Performance of a Herriott cell, designed for variable temperatures between 296 and 20 K

We designed, fabricated and tested a multipath Herriott cell (or off-axis spherical mirror interferometer) to achieve low temperature absorption measurements. The cell is fabricated entirely from copper, and the 15 cm radius of curvature copper mirrors have gold coated reflective surfaces. The cell was tested at temperatures between 296 and 20 K with a folded absorption path length of 5.37 m utilizing a lead salt tunable diode laser. Short term temperature stability (1 h) of the Herriott cell is better than 0.005 K under normal operating conditions with a temperature uniformity better than 0.01 K (not measurable). The cell was tested by performing collisional cooling experiments on ¹³C¹⁶O₂ in helium at temperatures between 70 and 20 K and by performing more traditional pressure broadening and shift measurements on molecular infrared absorption lines at temperatures between 300 and about 80 K on ¹³C¹⁶O₂ and methane.     

Design of multi-mirror optics for industrial extreme ultraviolet lithography

We develop a new method for multi-mirror optics design. The system includes several mirror groups that will be designed separately to fulfil the designer’s needs. The elements of individual mirror group are all spherical mirrors. The radii and separations of the all spherical mirror groups can be calculated by three conditions: the pupil-stop condition, the non-obstruction condition and the conjugate condition. The connected mirror groups could be optimized as a whole optics by gradual optimization process, and the final optics includes high order aspheric mirrors. The all sphere structure design method is effective to reduce the load of calculation and evaluation of the configurations. The gradual optimization method can help the objective achieve high imaging performance smoothly. Finally we got a NA 0.3 EUVL objective, and the mean wavefront error of 0:0287λ (RMS) is reached.     

应用反射型球面菲涅耳波带片的成像物镜设计

设计了一种应用球面菲涅耳波带反射面与非球面反射面结合的成像物镜。对球面结构的菲涅耳波带反射面进行分析,推导了球面菲涅耳波带反射面近似替代非球面的方法,采用单片球面菲涅耳波带反射面和三片非球面反射面设计成像物镜,在放大倍数100×、视场角120°、菲涅耳数2.5情况下,调制传递函数在放大成像侧可实现0.6 lp/mm的40%以上,畸变小于2.2%。该设计方法为菲涅耳波带片应用于可见光成像提供了参考,并随着菲涅耳器件加工技术的不断发展具有良好的应用前景。     

基于便携式柱面镜多通池的二氧化碳高灵敏度探测研究

二氧化碳作为大气中重要的温室气体，与气候变化和人类活动密切相关，因此对其浓度的探测具有重要意义。利用近红外可调谐二极管激光器结合自主设计的便携式小型化柱面镜光学多通吸收池，实现了二氧化碳气体的高灵敏探测。通过Matlab编写光线传输矩阵，优化设计了基于柱面镜的光学多通吸收池，相比于传统Herriott型多通池，具有腔镜利用面积高、在相同体积内可实现有效光程长等特点，在物理基长为15 cm的情况下，实现了14 m的有效光程。实验中使用中心波长为1.57 μm的DFB二极管激光器，采用直接吸收光谱方法对CO₂气体进行了探测研究，并用Allan方差对系统性能进行了分析。结果表明，在平均时间为5 s时，系统的探测灵敏度为33.1 μL·L-1，平均时间为235 s时，系统的探测灵敏度可达到5.3 μL·L-1。此外，利用该系统实现了大气中CO₂的探测，得到大气中的CO₂浓度为383.4 μL·L-1。基于柱面镜多通池搭建的可调谐激光吸收光谱(TDLAS)系统，结合了柱面镜多通池可在小体积内实现长光程和可调谐激光吸收光谱技术高灵敏度、高分辨率、快速响应的优点，大大减小了系统体积，提高了系统探测灵敏度，在气体探测领域有广泛的应用。     

一种螺旋型的紧凑多光程池

随着社会经济的高速发展,环境污染和生态破坏日益严重,突发性环境污染时有发生。利用光谱技术测量有害气体的浓度,可以对空气进行实时监测。在弱吸收条件下,利用多次反射池可以增加有效光程,从而提高吸收光谱的探测灵敏度。基于Herriott型多光程池的结构,提出了一种紧凑型多光程池。该光学器件由多个圆环形凹面反射镜螺旋封闭构成,入射光沿着环形镜的径向和轴向同时传播,形成有规律的放射状分布,光线在吸收池中的反射轨迹呈螺旋路径,光斑呈螺旋形分布。实现了入射光和出射光的分离,从而增加了光路的可调空间。由于吸收池中的反射次数与螺旋的圈数成正比,可以根据实际需要选择合适的光程。另外,该反射池的主体是一个圆筒,具有稳定的机械性能和一定的抗震性。利用ABCD矩阵变换分析了系统的稳定性,通过模拟发现光束通过透镜后,焦点会聚在圆筒中心附近,能使入射光斑在池中收敛,并讨论了反射次数与螺旋圈数的关系。还研究了在不同入射角条件下的旋光特性,发现线偏振光的旋转角度与入射角度成正比。当入射角相同时,旋转角度随着反射次数的增加而增大。     

Analytical design of nonlinear optical loop mirrors for fiber-optic communication systems

We propose an easy and efficient method for analytically designing nonlinear optical loop mirrors (NOLMs) for fiber-optic communication systems. This analytical design is based on a Taylor series expansion of the transfer function of the NOLM, from which highly stable dynamical regimes can be readily obtained for any desired pulse parameters. We present numerical simulations showing dramatically improved performances in a 160 Gb/s transmission system that incorporates the NOLMs designed analytically.     

