Digital moiré fringe measurement method for alignment in imprint lithography

Accurate layer-to-layer alignment, which is of prime importance for the fabrication of multilayer nanostructures in integrated circuits, is one of the main obstacles for imprint lithography. Current alignment measurement techniques commonly involve an image detection process for coarse alignment followed by a grating interference process for fine alignment. Though this kind of two-level alignment system is reasonable for measurement, when it is used in real imprint lithography, it is inconvenient because of the existence of a complex loading system that needs space for alignment. In this study, we propose a fine alignment method using only image detection using grating images and digital moiré fringe technology. In this method, though the gratings are also selected as alignment marks for accurate measurement, they do not interfere with the physics. The grating images captured from the template and wafer are used to measure angular displacement and to form parallel digital moiré fringes. The relative linear displacement between the template and wafer is determined by detecting the spatial phase of parallel digital moiré fringes. Owing to the magnification effect of digital moiré fringes, this method is capable of generating accurate measurements. According to the experimental results, this digital moiré fringe technique is accurate to less than 10 nm. In addition, without a complex grating interference system, this method has the advantage of being easy to operate.     

Optimization of light polarization sensitivity in QWIP detectors

The current development of QWIPs (Quantum Well Infrared Photodetectors) at III–V Lab led to the production of 20 μm pitch, mid-format and full TV-format LWIR starring arrays with excellent performances, uniformity and stability. At the present time III–V Lab, together with TOL (Thales Optronics Ltd.) and SOFRADIR (Société Française de Détecteurs Infrarouges), work on the demonstration of a 20 μm pitch, 640 × 512 LWIR focal plane array (FPA) which detects the incident IR light polarization. Manufactured objects present a strong linear polarization signature in thermal emission. It is of high interest to achieve a detector able to measure precisely the degree of linear polarization, in order to distinguish artificial and natural objects in the observed scene.In this paper, we present a theoretical investigation of the optical coupling in polarization sensitive pixels. The QWIP modeling is performed by the Finite Difference Time Domain (FDTD) method. The aim is to optimize the sensitivity to light polarization as well as the performance of the detector.     

基于莫尔信号的精密位移测量与控制的研究

应用光衍射理论分析了一种纳米级位移分辨率的双级衍射光栅测量系统,建立了衍射莫尔信号与对应位移的数学模型,并通过计算机仿真对莫尔信号的位移特性进行了研究。在此基础上构建了一套精密位移测量与控制装置,取差动零次激光莫尔信号为控制信号,由微机控制实现高精度位移检测及全自动精密定位。实验结果表明,基于激光莫尔信号的精密检测与控制装置可获得得5nm的位移分辨率及±0.4μm的定位精度。     

Fiber-based chromatic confocal microscope with Gaussian fitting method

The chromatic confocal microscopy is an effective method for displacement measurement. However, with relatively low detection efficiency, chromatic confocal systems from previous studies suffer from either a limited measuring range or an unsatisfying resolution. In this paper, a novel chromatic confocal system is proposed based on optical fiber with large diameter that is specifically chosen to allow more light to be detected, thus greatly improving the detection efficiency of the system. To accurately locate the peak wavelength of the recorded spectrum, four data processing methods are proposed and compared, within which the Gaussian fitting model is considered best for the system. A series of experiments are done to verify the feasibility, resolution and stability of the system. An applicable measuring range of 600 μm is discovered with a highly linear range of 400 μm. The system has a high resolution close to 0.10 μm with satisfying stability shown by a long-term displacement standard deviation of 0.16 μm.     

Nano-patterned visible wavelength filter integrated with an image sensor exploiting a 90-nm CMOS process

A highly efficient visible wavelength filter enabling a homogeneous integration with an image sensor was proposed and manufactured by employing a standard 90-nm CMOS process. A one dimensional subwavelength Al grating overlaid with an oxide film was built on top of an image sensor to serve as a low-pass wavelength filter; a microlens was then formed atop the filter to achieve beam focusing. The structural parameters for the filter were: a grating pitch of 300 nm, a grating height of 170 nm, and a 150-nm thick oxide overlay. The overall transmission was observed to reach up to 80% in the visible band with a decent roll-off near ～700 nm. Finally, the discrepancy between the observed and calculated result was accounted for by appropriately modeling the implemented metallic grating structure, accompanying an undercut sidewall.     

