机电耦合系数和复阻抗对压电换能器脉冲波形的影响

在地震模型实验中,需要指向性均匀、脉冲持续时间短的低频压电换能器。实验发现,具有匹配背衬的换能器发射脉冲的视周期总是比无背衬的长;向水中辐射的脉冲波形比向细棒中辐射的复杂。但没见过对这些现象的详细解释。 本文仅从基本压电万程和梅森等效电路出发,计算了长度模压电换能器的传递函数,并用数值方法计算了机电耦合系数k_(33)和复阻抗对长度模压电换能器脉冲波形的影响。结果表明具有匹配背衬的换能器k_(33)越大,其“单极”脉宽越宽;且复阻抗使脉冲波形变复杂。我们进行了复阻抗对脉冲波形影响的实验,计算和实验基本符合。在一定的近似条件下,可作为设计和使用脉冲压电换能器的参考。     

夹心式径向复合压电超声换能器

对夹心式径向复合压电换能器径向振动特性进行了研究。该换能器由弹性内芯、预应力金属管及柱面压电陶瓷晶堆径向复合而成.利用机电类比法,得到了换能器的径向振动等效电路及频率方程。探讨了换能器第1、2阶径向共振频率及有效机电耦合系数与其几何尺寸的关系。研究表明,换能器第1阶径向共振频率随其内芯内径及预应力管壁厚度增大而降低;第2阶共振频率随内芯内径增大存在极小值,但随预应力管壁厚度增大单调下降。此外,采用第2阶径向共振模式能获得较高的有效机电耦合系数,并且压电陶瓷处于位移节线时,换能器有效机电耦合系数达极大值。对换能器共振频率的测试与有限元仿真表明。理论与实验及仿真结果符合较好。     

外接LC电路的可调压电换能器的频率特性

压电换能器往往因受到温度与负载的影响,导致其谐振频率、反谐振频率和机械品质因数等特征参数发生变化。通过在压电换能器中设计用于调节的压电陶瓷片,并在调节压电陶瓷片两端外接电负载,可以实现压电换能器的频率调节,修正由于温度和负载导致的频率漂移。基于压电换能器的Mason等效电路,建立外接LC调节电路的压电换能器的谐振频率、反谐振频率模型,分析LC调节电路中调节电感对频率调节特性的影响;通过实验研究外接LC调节电路对可调压电换能器机械品质因数的影响,并验证调节电感对频率调节特性的影响。理论分析和实验研究的结果表明:随着调节电感的增大,调节电容对频率的调节灵敏度提高,可调压电换能器的频率调节宽度拓宽,但也会使压电换能器的机械品质因数降低。合理选择调节电感和调节电容能兼顾频率调节宽度和机械品质因数的要求。此研究可为后续自适应压电换能器的频率调节系统设计提供指导。     

厚度模压电换能器应电压的特性分析

在文献[1]中,我们曾经讨论了厚度模压电换能器在受到外电源的激励时直接产生的瞬变电压。曾指出这个电压同换能器接收超声信号时显示出的始脉冲宽度有直接联系,因而也和检测盲区的大小有直接联系。根据一维理论,这个应电压近似地是衰减的高频振荡,其频率接近于换能器所辐射声压的频率,叠加在一个指数曲线上,指数曲线系起源于外加瞬变电压对换能器钳定电容的充电。
本文给出了在阶跃电压的激励下具体计算应电压的步骤,并分析了几项结构参量对应电压的各自影响。理论采用了梅森（W.P.Mason）等效电路模型。这些参量是:（1）负载或背衬材料的声阻抗率,（2）压电片的机械Q值,（3）刚玉保护膜的厚度,（4）并联线圈的电感。
理论计算结果表明:
（1）在轻负载或轻背衬时,高频振荡部分大而拖长;在重负载或重背衬时,则这部分小,并且较快地衰减。
（2）对于同一种压电陶瓷,当约Q<100,降低Q值会减小高频振荡部分的幅度,而当约Q>100,改变Q值并不显著地影响高频振荡。
（3）在轻负载的条件下,增加保护膜的厚度会加大高频振荡的幅度;在重负载的条件下,当负载的声阻抗率匹配或接近匹配压电陶瓷时,保护膜对应电压的影响不明显。
（4）从并联电感的初步探讨结果看,值得进一步研究加联电学元件的效应。
当压电材料为PT陶瓷时,关于改变负载或背衬声阻抗率的理论计算结果,为实验所证实。但当压电材料为PZT-5陶瓷时,应电压中出现了一个附加的、理论所没有预计的、不规则低频振荡部分,可能是对这种压电材料,一维假定已不能适用,这个问题有待进一步分析。     

