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为了提高抗反射硅表面制备的加工质量、缩短研制周期,提出了一种基于时频域处理的面向激光加工过程的声波信号在线监测及分析方法。利用声信号的时频谱图分析了0~30 kHz内的声信号与激光烧蚀形成的表面微结构特征尺寸之间的相关性,具体分析了激光功率及加工次数对微结构深度及声信号各频率幅值变化的影响。以声信号作为输入,基于人工神经网络对加工质量进行预测。实验结果表明:通过监测激光加工时产生的声信号能够明确反映被烧蚀硅表面是否形成周期性微结构,且微结构宽度不同,其对应的声信号频率组成也不同。在微结构宽度固定的情况下,归一化后的声信号特征参数随微结构深度线性变化,且受到激光功率变化的影响忽略不计。以硅基表面5%的反射率作为加工质量分界线,采用人工神经网络对加工质量的预测结果与实际测量结果的准确率可以超过90%。结果表明:声波在线监测可以有效应用于评估表面加工质量,为抗反射硅表面制备过程的实时监测提供了理论依据。 相似文献
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不同光聚焦状态的光击穿声辐射特性 总被引:2,自引:0,他引:2
强激光通过光学系统聚焦于水下时,击穿水介质辐射强声波信号.光学聚焦特性的不同,使得激光击穿区域形状的差异,导致辐射的声信号在强度、频谱特征上具有较大的差异性.为研究不同光聚焦状态对激光击穿形成的空泡辐射声波的影响,推导了不同聚焦状态下激光空泡壁的运动方程及声辐射模型,构建了激光声实验测量系统,实验研究了不同聚焦状态下光击穿导致的空泡脉动参数、辐射声信号特征的差异性.结论:激光声信号强度与激光能量成线性关系,在激光能量高于一定参数情况下,声信号强度变化不大;在低激光功率下,扩束聚焦与非扩束聚焦,辐射的声信号特性差异不大;在高激光功率条件,扩束聚焦击穿形成的空泡半径大于非扩束聚焦击穿,辐射的声信号强度高于非扩束聚焦;为提高激光击穿辐射卢信号效率,应对激光束进行扩束聚焦. 相似文献
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针对一维非线性声波的传播问题进行了有限元仿真和实验研究. 首先推导了一维非线性声波方程的有限元形式, 含有高阶矩阵的非线性项导致声波具有波形畸变、谐波滋生、基频信号能量向高次谐波传递等非线性特性. 编制有限元程序对一维非线性声波进行了计算并对仿真得到的畸变非线性声波信号进行处理, 分析其传播性质和物理意义. 为验证有限元计算结果, 开展了水中的非线性声波传播的实验研究, 得到了不同输入信号幅度激励下和不同传播距离的畸变非线性声波信号. 然后对基波和二次谐波的传播性质进行详细讨论, 分析了二次谐波幅度与传播距离和输入信号幅度的变化关系及其意义, 拟合出二次谐波幅度随传播距离变化的方程并阐述了拟合方程的物理意义. 结果表明, 数值仿真信号及其频谱均与实验结果有较好的一致性, 证实计算方法和结果的正确性, 并提出了具有一定物理意义的二次谐波随传播距离变化的简单数学关系. 最后还对固体中的非线性声波传播性质进行了初步探讨. 本研究工作可为流体介质中的非线性声传播问题提供理论和实验依据. 相似文献
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采用激光干涉方法对水下声辐射激励水表面声波的特征参数频率和振幅进行了测量研究。从理论上对水表面声波激光相干测量信号的频谱构成进行了分析,在此基础上提出了水表面声波两个重要声学参数频率和振幅的解算方法,并通过数值仿真进行了验证。搭建了一套简单的激光干涉测量实验系统,对不同频率和声压激励的水表面声波进行了测量实验,验证了水表面声波频率和振幅解调方法的准确性。对水表面声波横向传播的振幅衰减现象进行了初步的实验研究,结果表明水表面声波的频率越高,振幅的横向衰减越快。研究表明激光相干检测方法能够准确地实现水表面声波振幅和频率的测量。 相似文献
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针对空气耦合超声信号微弱、难以直接测量的问题,进行了空气耦合超声声场测量的实验研究。使用激光多普勒测振仪测量由声波引起的激光路径上的介质折射率变化,进而得到空气和固体材料内部的时域瞬态声压。通过直接测量空耦换能器的辐射声功率,给出对单个空耦换能器灵敏度的直接评价方法。用空耦换能器激励K9玻璃板的漏兰姆波,观测到空气中的直达波和反射波、固体板内和空气中的漏兰姆波,实现了空气和固体中微弱声波的非侵入式实验测量,为空耦换能器的特性评估和空耦检测系统的声场测量提供了实验方法。 相似文献
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In-process monitoring techniques for laser cleaning 总被引:1,自引:0,他引:1
Diverse in-process monitoring techniques based on acoustic, chromatic and intelligent approaches have been developed for laser cleaning not only to achieve the sound-cleaned surface but also to control the process in an automatic manner. The cleaning of various materials such as copper, marble, paper have also been carried out by using Q-switched Nd:YAG radiation. The process was successfully monitored by detecting the acoustic emission induced by laser–surface interactions during laser cleaning. Novel surface monitoring was achieved by chromatic modulation technique. The monitoring of laser fluence based on neural network logic was carried out by means of the recognition of acoustic spectrum patterns. The prediction system of surface damage has been also developed using fuzzy rule base in the same way as a human expert. These techniques may provide unique information for characterising the process as well as a promise of successful applications for laser cleaning techniques in real practical fields. 相似文献