A thin film magnetic field sensor of sub-pT resolution and magnetocardiogram (MCG) measurement at room temperature

We developed a very sensitive high-frequency carrier-type thin film sensor with a sub-pT resolution using a transmission line. The sensor element consists of Cu conductor with a meander pattern (20 mm in length, 0.8 mm in width, and 18 μm in thickness), a ground plane, and amorphous CoNbZr film (4 μm in thickness). The amplitude modulation technique was employed to enhance the magnetic field resolution for measurement of the high-frequency field (499 kHz), a resolution of 7.10×10^?13 T/Hz^1/2 being achieved, when we applied an AC magnetic field at 499 kHz. The phase detection technique was applied for measurement of the low frequency field (around 1 Hz). A small phase change was detected using a dual mixer time difference method. A high phase change of 130°/Oe was observed. A magnetic field resolution of 1.35×10^?12 T/Hz^1/2 was obtained when a small AC field at 1 Hz was applied. We applied the sensor for magnetocardiogram (MCG) measurement using the phase detection technique. We succeeded in measuring the MCG signal including typical QRS and T waves, and compared the MCG with a simultaneously obtained conventional electrocardiogram (ECG) signal.     

High-performance modulation-doped AlGaAs/InGaAs thermopiles for uncooled infrared FPA application

Novel thermopile based on modulation doped AlGaAs/InGaAs heterostructures is proposed and developed for the first time, for uncooled infrared FPA (Focal Plane Array) image sensor application. The high responsivity with the high speed response time are designed to be 4900 V/W with 110 μs under the 2 μm design rule. Based on integrated HEMT–MEMS technology, the 32 × 32 matrix FPA is fabricated to demonstrate its enhanced performances by black body measurement. The technology presented here demonstrates the potential of this approach for low-cost uncooled infrared FPA image sensor application.     

Fabry–Pérot cavities based on chemical etching for high temperature and strain measurement

In this paper, two hybrid multimode/single mode fiber Fabry–Pérot (FP) cavities were compared. The cavities fabricated by chemical etching are presented as high temperature and strain sensors. In order to produce this FP cavity a single mode fiber was spliced to a graded index multimode fiber with 62.5 μm core diameter. The Fabry–Pérot cavities were tested as a high temperature sensor in the range between room temperature and 700 °C and as strain sensors. A reversible shift of the interferometric peaks with temperature allowed to estimate a sensitivity of 0.75 ± 0.03 pm/°C and 0.98 ± 0.04 pm/°C for the sensor A and B respectively. For strain measurement sensor A demonstrated a sensitivity of 1.85 ± 0.07 pm/μ? and sensor B showed a sensitivity of 3.14 ± 0.05 pm/μ?. The sensors demonstrated the feasibility of low cost fiber optic sensors for high temperature and strain.     

A new subdivision technique for grating based on CMOS microscopic imaging

We propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle are theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm and the maximum displacement error is less than 0.4μm. The factors contributing to the systemic error are also discussed.     

Super-resolution imaging in digital holography by using dynamic grating with a spatial light modulator

A super-resolution imaging method using dynamic grating based on liquid-crystal spatial light modulator (SLM) is developed to improve the resolution of a digital holographic system. The one-dimensional amplitude cosine grating is loaded on the SLM, which is placed between the object and hologram plane in order to collect more high-frequency components towards CCD plane. The point spread function of the system is given to confirm the separation condition of reconstructed images for multiple diffraction orders. The simulation and experiments are carried out for a standard resolution test target as a sample, which confirms that the imaging resolution is improved from 55.7 μm to 31.3 μm compared with traditional lensless Fourier transform digital holography. The unique advantage of the proposed method is that the period of the grating can be programmably adjusted according to the separation condition.     

An all-fiber high resolution fiber grating concentration sensor

An all-fiber high resolution optical fiber grating concentration sensor has been studied theoretically and experimentally. A long period grating is used as the sensor head and a wavelength matched fiber Bragg grating is used as an interrogator to convert wavelength into intensity encoded information for interrogation. A concentration resolution of 0.104 g/L for NaCl solution is realized in experiment. The all-fiber sensor system, with the sensor head and the interrogator being all optical fiber components, is suitable for far-distance monitoring. The sensor system is with multifunction and can be used for temperature monitoring. A temperature resolution of 0.013 °C has realized in experiment.     

