Photoluminescence properties of BaMoO4 amorphous thin films

BaMoO₄ amorphous and crystalline thin films were prepared from polymeric precursors. The BaMoO₄ was deposited onto Si wafers by means of the spinning technique. The structure and optical properties of the resulting films were characterized by FTIR reflectance spectra, X-ray diffraction (XRD), atomic force microscopy (AFM) and optical reflectance. The bond Mo-O present in BaMoO₄ was confirmed by FTIR reflectance spectra. XRD characterization showed that thin films heat-treated at 600 and 200 °C presented the scheelite-type crystalline phase and amorphous, respectively. AFM analyses showed a considerable variation in surface morphology by comparing samples heat-treated at 200 and 600 °C. The reflectivity spectra showed two bands, positioned at 3.38 and 4.37 eV that were attributed to the excitonic state of Ba²⁺ and electronic transitions within MoO²⁻₄, respectively. The optical band gaps of BaMoO₄ were 3.38 and 2.19 eV, for crystalline (600 °C/2 h) and amorphous (200 °C/8 h) films, respectively. The room-temperature luminescence spectra revealed an intense single-emission band in the visible region. The PL intensity of these materials was increased upon heat-treatment. The excellent optical properties observed for BaMoO₄ amorphous thin films suggested that this material is a highly promising candidate for photoluminescent applications.     

Swift heavy ion induced modification in dielectric and microhardness properties of polymer composites

Polymer composites with different concentrations of organometallics (ferric oxalate) dispersed PMMA were prepared. PMMA was synthesized by solution polymerization technique. These films were irradiated with 120 MeV Ni¹⁰⁺ ions in the fluence range 10¹¹-5 × 10¹² ions/cm². The radiation induced modifications in dielectric properties, microhardness, structural changes and surface morphology of polymer composite films have been investigated at different concentrations of filler and ion-fluences. It was observed that electrical conductivity and hardness of the films increase with the concentration of the filler and also with the fluence. The dielectric constant (?) obeys the Universal law given by ?αfⁿ⁻¹. The dielectric constant/loss is observed to change significantly due to irradiation. This suggests that ion beam irradiation promotes the metal to polymer bonding and convert polymeric structure into hydrogen depleted carbon network. This makes the composites more conductive and harder. Surface morphology of the films has been studied using atomic force microscopy (AFM) and scanning electron microscopy (SEM). The average surface roughness is observed to increase after irradiation as revealed by AFM studies. The SEM images show the blisters type of phenomenon on the surface due to ion beam irradiation.     

Nanocalorimeter fabrication procedure and data analysis for investigations on implantation damage annealing

Nanocalorimetry operates on similar principles as conventional differential thermal analysis, but the thinness of the system provides a mass addenda small enough to observe thermal processes in thin films or at surface, involving energies in the order of the nanojoules. The fabrication procedure of nanocalorimeters used to measure the heat released by damage after low-energy (30 keV) ion implantation in polycrystalline silicon (poly-Si) is described. Nanocalorimeters are fabricated from low-stress Si₃N_x membranes (100 nm) on which a Pt strip (25 nm) is deposited which serves both as a heater and thermometer. Using Pt allows us to carry out the metallization step prior to Si anisotropic chemical etching releasing the rectangular Si₃N_x membrane, so the success yield nearly reaches 100%. A 140 nm Si layer is deposited on the nanocalorimeters. Large-grain (∼75 nm) poly-Si is obtained by annealing at 900 °C for 100 s. The calculation method used to obtain heat rate curves is described, including the corrections necessary to take into account the dissimilarity between sample and reference calorimeters (baseline), and the increased heating rate and associated losses. Examples of heat release after 30 keV Si implantations are presented, showing that the total amount of heat release is characterized by a saturation above a fluence of 1 Si⁻/nm². The similarity observed in the signal shape between low and high fluence measurements also suggests that each impacting ion produces a high damage zone similar to the damage generated by high fluence irradiation. This conclusion is compatible with the annealing of damage zones proposed by molecular dynamic studies. It is also shown that the measured signal is not affected significantly by temperature non-uniformity.     