厚度模压电超声换能器无源声学材料研究进展*

厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心器件,一般由压电层、匹配层和背衬层3部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标(带宽、灵敏度)除了受到压电层的影响,还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材料(匹配层、背衬层和声透镜)的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向进行了展望。     

压电陶瓷非线性对大功率换能器结构参数匹配影响的计算分析

在Guyomar非线性模型基础上,通过机电等效法将晶堆前向负载作为等效质量和阻尼加入振动方程的质量项和阻尼项,推导了换能器振速、辐射声压级和谐振频率偏移率等表达式,计算分析了压电陶瓷非线性参数和结构参数对换能器声辐射性能的影响,研究了压电陶瓷的非线性对换能器结构参数匹配的影响。结果表明,换能器节面靠前,前盖板厚度越小,前盖板大径越小,都可以减少压电陶瓷非线性引起的换能器频率偏移。当设计频率确定时,压电陶瓷处于非线性工作域的换能器的结构参数有所减小。换能器加入辐射端匹配后,可以改善压电晶堆前向负载匹配,降低换能器的谐振频率偏移率。换能器激励电流也会出现频率偏移现象。在提高换能器激励电压时,换能器的结构参数应适当减小。得到的结论可为换能器设计提供理论依据和帮助。     

阶梯圆环压电超声换能器径向振动性能的理论研究*

提出了一种阶梯圆环径向振动压电超声换能器,根据力电类比原理建立了阶梯圆环及阶梯圆环换能器的径向振动等效电路,推导了阶梯圆环的径向共振频率方程和位移放大系数,在此基础上进一步推导了换能器的径向共振和反共振频率方程。通过理论推导和有限元仿真模拟分析了阶梯圆环压电超声换能器的径向振动性能。结果表明,增大阶梯圆环中内外环的径向厚度之比K1或减小轴向厚度之比K2,阶梯圆环的一阶径向共振频率减小,二阶径向共振频率增大;在二阶径向共振模式下,K1、K2值在一定范围内阶梯圆环可实现由内向外的径向位移振幅放大;随着压电陶瓷圆环的内半径增大,阶梯圆环压电超声换能器的一阶、二阶径向共振和反共振频率减小,二阶径向共振下的有效机电转换系数趋于零;增大阶梯圆环内环的外半径,换能器的一阶径向共振和反共振频率减小,二阶径向共振和反共振频率先增大后减小,理论推导与仿真模拟结果符合良好。本文研究结果为阶梯圆环压电超声换能器的工程应用提供理论参考。     

螺栓紧固型纵振换能器设计考虑

本语文采用网络传输法分析了螺栓螺固型纵振换能器的设计方法，并考虑了换能器结构件的内部机械损耗和压电元件的电损耗，数值计算了换能器谐振特性及节面位置，结果与实验情况一致。     

四激励二维正交复合夹心式压电超声换能器的设计

提出了一种四激励二维正交复合夹心式压电超声换能器,换能器由四组纵向极化压电陶瓷晶堆、一个中心耦合金属块和四个外部金属圆锥组成。基于二维耦合振动机理和机电类比原理,建立了换能器的等效电路模型并推导了其谐振频率方程。利用有限元软件仿真分析了四激励正交复合换能器的频响特性和振动特性,并与其单独一个方向振子的振动特性进行了对比。加工了反相和同相模态的换能器,利用阻抗分析仪和激光测振仪测试了其频率响应和二维四向纵振动输出特性,并进行了大功率二维四向超声乳化实验测试。理论、仿真和实验结果表明:换能器具有反相和同相两个纵向正交共振模态,在这两种共振模态下均可实现二维四向纵振动输出,且换能器两个正交方向振子的纵向振动具有相互耦合加强的作用;等效电路法和有限元法所得换能器的共振频率和有效机电耦合系数与实验测试结果吻合,通过与单激励正交复合夹心式压电超声换能器的有效机电耦合系数对比,发现该换能器具有更高的有效机电耦合系数。     

