用于彩色滤光片的低阻低应力ITO透明导电膜

探讨了用于彩色滤光片的低电阻和低压应力的ITO透明导电膜工艺。用磁控溅射方法在不同温度的衬底上制备了ITO薄膜。研究了膜形衬底温度与膜结晶化程度的关系,以及膜形衬底温度对膜电阻和压应力的影响。对不同衬底温度下形成的ITO薄膜进行了退火处理,并对退火后的ITO薄膜的电阻和压应力特性进行了分析。结果表明,采用室温沉积非晶态ITO膜,在真空退火下可获得低电阻、低压应力的多晶相ITO膜。     

观测表面反射像检测精密薄板玻璃翘曲度的理论分析

分析了一种高效简便测试精密薄板玻璃翘曲度的方法。这种方法是通过观测精密薄板玻璃和基准平面反射同一参考物的像,检测两个像分离的程度来判定精密薄板玻璃的翘曲度。通过对精密薄板玻璃表面变形形态进行抽象、模拟和近似处理,从理论上推导出精密薄板玻璃翘曲度 Ｗ ≤０ ．００３ ,样品尺寸在２００ｍ ｍ ～５００ｍ ｍ 的条件下,参考物直径与测量装置结构尺寸和翘曲度之间的关系式。     

有ITO透明导电膜的平面分层介质系统的电磁波性能理论研究

理论研究了有ITO(indium tin oxide)透明导电膜的多层平面分层介质系统的电磁性能，给出的理论曲线和实测曲线符合很好.多层平面分层介质系统的电磁性能与ITO膜(方块电阻为8Ω)所在界面位置和平面分层介质系统层数及各层厚度等有关.优化设计了一种含有ITO透明导电膜的厚度仅7.35mm的四层平面分层介质系统，其在8—18GHz频段内电磁波反射性能很好.作为多层平面分层系统中的ITO导电膜，其方块电阻应低于30Ω，并且越小，其反射性能越好. 关键词： 多层平面介质系统 电磁性能 ITO透明导电膜     

基于金属掺杂ITO透明导电层的紫外LED制备

为降低ITO薄膜对紫外波段的光吸收,制备低电压高功率的紫外LED,研究了一种基于金属掺杂ITO透明导电层的365 nm紫外LED的制备工艺。利用1 cm厚的石英片生长了不同厚度ITO薄膜以及在ITO上掺杂不同金属的新型薄膜,并研究了在不同的退火条件下这种薄膜的电阻和透过率,分析了掺杂金属ITO薄膜的带隙变化。将这种掺杂的ITO薄膜生长在365 nm外延片上并完成电极生长,制备成14 mil×28 mil的正装LED芯片。利用电致发光（EL）设备对LED光电性能进行测试并对比。实验结果表明:掺Al金属的ITO薄膜能够相对ITO薄膜的带隙提高0.15 eV。在600℃退火后,方块电阻降低6.2 Ω/□,透过率在356 nm处达到90.8%。在120 mA注入电流下,365 nm LED的电压降低0.3 V,功率提高14.7%。ITO薄膜掺金属能够影响薄膜带隙,改变紫光LED光电性能。     

一种保护玻璃防水雾透明导电薄膜的设计与制备

为了使光学仪器能适应低温潮湿环境,设计了一种复合型的保护玻璃防水雾透明导电薄膜.采用非平衡闭合磁场反应溅射技术在K9玻璃基底上沉积了氧化铟锡(ITO)导电膜以及复合型的透明导电膜系.采用光谱仪、方阻仪测试了样品的透射光谱以及方块电阻,并对样品进行了环境试验.结果表明,样品的光学技术指标以及抗恶劣环境性能均达到了使用要求...     

衬底偏置对ITO膜光学性质的影响

研究衬底偏置机理。在低温偏压衬底下,用三极反应溅射法镀制出在可见光区透射率为83％的ITO膜。测试低温负偏置衬底法与高温无偏置衬底法镀制ITO膜的光谱特性,发现两者在红外区有相似变化。确定出氧分压范围在(5～7)×10~(-3)Pa。     

氧化铟锡薄膜的椭偏光谱研究

用溅射法在Si片上制备了厚度为140nm的氧化铟锡(ITO)薄膜。X射线衍射研究表明所制备的薄膜为多晶结构。在1.5~4.5eV范围内对ITO薄膜进行了椭偏测量。分别用德鲁德-洛伦茨谐振子(Drude Lorenz oscillators)模型、层进模型结合有效介质近似模型对椭偏参量ψ、Δ进行了拟合,得到ITO薄膜的折射指数n的变化范围在1.8~2.6之间,可见光范围内消光系数k接近于零,在350nm波长附近开始明显变化,且随着波长的减小k迅速增加。计算得到直接和间接光学带隙分别是3.8eV和4.2eV。并在1.5~4.5eV段给出一套较为可靠的、具有实用价值的ITO介电常量和光学常量。     

利用磁控溅射技术在熔融石英衬底上生长铟锡氧薄膜的结构和形貌特性研究

利用磁控溅射技术在熔融石英衬底上沉积铟锡氧薄膜(ITO),讨论了生长温度、沉积时间、激光辐照和退火对ITO薄膜结构及形貌的影响.随着沉积温度的升高和沉积时间的延长,薄膜的晶化程度得到明显的改善,方块电阻降低,并且薄膜的形貌从光滑表面的圆形多晶颗粒演变到枝杈形貌.短时间的脉冲激光辐照使得枝杈的尖状晶粒变得圆滑,导电性略有改善.ITO薄膜在可见光区的透过率在经过空气中退火处理后明显得以改善,平均透过率可以达到80%.     