一种成像光谱仪前置物镜的设计

未来的成像光谱仪要求其光学系统在宽视场和宽波段范围内有高的空间分辨率和光谱分辨率。提出了一种无遮栏三反射镜系统的设计方法。所设计的三反射镜消像散系统包括两个非球面凹反射镜和一个凸球面反射镜。系统的视场角可达到5°,并实现了平场、远心光路的设计,可满足大视场高分辨成像光谱仪前置物镜的使用要求。     

新型光学长程吸收池的仿真设计研究

为了解决传统的长程光学吸收池设计中镜面利用率低导致反射次数少的问题,根据传输矩阵理论,开展了离散型Herriott池的结构参数设计研究。基于MATLAB数值计算模拟详细研究了吸收池内光线的传输次数与机械结构参数、光线的入射位置及入射角之间的依赖关系。仿真结果为实际应用中设计便携式长程光学吸收池提供良好的参数和模型借鉴作用。     

Hybrid approach for the design of mirror array to produce freeform illumination sources in immersion lithography

Source and mask optimization (SMO) has emerged as a key resolution enhancement technique (RET) for 45 nm technology node and below in lithography. The design method of freeform illumination sources predicted by SMO is significant for the scanner development. We present a hybrid approach combining simultaneous and sequential approaches to optimize the tilt angles of the mirrors to produce multi target freeform illumination sources accurately and quickly. The size of spot reflect by plane mirror can be easily controlled by changing different microlens arrays with appropriate focal length, which reduce the complexity of the system and makes it more flexible to produce the specific freeform sources compared to curving the mirrors used in previous work. The relationship between the tilt angles of plane mirrors and the positions of the spots in the pupil is obtained by chief ray tracing. Using the hybrid approach the freeform illumination sources required by SMO can be designed by merely adjusting the tilt angles of mirrors without changing other parameters of optical elements, which is most effective for both lithography tool manufacture and its applications. The real ray tracing results demonstrate that our design method is capable of creating multi freeform illumination sources with high transmittance, and confirm that the effectiveness of the hybrid approach for optimized design and control of mirror array in immersion lithography system.     

A novel compensation method for the measurement of radius of curvature

A test method for spherical mirrors with super-long radius of curvature that only one compensator is employed to measure the radii of curvature of both concave and convex mirrors is presented. With this testing system, the surface figure and radius of curvature of spherical mirrors can be measured simultaneously. Using the ABCD matrix method, a precise formula for radius of curvature calculation is deduced. Experimental results show that the relative measurement error of this method is less than 4.2×10⁻⁴.     

大孔径长焦距摄远物镜光学系统设计

对于长焦距摄远光学系统,大相对孔径意味着成像亮度更加优秀,但是也伴随着孔径边缘像差变差而难以校正的难题。利用折反系统减小光学系统总长,采用反射结构为基础,搭配前后两组校正镜构成光学系统,设计出大相对孔径,总长较短的摄远光学系统。光学系统工作波段为可见光波段,焦距1 000 mm,F数2.1,摄远比0.52,光学总长远小于焦距,遮拦比45%,全视场MTF在空间频率80 lp/mm处大于0.3,像面直径11 mm。该光学系统镜片全部采用球面镜,光学系统由2片反射镜和7片透射镜组成,结构紧凑,成像质量好。对摄远物镜进行公差分析,得出该设计公差较宽松。     

傅里叶变换红外光谱仪干涉仪系统的设计

设计了一种基于立体角镜与固定平面镜组合的干涉仪系统,以解决传统傅里叶变换红外光谱仪中干涉仪系统由于动镜的倾斜与横移影响光谱质量的问题。系统包含一对立体角镜,两面相互垂直的固定平面镜,以及分束器。通过对立体角镜的倾斜与横移、立体角镜垂直度误差以及两固定平面镜的倾斜与垂直度误差对干涉信号初相位与调制度的影响进行分析,表明立体角镜的倾斜与横移、固定平面镜的垂直度误差等因素不会影响干涉信号的初相位与调制度;通过对干涉仪进行实际测试表明,仪器具有结构简单紧凑、密封性好、分辨率高以及抗震性强等优点。     

Application d''un interferometre a ondes multiples a la mesure des pouvoirs reflecteurs

We describe a device which can be used to measure mirror reflectances with a good precision. The method is convenient for plane or spherical mirrors of optical cavities and can be applied over a large spectral range.     

