Study of laser carving three-dimensional structures on ceramics: Quality controlling and mechanisms

Three-dimensional (3D) laser carving is a new, very flexible process and is very useful for machining the hard and/or brittle materials such as ceramics, carbide and hardened steel with high precision, excellent productivity and surface quality. In this paper, the effects of laser processing parameters on single-layer carving depth and surface quality are analyzed by laser carving on an Al₂O₃ ceramic with different processing parameters. The mechanisms of laser carving are also studied. A mathematical model of the relationship between the laser processing parameters and the laser carving depth is established, which is useful in obtaining the best machining parameters with the shortest time. Finally, a 3D pattern is successfully carved using the optimum parameters.     

Intensity profile distortion at the processing image plane of a focused femtosecond laser below the critical power: Analysis and counteraction

Femtosecond laser surface processing of materials allows for precise micro or sub-micrometer machining with restricted detrimental side effects. Thus, fine control of the laser intensity distribution (repeatability) in the processing plane is of outmost importance for industrial implementation. In this paper, we study the influence on non-linear effects on the machining quality. We experimentally study the profiles of cavities machined at the image plane of a focused femtosecond laser for a large set of fluences on stainless steel below the critical power. A strong distortion of the cavities is observed for high energetic levels. A beam analysis performed in the machining conditions reveals that the cavity profile follows the laser beam profile even at high fluences where the beam undergoes an increasing distortion. Numerical calculations of the laser beam distribution taking a Kerr effect into account are presented showing a good agreement with the experimental laser profile. To counteract the beam distortion at high fluences, we propose and successfully employ a robust solution consisting in geometrically forming the image processing plane before the laser focusing point. This ensures a beam profile free of distortion even at high fluences. Experimental evidence is made, showing a significant quality increase of the cavity profiles with an image plane placed before the focus point.     

端面抽运Nd∶YAG陶瓷1.83 μm激光

报道了基于Nd∶YAG透明陶瓷4F3/2-4I15/2跃迁实现1.83 m激光输出的研究。采用简单紧凑的平凹腔结构,结合对腔镜镀膜参数的设计,控制其他能级跃迁谱线对应波长激光的透射损耗来抑制较强能级跃迁对应的激光振荡。在入射抽运功率14.6 W的808 nm波长半导体激光端面抽运Nd∶YAG透明陶瓷,获得了0.65 W的1.83 m激光输出,斜率效率5.8%。可见Nd∶YAG透明陶瓷可望成为获得1.8 m波段激光直接输出的激光介质。     

670nm电光调Q陶瓷激光器

为了进一步研究Nd∶YAG陶瓷激光器的红光波段,研制了一台重复频率为1 000 Hz的670 nm电光调Q Nd∶YAG陶瓷激光器.采用三个激光二极管列阵侧面抽运掺杂浓度为1.1at%、尺寸为Φ3×50 mm2的Nd∶YAG陶瓷晶体,根据实验测量的陶瓷晶体热透镜焦距,优化设计了折叠腔的各个参量,并对陶瓷晶体及倍频晶体热...     

医用高功率CTH:YAG脉冲激光器的研究

为了提高Cr,Tm,Ho∶YAG激光器的输出功率对CTH∶YAG准三能级能量转移特性进行了分析,优化了谐振腔的腔长及腔镜的曲率半径,采用了高漫反射陶瓷聚光腔.结果表明,有效抽运光谱带的反射率高达95％,在冷却水温为19 ℃,抽运能量为159 J时,获得最大单脉冲输出能量5.11 J,斜率效率5.6%.     

660 nm单一波长Nd:YAG陶瓷激光器

 针对陶瓷晶体1319 nm的谱线设计了适合的谐振腔腔镜膜系参量,采用激光二极管列阵侧向抽运掺杂1.1at%、Φ3×50 mm的Nd:YAG陶瓷,利用色散棱镜及KTP晶体Ⅱ类匹配腔内倍频,研制了一台660 nm单一波长输出的高重频Nd:YAG陶瓷红光激光器.根据陶瓷晶体的热透镜焦距设计了谐振腔的各个参量,在重复频率为1000 Hz、单脉冲抽运能量约144 mJ时,获得了3.9 mJ的660 nm脉冲激光输出,总的光-光转换效率为2.71%.为进一步研究大功率、高效率的陶瓷红光激光器奠定了基础.     