多匹配层空气耦合压电超声换能器*

该文针对超声无损检测与成像功能空气耦合换能器开展了分析计算和研制。为解决压电材料与空气间巨大的阻抗失配问题,进行了多匹配层设计,并基于有限元技术仿真设计了1-3压电复合材料参数。借助复数压电方程,导出考虑损耗的多匹配层压电复合材料换能器厚度振动等效电路,获得其等效导纳,以此计算电导谱,同时基于有限元技术数值计算相应电导谱,二者有较好的一致性。在此基础上分别设计制作复合压电材料,多匹配层材料以及由此构成的空气耦合超声换能器。换能器的实测电导谱与数值仿真结果一致。进一步的换能器回波信号测试及其谱分析结果表明,所研制的160 k Hz中心频率空气耦合换能器样品有较好灵敏度和带宽。这些结果说明,该文研制的空气耦合超声换能器的初样是成功的。     

Characteristics of backing impacts on the performance of the thickness mode piezoelectric transducer

The impacts of the thickness, the specific acoustic impedance and the mechanical loss factor of the backing on the performance of the thickness mode piezoelectric transducer are systemically studied, which are focused on the effective electromechanical coupling coefficient and the mechanical quality factor near the center frequency. The results show that with contin?uous increasing of the backing thickness, the effective electromechanical coupling coefficient and the mechanical quality factor are found rapidly declined by oscillation way. With the increase of the difference value of the acoustic impedance between the backing material and the piezoelec?tric material, the effective electromechanical coupling coefficient deceases and the mechanical quality factor increases. Under condition that the thickness of the piezoelectric material is fixed, the effective electromechanical coupling coefficient is found declined with the increase of the mechanical loss factor by monotonous way. The mechanical quality factor has minimum value and the electric characteristic curve tends to be smooth in a given frequency range. The equivalent circuit theory result is in good agreement with the ones by finite element method and the experimental results. The work mentioned above provides a theoretical guidance for the design and experimental fabrication of the thickness mode piezoelectric transducer.     

Optimization of the performance of the sandwich piezoelectric ultrasonic transducer

The resonance and antiresonance frequency, the effective electromechanical coupling coefficient, and the mechanical quality factor of a sandwich piezoelectric ultrasonic transducer are studied and optimized. The effect of the thickness of thick piezoelectric element electrodes on the transducer performance is analyzed. The effect of the length and position of the piezoelectric elements in the transducer is also studied. It is shown that, although using thick electrodes is beneficial for releasing heat produced by the piezoelectric elements, the effective electromechanical coupling coefficient and the mechanical quality factor are reduced. The length and the position of the piezoelectric elements affect the performances of the transducer. Increasing the length of the piezoelectric elements decreases the mechanical quality factor, but the effective electromechanical coupling coefficient increases. When the length reaches a certain value, the effective electromechanical coupling coefficient reaches a maximum value. When the piezoelectric elements are located at the geometrical center or the displacement node, the effective electromechanical coupling coefficient and the mechanical quality factor are maximized.     

