厚度模压电超声换能器无源声学材料研究进展*

厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心器件,一般由压电层、匹配层和背衬层3部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标(带宽、灵敏度)除了受到压电层的影响,还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材料(匹配层、背衬层和声透镜)的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向进行了展望。     

Influence of the thickness of matching layers on narrow band transmitter ultrasonic airborne transducers with frequencies <100 kHz: Application of a genetic algorithm

The acoustic impedances of matching layers and their thicknesses are the most important and influential parameters in the performance of airborne ultrasonic transducers. In this paper, the optimum thicknesses of the matching layers of the narrow band transmitter ultrasonic transducer regarding transmission coefficient were determined by individual calculations using a genetic algorithm. The genetic algorithm was chosen because it is a powerful tool in the optimization domain. The results show that the permitted thickness variation is 0.0005% for one matching layer, and this value can be increased to 0.0031%, which corresponds to the permitted thickness variation for five matching layers. Approximately 55% enhancement in the transmission coefficient is theoretically possible, and 42% enhancement was observed experimentally when the genetic algorithm was applied to calculate the matching layer thicknesses in place of the quarter wavelength equation that is conventionally used for the determination of layer thickness. To verify our approach, the effect of the thickness variation on the transmission coefficient has been investigated experimentally for three, four and five matching layers. The experimental results displayed good agreement with the theoretical predictions.     

Loading transducers for non-destructive testing and signal processing by acoustic bulk waves

Non-destructive testing and signal processing with acoustic bulk waves require the use of loaded transducers having a large bandwidth. The technique of loading quartz or ceramic transducers by backing with a material having a relatively large acoustic impedance is well known. A brief review of the methods and results of this classical type of loading is given. Another method of broadening the bandwidth by backing the transducer with one or several metallic layers of variable thickness followed by a semi-infinite medium is then proposed. A brief mention is also given to the technique of matching the backed transducer to the propagating medium. Several practical examples illustrating the use of the methods are given.     

Hybrid linear and matrix acoustic arrays

This work describes a new technique for constructing both linear and matrix array transducers. It used completely separated piezoelectric elements whose vibration modes have been studied experimentally. Each piezoelectric element has a $\text{λ}\text{4}$ matching plate and backing, and so it forms a separate transducer. The array is formed by an assembly of these transducers.The technique shows some interesting features such as the possibility of reducing the dispersion of the electroacoustic characteristics of the single elements to the required value, mechanical strength, and the possibility of periodical maintenance.     

超声换能器辐射特性的优化*

匹配层和背衬层是换能器的重要组成部分,对换能器特性有重要影响。针对发射型换能器,基于有/无匹配层和空气/树脂背衬两种条件组合,该文研究了匹配层与背衬层对换能器辐射特性的影响。结果表明,负载材料为水时,空气背衬换能器相较于树脂背衬换能器声能辐射效率更高;匹配层可以提高换能器的主瓣能量,抑制旁瓣能量及旁瓣数量。因此,针对发射型换能器的设计,背衬材料的选择应遵循与压电材料的阻抗差异越大越优的原则;匹配层的合理设计不仅可以提高超声换能器的声能辐射效率,还可以提高主瓣旁瓣峰值比,使声能更集中。     

Fabrication and comparison of PMN-PT single crystal, PZT and PZT-based 1-3 composite ultrasonic transducers for NDE applications

This paper describes fabrication and comparison of PMN-PT single crystal, PZT, and PZT-based 1-3 composite ultrasonic transducers for NDE applications. As a front matching layer between test material (Austenite stainless steel, SUS316) and piezoelectric materials, alumina ceramics was selected. The appropriate acoustic impedance of the backing materials for each transducer was determined based on the results of KLM model simulation. Prototype ultrasonic transducers with the center frequencies of approximately 2.25 and 5 MHz for contact measurement were fabricated and compared to each other. The PMN-PT single crystal ultrasonic transducer shows considerably improved performance in sensitivity over the PZT and PZT-based 1-3 composite ultrasonic transducers.     