1m口径主反射镜支撑系统的优化设计

应用有限元法并借助有限元分析软件建立了主镜的三维实体有限元模型,对1m主镜的支撑系统进行了优化设计。分析比较了两种常用主镜侧支撑结构,优化确定了轴向支撑半径、侧支撑方式和侧支撑点位置。分析计算显示主镜处于不同俯仰角位置时的最大面形精度RMS值为5.3nm,满足设计指标要求,该有限元优化设计方法和过程不受主镜直径及厚度的影响,适用于平面、球面、非球面甚至异形面主镜的设计。结果表明了所设计的支撑系统方案的合理性与可行性。     

相位恢复测量长焦距镜面

针对长焦距光学镜面检测中测量光路长,振动干扰较大,不容易用干涉仪进行面形检测的难题,提出了一种基于相位恢复技术的测量方法.该方法用相干点光源照射被测镜,采集一系列焦点附近的衍射光强图像,然后运用相位恢复算法得到镜面面形误差分布.利用衍射光学理论建立了测量模型,并用基于Gerchberg-Saxton算法的迭代算法求解模型.然后仿真验证了光场传播模型的可靠性和测量算法的有效性,并用该方法测量了一块曲率半径8 700 mm,口径145 mm的球面镜.通过对光强图像位置进行优化,并选择适当离焦位置的图像,最终恢复出了镜面面形.相位恢复测量的结果与动态干涉仪测量结果基本一致,并且测量装置简单,对环境要求低.     

相位恢复测量长焦距镜面(英文)

针对长焦距光学镜面检测中测量光路长,振动干扰较大,不容易用干涉仪进行面形检测的难题,提出了一种基于相位恢复技术的测量方法.该方法用相干点光源照射被测镜,采集一系列焦点附近的衍射光强图像,然后运用相位恢复算法得到镜面面形误差分布.利用衍射光学理论建立了测量模型,并用基于Gerchberg-Saxton算法的迭代算法求解模型.然后仿真验证了光场传播模型的可靠性和测量算法的有效性,并用该方法测量了一块曲率半径8700mm,口径145mm的球面镜.通过对光强图像位置进行优化,并选择适当离焦位置的图像,最终恢复出了镜面面形.相位恢复测量的结果与动态干涉仪测量结果基本一致,并且测量装置简单,对环境要求低.     

Entangling two oscillating mirrors in an optomechanical system via a flying atom

We propose a novel scheme for generating the entanglement of two oscillating mirrors in an optomechanical system via a flying atom. In this scheme, a two-level atom, in an arbitrary superposition state, passes through an optomechanical system with two oscillating cavity-mirrors, and then its states are detected. In this way, we can generate the entangled states of the two oscillating mirrors. We derive the analytical expressions of the entangled states and make numerical calculations. We find that the entanglement of the two oscillating mirrors can be controlled by the initial state of the atom,the optomechanical coupling strength, and the coupling strength between the atom and the cavity field. We investigate the dynamics of the system with dissipations and discuss the experimental feasibility.     

空间光学遥感器热设计

为了保证空间光学遥感器所需温度条件,本着被动热控为主、主动热控为辅的原则对其进行了热设计.首先,分析了遥感器在轨工作模式,建立了遥感器外热流计算模型,根据遥感器各面外热流变化,确定了3个极端工况.然后,以对日低温工况热设计为主对遥感器进行了热设计.最后,对热设计进行了热仿真分析和热试验验证.结果表明:镜组温度水平可控制...     

Metrics for ergodicity and design of ergodic dynamics for multi-agent systems

In this paper we propose a metric that quantifies how far trajectories are from being ergodic with respect to a given probability measure. This metric is based on comparing the fraction of time spent by the trajectories in spherical sets to the measure of the spherical sets. This metric is shown to be equivalent to a metric obtained as a distance between a certain delta-like distribution on the trajectories and the desired probability distribution. Using this metric, we formulate centralized feedback control laws for multi-agent systems so that agents trajectories sample a given probability distribution as uniformly as possible. The feedback controls we derive are essentially model predictive controls in the limit as the receding horizon goes to zero and the agents move with constant speed or constant forcing (in the case of second-order dynamics). We numerically analyze the closed-loop dynamics of the multi-agents systems in various scenarios. The algorithm presented in this paper for the design of ergodic dynamics will be referred to as Spectral Multiscale Coverage (SMC).     

The characteristics analysis of a new-style four-mirror axisymmetric-fold-combination cavity adapting to cylindrical discharge region

An axisymmetric-fold-combination (ASFC) cavity composed of two planar mirrors and spherical mirrors was designed. It is a stable-unstable resonator cavity. The light field of radial direction is Gaussian distribution. And in angular orientation, the distribution keeps invariant. It could generate annular CO₂ laser beam with excellent spatial coherence. And the spatial coherence is commendably realized with its stable-unstable cavity structure. The output light intensity distribution of this special model was discussed and simulated. With exterior lenses group, the output beams can be adjusted and controlled better to meet the manufactural requirements. Some references were provided for further research of the cavity with cylindrical discharge region.