空心聚合物微珠/环氧树脂复合材料匹配层空耦式压电换能器

研制了一种厚度模空耦式压电换能器,使用综合考虑材料衰减系数和声阻抗的空耦式压电换能器电力声等效电路理论模型以指导匹配层结构设计和材料选择,选用新型的空心聚合物微珠/环氧树脂复合材料作为声匹配材料,优化设计电阻抗匹配及结构参数。该换能器中心频率为510 kHz,-6 dB频域相对带宽为25.4%,插入损耗为-27 dB。结果表明,使用新型低衰减系数的闭孔复合材料单匹配层设计的该换能器不仅保证了高灵敏度,同时简化了换能器结构,为空耦式压电换能器研制提供了新思路。     

基于2-2型压电复合材料的新型宽频带径向振动超声换能器

本文提出了一种基于2-2型压电复合材料的新型宽频带径向振动超声换能器,它主要由内金属圆环和外压电陶瓷复合材料圆环组成.首先利用Newnham串并联理论和均匀场理论推导了2-2型压电复合材料的等效参数;其次利用解析法得到了金属圆环和径向极化压电复合陶瓷圆环径向振动的机电等效电路;最后得到了换能器的六端机电等效电路,从而得到了换能器的频率方程.接着分析了换能器共振频率和反共振频率以及有效机电耦合系数与几何尺寸、两相体积占比的关系,采用仿真软件对新型换能器的径向振动进行了数值模拟.结果表明,利用解析法得到的共振频率和反共振频率与数值模拟结果吻合较好.此外,对换能器在水下的辐射声场进行了仿真研究,结果表明新型复合材料径向换能器相比传统纯陶瓷径向换能器,发射电压响应幅值更大,工作带宽提高接近一倍,声匹配更佳.     

新型掺碳二氧化硅-薄膜体声波谐振器结构及其仿真验证

一定厚度的低声阻抗支撑层可以在薄膜体声波谐振器(FBAR)与衬底之间形成声学隔离层,防止声波泄漏到衬底当中。掺碳二氧化硅(CDO)是一种低声阻抗材料,对FBAR具有较好的温度补偿效果,可以作为FBAR与衬底之间的声学隔离层,从而构成一种新型的CDO-FBAR。为了分析CDO-FBAR与通孔型FBAR相比性能是否退化,以及CDO声学隔离层所需厚度,采用多物理场耦合仿真软件分析了CDO-FBAR和通孔型FBAR的谐振频率、Q值、有效机电耦合系数和S参数,并提取了CDO-FBAR纵向振动位移。分析结果表明：CDO-FBAR的谐振频率整体向下漂移;CDO声学隔离层导致S参数的寄生干扰;由于声学损耗增加,Q值略有降低,其中并联谐振点处的Q值降幅更大;有效机电耦合系数略有降低;声波传播到声学隔离层中9 m处就完全衰减,即只需要9 m厚的CDO声学隔离层就能在FBAR与衬底之间形成有效的声学隔离。由此,仿真验证了这种新颖的CDO-FBAR结构的可行性。     

Theoretical modelling of frequency dependent elastic loss in composite piezoelectric transducers

The large number of degrees of freedom in the design of piezoelectric transducers requires a theoretical model that is computationally efficient so that a large number of iterations can be performed in the design optimisation. The materials used are often lossy, and indeed loss can be used to enhance the operational characteristics of these designs. Motivated by these needs, this paper extends the one-dimensional linear systems model to incorporate frequency dependent elastic loss. The reception sensitivity, electrical impedance and electromechanical coupling coefficient of a 1–3 composite transducer, with frequency dependent loss in the polymer filler, are investigated. By plotting these operating characteristics as a function of the volume fraction of piezoelectric ceramic an optimum design is obtained. A device with a non-standard, high shear attenuation polymer is also simulated and this leads to an increase in the electromechanical coupling coefficient. A comparison with finite element simulations is then performed. This shows that the two methods are in reasonable agreement in their electrical impedance profiles in all the cases considered. The plots are almost identical away from the main resonant peak where the frequency location of the peaks are comparable but there is in some cases a 20% discrepancy in the magnitude of the peak value and in its bandwidth. The finite element model also shows that the use of a high shear attenuation polymer filler damps out the unwanted, low frequency modes whilst maintaining a reasonable impedance magnitude.     

