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建立了包含两种正离子的碰撞等离子体鞘层的流体模型,通过四阶龙格-库塔法模拟了碰撞对含有两种正离子的等离子体鞘层中的离子密度和速度分布产生的影响。结果表明,对于两种正离子的等离子体来说,鞘层中无论哪种离子与中性粒子碰撞频率的增加,该种离子的密度和速度分布都将呈现波动变化,密度是先增加后降低,速度是先降低后增加;而另一种离子的密度和速度呈单调变化。鞘边正离子的含量越少,受自身与中性粒子的碰撞频率增加,鞘层中该种离子密度先增加后降低的变化位置就越远离等离子体的鞘层边界。同时发现该种离子密度分布受自身碰撞频率增加,降低的幅度变化非常小。另外发现电子碰撞器壁产生的二次电子发射系数对质量较轻的离子影响要大一些。     

偏滤器靶板磁预鞘层边界的离子流

利用流体力学模型研究了偏滤器等离子体条件下磁预鞘层边界离子流和预鞘层宽度之间的关系，并分析了粒子碰撞对预鞘层边界离子流的影响。由于粒子碰撞对离子的驱动效益，预鞘层边界离子流速度随着预鞘层宽度的增加而减少；只有当预鞘层宽度趋于零时，边界离子流沿磁力线的速度才趋近于离子声速。在固定预鞘层宽度的条件下，计算了预鞘层边界离子流速度与碰撞频率之间的函数关系。     

磁场对直流辉光放电阻极鞘层中电子输运过程的影响

采用Ｍｏｎｔ－Ｃａｒｌｏ模拟方法研究了磁场对直流辉放电阴极鞘层中电子输运过程的影响，磁场垂直于阴极鞘层中电场的方向，模型中，电子与中性粒的碰撞过程有三种。电子的自由飞行步长由电子与中性粒子的碰撞频率来决定，计算了电子的密度分布，电子与中性粒的非弹性碰撞速率，以及电子能量和电子通量分布等，结果表明，横向磁场能在一定程度上改变直流放电中电子的输运过程，磁场中电子与中性粒子的非性弹碰撞速率被增强，这一结     

直流空心阴极放电中鞘层区电子的输运过程

采用蒙特－卡洛方法对空心阴极放电中鞘层区电子的输运过程进行了研究，电子在鞘层区被非均匀电场加速，两次碰撞之间的步长是由电子与中性粒子的碰撞频率确定。模型中三种碰撞截面积是由实验和理论数据拟合而来。研究了电子平均能量、电子密度和电离系数在径向的分布。电子能量的空间分布结果与实验很好地符合。 关键词：     

等离了体源离子注入球靶的蒙特—卡罗模拟

建立了在球形靶鞘层中蒙特－卡罗模拟模型，考虑了离子与中性粒子的电荷交换碰撞和弹性散射，以及精确依赖于入射离子能量的电荷交换碰撞截面和动量输运截面。模拟了不同气压下，在鞘层扩展过程中，氮离子Ｎ＾＋２到达靶表面的能量分布和入射分布，研究了它们的变化规律。     

ECR微波等离子体离子输运的数值模拟

建立了ECR微波等离子体源离子输运的平板和圆柱模型,对离子历经的空间区域的输运过程进行了数值研究。采用Monte Carlo(M-C)方法模拟了存在外磁场情况下,离子离开开放电室后历经中性区、鞘层区、最后被加负偏压的工作表面吸收的全过程,考虑了离子与中性粒子的电荷交换碰撞玫弱性散性,统一处理了中性区和鞘层区电势的衔接,采用曲线拟合,电势自洽迭代方法把中性区和鞘层区衔接起来,得到了光滑自治的电势分布曲线和鞘层区不同位置处的速度分布、能量分布及角分布。     

具有非广延分布电子的碰撞等离子体磁鞘的结构

很多关于等离子体鞘层的研究工作都是基于电子满足经典的麦克斯韦速度分布函数,而等离子体中的粒子具有长程电磁相互作用,使用Tsallis提出的非广延分布来描述电子更为恰当.本文建立一个具有非广延分布电子的碰撞等离子体磁鞘模型,理论推导出受非广延参数q影响的玻姆判据,离子马赫数的下限数值会随着参数q的增大而减小.经过数值模拟,发现与具有麦克斯韦分布(q=1)电子的碰撞等离子体磁鞘对比,具有超广延分布(q<1)和亚广延分布(q>1)电子的碰撞等离子体磁鞘的结构各有不同,包括空间电势分布、离子电子密度分布、空间电荷密度分布.模拟结果显示非广延分布的参数q对碰撞等离子体磁鞘的结构具有不可忽略的影响.希望这些结论对相关的天体物理、等离子体边界问题的研究有参考价值.     