The effect of nitrogen on the cycling performance in thin-film Si1−xNx anode

The effects of nitrogen on the electrochemical properties of silicon-nitrogen (Si_1−xN_x) thin films were examined in terms of their initial capacities and cycling properties. In particular, Si_0.76N_0.24 thin films showed negligible initial capacity but an abrupt capacity increase to ∼2300 mA h/g after ∼650 cycles. The capacity of pure Si thin films was deteriorated to ∼20% of the initial level after 200 cycles between 0.02 and 1.2 V at 0.5 C (1 C=4200 mA/g), whereas the Si_0.76N_0.24 thin films exhibited excellent cycle-life performance after ∼650 cycles. In addition, the Si_0.76N_0.24 thin films at 50 °C showed an abrupt capacity increase at an earlier stage of only ∼30 cycles. The abnormal electrochemical behaviors in the Si_0.76N_0.24 thin films were demonstrated to be correlated with the formation of Li₃N and Si₃N₄.     

100 keV H+ ion irradiation of as‐deposited Al‐doped ZnO thin films: An interest in tailoring surface morphology for sensor applications

We report the influence of 100 keV H⁺ ion beam irradiation on the surface morphology, crystalline structure, and transport properties of as‐deposited Al‐doped ZnO (Al:ZnO) thin films. The films were deposited on silicon (Si) substrate by using DC sputtering technique. The ion irradiation was carried out at various fluences ranging from 1.0 × 10¹² to 3.0 × 10¹⁴ ions/cm². The virgin and ion‐irradiated films were characterized by X‐ray diffraction, Raman spectroscopy, atomic force microscopy, and Hall probe measurements. Using X‐ray diffraction spectra, 5 points Williamson‐Hall plots were drawn to deduce the crystallite site and strain in Al:ZnO films. The analysis of the measurements shows that the films are almost radiation resistant in the structural deformation under chosen irradiation conditions. With beam irradiation, the transport properties of the films are also preserved (do not vary orders of magnitude). However, the surface roughness and the crystallite size, which are crucial parameters of the ZnO film as a gas sensor, are at variation with the ion fluence. As ion fluence increases, the root‐mean‐square surface roughness oscillates and the surface undergoes for smoothening with irradiation at chosen highest fluence. The crystallite size decreases initially, increases for intermediate fluences, and drops almost to the value of the pristine film at highest fluence. In the paper, these interesting experimental results are discussed in correlations with ion‐matter interactions especially energy losses by the ion beam in the material.     

Optimization of the photocatalytic activity of CdO + CdTiO3 coupled oxide thin films obtained by sol-gel technique

In the preparation of CdO + CdTiO₃ polycrystalline thin films by the sol-gel method, the optical, structural and crystalline properties, as well as the photocatalytic activity (PA) depends strongly on the sintering temperature (Ts) of the films and of the Ti/Cd ratio used in the precursor solution. In this work, CdO + CdTiO₃ thin films were prepared using a Ti/Cd constant ratio in the precursor solution. The films were sintered at six different Ts in the 450-550 °C range, in an open atmosphere. The structure of the films was characterized by X-ray diffraction and the PA was evaluated by the photobleaching of methylene blue in an aqueous solution using a UV-vis spectrometer. The relative intensity of the diffraction peaks associated with CdO and CdTiO₃, change with the Ts. The better photocatalytic activities were obtained for the films sintered at 490 °C and 550 °C. When the CdO was removed from the films by chemical etching the PA decreased, showing the importance of coupling both oxides.     

Carbon ion beam induced modifications of optical,structural and chemical properties in PADC and PET polymers

We report a study on the carbon ion beam induced modifications on optical, structural and chemical properties of polyallyl diglycol carbonate (PADC) commercially named as CR-39 and Polyethyleneterepthalate (PET) polymer films. These films were then irradiated by 55 MeV C⁵⁺ ion beam at various fluences ranging from 1×10¹¹ to 1×10¹³ ions/cm². The pristine as well as irradiated samples were subjected to UV–Visible spectral study (UV–Vis), Photoluminescence (PL), X-ray diffraction (XRD) and Fourier transform infrared (FTIR) spectroscopy. It has been found that ion irradiation may induce a sort of defects in the polymers due to chain scission and cross linking as observed from PL spectral study. It is revealed from UV–Vis spectra absorption edge shifted towards longer wavelength region after irradiation with increasing ion fluence. This shift clearly reflects decrease in optical band gap. The XRD study indicates the gradual decrease in intensity in case of PADC with increasing ion fluence. However, the intensity pattern increased in case of PET at fluence of 10¹¹ ion/cm² then decreased with further increase in fluence. Crystalline size of PADC was found to be decreasing gradually with increase of ion fluence. Whereas, the crystalline size of PET films found to increase with lower fluence and decreases with higher ion fluence. FTIR spectrum also shows the change in intensity of the typical bands after irradiation in the both the polymers. The results so obtained can be used successfully in heavy ions dosimetry using well reported techniques.     