Indentation measurements on the eardrum with automated projection moiré profilometry

Computer modeling of middle ear mechanics is an important tool to investigate its complex behavior, but correct mechanical and elastic parameters are needed to obtain realistic simulations. A possible way to determine eardrum elasticity in situ is the use of point indentation measurements. The eardrum is, however, a small fragile membrane, so a non-contacting high-resolution technique is needed to measure the shape change caused by point indentation. We have developed a projection moiré interferometer combined with an indentation actuator and a high-resolution force sensor. The apparatus applies deformations up to 1 mm with a resolution of $1\mathrm{\mu }\mathrm{m}$, while the indentation force is measured with a resolution better than 1 mN. The moiré setup delivers height data on $512\times 512$ points through phase-shifting, with a height resolution of $15\mathrm{\mu }\mathrm{m}$. Shape recordings are made on a rabbit eardrum at different indentation distances, and indentation force is recorded simultaneously.     

Application of moiré technique to the measurement of the atmospheric turbulence parameters related to the angle of arrival fluctuations

There are several methods for measuring ground-level atmospheric turbulence parameters, such as the refractive index profile and its fluctuations, correlations of the fluctuations in space and time, and the atmospheric refractive-index structure constant. These methods are based mainly on the measurement of fluctuations in intensity and location of an image formed by light propagating in the turbulent atmosphere or the fluctuations in impinging points of narrow light beams traversing the ground-level atmosphere. Exploiting the moiré technique, we suggest a high-precision approach for determining fluctuaions in the angle of arrival. When a low-frequency grating (carrier grating) is installed at a suitable distance from a telescope, its image, practically, forms on the focal plane of the telescope objective. Superimposing a physical grating (probe grating) of the same pitch as the image grating on the image forms the moiré pattern. The atmospheric turbulence distorts the image grating. Processing the fluctuations of successive moiré fringes can yield the mentioned parameters across a rather large cross section of the atmosphere with high accuracy, because of the moiré technique's magnifying character and access to a large volume of data, and does so in a comparatively simple and reliable manner.     

Mid-wavelength type II InAs/GaSb superlattice infrared focal plane arrays

We have demonstrated 384 × 288 pixels mid-wavelength infrared focal plane arrays (FPA) using type II InAs/GaSb superlattice (T2SL) photodetectors with pitch of 25 μm. Two p-i-n T2SL samples were grown by molecular beam epitaxy with both GaAs-like and InSb-like interface. The diode chips were realized by pixel isolation with both dry etching and wet etching method, and passivation with SiN_x layer. The device one with 50% cutoff wavelength of 4.1 μm shows NETD ∼ 18 mK from 77 K to 100 K. The NETD of the other device with 50% cutoff wavelength at 5.6 μm is 10 mK at 77 K. Finally, the T2SL FPA shows high quality imaging capability at the temperature ranging from 80 K to 100 K which demonstrates the devices’ good temperature performance.     

Incident angle and temperature dependence of WSi wire-grid polarizer

The dependences of the incident angle and thermal durability of a tungsten silicide (WSi) wire-grid polarizer were examined. A WSi grating with a 0.5 fill factor, 260 nm depth, and 400 nm period was formed on a Si surface using two-beam interference and dry etching. The TM transmission spectrum of the fabricated element was greater than 60% at the incident angle of θ = 40° (the angle between the incident direction and the perpendicular axis to the grating direction) in the 4–10 μm wavelength range. An extinction ratio of 22.2 dB was achieved at 2.5 μm wavelength. Additionally, results show that this polarizer has higher thermal resistance than that of commercial infrared polarizers. Therefore, this polarizer is effective for taking a polarized thermal image of high temperatures.     

Cleaving of TOPAS and PMMA microstructured polymer optical fibers: Core-shift and statistical quality optimization

We fabricated an electronically controlled polymer optical fiber cleaver, which uses a razor-blade guillotine and provides independent control of fiber temperature, blade temperature, and cleaving speed. To determine the optimum cleaving conditions of microstructured polymer optical fibers (mPOFs) with hexagonal hole structures we developed a program for cleaving quality optimization, which reads in a microscope image of the fiber end-facet and determines the core-shift and the statistics of the hole diameter, hole-to-hole pitch, hole ellipticity, and direction of major ellipse axis. For 125 μm in diameter mPOFs of the standard polymer PMMA we found the optimum temperatures to be 77.5 °C for both blade and fiber. For 280 μm in diameter mPOFs of the humidity insensitive polymer TOPAS® (grade 8007) the optimum temperature was 40° for both blade and fiber. A 100 μm thick flat-edge blade was found to minimize the core-shift by the cleaving to only 298 nm or 5% of the pitch for the PMMA mPOF at the optimal temperature.     