A ceramic based Yb<Superscript>3+</Superscript>:YAG laser

We report the performance of a laser based on a 9.8% doped ceramic Yb³⁺:YAG operating in quasi-Continuous Wave (QCW) and in Continuous Wave (CW) at room temperature. The maximum output power of 9 W with a slope efficiency of 73% at 1030 nm was achieved in QCW. We investigated the problems originated from thermo-mechanical properties of the ceramic and we studied their effects on the laser per-formance finding that either the slope efficiency or the laser threshold are thermal-losses independent. Finally, we report a characterization of a low losses tunable cavity for several laser wavelengths.     

Highly efficient diode side-pumped Nd:YAG ceramic laser with 210 W output power

We developed a highly efficient diode side-pumped Nd:YAG ceramic laser with a diffusive reflector as an optical pump cavity. A maximum output power of 211.6 W was obtained with an optical-to-optical conversion efficiency of 48.7%. This corresponds to the highest conversion efficiency in the side-pumped ceramic rod. Thermal effects of the Nd:YAG ceramic rod were analyzed in detail through the measurements of laser output powers and beam profiles near the critically unstable region. A M² beam quality factor of 18.7 was obtained at the maximum laser output power.     

Effect of energy density on the machining character of C/SiC composites by picosecond laser

The effect of laser energy density on the machining character of C/SiC composites by picosecond laser was investigated using two machining modes: single ring line and helical lines scanning. For single ring line scanning mode, the width and depth of machining grooves increased nonlinearly with the increase of laser energy density. Moreover, periodic surface structures (ripples) were generated at relative low laser energy density and disappeared at high energy density. With the increasing energy density, the oxygen content of machining debris increased dramatically. For helical lines scanning mode, the depth of machining grooves increased nonlinearly with the increasing laser energy density. With the increasing energy density, the oxygen content of machining debris also increased dramatically. The machining character showed as nano-scale laser-induced ripples, pores, strip structures and bubble pits. Finally, micro-holes of high aspect ratio were obtained in the mode of helical lines scanning by removing multiple layers.     

飞秒激光直写PMMA制备微流道的工艺技术研究

针对目前PMMA微流道加工质量差和效率低的问题, 对飞秒激光直写PMMA制备微流道的工艺技术进行了研究。通过实验分析了不同激光参数对微流道的宽度、深度、粗糙度、微流道两侧堆积物火山口高度的影响及变化规律。实验结果表明, 当激光扫描速度为20 mm/s时, 激光功率为0.5 W时, 微流道粗糙度较低且变化幅度不明显; 激光能量从0.5 W增加到0.75 W时, 微流道的宽度、深度与激光能量呈线性关系增加; 激光功率大于0.5 W时, 随着激光功率以及加工次数的增加, 微流道宽度、深度、粗糙度以及堆积物火山口的高度逐渐增加。经过计算得出, PMMA的烧蚀阈值为0.357 J/cm2。通过优化工艺参数, 制备出粗糙度较低、表面光滑、深度为16 μm的微流道芯片。     

High efficiency,high power QCW diode-side-pumped Nd：YAG ceramic laser at 1064 nm based on domestic ceramic

A high efficiency, high power diode-side-pumped quasi continuous wave （QCW） Nd：YAG ceramic rod laser at 1064 nm based on the domestic transparent ceramic is reported. The average output power of 961 W is achieved with double ceramic rods by means of a symmetrical convex-convex cavity. The optical-to-optical conversion efficiency is 38.3% and the slope efficiency is 45.3%. To the best of our knowledge, this is the highest level of efficiency achieved for the domestic Nd：YAG ceramic rod laser.     