Effect of sodium hydroxide pre-treatment on the optical and structural properties of lyocell

Lyocell is a type of regenerated cellulose. Fibres spun from cellulose solution in N-methylmorpholine-N-oxide hydrate consist of crystalline cellulose II and amorphous cellulose. Lyocell fabrics were treated with aqueous sodium hydroxide solution (NaOH) to study the influence of alkali on optical and structural properties. It was observed that sodium hydroxide treatment causes the density, orientation and crystallinity of lyocell fibre to decrease with increasing sodium hydroxide concentration, a corresponding decrease in tensile strength is also observed. The greatest change in fibre properties occurs between 3.0 and 5.0 mol dm⁻³ NaOH. This is attributed to the onset of formation of Na-cellulose II at 3.0 mol dm⁻³ NaOH; a fully formed Na-cellulose II structure is expected above 6.8 mol dm⁻³ NaOH. Formation of Na-cellulose II causes plasticization of the lyocell fibres as both inter- and intra-molecular hydrogen bonds are broken by these higher sodium hydroxide concentrations.     

A new sulfonamide derivative as magnesium ion receptor: N-tosyl-2,6-diisopropyl-4-(2,3-dimethoxylbenzoylamide)aniline

N-Tosyl-2,6-diisopropyl-4-(2,3-dimethoxylbenzoylamide)aniline (1) has been synthesized and its metal ion (Na⁺, K⁺, Ca²⁺, Mg²⁺) coordinating properties investigated by FT-IR, ESI-MS, and ¹H NMR methods. Among the tested metal ions, the overall stability constant (log K) for Mg²⁺ (6.89) is the highest (Na⁺, 5.64; K⁺, 5.43; Ca²⁺, 5.51) in 10% water/THF at 25.0 ± 0.5 °C determined by UV-vis spectroscopy, indicating that 1 is a potent ionophore for Mg²⁺ ion.     

Fabrication and nanoindentation properties of TiN/NiTi thin films and their applications in electrochemical sensing

Nanocrystalline TiN/NiTi thin films have been grown on silicon substrate by dc magnetron sputtering to improve the corrosion and mechanical properties of NiTi based shape memory alloys without sacrificing the phase transformation effect. Interestingly, the preferential orientation of the TiN films was observed to change from (1 1 1) to (2 0 0) with change in nature of sputtering gas from 70% Ar + 30% N₂ to 100% N₂. In present study the influence of crystallographic orientation of TiN on mechanical and corrosion properties of TiN/NiTi thin films was investigated. TiN (2 0 0)/NiTi films were found to exhibit high hardness, high elastic modulus, and thereby better wear resistance as compared to pure NiTi and TiN (1 1 1)/NiTi films. Electrochemical test revealed that TiN coated NiTi film exhibits better corrosion resistance in 1 M NaCl solution as compared to uncoated NiTi film. The application of TiN/NiTi films in the electrochemical sensing of dopamine, which has a critical physiological importance in Parkinson's disease, has been demonstrated. A comparison of voltammetric response of dopamine at silicon based electrodes modified with different nanocrystalline coatings indicated that these films catalyze the oxidation of dopamine.     

Synthesis, characterization and thermal properties of new aromatic quaternary ammonium bromides: precursors for ionic liquids and complexation studies

Series of new aromatic R₂R′₂N⁺Br⁻ (R=benzyl, 4-methylbenzyl, 2-phenylethyl, 3-phenylpropyl; R′=ethyl, methyl, isopropyl) or RR′₂NH⁺Br⁻-type (R=benzyl, R′=isopropyl) quaternary ammonium bromides were prepared by using novel synthetic route in which a formamide (N,N-diethylformamide, N,N-dimethylformamide, N,N-diisopropylformamide) is treated with aralkyl halide in presence of a weak base. The compounds were characterized by ¹H-NMR and ¹³C-NMR spectroscopy and mass spectrometry. Structures of the crystalline compounds were determined by X-ray single crystal diffraction, and in addition the powder diffraction method was used to study the structural similarities between the single crystal and microcrystalline bulk material. Three of the compounds crystallized in monoclinic, two in orthorhombic and one in triclinic crystal system, showing ion pairs, which are interconnected by weak hydrogen bonds and weak π-π interactions between the phenyl rings. Three of the compounds appeared as viscous oil or waxes. Finally, TG/DTA and DSC methods were used to analyze thermal properties of the prepared compounds. The lowest melting points were obtained for diethyldi-(2-phenylethyl)ammonium bromide (122.2 °C) and for diethyldi-(3-phenylpropyl)-ammonium bromide (109.1 °C). In general, decomposition of the compounds started at 170-190 °C without identifiable cleavages, thus liquid ranges of 30-70 °C were observed for some of the compounds.     