Evolution of array format of longwave infrared Type-II SLS FPAs with high quantum efficiency

In the remarkably short span of 2 years, longwave infrared focal plane arrays (FPAs) of Type-II InAs/GaSb strained layer superlattice (SLS) photodiodes have advanced from 320 × 256 format to 1024 × 1024 format while simultaneously shrinking the pitch from 30 μm to 18 μm. Despite a dark current that is presently higher than state-of-the-art mercury cadmium telluride photodiodes with the same ∼10 μm cutoff wavelength, the high pixel operability and high (∼50%) quantum efficiency of SLS FPAs enable excellent imagery with temporal noise equivalent temperature difference better than 30 mK with F/4 optics, integration time less than 1 ms, and operating temperature of 77 K or colder. We present current FPA performance of this promising sensor technology.     

A novel raster-scanning method to fabricate ultra-fine cross-gratings for the generation of electron beam moiré fringe patterns

The resolution of the electron beam moiré method depends on the line frequency of the grating. Recently, more and more effort has been devoted to increase the frequency, and a novel method for producing high-resolution electron beam gratings is presented in this work. Cross-gratings with a frequency up to 14,832 lines/mm (67 nm pitch) were successfully fabricated using a common scanning electron microscope without a dedicated pattern generation system. The quality of the grating was high enough to produce high-quality moiré fringe patterns. In this method, the ultra-fine cross-grating can be fabricated only through one-directional scanning on the resist, which can improve the grating quality and significantly reduces the fabrication time. The number of control parameters for grating fabrication could be reduced to two compared to the six parameters required by conventional methods, which facilitates the use of the electron beam moiré method. The frequency of the fabricated grating is linearly proportional to the exposure magnification. Thus, the frequency of the grating can be accurately predetermined, and the null field can be easily obtained in the electron beam moiré method. The quality of the fabricated gratings was illustrated by the obtained micrographs and moiré fringe patterns. The full-field local strain near an induced crack was studied to verify the application potential of this method.     

Three-dimensional space charge cartographies by FLIMM in electron irradiated polymers

High resolution three-dimensional space charge cartographies obtained on 50 μm PTFE samples by using FLIMM technique are presented in this article. Samples were irradiated by a 30 keV electron beam. Charges were injected according to the grid pattern put on the sample during irradiation. A new measurement strategy associated with a new set-up leads to an improvement in measurements accuracy and precision. With this new strategy, measurements were performed rapidly, at a chosen depth and with a low lateral resolution in order to map the space charge profile in the whole sample and to choose a study area. After selecting an interesting area, space charge cartographies were carried out with a very high lateral resolution of about 1 μm. The irradiated zones according to the grid pattern were well reconstructed and the injection depth did not exceed 4 μm.     

Submicrometer tomographic resolution examined using a micro-fabricated test object

To estimate the spatial resolution of microtomographs, a test object on the submicrometer scale was prepared by focused ion beam milling and subjected to microtomographic analysis. Since human tissues are composed of cells and extracellular matrices with micrometer and submicrometer structures, it is important to investigate the three-dimensional spatial resolution of microtomographs used to visualize microstructures of human tissues. The resolutions along the direction within the tomographic slice plane (in-plane resolution) and perpendicular to it (through-plane resolution) were determined from the modulation transfer function of square-wave patterns. The in-plane resolution was estimated to be 1.2 μm from the modulation transfer function of the non-zoom image. In contrast, the zoom image gave the in-plane resolution of 0.8 μm. This in-plane resolution is comparable to the through-plane resolution, which was estimated to be 0.8 μm. Although the two-dimensional radiographs were taken with the pixel width of half the X-ray optics resolution, these three-dimensional resolution analyses indicated that the zoom reconstruction should be performed to achieve the in-plane resolution comparable to the X-ray optics resolution. The submicrometer three-dimensional analysis was applied in the structural study of human cerebral tissue stained with high-Z elements and the obtained tomograms revealed that the microtomographic analysis allows visualization of the subcellular structures of the cerebral tissue.