碰撞对非对称射频鞘层特性的影响

对于大多数活性射频等离子体刻蚀工艺，由于放电室中两个电极的面积不等，使得两个电极附近的等离子体鞘层是非对称性的.考虑离子与中性粒子的碰撞效应，建立了一种描述这种非对称射频鞘层动力学特性的自洽动力学模型.数值结果显示碰撞效应对极板上的瞬时电压降、瞬时电子鞘层厚度、鞘层内的离子密度和动能的空间分布以及两个极板上电压之差等物理量的影响. 关键词： 射频鞘层 非对称电极 碰撞效应 离子     

磁场对直流辉光放电阴极鞘层中电子输运过程的影响

采用MonteCarlo模拟方法研究了磁场对直流辉光放电阴极鞘层中电子输运过程的影响.磁场垂直于阴极鞘层中电场的方问.模型中,电子与中性粒子的碰撞过程有三种(弹性碰撞;激发碰撞和电离碰撞).电子的自由飞行步长由电子与中性粒子的碰撞频率来决定.计算了电子的密度分布,电子与中性粒子的非弹性碰撞速率,以及电子能量和电子通量分布等.结果表明,横向磁场能在一定程度上改变直流放电中电子的输运过程.磁场中电子与中性粒于的非弹性碰撞速率被增强,这一结果与实验结果符合较好.     

含杂质多离子成分等离子体中的碰撞鞘结构

采用流体模型，研究含杂质多离子成分等离了体的碰撞鞘，首衔导出描述碰撞鞘的非线性方程组，然后采用数值方法研究鞘宽和离子注入能量与等离子体参数的信赖关系，结果表明，碰撞率及杂质（尘埃）密度对鞘宽和离子注入能量有显著影响。     

Distribution functions of positive ions and electrons in a plasmanear a surface

In this study, the velocity distribution functions of the ions and electrons in a collisional presheath and collisionless sheath of a plasma near a wall emitting and reflecting ions and electrons are systematically determined. The collisions in the presheath are modeled by a relaxation time approximation (namely, Bhatnagar-Gross-Krook model, or simply BGK model). To find the variation in electrostatic potential with position, the model and analysis from Emmert et al. (1980), are used. Distribution functions of the ions and electrons in a collisionless presheath and sheath on a wall partially reflecting ions and electrons, therefore, can be exactly obtained. The reflections of the ions and electrons by a wall play important roles in studying heat transfer from a plasma sheath to a workpiece surface, and sputter etching and deposition, ion implantation, and ion scattering spectroscopy. Irrespective of ion and electron reflectivities, velocities of the ions in the presheath and sheath are of highly non-Maxwell-Boltzmann distributions. The electrons in the presheath are close to Maxwell-Boltzmann distributions, whereas those in the sheath are non-Maxwell-Boltzmann distributions. Even though the wall partially reflects ions and electrons, the Bohm's criterion is marginally satisfied at the sheath edge. The computed distribution functions for a completely absorbing surface agree with theoretical results provided in the literature. Good comparison of the resulted transport variables with available analytical work is presented in the companion paper     

Presheath in Fully Ionized Collisional Plasma in a Magnetic Field

The quasineutral presheath layer at the boundary of fully ionized, collisional, and magnetized plasma with an ambipolar flow to an adjacent absorbing wall was analyzed using a two fluid magneto‐hydrodynamic model. The plasma is magnetized by a uniform magnetic field B , imposed parallel to the wall. The analysis did not assume that the dependence of the particle density on the electric potential in the presheath is according to the Boltzmann equilibrium, and the dependence of the mean collision time τ on the varying plasma density within the presheath was not neglected. Based on the model equations, algebraic expressions were derived for the dependence of the plasma density, electron and ion velocities, and the electrostatic potential on the position within the presheath. The solutions of the model equations depended on two parameters: Hall parameter (β ), and the ratio (γ ), where γ = ZT_e /(ZT_e + T_i ), and T_e , T_i and Z are the electron and ion temperatures and ionicity, respectively. The characteristic scale of the presheath extension is several times r_i /β , where r_i is the ion radius at the ion sound velocity. The electric potential could have a non monotonic distribution in the presheath. The ions are accelerated to the Bohm velocity (sound velocity) in the presheath mainly near the presheath‐sheath boundary, in a layer of thickness ～r_i /β . The electric field accelerates the ions in the whole presheath if their velocity in the wall direction exceeds their thermal velocity. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Fluid-like transport variables in a kinetic collisionless plasmanear a surface with ion and electron reflection

Transport variables of the positive ions and electrons in the presheath and sheath of a plasma near a wall that partially reflects ions and electrons are determined from a kinetic analysis. Because velocity distributions of the ions and electrons near the wall are highly non-Maxwell-Boltzmann distributions, accurate predictions of transport variables, such as density, fluid velocity, mean pressure, fluid-like viscous stress, and conduction, require kinetic analysis. The results find that dimensionless transport variables of ions and electrons in the presheath and sheath can be exactly expressed in terms of transcendental functions determined by dimensionless independent parameters of ion and electron reflectivities of the wall, ion-to-electron mass ratio, charge number, and electron-to-ion temperature ratio at the presheath edge. The effects of the parameters on transport variables at the wall are also obtained. The computed transport variables in the presheath and sheath show agreement with available theoretical data for a completely absorbing wall     

Maximum-entropy states for magnetized ion transport

For a plasma with fixed total energy, number of particles, and momentum, the distribution function that maximizes entropy is a Boltzmann distribution. If, in addition, the rearrangement of charge is constrained, as happens on ion-ion collisional timescales for cross-field multiple-species transport, the maximum-entropy state is instead given by the classic impurity pinch relation. The maximum-entropy derivation, unlike previous approaches, does not rely on the details of the collision operator or the dynamics of the system, only on the presence of certain conservation properties.     