Low-energy electron and X-ray degradation of biomedical plasma-fluoropolymer

Plasma-deposited thin films of fluoropolymer on metallic substrates were degraded by low-energy (1-100 eV) electrons and X-ray irradiation to simulate irradiation conditions of implanted coated stents in the human body during diagnostic procedures using high energy radiation. The desorption of anions and cations from the surface of the films induced by 1-100 eV electrons was recorded by mass spectrometry. The electron energy dependence of the emission of F⁻ exhibited a resonant peak at 12.9 ± 0.4 eV, showing the formation of a transient excited anion and a monotonic rise at higher energies, associated to dipolar dissociation. In the positive ion mode, the fragments F⁺, CF⁺, CF₂⁺, CF₃⁺, C₃F₃⁺, C₂F₄⁺ and C₂F₅⁺ were observed. Emission thresholds were measured and laid above 25 eV. The shape of the cation emission curves versus electron energy showed no resonant process. X-ray degradation was studied by X-ray photoelectron spectroscopy for different exposure times. Loss of fluorine in -CF₂ groups was observed and damage mechanisms were proposed.     

Exploiting the deprotonation mechanism for the design of ratiometric and colorimetric Zn fluorescent chemosensor with a large red-shift in emission

The design, synthesis, and photophysical evaluation of a new naphthalimide-based fluorescent chemosensor, N-butyl-4-[di-(2-picolyl)amino]-5-(2-picolyl)amino-1,8-naphthalimide (1), were described for the detection of Zn²⁺ in aqueous acetonitrile solution at pH 7.0. Probe 1 showed absorption at 451 nm and a strong fluorescence emission at 537 nm (Φ_F=0.33). The capture of Zn²⁺ by the receptor resulted in the deprotonation of the secondary amine conjugated to 1,8-naphthalimide so that the electron-donating ability of the N atom would be greatly enhanced; thus probe 1 showed a 56 nm red-shift in absorption (507 nm) and fluorescence spectra (593 nm, Φ_F=0.14), respectively, from which one could sense Zn²⁺ ratiometrically and colorimetrically. The deprotonated complex, [(1-H)/Zn]⁺, was calculated at m/z 619.1800 and measured at m/z 618.9890. In contrast to these results, the emission of 1 was thoroughly quenched by Cu²⁺, Co²⁺, and Ni²⁺. The addition of other metal ions such as Li⁺, Na⁺, K⁺, Mg²⁺, Ca²⁺, Fe³⁺, Mn²⁺, Al³⁺, Cd²⁺, Hg²⁺, Ag⁺, and Pb²⁺ produced a nominal change in the optical properties of 1 due to their low affinity to probe 1. This means that probe 1 has a very high fluorescent imaging selectivity to Zn²⁺ among metal ions.     

Li ion diffusion in Li4Ti5O12 thin film electrode prepared by PVP sol-gel method

Li₄Ti₅O₁₂ thin films for rechargeable lithium batteries were prepared by a sol-gel method with poly(vinylpyrrolidone). Interfacial properties of lithium insertion into Li₄Ti₅O₁₂ thin film were examined by cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS), and potentiostatic intermittent titration technique (PITT). Redox peaks in CV were very sharp even at a fast scan rate of 50 mV s⁻¹, indicating that Li₄Ti₅O₁₂ thin film had a fast electrochemical response, and that an apparent chemical diffusion coefficient of Li⁺ ion was estimated to be 6.8×10⁻¹¹ cm² s⁻¹ from a dependence of peak current on sweep rates. From EIS, it can be seen that Li⁺ ions become more mobile at 1.55 V vs. Li/Li⁺, corresponding to a two-phase region, and the chemical diffusion coefficients of Li⁺ ion ranged from 10⁻¹⁰ to 10⁻¹² cm² s⁻¹ at various potentials. The chemical diffusion coefficients of Li⁺ ion in Li₄Ti₅O₁₂ were also estimated from PITT. They were in a range of 10⁻¹¹-10⁻¹² cm² s⁻¹.     

