一种三维变形光学测量系统及微结构力学性能测试应用

描述了一种使用显微栅线投影技术和数字图像相关技术同时测量微结构三维形貌和变形的光学测量系统.在此系统中,正弦栅线通过相移投影器投影到被测物体表面,变形的条纹图由高分辨率的CCD相机和显微镜头采集并保存.相移技术处理条纹图得到形貌和离面变形,同时从相移图像中提取出被测物表面纹理,数字图像相关技术处理变形前后表面纹理得到面...     

基于白光干涉测试技术的改进Carré相移算法

为了减小白光相移干涉法测量物体微观形貌时产生的误差,对极值法的搜索路径进行优化后与Carré相移算法相结合,提出一种基于白光干涉测试技术的改进Carré相移算法.该算法减小了光源扰动及电荷耦合元件散粒噪声带来的影响,且对相移器的线性误差不敏感,免去了相位解包裹过程,提高了运算效率.采用单刻线样块对扫描步距进行校准实现了光源中心波长的在线修正,减小了由于光源特性及环境扰动误差带来的影响.采用不同算法对标准粗糙度样块进行三维形貌恢复以及表面粗糙度的重复性测量实验,结果表明:该算法对表面粗糙度的测量结果较传统白光干涉算法准确度提高,测量重复性优于1%.     

基于液晶显示投影技术的数字影栅云纹相移实现方法

影栅云纹是物体离面变形和表面形貌测量常用的一种比较简单的方法,用单纯的影栅云纹法即便在最好的光学系统配置情况下测量精度也只有1~100μm左右,在影栅云纹测试方法中引进相移技术是提高测量精度的主要手段。采用液晶投影仪和数字图像处理技术实现数字影栅云纹测量的准确数字相移,避免了在影栅云纹法中使用结构比较复杂或特制的相移机构。由计算机产生相移条纹图经液晶显示投影,应用实时图像灰度算术相减技术得到数字相移影栅云纹条纹图。该方法具有“基准栅”的栅距和相移步长实时可调,配置高速图像采集系统和图像后处理软件,可将相移技术引入动态测量中,从而提高动态测量的精度的优点。最后的悬臂梁实验结果证实了该方法的有效性。     

条纹投影法中抗噪声干扰的相移编码去包裹方法

相位去包裹问题广泛存在于条纹投影形貌测量中。提出了一种相移编码去包裹方法,该方法在求解相位时使用多步相移法,并在额外的一幅编码图像中,将标记条纹级数的编码嵌入到相移量中。解码时,通过分析各像素点处不同相移的光强信息序列,可以求解该点处的编码相移量,从而获得绝对相位。该方法只需要少量图像,且可以逐点去包裹,适用于不连续物体的形貌测量,但是容易受到投影仪和相机的噪声影响。通过增加互补的编码条纹图像,提出了一种改进的相移编码去包裹方法,在实现不连续物体形貌测量的同时,显著增强了噪声鲁棒性。经过仿真分析和实验,验证了所提的相移编码去包裹方法的有效性。     

基于四步相移光栅投影的三维形貌测量系统

为了实现对具有明显跳变面物体的轮廓测量,建立了四步相移光栅投影的三维形貌测量系统,并对所采用的四步相移测量算法进行研究。在介绍四步相移原理的基础上以有明显跳变面的三棱锥橡皮块为例,建立针对明显跳变面的测量算法。通过对4幅相移图算术求和并除以4得到平均灰度图;将平均灰度图二值化处理定位明显跳变面或阴影部分;将二值化图像与包裹相位图卷积,而后对包裹相位图进行解包裹,从而得到正确的连续相位,最终获取物体三维形貌。根据上述算法测量三棱锥的三维形貌并计算其体积,测量实验表明:被测物的体积平均相对精度为0.47%。     

Mirau相移干涉法测量微透镜阵列面形

基于Mirau相移干涉法,在实验室环境下对微透镜阵列的微表面形貌进行了轮廓测量.实验使用He-Ne激光器作为光源,干涉成像系统由Mirau干涉物镜和其他光学元件组成.在实验中使用压电陶瓷执行器作为相移器,通过5步相移法计算待测表面形貌.实验结果表明,基于Mirau相移干涉法对微透镜阵列面形的测量,水平分辨率达到1.1 μm,垂直测量准确度达到6.33 nm,垂直测量范围为5 μm.对于微透镜阵列的面形测量,通过将微透镜阵列划分为若干微小区域以保证局部面形最大高度小于5 μm,然后辅以精密平移机构进行若干次5步相移法测量局部面形,再利用相位重建所得的数据进行拼接和3D轮廓重建,最终得到整个微透镜阵列的精确微表面形貌.     

