crystallographic orientation change as a function of film thickness was investigated in Ni thin films grown on (100) yttria-stabilized zirconia (YSZ) single crystal substrates. Texture development with two different orientation relationships, OR1: Ni {111}//YSZ {100} and OR2: Ni {100}//YSZ {100}, cube on cube orientation were identified by X-ray diffraction and transmission electron microscopy depending on the film thickness. The observed orientation transition reveals the existence of a critical thickness (～320?nm) favoring two different orientations in sputtered Ni films on YSZ (100) substrate.     

Synthesis of Nano-Crystalline Graphite Films in Hollow Cathode Discharge

The results of experiments on the production of nano-crystalline graphite films in the hollow cathode discharge on Ni(111)/sapphire substrate are presented. The characteristics of the discharge for different gases and pressures are given. The emission spectra of the plasma have been measured. The layers of the deposited graphite have been characterized by the methods of Raman scattering and atomic force microscopy. The field emission of nano-crystalline graphite was also measured. The produced layers have good homogeneity and high value of the electron field emission. The presence of vertically growing graphene is revealed.