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1.
用于彩色滤光片的低阻低应力ITO透明导电膜   总被引:2,自引:0,他引:2  
闫金良 《光学技术》2004,30(4):455-456
探讨了用于彩色滤光片的低电阻和低压应力的ITO透明导电膜工艺。用磁控溅射方法在不同温度的衬底上制备了ITO薄膜。研究了膜形衬底温度与膜结晶化程度的关系,以及膜形衬底温度对膜电阻和压应力的影响。对不同衬底温度下形成的ITO薄膜进行了退火处理,并对退火后的ITO薄膜的电阻和压应力特性进行了分析。结果表明,采用室温沉积非晶态ITO膜,在真空退火下可获得低电阻、低压应力的多晶相ITO膜。  相似文献   

2.
CuPc/ITO结构的表面和界面电子态的XPS研究   总被引:3,自引:0,他引:3  
覆盖有Indium tin oxide(ITO)膜的透明导电玻璃广泛地用作有机发光器件 (OLEDs)的空穴注入电极 ,但是ITO膜的功函数通常与空穴传输材料的最高被占据分子轨道 (HOMO)不匹配。铜酞菁 (CuPc)作为缓冲层可以提高空穴从ITO向空穴传输材料的注入效率。对CuPc ITO样品的XPS表面分析表明 ,在CuPc分子中 ,铜原子显 2价 ,通过配位键和氮原子相互作用。CuPc分子中有两类碳原子 :8个C原子与 2个N原子成键 ;其余 2 4个C原子具有芳香烃性质。N原子也处在两种化学环境中 :有 4个N原子只与 2个C原子形成CNC键 ;另外 4个N原子不仅与 2个C原子成键 ,还通过配位键与Cu原子成键。用氩离子束对样品表面进行了溅射剥蚀 ,当溅射时间分别为 2 ,5 ,10min时进行XPS采谱分析 ,结果表明 ,随着氩离子束溅射时间增长 ,C 1s,N 1s峰变弱 ,Cu 2p ,O 1s,In 3d,Sn 3d峰增强 ,C 1s,N 1s,O 1s,In 3d和Sn 3d峰都向高束缚能或低束缚能方向移动 ,但它们的情况却不相同。  相似文献   

3.
聚合物基片对柔性有机发光器件性能的影响   总被引:1,自引:1,他引:0  
以聚合物基片柔性ITO膜为透明电极,制备了ITO/TPD/Alq3/Al结构柔性有机发光器件,并与在相同条件下制备的玻璃基片相同结构器件作了比较。研究了不同基片对有机材料及器件性能的影响,指出选择不易吸湿、耐温高、热胀系数小的聚合物材料,提高柔性ITO膜的附着力和导电性,结合柔性ITO膜的具体特性。优化有机层的蒸镀条件,是提高柔性有机发光器件发光亮度和稳定性的重要途径。  相似文献   

4.
为揭示ITO薄膜膜厚对透光率及色泽感影响规律,本文采用TFCalc光学薄膜设计软件计算了 50~700 nm膜厚的ITO薄膜可见光透光率,平均透光率和人眼最为敏感波长550 nm的透光率与膜厚的关系.采用膜层干涉理论研究了 ITO膜厚和入射角对其透光率和色泽感影响规律和物理机制.研究结果表明:对特定膜厚的ITO薄膜,其...  相似文献   

5.
本文在灵敏度、精密度、检出限、抗干扰能力,以及操作简易性和稳定性方面比较了流动注射氢化物发生法中膜分相器和U管分相器的分析性能。结果表明,两种分相器各有优缺点,均能满足地球化学样品分析的要求。但膜的寿命短,需经常更换,是膜分相器的不足之处。  相似文献   

6.
设计与制作了铁电高分子共聚物薄膜样品真空制膜仪,该制膜仪操作简单,制膜方便,制备出的薄膜样品厚度均匀,膜厚可控制在30-40μm,可替代昂贵的机械静热压式或旋转悬浮式制膜仪。  相似文献   

7.
采用电化学腐蚀法制备了不同多孔度的多孔硅(PS),再通过磁控溅射法在该PS衬底上沉积了一定厚度的Fe膜;并对样品进行了X射线衍射的结构分析、扫描隧道显微技术的表面形貌观察和磁光克尔效应的测量.发现在同一Fe膜厚度下,相对于参考样品硅上的Fe膜,多孔硅上Fe膜的矫顽力更大;同时观察到多孔硅基Fe膜随着PS多孔度的增加,矫顽力相应变大;而对于多孔度相同的多孔硅基样品,随着Fe膜厚度的增加矫顽力却逐步减小.得出了多孔硅特有的海绵状疏松结构能有效调节Fe膜矫顽力大小的结论. 关键词: 多孔硅 海绵状结构 Fe薄膜 矫顽力  相似文献   

8.
透光导电ITO膜的制备及其光电特性的研究   总被引:13,自引:4,他引:9  
采用溶胶-凝胶方法制备ITO膜,并从制备工艺上研究了各种因素对ITO膜光电特性的影响.最后制出的ITO膜厚度约为50nm,在可见光区平均透射比达97%,最高达99.55%,电阻率在2.0Ω·cm左右,最低达到0.31Ω·cm.  相似文献   