Modeling of functionally graded piezoelectric ultrasonic transducers

The application of functionally graded material (FGM) concept to piezoelectric transducers allows the design of composite transducers without interfaces, due to the continuous change of property values. Thus, large improvements can be achieved, as reduction of stress concentration, increasing of bonding strength, and bandwidth. This work proposes to design and to model FGM piezoelectric transducers and to compare their performance with non-FGM ones. Analytical and finite element (FE) modeling of FGM piezoelectric transducers radiating a plane pressure wave in fluid medium are developed and their results are compared. The ANSYS software is used for the FE modeling. The analytical model is based on FGM-equivalent acoustic transmission-line model, which is implemented using MATLAB software. Two cases are considered: (i) the transducer emits a pressure wave in water and it is composed of a graded piezoceramic disk, and backing and matching layers made of homogeneous materials; (ii) the transducer has no backing and matching layer; in this case, no external load is simulated. Time and frequency pressure responses are obtained through a transient analysis. The material properties are graded along thickness direction. Linear and exponential gradation functions are implemented to illustrate the influence of gradation on the transducer pressure response, electrical impedance, and resonance frequencies.     

Vibration amplitude and induced temperature limitation of high power air-borne ultrasonic transducers

The acoustic impedances of matching layers, their internal loss and vibration amplitude are the most important and influential parameters in the performance of high power airborne ultrasonic transducers. In this paper, the optimum acoustic impedances of the transducer matching layers were determined by using a genetic algorithm, the powerful tool for optimizating domain. The analytical results showed that the vibration amplitude increases significantly for low acoustic impedance matching layers. This enhancement is maximum and approximately 200 times higher for the last matching layer where it has the same interface with the air than the vibration amplitude of the source, lead zirconate titanate-pizo electric while transferring the 1 kW is desirable. This large amplitude increases both mechanical failure and temperature of the matching layers due to the internal loss of the matching layers. It has analytically shown that the temperature in last matching layer with having the maximum vibration amplitude is high enough to melt or burn the matching layers. To verify suggested approach, the effect of the amplitude of vibration on the induced temperature has been investigated experimentally. The experimental results displayed good agreement with the theoretical predictions.     

Optimization of ultrasonic transducers

The so-called KLM-model for ultrasonic transducers is employed to optimize transducer design. Some new performance characteristics are defined which change monotonically with design parameters. These characteristics are based on the area of the envelope of the echo waveform produced by the transducer and of the corresponding amplitude spectrum. The efficiency of the transducer is defined by the round trip energy factor. The performance characteristics are used in a composite performance measure, which is then employed as a criterion in the optimization procedure. Two transducers are investigated: for medical imaging purposes and for spectral analysis of clinical echograms. The influence of electrical matching, backing impedance, matching layer impedance, bond line thickness and series induction on the optimized transducers is investigated.     

Study on the multifrequency Langevin ultrasonic transducer

Langevin ultrasonic transducers are widely used in high-power ultrasonics and underwater sound. In ultrasonic cleaning, a matching metal horn rather than a metal cylinder is used as the radiator in order to enhance the radiating surface and improve the acoustic matching between the transducer and the processed medium. To raise the effect of ultrasonic cleaning, the standing wave in the cleaning tank should be eliminated. One method to eliminate the standing wave in the tank is to use the multifrequency ultrasonic transducer. In this paper, the Langevin ultrasonic horn transducer, with two resonance frequencies, is studied. The transducer consists of two groups of piezoelectric ceramic elements: the back metal cylinder, the middle metal cylinder and the front matching metal horn. The vibrational modes of the transducer are analysed, and resonance frequency equations of the transducer in the half-wave and the all-wave vibrational modes are derived. According to the resonance frequency equations, transducers with two resonance frequencies are designed and made. The resonance frequencies, the effective electromechanical coupling coefficients and the equivalent electric impedances of the transducers are measured. It is shown that the measured resonance frequencies are in good agreement with the computed results, and the transducer can be excited to vibrate at two resonance frequencies, which correspond to the half-wave and the all-wave vibrational modes of the transducer.     

Design and modeling of inversion layer ultrasonic transducers using LiNbO3 single crystal

Using inversion domain engineering controlled by heating temperature, the LiNbO(3) (LNO) piezoelectric plate with both odd and even-order thickness-extensional modes can be excited simultaneously. Therefore, the inversion layer ultrasound transducer is expected to be capable of operating over a wider frequency range. In this paper, the electrical impedance and the acoustic characteristics of LiNbO(3) (LNO) inversion layer transducer have been studied by finite element modeling (FEM). The transducer designed for this study uses a 36 degrees rotated Y-cut LiNbO(3) thin plate with an active element thickness of approximately 100 microm. First the electrical and elastic properties of the 36 degrees rotated Y-cut LNO were obtained by transforming a basic piezoelectric matrix for Z-cut LNO. In order to validate the FEM using the transformed properties several pieces of pure and 50% inversion layer LNO were tested on the electrical impedance analyzer. The modeled impedance characteristics were consistent with the measured data. Next the model was used to design 50-60 MHz transducers using pure and 30% inversion LNO. Two lambda/4 matching layers and a Tungsten loaded epoxy backing were used in these designs. The modeled results show that an over 90% bandwidth transducer can be made with proper matching and 30% inversion layer.     