Ion induced controlled modifications in structural and optical properties of indium oxide thin films – studies with 25‐keV Co− and N+ beam implantations

Two sets of indium oxide thin films (~150 nm) grown on quartz substrates using thermal evaporation technique were processed separately with 25‐keV Co^? and N⁺ ions with several fluences ranging from 1.0 × 10¹⁵ to 1.0 × 10¹⁶ ions/cm². The pristine and the ion implanted films were characterized by Rutherford backscattering spectroscopy (RBS), X‐ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and UV–Vis spectrometry. The RBS spectra reveal signature of only cobalt and nitrogen in accordance to their fluences confirming absence of any contamination arising due to ion implantation. An increase in the average crystallite size (from 13.7 to 15.3 nm) of Co^? ions implanted films was confirmed by XRD. On the other hand, the films implanted with N⁺ ions showed a decrease in the average crystallite size from 20.1 to 13.7 nm. The XRD results were further verified by SEM micrographs. As seen in AFM images, the RMS surface roughness of the samples processed by both ion beams was found to decrease a bit (29.4 to 22.2 nm in Co^? implanted samples and 24.2 to 23.3 nm in N⁺ implanted samples) with increasing fluence. The Tauc's plot deduced from UV–visible spectroscopy showed that the band gap decreases from 3.54 to 3.27 eV in Co^? implanted films and increases from 3.38 to 3.58 eV for films implanted with N⁺ ions. The experimental results suggest that the modifications in structural and optical properties of indium oxide films can be controlled by optimizing the implantation conditions. Copyright © 2017 John Wiley & Sons, Ltd.     

Study of beta-cyclodextrin/fluorinated trimethyl ammonium bromide surfactant inclusion complex by fluorinated surfactant ion selective electrode

The construction and performance of a liquid membrane electrode responsive to N-(1,1,2,2-tetrahydroperfluorooctyl)-N,N,N-trimethylammonium bromide (FTABr) and its use for the study of β-cyclodextrin/fluorinated surfactant inclusion complex is described. The electrode is based on the use of tetrahydroperfluorooctyltrimethylammonium-tetraphenylborate ion pair as electro active material in polyvinyl chloride (PVC) matrix plasticized using 2-Nitrophenyl octyl ether (NPOE). The electrode exhibits a fast, stable, reproducible and “Nernstian” response (59 ± 2 mV) for FTABr over the concentration range of 10⁻⁵ to 2 × 10⁻³ mol L⁻¹ at 298 K. The lowest detection limit is 2 × 10⁻⁶ mol L⁻¹ and the response time is around 20-30 s. The validity of the electrode, for detection of fluorinated surfactant ions and hence to carry out electrochemical measurements to study micellization of fluorinated surfactant, is verified by comparing the critical micelle concentration (cmc) value of FTABr obtained by using the electrode, with that obtained by surface tension measurements. Association constant K for β-cyclodextrin/FTABr complex is evaluated from the potentiometric measurements carried out using this electrode and is observed to be ∼1.26 × 10⁵. The results suggest that β-cyclodextrin forms an equimolar association complex with the FTA⁺ surfactant ion.     

Biomimetic sensor based on MnMn complex as manganese peroxidase mimetic for determination of rutin