Laser milling of martensitic stainless steels using spiral trajectories

A laser beam with sub-picosecond pulse duration was driven in spiral trajectories to perform micro-milling of martensitic stainless steel. The geometry of the machined micro-grooves channels was investigated by a specifically conceived Scanning Probe Microscopy instrument and linked to laser parameters by using an experimental approach combining the beam energy distribution profile and the absorption phenomena in the material. Preliminary analysis shows that, despite the numerous parameters involved in the process, layer removal obtained by spiral trajectories, varying the radial overlap, allows for a controllable depth of cut combined to a flattening effect of surface roughness. Combining the developed machining strategy to a feed motion of the work stage, could represent a method to obtain three-dimensional structures with a resolution of few microns, with an areal roughness S_a below 100 nm.     

A model for “cold” laser ablation of green state ceramic materials

This paper reports calculations of predicted values of the key process parameters associated with “cold” laser ablation of ceramic materials in the green state. A model for material removal of composite organic/ceramic materials is proposed and verified experimentally by laser ablation measurements and ultrafast videography. An energy balance approach is used with the model to calculate values of threshold fluence, material removal rate and particle escape velocity, which are seen to be in good agreement with experimental results. Suggested values for optimised laser machining of LTCC are proposed. PACS 79.20.Ds; 42.62.Cf; 42.55.Lt; 81.20.Wk     

Ultra-precision machining induced phase decomposition at surface of Zn-Al based alloy

The microstructural changes and phase transformation of an ultra-precision machined Zn-Al based alloy were examined using X-ray diffraction and back-scattered electron microscopy techniques. Decomposition of the Zn-rich η phase and the related changes in crystal orientation was detected at the surface of the ultra-precision machined alloy specimen. The effects of the machining parameters, such as cutting speed and depth of cut, on the phase decomposition were discussed in comparison with the tensile and rolling induced microstrucutural changes and phase decomposition.     

Axisymmetric laser welding of ceramics: comparison of experimental and finite element results

In this paper, we compare experimental data for a laser spot weld on a ceramic to the solution from an adaptive finite element model of the system. Our focus is on validating the finite element model, which necessarily includes numerous simplifications. We assume an axisymmetric geometry and flow profile, with a flat free surface. Buoyancy and surface tension drive the liquid motion in the molten ceramic pool beneath the laser, which is calculated using the axisymmetric forms of the continuity, momentum and energy equations. Latent heat, temperature-dependent material properties and radiation effects are all included in the formulation. These equations are solved with standard finite element techniques utilizing mesh relocation with a movement indicator based on solution gradients. Comparision with experimental data indicates that the numerical techniques used successfully predicted the depth and diameter of the actual ceramic weld pool.     

678 nm RTP electro-optical Q-switched ceramic laser

The RTP electro-optical Q-switched ceramic laser at the wavelength of 678 nm with narrow pulse width is studied. We used the laser diode arrays side-pumped Nd:YAG ceramic crystal with 1.1 at% Nd doping and dimensions of Φ3 mm × 50 mm, designed folding cavity parameters, and discussed the variation of the beam radius in the ceramic crystal and frequency doubling crystal with the thermal focal length of ceramic crystal or KTP crystal. By using double RTP crystals as electro-optic Q-switch and KTP crystal type II phase matching for intracavity frequency-doubling, a narrow pulse width electro-optical Q-switched Nd:YAG ceramic laser was obtained. The output energy of 0.9 mJ and the pulse width of 41.6 ns at 678 nm are obtained at the repetition rate of 1000 Hz and pumped power of 144 W. The results formed the basis for the further development of the high power and high efficiency ceramic red laser.     