A spiral wave front beacon for underwater navigation: transducer prototypes and testing

Transducers for acoustic beacons which can produce outgoing signals with wave fronts whose horizontal cross sections are circular or spiral are studied experimentally. A remote hydrophone is used to determine its aspect relative to the transducers by comparing the phase of the circular signal to the phase of the spiral signal. The transducers for a "physical-spiral" beacon are made by forming a strip of 1-3 piezocomposite transducer material around either a circular or spiral backing. A "phased-spiral" beacon is made from an array of transducer elements which can be driven either in phase or staggered out of phase so as to produce signals with either a circular or spiral wave front. Measurements are made to study outgoing signals and their usefulness in determining aspect angle. Vertical beam width is also examined and phase corrections applied when the hydrophone is out of the horizontal plane of the beacon. While numerical simulations indicate that the discontinuity in the physical-spiral beacon introduces errors into the measured phase, damping observed at the ends of the piezocomposite material is a more significant source of error. This damping is also reflected in laser Doppler vibrometer measurements of the transducer's surface velocity.     

An experimental study of acoustoelectric transducers with nonuniform distribution of the piezoelectric coefficient

In this paper, an experimental test of a theoretical model published previously is presented that describes the behavior of an acoustoelectric transducer with a nonuniform distribution of the piezoelectric coefficient within its bulk. Results of this theoretical model are first reviewed. Uniform and nonuniform piezoelectric transducers were fabricated, following a procedure described herein. The receive transfer functions of the transducers were recorded experimentally, and a comparison is made with the theoretical transfer functions predicted by the model, which shows good agreement. The transmit transfer functions of the uniform and nonuniform transducers were also measured and are reported. Numerical calculations of the different transfer functions given by the theoretical model for a uniform transducer associated with different backing materials are also presented, and the results are shown to be equivalent to the results following from the Mason equivalent circuit. Comparisons with experimental results and with Mason's equivalent circuit verified the new theoretical model.     

Chirp response of an active-controlled thickness-drive tunable transducer

The chirp response of a thickness-drive tunable transducer for wide range time-bandwidth and sweep rates chirp signals is demonstrated experimentally and computationally. The computational evaluation uses recursive digital-filter model based on the z-transform method. The model is limited to simple lossless structure with no front and backing layers. The model and experimental results show that there is no limit on the maximum sweep rate of the chirp signal but practically the limit is determined by the limitation of the circuit that generates the control voltage that simulates a variable electric load.     

Influence of acoustic impedance of multilayer acoustic systems on the transfer function of ultrasonic airborne transducers

In different solutions of ultrasonic transducers radiating acoustic energy into the air there occurs the problem of the proper selection of the acoustic impedance of one or more matching layers. The goal of this work was a computer analysis of the influence of acoustic impedance on the transfer function of piezoceramic transducers equipped with matching layers. Cases of resonance and non-resonance matching impedance in relation to the transfer function and the energy transmission coefficient for solid state-air systems were analysed. With stable thickness of matching layers the required shape of the transfer function can be obtained through proper choice of acoustic impedance were built (e.g. maximal flat function). The proper choice of acoustic impedance requires an elaboration of precise methods of synthesis of matching systems. Using the known matching criteria (Chebyshev's, DeSilets', Souquet's), the transfer function characteristics of transducers equipped with one, two, and three matching layers as well as the optimisation methods of the energy transmission coefficient were presented. The influence of the backside load of the transducer on the shape of transfer function was also analysed. The calculation results of this function for different loads of the transducer backside without and with the different matching layers were presented. The proper load selection allows us to obtain the desired shape of the transfer function, which determines the pulse shape generated by the transducer.     