两种方法制备ITO薄膜的红外特性分析

比较了用电束加热蒸发法和直流磁控溅射法制备的氧化锡铟(ITO)薄膜在红外波段的光学特性实验发现,通过直流磁控溅射在常温下制备的ITO薄膜在红外波段折射率稳定、消光系数小,比电子束加热蒸发制备的膜有较高的透过率在波长1550nm附近的透过率可达86%以上,消光系数约为004,方电阻最低为100Ω/□.     

Patterning of nanoparticulate transparent conductive ITO films using UV light irradiation and UV laser beam writing

Indium tin oxide (ITO) thin film is one of the most widely used as transparent conductive electrodes in all forms of flat panel display (FPD) and microelectronic devices. Suspension of already crystalline conductive ITO nanoparticles fully dispersed in alcohol was spun, after modifying with coupling agent, on glass substrates. The low cost, simple and versatile traditional photolithography process without complication of the photoresist layer was used for patterning ITO films. Using of UV light irradiation through mask and direct UV laser beam writing resulted in an accurate linear, sharp edge and very smooth patterns. Irradiated ITO film showed a high transparency (∼85%) in the visible region. The electrical sheet resistance decrease with increasing time of exposure to UV light and UV laser. Only 5 min UV light irradiation is enough to decrease the electrical sheet resistance down to 5 kΩ□.     

Study of Zinc Oxide nano/micro rods grown on ITO and glass substrates

Highly oriented multilinked ZnO nano and micro rods were deposited using aqueous solution growth technique on ITO and glass substrates. Their study provides a basic understanding of effect of the base material on the growth of nanorods. An equimolar aqueous solution of Zinc nitrate and hexamine (HMT) was used for the preparation of ZnO nanorods arrays. ZnO was deposited on ITO and glass substrates after establishing the optimal pH and concentration, which yield the best substrate coverage for precursor solution. To achieve uniform growth and high density of ZnO nanorods, the prepared solution was heated at certain constant temperature. The experimental results have been obtained by using Scanning Electron Microscope (SEM), X-ray diffractometer (XRD) and Fluorescence Spectroscope which shows highly oriented nanorods perpendicular to the surface of substrates and a comparative study of ITO and glass grown nanorod arrays shows that the structural chemistry of the substrate clearly affects the growth nanostructures. The high variation in optical properties can be attributed by the heating temperatures and limited presence of reactants available for the controlled growth on substrates. It is also observed confined and decreased particle size with enhanced nucleation on ITO substrate as compared to glass. Due to the physical limitations in the growth, this kinetically controlled nucleation would be responsible for producing the highly uniform, dense and perpendicularly oriented nanorods.     

Properties of ZnO thin films deposited on (glass,ITO and ZnO:Al) substrates

ZnO thin films were deposited on glass, ITO (In₂O₃; Sn) and on ZnO:Al coated glass by spray pyrolysis. The substrates were heated at 350 °C. Structural characterization by X-ray diffraction (XRD) measurements shows that films crystallize in hexagonal structure with a preferential orientation along (0 0 2) direction. XRD peak-shift analysis revealed that films deposited on glass substrate (−0.173) were compressive, however, films deposited onto ITO (0.691) and on ZnO:Al (0.345) were tensile. Scanning electron microscopies (SEM) show that the morphologies of surface are porous in the form of nanopillars. The transmittance spectra indicated that the films of ZnO/ITO/glass and ZnO/ZnO:Al/glass exhibit a transmittance around 80% in the visible region. An empirical relationship modeled by theoretical numerical models has been presented for estimating refractive indices (n) relative to energy gap. All models indicate that the refractive index deceases with increasing energy band gap (E_g).     

Opto-Electronic Properties of MBE-Grown ZnSSe Thin Films on ITO Substrates

The opto-electronic properties of molecular-beam-epitaxy (MBE)-grown ZnSSe thin films on indium-tin-oxide (ITO) glass substrates were investigated in this work. Ultraviolet (UV) photoresponsivity as high as 0.01 A/W and three orders of visible rejection power were demonstrated. The results of d.c. resistivity measurements revealed that the resistivity of the ZnSSe thin films decreased as the crystal size increases and reaches a value of 4.3 × 10¹¹ Ω cm for a thin film grown at the optimized substrate temperature of 290°C. The results of a.c. impedance measurements performed in the frequency range of 40 to 4000 Hz further indicated that the impedance of this alloy thin film can provide a good match with the liquid crystal layer of a liquid crystal light valve for UV imaging applications.     

谷胱甘肽在金纳米粒子有序膜表面吸附的表面增强Raman光谱表征

将制备好的金纳米溶胶粒子组装在3-氨基丙基-三甲氧基硅烷(APTMS)修饰的ITO导电玻璃表面,形成金纳米粒子有序膜。FE-SEM电镜图显示金纳米粒子有序膜呈现出较为均匀的亚单层分布。同时利用电化学方法对有序膜进行了表征。将有序膜作为表面增强Raman光谱(SERS)基底应用于生物分子谷胱甘肽的SERS光谱表征与分析。研究表明,所制备的金纳米粒子有序膜可有效应用于谷胱甘肽分子的SERS光谱表征与分析。