基于正弦和三角波条纹投影的三维测量方法

在现有的针对复杂物体表面形貌的三维测量方法中, 为了完成绝对相位的测量, 通常需要处理至少6幅条纹图像, 限制了测量速度。提出了采用2幅正弦条纹和2幅三角波条纹图来获得物体三维形貌的方法。利用两步相移正弦条纹和两步相移三角条纹得到截断相位, 再利用两步相移三角波条纹得到条纹级次, 减少了投影条纹幅数, 提高测量速度。在得到条纹级次时, 计算三角波条纹强度调制和强度对比度, 与计算相位相比, 可以减少数据处理的时间, 进一步提高测量速度, 同时能减小物体表面反射率的影响, 提高了测量精度。测量最大高度为39 mm的阶梯状标准块, 得到的最大绝对误差和最大的RMS误差分别为0.045 mm和0.041 mm。验证了该方法的有效性和实用性, 在高速实时的复杂形貌三维测量中有广泛的应用前景。     

数字三色条纹相移形貌投影栅线法

基于投影栅线的三色条纹相移算法与投影栅线法相结合,提出一种数字三色条纹相移形貌投影栅线法.此法是对时间相移法的改进,只需一幅三色条纹图,就可利用简单的三光强相移算法完成物体表面的形貌重建;不需要相移装置而误差较小,成本较低,简易实用,将有利于推广到动态实时分析.实验证明,此法是正确可行的.     

一种基于希尔伯特变换实施相移的相位解调算法

相移法因其精度高、运算简单,所以被广泛应用于形貌检测中的相位解调。该方法的弱点是:不仅要采集多幅相移图像,而且不能克服相移器的移相误差。将小波分析与希尔伯特变换结合起来,采用小波分析去除直流背景成分,利用希尔伯特变换方法实现90°相移;利用相移法解调形貌相位,由于是采用软件来实现相移的,因此只需采集一幅变形栅线图。对该方法与传统相移技术进行了模拟比较实验,结果表明,该方法具有较高的精度。     

投影条纹相移法中图像饱和误差抑制算法研究

针对投影条纹相移法三维形貌测量中的图像饱和误差进行了深入研究,分析了基于条纹相移技术的图像饱和误差抑制算法的适用范围,推导了基于六步相移的饱和误差抑制算法公式.理论分析表明,相移条纹图的帧数越多,饱和误差抑制算法的适用范围越广.并通过数值模拟和实验进行了验证,基于六步相移的饱和误差抑制算法可以更加有效地抑制图像饱和引起的相位误差.     

3-D surface profilometry using simultaneous phase-shifting interferometry

Urgent needs for high-speed, non-contact and on-line measurement with high accuracy and repeatability are of great interest for automatic optical inspection (AOI) industries. Therefore, optical phase-shifting interferometry for precision 3-D surface profilometry has become an important metrological method due to its non-contact and high measurement accuracy. Traditional phase-shifting interferometry is very sensitive to vibrations because image acquisition in various phase-shifting sequences could easily introduce measurement errors from environmental influences, such as air disturbance and system structure vibrations. In this paper, we introduce a new simultaneous phase-shifting interferometer for 3-D surface profilometry which employs a single glass plate to generate simultaneous phase-shifted interferograms. Phase reconstruction is performed by using a developed phase-shifting algorithm which uses a three-step phase-shifting method with phase differences of 90°, 180°, and 270° for three interferograms. To verify measurement accuracy and repeatability, the system was employed to measure surface profiles of surface of a flat mirror and set of Mitutoyo gauge blocks. The experiment result shows that the method is proven to be capable of performing one-shot interferometric measurement and minimizing influences from environmental disturbances with measurement repeatability down to 10 nm or less.     

利用电子散斑相移技术测量物体三维面形的方法

为了获得准确的面形测量,提出了一种相移电子散斑干涉技术测量物体面形的测量方法.利用电子散斑干涉产生载波条纹,该载波条纹受到物体表面高度的调制变得弯曲,引起载波条纹相位的变化,可运用相移技术提取物体的相位信息,最后根据高度和相位之间的关系得到物体的面形.介绍了该方法的原理,利用该方法对球冠物体进行了面形测量,证明该方法测量物体面形是可行性的.由于是采用散斑干涉的方法产生干涉条纹,因此该方法测量物体面形具有灵敏度高的优点.     