高次谐波体声波谐振器的有效机电耦合系数

高次谐波体声波谐振器HBAR (High-overtone Bulk Acoustic Resonator)由基底、压电薄膜和上下电极组成,系统地研究了它们的结构参数(厚度)和性能参数(特性阻抗)对HBAR的重要性能参数有效机电耦合系数K_eff²的影响。在谐振频率附近,通过将HBAR的分布参数等效电路简化为集总参数等效电路得到了它们之间的关系表达式,分析了K_eff²在所关心频率最近谐振点的变化情况。结果表明,保持压电薄膜厚度不变,连续增加基底厚度,K_eff²呈振荡(非单调)下降,当基底厚度达到一定值时K_eff²与厚度成反比下降;保持基底厚度不变,连续增加压电薄膜厚度,K_eff²的峰值随基底和压电层的特性阻抗之比增加快速下降,到达极小值后缓慢增加;选择低阻抗的熔融石英作为基底可以获得较大的K_eff²;与Al电极相比,Au电极选择适当厚度可以获得较高的K_eff²。上述揭示的一些规律为HBAR的优化设计提供了理论依据。     

复合圆环弯曲振动四极子模态分析

针对压电圆环弯曲振动机电转换性能较差的问题,提出了一种复合圆环弯曲振动换能器,它由一个径向极化的压电陶瓷内圆环和一个金属外圆环复合而成。基于能量原理推导得到了复合圆环弯曲振动的谐振频率和有效机电耦合系数,探讨了弯曲振动四极子模态特性与其结构尺寸间的关系。当压电圆环尺寸不变时,随外侧金属圆环壁厚增加,复合圆环弯曲振动四极子模态谐振频率上升,有效机电耦合系数迅速上升到极大值后缓慢下降。最后,设计制作了圆环换能器并对其谐振频率和有效机电耦合系数进行了实验测试,测试结果与解析结果和数值模拟结果吻合得较好。     

Study on the radial composite piezoelectric ceramic transducer in radial vibration

A new type of radial composite piezoelectric transducer in radial vibration is developed and analyzed. The radial composite transducer consists of a piezoelectric ceramic thin ring polarized in the thickness direction and a metal thin circular ring. They are connected together and excited to vibrate in the radial direction. The radial vibrations of a piezoelectric ceramic thin ring and a metal thin circular ring are analyzed, respectively. Their radial electro-mechanical equivalent circuits are obtained. Based on the electro-mechanical equivalent circuits and using the boundary conditions between the piezoelectric ceramic thin ring and the metal thin circular ring in the radial direction, the electro-mechanical equivalent circuit of the radial composite piezoelectric transducer is derived out and the resonance frequency equation is obtained. The relationship between the resonance frequency and the geometrical dimensions of the transducer is analyzed. Some radial composite piezoelectric transducers are designed and manufactured. The resonance frequencies and the anti-resonance frequencies, the electro-mechanical equivalent circuit parameters are measured. The effective electro-mechanical coupling coefficient and the mechanical quality factor are calculated. It is illustrated that the measured radial resonance frequencies are in good agreement with the theoretical results from the resonance frequency equation.     

Mode analysis of trilaminar bender bar transducers using an approximation method

Based on the vibration theory of a thin plate, an analytical treatment of the trilaminar bender bar with piezoelectric elements and inert substrate of various lengths is presented for mode analysis. Resonance frequency and effective electromechanical coupling coefficient are calculated by this method. The impacts of the geometries of the bender bar on the performance of its fundamental and third-order flexural mode are investigated in detail under rigid boundary conditions. It is shown that resonance frequency is extremely sensitive to the thickness of inert substrate. Moreover, the effective electromechanical coupling coefficient has peaks as the length of piezoelectric elements varies. The peaks are achieved when the length of piezoelectric elements equals the length between two nodes having zero strains in the x-direction. The trilaminar bender bar will be effectively excited when the strains on the piezoelectric element are in the same phase, which is important to disclose the vibration mechanisms of this kind of transducer. Also, analytical results are compared with the ones of numerical simulation. The results suggest that effective electromechanical coupling coefficient shares similar patterns with electrical conductance, which can be used to characterize transducer performance to a certain extent. It also demonstrates that the analytical treatment provides an efficient alternative way for optimizing the bender bar transducer design.