聚苯硫醚材料复合棒型换能器

本文选择了高聚物中杨氏模量较大、损耗较小的聚苯硫醚作为复合棒型换能器的前盖板.计算了聚苯硫醚棒中的纵波传播速度,研究了基于聚苯硫醚材料的复合棒型换能器的等效电路设计方法.利用有限元方法计算了换能器谐振频率、轴向应变分布、平均耗散功率等性能参数.对本文研制的前盖板为聚苯硫醚、后盖板为钢(1#)和前后盖板均为聚苯硫醚(2#...     

Electrical Control of the Frequencies of a Fabry–Perot Acoustic Resonator

The effect electronic tuning has on the frequency of the acoustic resonance of an acousto-optic modulator intended for active laser mode locking is studied theoretically and experimentally. The problem of exciting a Fabri–Perot acoustic resonator with a plate-like piezoelectric transducer is solved in the approximation of plane acoustic waves, with allowance for the real parameters of the HF generator and the matching elements of the transducer and the generator. Expressions for the basic electrical and acoustic parameters are obtained. Theoretical analysis confirms the frequency shift effect of acoustic resonances, observed earlier experimentally upon varying the matching electrical elements. The experiment is performed using an acousto-optic quartz cell and a lithium niobate transducer.     

Fabrication and evaluation of fully-sampled, two-dimensional transducer array for "Sonic Window" imaging system

A low-cost, fully-sampled, 3600 element 2D transducer array operating at 5 MHz and designed for use in a hand-held ultrasound system is described here. Four array configurations are presented - (1) array with both matching and pedestal backing layers, (2) array with a matching layer but no backing pedestal, (3) array with a backing pedestal but no matching layer, and (4) array with neither matching layer nor backing pedestal. Each array was characterized in terms of impedance measurements, pulse-echo response, and experimental beamprofile. Comparative finite element analysis simulations are also presented. Average estimated active element yield for the four arrays was 94%. The array with pedestal layer proved the most promising, providing a 26% bandwidth and a 1.7 dB improvement in sensitivity with respect to the array with neither pedestal nor matching layer. Although this bandwidth is acceptable for our specific application (C-scan imaging), reverberations within the substrate material remain a potential challenge. We are currently working to fabricate a custom PCB material to address this concern, and may also consider using a pre-compensated transmit waveform or matched digital filter approach to further reduce the effects of such reverberations.     

具有阻抗匹配层的宽带纵向振动压电换能器设计

本文研究纵向振动压电换能器的频带展宽问题。在复合棒纵向换能器的辐射端加工适当材料的阻抗匹配层,可以使其工作在非单谐振状态下,在单层阻抗匹配层的情况下,合理地选择匹配层的厚度可以调整其谐振点之间的位置,从而改善换能器的辐射特性。本研究结果表明,对于机械品质因素Qm=6,发射响应带宽△f=4kHz的纵向振子,采用四分之一波长厚度的匹配层,在不降低发射响应的条件下,可展宽频带一倍以上。     

Single-element ultrasonic transducer modeling using a hybrid FD–PSTD method

In a recent publication [E. Filoux, S. Callé, D. Certon, M. Lethiecq, F. Levassort, Modeling of piezoelectric transducers with combined pseudospectral and finite-difference methods, J. Acoust. Soc. Am. 123 (6) (2008) 4165–4173], a new finite-difference/pseudospectral time-domain (FD–PSTD) algorithm was presented and used to model the generation of acoustic waves by a piezoelectric resonator and their propagation in the structure and the surrounding water. In this paper, the model has been extended to simulate the two-dimensional behaviour of a complete single-element transducer, composed of the resonator, a backing and a front matching layer. This further version of the model takes into account the mechanical loss in materials, and enables the calculation of electrical impedance, which is a characteristic of high interest to optimize the performance of ultrasonic transducers. The impedance curves of a PZT [URL: http://www.ferroperm-piezo.com (last viewed 04/2008); B. Jaffe, R.S. Roth, S. Marzullo, Piezoelectric properties of lead zirconate-lead titanate solid-solution ceramics, J. Appl. Phys. 25 (1954) 809–810] plate-based high-frequency transducer, with a 50 MHz thickness resonant frequency, were compared to those of a KLM model [R. Krimholtz, D.A. Leedom, G.L. Matthei, New equivalent circuit for elementary piezoelectric transducers, Electron. Lett. 6 (1970) 398–399] in the one-dimensional case. The acoustical properties were also found to be in good agreement with those obtained using the finite element (FE) method of ATILA^® software in two-dimensional configuration.