基于波像差判据的同步相移显微干涉检焦方法

为了实时准确地将激光直写系统中经直写物镜聚焦的光斑定位于待加工元件表面,提出了一种基于波像差判据的同步相移显微干涉检焦方法,实现了对离焦量的实时检测与调整。在直写系统中引入检焦光路,与直写光路共享同一物镜,构建Linnik型同步相移显微干涉检焦系统,提取包含离焦量的波面相位信息;再从大数值孔径（NA）的物镜波像差数据中解析出离焦量的大小与方向。仿真结果验证了基于波像差判据的离焦计算方法的正确性,NA≥0.5时,离焦探测灵敏度可达4 nm, 通过实验验证了同步相移显微干涉检焦方法的可行性,检焦精度可达10 nm以内,满足激光直写高精度的测量要求。     

Shifted-phase calibration for a 3-D shape measurement system based on orthogonal composite grating projection

This paper proposes a novel method for reducing measurement error caused by spectrum overlapping in orthogonal-composite-grating-based 3-D measurement method. For 3-D measurement systems based on orthogonal composite grating projection, spectrum overlapping causes phase of each deformed phase-shifting fringe changed differently, which violates the principle that the shifted phases between adjacent deformed fringes must be equivalent to 2π/3, and therefore results in phase measurement error. The proposed shifted-phase calibration method is based on that phase variation of each deformed fringe is independent of height and reflectivity of the measured object. Three composite gratings are projected on the reference plane, and each carrier channel includes three phase-shifting gratings needed in phase measuring profilometry (PMP). Because the adjacent phase-shifting fringes demodulated from the same carrier channel have the phase difference of 2π/3, we can respectively calculate the reference plane's phases of three carrier channels by the phase algorithm of PMP method, and the shifted phases between them are obtained. When an object is measured, the shifted phases between deformed phase-shifting fringes can be calibrated. A new 3-D measurement mathematical model is set to reconstruct object. Our experiments prove that the proposed method can effectively restrain the effect of spectrum overlapping and improve measurement accuracy almost one times.     

Profile measurement of a moving object using an improved projection grating phase-shifting profilometry

3-D profile measurement of a moving object using a novel phase-shifting technique is introduced. Digital gratings with two steps phase-shifting are projected periodically onto a measured object surface. The deformed fringe patterns are captured by a frame CCD camera within a short exposure time. By synchronizing the projector and the CCD camera accurately, there is an overlapping part which is the same part of the object among three neighbouring frames. The length of an overlapping part can be controlled as one third of a frame length. Hence the intensity values at the same surface point modulated by three neighbouring gratings can be obtained, and its phase value can be computed by an improved phase-extracting algorithm. The profile of a specimen is detected by the proposed method. Experimental results demonstrate that this method is effective for the profile measurement of a moving object.     

Modified fourier transform profilometry for the measurement of 3-D steep shapes

Analysing the principle of Fourier transform profilometry (FTP) for the measurement of 3-D object shapes and improved Fourier transform profilometry (IFTP) for the measurement of 3-D steep object shapes, the disadvantage of IFTP is discussed. Through the measurable slope of the height variation normal to grating line can be extended to nearly three times in IFTP, and phase-shift error is introduced. In this paper modified Fourier transform profilometry (MFTP) is described for the measurement of 3-D steep object shapes, which gets rid of the disadvantage of IFTP by utilizing the nature of FTP. The measuring precision and the measureable steepness can be ensured in this way.     

Wave-front curvature compensation of polarization phase-shifting digital holography

An on-axis polarization phase-shifting digital holographic microscope, based on a normal upright optical microscope, is constructed to quantitatively measure both the amplitude and phase distributions of specimen. The condenser lens and microscope objective employed in the object beam path enhance the illumination and magnification of the image, however, they induce additional phase aberration of the object wave. The physical formation of the phase aberration is theoretically analyzed, and a formula for the object wave front involving the phase aberration in the CCD plane is derived. The phase aberration can be eliminated in the reconstruction procedure by measuring a specimen-free hologram and then fitting the aberration phase with a least square ellipsoidal model to determine the parameters of the system. This phase aberration compensation procedure also reduces some of noises in the reconstructed phase of the specimen. The practicability of this method is demonstrated by a test experiment on microlenses.     

干涉测量波面重构DCT算法研究

采用一种空间移相干涉仪测量凹形非球面反射镜光学表面,使用偏振元件和多幅图像同步采集实现移相,并对测量得到的干涉条纹采用基于离散余弦变换的相位解包裹算法,对不连续相位分布采用非加权的最小二乘法进行优化目标函数,最终重构出被测光学表面的面形.这种结构形式的干涉仪具有一定的抗振能力,同时在数字图像处理上优化了算法,能够快速稳定地得到被测面形,而且对硬件要求不高.结果表明:这种算法能够适用于非实验室条件下的光学测量,在一定干扰条件下可以达到较高的测量精度.     

A study on the 3-D measurement by using digital projection moiré method

Moiré topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement technique by moiré topography has been developed in order to apply to the engineering and medical fields. The projection moiré topography is very attractive because of its high measuring speed and high sensitivity. In this paper, using the two-wavelength methods of projection moiré topography was investigated to measure the 3-D shape of an object with 2π-ambiguity problems. Rapid measurement can be accomplished by the synchronization between CCD camera and projector. The experimental results prove that the proposed scheme is capable of finding absolute fringe orders, so that the 2π-ambiguity problems can be effectively overcome so as to treat large step discontinuities in measured objects.