A novel biomimetic sensor for rutin determination based on a dinuclear complex [Mn^IIIMn^II(Ldtb)(μ-OAc)₂]BPh₄ containing an unsymmetrical dinucleating ligand, 2-[N,N-bis(2-pyridylmethyl)-aminomethyl]-6-[N-(3,5-di-tert-butyl-2-oxidoben-zyl)-N-(2-pyridylamino)aminomethyl]-4-methylphenol (H₂Ldtb), as a manganese peroxidase mimetic was developed. Several parameters were investigated to evaluate the performance of the biomimetic sensor obtained after the incorporation of the dinuclear complex in a carbon paste. The best performance was obtained in 75:15:10% (w/w/w) of the graphite powder:Nujol:Mn^IIIMn^II complex, 0.1 mol L⁻¹ phosphate buffer solution (pH 6.0) and 4.0 × 10⁻⁵ mol L⁻¹ hydrogen peroxide. The response of the sensor towards rutin concentration was linear using square wave voltammetry in the range of 9.99 × 10⁻⁷ to 6.54 × 10⁻⁵ mol L⁻¹ (r = 0.9998) with a detection limit of 1.75 × 10⁻⁷ mol L⁻¹. The recovery study performed with pharmaceuticals ranged from 96.6% to 103.2% and the relative standard deviation was 1.85% for a solution containing 1.0 × 10⁻³ mol L⁻¹ rutin (n = 6). The lifetime of this biomimetic sensor was 200 days (at least 750 determinations). The results obtained for rutin in pharmaceuticals using the biomimetic sensor and those obtained with the official method are in agreement at the 95% confidence level.     

Optical and morphological characterization of polyacrylamide hydrogel and liquid crystal systems

In this work, the thermotropic liquid crystal MBBA (N-(4-methoxybenzilidene)-4-butylaniline), entrapped on hydrogels, based on cross-linked polyacrylamide (PAAm), was studied. The liquid crystalline phases of system were characterized by polarized optical microscopy (POM), refractive index, optical transmittance, scanning electron microscopy (SEM) and water loss. It was verified the presence of birefringence on hydrogel + liquid crystal. The dynamic of formation of such birefringence finished 40 days after the hydrogel synthesis. The effective birefringence Δn, i.e., the difference on refractive index of polyacrylamide hydrogel to refractive index of hydrogel + liquid crystal (Δn₁) and the difference on refractive index of liquid crystal (MBBA) to refractive index of hydrogel + liquid crystal (Δn₂) are dependent of content of acrylamide (AAm) and MBBA on hydrogel. The increase on Δn₁ and Δn₂ with the polyacrylamide content on hydrogel was attributed to decreasing of the mobility liquid crystal inside the hydrogel. Also, an increase on MBBA concentration in the polymeric matrix provides a reduction in the values of optical transmittance in the system. The morphology observed by SEM shows that hydrogel + liquid crystal is more compact that PAAm hydrogels. The presence of MBBA causes an increase in hydrophobicity. The water loss speed is favored by the increase in the amount of MBBA present in the hydrogels.     

Naked-eye colorimetric analysis of Hg2+ with bi-color CdTe quantum dots multilayer films

A novel direct quantificational method through naked-eye colorimetric analysis of Hg²⁺ was constructed based on different degree of the fluorescence quenching of bi-color quantum dots (QDs) multilayer films (2-QDMF). The functional multilayer films were assembled by layer-by-layer (LBL) deposition of oppositely charged CdTe QDs and poly(dimethyldiallylemmonium chloride) (PDDA). Then the outermost layer of 2-QDMF was cross-linked to bovine serum albumin (BSA), polyethylene glycol (PEG) or glutathione (GSH). It was found that when BSA modified quartz slides were immersed into solutions containing Hg²⁺ and Cu²⁺ respectively, the 2-QDMF can be quenched by Hg²⁺, but not by Cu²⁺. Under the optimization conditions, the quenched photoluminescence (PL) intensities of multilayer films were almost linearly proportional to the concentration of Hg²⁺ in the range of 1.0 × 10⁻⁸ to 1.0 × 10⁻⁶ mol L⁻¹ and the detection limit was 4.5 × 10⁻⁹ mol L⁻¹. The proposed method is intuitional and convenient, which can be applied to the determination of trace Hg²⁺ in the artificial water sample with satisfactory results.     

Surface chemistry and optical property of TiO2 thin films treated by low-pressure plasma

The low temperature RF plasma treatment was used to control the surface chemistry and optical property of TiO₂ thin films deposited by RF magnetron sputtering with a very good uniformity at 300 °C substrate heating temperature. The XRD pattern indicates the crystalline structure of the film could be associated to amorphous structure of TiO₂ in thin film. The plasma treatment of TiO₂ film can increase the proportion of Ti³⁺ in Ti2p and decrease in carbon atoms as alcohol/ether group in C1s at the surface. The optical transmittance of the film was enhanced by 50% after the plasma treatment. The surface structure and morphology remain the same for untreated and low-pressure plasma-treated films. Therefore, increase in the optical transmission could be due to change in surface chemistry and surface cleaning by plasma treatment.