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A laser shock cleaning is a new dry cleaning methodology for the effective removal of submicron sized particles from solid surfaces. This technique uses a plasma shock wave produced by laser-induced air breakdown, which has applied to remove nano-scale silica particles from silicon wafer surfaces in this work. In order to characterize the laser shock cleaning process, acoustic waves generated during the shock process are measured in real time by a wide-band microphone and analyzed in the change of process parameters such as laser power density and gas species. It was found that the acoustic intensity is closely correlated with the shock wave intensity. From acoustic analysis, it is seen that acoustic intensity became stronger as incident laser power density increased. In addition, Ar gas has been found to be more effective to enhance the acoustic intensity, which allows higher cleaning performance compared with air or N2 gas. 相似文献
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Acoustic expressions have been derived for the thermal expansion of substrate surfaces due to irradiation by an exponential laser pulse. The result of acoustic effects on three substrates (silicon, glass and silica) with different absorptions has been calculated.It has been shown that for substrates having relatively low absorptions, like silica and glass, acoustic considerations substantially reduce thermal expansion of the substrate caused by irradiation by nanosecond laser pulses relative to a quasi-static expansion model. In particular, the expansion of the substrate occurs over a much longer time frame than when the quasi-static approximation holds. Consequently, acceleration of the substrate surface is greatly reduced and laser cleaning threshold fluences for particle removal are increased.The predictions of the model of Arnold et al. when developed for acoustic considerations give reasonable agreement with experimentally found threshold fluences for alumina particles on silica and glass substrates although it underestimates the ratio of the threshold cleaning fluences of silica and glass. This could be due to the model underestimating the contribution of surface expansion to the laser cleaning process. The influence of multiple reflections in the substrate and departure from one dimensionality in the heat conduction on the threshold fluence was found to be insignificant. Thermal contact between the particle and the substrate was also found to have little effect on laser cleaning threshold fluences. Another mechanism that may enhance surface expansion is the 3D focussing of radiation by the particles. PACS 42.62.Cf; 81.65.Cf; 42.55.Lt 相似文献
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铝合金焊接技术在工业生产、制造和维修等领域有广泛的应用,焊缝内存在气孔导致焊接质量降低是铝合金焊接技术的常见问题。由于铝合金表面金属氧化物是导致气孔生成的主要来源,对激光清洗过程进行在线检测,不但可以实时分析表面氧化物的清洗状态,而且可以避免基体表面因为过度清洗造成损伤或二次氧化。提出采用激光诱导等离子体光谱(LIBS)在线检测铝合金焊前激光清洗过程,表征清洗后铝合金基体的表面状态。LIBS技术可以对多元素成分同时检测,拥有较低的检出限和较高的准确性。搭建基于Andor Mechelle 5000光谱仪的铝合金焊前激光清洗在线检测系统,剔除空气环境对实验结果的影响,测试6061铝合金表面氧化物和铝合金基体的LIBS光谱,分析两者独特的元素特征谱线,采用X射线能谱(EDS)测试结果验证元素特征谱线的准确性,并探讨激光清洗过程LIBS技术在线检测的可行性。实验测试等离子体光谱谱线强度与激光能量密度之间的关系,获得单次脉冲激光去除铝合金表面氧化物的损伤阈值,结合X射线能谱的检测结果研究激光损伤阈值的成因及影响。研究激光清洗过程等离子体光谱特征谱线与脉冲次数之间的关系,提出基于O/Al特征谱线强度比值作为在线检测清洗效果及二次氧化损伤的评判依据。为验证该评判依据的准确性,将O/Al特征谱线强度比值随清洗次数的变化趋势与X射线能谱测试获得的氧元素原子百分比变化趋势进行对比。实验结果表明:采用200~700 nm范围内激光诱导等离子体谱线特征分析激光清洗状态,可以剔除空气环境的影响;氧元素和铝元素特征谱线准确反映出表面氧化膜与铝合金基体的成分差异;X射线能谱检测元素成分和含量表明氧元素含量随着激光清洗能量密度先减后增,单次清洗铝合金的二次氧化损伤的激光能量阈值为11.46 J·cm-2,小于损伤阈值的激光能量密度对铝合金基体的多次清洗未造成损伤,等离子体光谱特征谱线强度与表面清洗状态相关, 656.5 nm(OⅡ)/396.2 nm(AlⅠ)谱线强度比值≤1.5%为激光清洗干净的依据。研究结果有利于铝合金的激光清洗实时控制技术和焊接装置集成化。 相似文献
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采用CO2激光对镀金K9玻璃表面的二甲基硅油污染物进行清洗,在激光器单点作用模式下,分别研究了激光功率和作用时间对清洗效果的影响;并研究了连续扫描工作模式下的激光清洗效果。采用光学显微镜和傅里叶变换红外光谱仪表征激光清洗效果,研究结果表明:通过良好的控制激光参数,采用CO2激光清洗二甲基硅油具有明显的效果;此种非接触式清洗方式可确保K9玻璃表面的金膜完好无损。采用有限元分析软件模拟计算了激光功率和作用时间对清洗过程中温度的影响,计算结果与实验结果规律一致。 相似文献