Experimental studies of plasma sheath near meshes of different transmissivity

<正>The measurements of the potential distributions in the boundary layer near meshes with different mesh spacing were conducted in weakly collisional plasmas using a fine-structured emissive probe and the results of the sheath thickness and electric field at the sheath-presheath edge were compared with theoretical models of collisional presheath and collisionless sheath.It was shown that,because the meshes are partially transparent to ions,the sheath is thinner and the electric field is stronger for the mesh of higher transmissivity,owing to the increased ion density in the sheath contributed from the ions transmitted from the other side of the mesh.However,the potential profiles in the presheath remain almost the same for different meshes except for the shift of the sheath-presheath edge.The thickness of the sheath decreases while the electric field at the edge increases with the increase of the neutral gas pressure.Furthermore, depending on the pressure,the measured electric fields at the edge are close to that from the models of a transition region.     

离子振荡对低压脉冲负电性放电条件的影响

为了研究该离子振荡及其对低气压负电性放电自持条件的影响，建立了一个整体模型描述低气压正负离子等离子体中离子振荡与少量电子的相互作用. 在模型中引入参数r描述电子流体与电极碰撞后的动量保存(或损失)的程度. 发现体系存在一个临界值r=r_c,它导致了两种不同性质的电子损失机理. 另一临界值r=4r_c决定了两种不同的电子密度随时间增长的阈值. 这使得该阈值随r非单调变化, 进而导致RF负电性脉冲放电主动放电阶段初期的自持放电条件参数空间中可以存在间隙. PIC-MCC 关键词： 负电性放电 脉冲放电 离子振荡     

Sheath formation in the presence of non-extensive electron distribution

The main aim of this article is to recognize the sheath formation in the presence of non-extensive electron distribution. The role of ion–neutral collision parameter K and the non-extensive parameter “q” has been discussed. Existing literature suggests that the presence of non-extensive electrons potentially modifies the plasma sheath behaviour. However, numerical calculations over the full plasma range, jointly addressing the sheath and presheath, are rare. Sheath formation, being a very fundamental phenomenon, deserves enough investigation in the region of non-extensive distribution of particles. This study attempts to bridge the gap in understanding the formation of the sheath in collisional plasma in the light of both Boltzmann and q-distributed non-extensive electrons.     

First experimental measurements of the plasma potential throughout the presheath and sheath at a boundary in a weakly collisional plasma

Experimental data obtained with emissive probes and Langmuir probes show that the plasma potential profile in the presheath scales as -ephi /T(e)= sqrt[(x(0) -x)/lambda ], consistent with ion flux conservation, and that the sheath consists of a transition region and an electron-free collisionless sheath with thicknesses scaling as lambda( 1/5)lambda (4/5 )(D) and lambda(D )(ephi/ T(e))(3 /4), respectively, where lambda is the ion-neutral collision length. Results support Rieman's presheath and transitional region model [Phys. Plasmas 4, 4158 (1997)]]. The potential drop over the presheath and transition sheath region were the order of T(e) /e and 2T(e )/3e, respectively, increasing with increasing pressure.     

A self-consistent kinetic modeling of a 1-D, bounded, plasma in equilibrium

A self-consistent kinetic treatment is presented here, where the Boltzmann equation is solved for a particle conserving Krook collision operator. The resulting equations have been implemented numerically. The treatment solves for the entire quasineutral column, making no assumptions about λ_mfp/L, where λ_mfp is the ion-neutral collision mean free path and L the size of the device. Coulomb collisions are neglected in favour of collisions with neutrals, and the particle source is modeled as a uniform Maxwellian. Electrons are treated as an inertialess but collisional fluid. The ion distribution function for the trapped and the transiting orbits is obtained. Interesting findings include the anomalous heating of ions as they approach the presheath, the development of strongly non-maxwellian features near the last λ_mfp, and strong modifications of the sheath criterion.     

The effects of ion-neutral collision frequency on the plasma sheath dynamics for oblique entrance of ions into the sheath

Recently it has been shown that the magnetic field has significant effects on the characteristics of ions which enter the collisionless plasma sheath with an oblique incidence angle. Here, we have investigated these effects in collisional plasma sheath. Considering the ion-neutral collision, the basic equations of fluid model in a plasma sheath have been numerically solved in the presence of an external magnetic field where the ion collision frequency has a power law dependency to the ion flow velocity. The results show that the effects of magnetic field on the plasma sheath dynamics strongly depend on the ion-neutral collision frequency and its dependency to ion flow velocity.