A numerical study of residual stress induced in machined silicon surfaces by molecular dynamics simulation

Residual stresses in machined surface are regarded as a critical factor affecting the quality and service life of components. However, little research has been conducted to reveal the formation of residual stresses as well as the relation between machining conditions and residual stresses at the nanometric scale. In this study, residual stresses in machined surfaces of monocrystalline silicon are computed based on molecular dynamics simulation. An orthogonal machining configuration is adopted, and diamond cutting tools are used. The numerical approach developed is able to reveal stress evolution during and after machining, as well as in-depth residual stress distributions. The results indicate that the material stresses are stabilized within a manageable amount of computation time, and the in-depth normal stress along the tool moving direction has a more dynamical and significant pattern compared with other stress components. Meanwhile, the effects of depth of cut and tool rake angle are investigated. It is found that the increase of depth of cut results in the decrease of maximum tensile residual stress on the machined surfaces and the increase of maximum compressive residual stress underneath the surface. Similar observations are observed when the tool rake angle changes from positive to negative. It is believed that the more negative tool rake angles or the larger depths of cut induce a more drastic phase transformation to the machined surfaces, and this makes the in-depth residual stress distributions more compressive.     

Experimental approach to the laser machining of PMMA substrates for the fabrication of microfluidic devices

This paper deals with CO₂ laser machining of a suitable amorphous polymer (PMMA) as a flexible technique for the rapid fabrication of miniaturized structures such as microfluidic devices.A model to estimate the main dimensions (depth and width) of the grooves produced by the laser on PMMA is presented, taking into account the influence of the main process parameters (incident power, scanning speed and spot diameter). This theoretical model allows to control the engraving process showing that laser could represent a valid alternative for the production of microchannels. PMMA single-use devices are found to be easier to manufacture with respect to the conventional glass or silicon products.In a second step, IR laser vaporization is adopted for the removal of a single layer of PMMA. This is achieved using multiple overlapping sequences of straight grooves with different scanning directions. The proposed technique showed that the removal depth varied proportionally with the number of layers machined, while surface roughness is influenced by the grooves spacing and the orientation of the scanning direction between successive layers.A method for thermally bonding the PMMA sheets, constituting the 3D structure of the chip, is also presented. The combination of high temperatures and low bonding pressures makes it possible to generate a bulk junction enabling good performances in terms of sealing characteristics.     

Study on the nano machining process with a vibrating AFM tip on the polymer surface

The polymer has been proved to be nano machined by a vibrating tip in tapping mode of Atomic Force Microscope (AFM). The force between the tip and the surface is an important factor which determines success of the machining process. Controlling this force with high accuracy is the foundation of nanomachining in AFM tapping mode. To achieve a deeper understanding on this process, the tip is modeled as a driving oscillator with damping. Factors affecting the nano machining process are studied. The Hertz elastic contact theory is used to calculate the maximum contact pressure applied by the tip which is employed as a criterion to judge the deformation state of the sample. The simulation results show that: The driven amplitude can be used as a main parameter of controlling the machined depth. Sharper tips and harder cantilevers should be used for successful nanomachining with the vibrating tip. Under the same conditions, a larger tip radius will not only result in the machining error, but also lead to failure of the nanomachining process. The higher driving frequency will lead to a larger tapping force. However it cannot be used as a parameter to control the machined depth because of its narrow variation range. But it is a main error source for the nanomachining process in AFM tapping mode. Moreover, a larger Young's modulus polymer sample will induce a smaller machined depth, a larger maximum contact pressure and a bigger tapping force.     

Laser ablation of advanced ceramics and glass-ceramic materials: Reference position dependence

In this work, we present the effect produced by modifying the reference position as well as the method of machining on the results obtained when advanced ceramics and glass-ceramic materials are machined by laser ablation. A Q-switched Nd:YAG laser at its fundamental wavelength of 1064 nm with pulsewidths in the nanosecond range has been used. Morphology, depth and volume obtained by means of pulse bursts and grooves have been studied. Working within the same laser conditions, it has been shown that these values depend on the thermal, optical and mechanical features of the material processed. We have also studied the variation in the ablation yield when the position of the surface to be machined is modified. Material properties and work conditions are related to the results obtained.We have described and discussed the morphology, composition, microstructure and hardness of the materials processed.