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用激光清洗金膜表面硅油污染物 总被引:2,自引:0,他引:2
采用CO2激光对镀金K9玻璃表面的二甲基硅油污染物进行清洗,在激光器单点作用模式下,分别研究了激光功率和作用时间对清洗效果的影响;并研究了连续扫描工作模式下的激光清洗效果。采用光学显微镜和傅里叶变换红外光谱仪表征激光清洗效果,研究结果表明:通过良好的控制激光参数,采用CO2激光清洗二甲基硅油具有明显的效果;此种非接触式清洗方式可确保K9玻璃表面的金膜完好无损。采用有限元分析软件模拟计算了激光功率和作用时间对清洗过程中温度的影响,计算结果与实验结果规律一致。 相似文献
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Electrochemical, acoustic and imaging techniques are used to characterise surface cleaning with particular emphasis on the understanding of the key phenomena relevant to surface cleaning. A range of novel techniques designed to enhance and monitor the effective cleaning of a solid/liquid interface is presented. Among the techniques presented, mass transfer of material to a sensor embedded in a surface is demonstrated to be useful in the further exploration of ultrasonic cleaning of high aspect ratio micropores. In addition the effect of micropore size on the cleaning efficacy is demonstrated. The design and performance of a new cleaning system reliant on the activation of bubbles within a free flowing stream is presented. This device utilised acoustic activation of bubbles within the stream and at a variety of substrates. Finally, a controlled bubble swarm is generated in the stream using electrolysis, and its effect on both acoustic output and cleaning performance are compared to the case when no bubbles are added. This will demonstrate the active role that the electrochemically generated bubble swarm can have in extending the spatial zone over which cleaning is achieved. 相似文献
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In the high power laser facility, surface contaminations on the optics will worsen the laser beam quality and damage the optics. Particle and grease contaminations are two of the usual contaminations on the surface of optics. In this work, the 1064-nm laser induced plasma shockwave cleaning is utilized to remove SiO2 particle contaminations on the K9 glass surface. The results indicate the removal ratio can reach above 95%. The effects of parameters (particle position, laser gap distance and laser energy) on the cleaning efficiency have been studied in the case of single pulse laser cleaning. In addition, CO2 laser (10.6 μm) is utilized to remove the dimethylsilicone oil contaminations on the gold-coated K9 glass surface. The results show that CO2 laser can effectively remove the dimethylsilicone oil by properly controlling the laser parameters. The cleaned area increases with the increased laser power or irradiation time when the other parameters are constant. 相似文献
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近年来碳纤维复合材料(CFRP)由于性能优异,受到工业领域广泛关注。采用激光清洗技术预处理碳纤维复合材料表面的污染物和环氧树脂等杂质,有利于改善碳纤维复合材料表面性能,提高碳纤维复合材料胶接界面的结合强度。在线检测激光清洗过程,实时判断碳纤维复合材料的表面清洗质量,是保证激光清洗效果的关键环节,也是激光清洗装置自动化、集成化的核心技术。激光诱导等离子体光谱技术可以快速分析材料表面元素变化,实现在线检测激光清洗表面状态,在激光清洗领域有很广的应用前景。采用Nd∶YAG高能量脉冲激光器产生的1 064 nm激光在空气环境中诱导产生等离子体,利用改进型光栅光谱仪(ME5000)获取等离子体光谱,在线检测激光清洗碳纤维复合材料。研究外界空气环境对等离子体光谱检测结果的影响,发现350~700 nm波段的元素谱线可用于碳纤维复合材料表面物质成分分析;采用电子扫描显微镜观测的激光清洗表面形貌和X射线电子能谱仪测得的元素变化共同表征等离子体光谱检测的有效性,通过采集不同激光能量以及不同作用次数的等离子体光谱图,获得碳纤维复合材料表层树脂物质通过激光单次清洗干净的阈值,研究激光清洗质量与激光诱导等离子体谱线成分及其强度变化的关系。结果表明:在获取的激光诱导等离子体光谱中,光谱图中谱线波长在393.3 nm的S(Ⅱ)和589.5 nm的S(Ⅱ)谱线可有效在线表征碳纤维复合材料表面清洗质量;激光单次去除干净表面环氧树脂的阈值为10.68 mJ;低激光能量时需要清洗多次可以去除干净表面树脂;高激光能量时清洗单次可使表面树脂去除干净,多次清洗易造成基体损伤。实验结果为激光清洗碳纤维复合材料的智能集成化应用提供工艺依据和技术支持。 相似文献