9.
ITO导电膜红外发射率理论研究   总被引:5,自引:0,他引:5       下载免费PDF全文
根据红外辐射理论和薄膜光学原理计算了高品质ITO(indium tin oxide)导电膜的红外发射 率,其理论曲线与实测曲线基本符合. 并得出方块电阻小于30Ω时,ITO膜在红外波段8—14μ m的平均红外发射率理论值小于0.1.实际制备方块电阻小于10Ω的ITO膜具有优良的红外隐身 性能. 讨论了高品质ITO膜具有低红外发射率的物理机理,并提出了低红外发射率临界方块电 阻值,这有利於理论研究和工艺制备红外隐身ITO膜. 关键词: 红外发射率 ITO薄膜 理论计算 方块电阻  相似文献   

10.
在有机玻璃上射频溅射ITO组合薄膜   总被引:1,自引:0,他引:1  
利用射频磁控溅射技术在有机玻璃表面上一次完成表面活化、ITO膜制备、SiO2 减反射膜制备过程。利用低能等离子体对有机玻璃表面进行改性以提高ITO膜的附着力。研究了氧分压等工艺参数对ITO膜导电性能及光学性能的影响。  相似文献   

11.
An easy method for measuring the dielectric constant, the Young modulus and the electrostrictive coefficients of a polymer film is proposed herein. The approach was based on the determination of the current flowing through the sample when simultaneously driven by an electrical field and a mechanical excitation. The experimental data were in good agreement with published results. In addition, the method rendered it possible to characterize the film sample under real conditions.  相似文献   

12.
红外光谱分析中样品处理方法的改进   总被引:4,自引:0,他引:4  
介绍了液体和固体样品的常规制样方法 ;指出了其中最常用的方法———压片法和液膜法的不足之处 ;提出了一种改进的制样方法 ,即以廉价的空白KBr压片作片基 ,通过液膜法或浸渍法制样。对于低沸点液体样品 ,以两片空白KBr压片代替晶体盐窗 ,模拟液体池窗片液膜法制样 ;对于高沸点液体样品 ,将样品用挥发性有机溶剂稀释 ,采用浸渍法制样 ,即把空白KBr压片在稀释后的溶液中浸渍后挥发掉有机溶剂制样 ;对于固体样品 ,将其溶解于挥发性有机溶剂 ,浸渍法制样。与按常规制样方法所获得的红外光谱图进行比较 ,这种改进的制样方法所得谱图 ,能达到定性分析的要求 ,且弥补了常规液膜法和压片法的不足  相似文献   

13.
In a modification of a picosecond ultrasonic technique, a short acoustic pulse is launched into a liquid sample by a laser pulse absorbed in a semitransparent transducer film and is detected via coherent Brillouin scattering of a time-delayed probe pulse. With both excitation and probing performed from the transducer side, the arrangement is suitable for in vivo study of biological tissues. The signal is collected from a micrometer-thick layer next to the transducer and is not affected by the diffuse scattering of probe light deeper in the sample. The setup, utilizing a 33 nm thick single crystal SrRuO(3) transducer film, is tested on a full fat milk sample, with 11 GHz acoustic frequency recorded.  相似文献   

14.
分别以富集有Cr,Pb和Cd三种元素的尼龙薄膜样品及玻璃纤维滤膜为研究对象,采用滤膜叠加的方式,通过XRF光谱仪测量不同样品厚度下薄膜样品的XRF光谱,根据测得的尼龙薄膜样品中Cr,Pb,Cd元素及玻璃纤维滤膜中Ca,As和Sr元素特征XRF性质的变化,研究样品厚度对薄膜法XRF光谱测量的影响。结果表明:薄膜样品厚度对不同能量区间上元素特征谱线荧光性质的影响并不相同。元素特征谱线能量越大,元素特征X射线荧光穿透滤膜到达探测器的过程中损失越少;但由薄膜样品厚度增加引起的基体效应却越强,相应特征谱线位置处的背景荧光强度就越大,因此样品厚度增加所引起的基体效应对薄膜法XRF光谱测量的灵敏度影响就越大。对于特征谱线能量较低(能量小于7 keV)的元素,以增加薄膜样品厚度的方式来增加待测组分的质量厚度浓度,并不能有效地提高薄膜法XRF光谱测量的灵敏度;对于特征谱线能量较高的元素(能量>7 keV),可以通过适当增加样品厚度以增加被测组分的质量厚度浓度的方式来提高XRF光谱测量的灵敏度,薄膜样品厚度在0.96~2.24 mm内,更有利于XRF光谱的测量与分析。该研究为大气及水体重金属薄膜法XRF光谱分析中薄样制备及富集技术提供了重要的理论依据。  相似文献   

15.
何存富  张改梅  吴斌 《中国物理 B》2010,19(8):84302-084302
<正>In this paper the elastic properties of SiO_x film are investigated quantitatively for local fixed point and qualitatively for overall area by atomic force acoustic microscopy(AFAM) in which the sample is vibrated at the ultrasonic frequency while the sample surface is touched and scanned with the tip contacting the sample respectively for fixed point and continuous measurements.The SiO_x films on the silicon wafers are prepared by the plasma enhanced chemical vapour deposition(PECVD).The local contact stiffness of the tip-SiO_x film is calculated from the contact resonance spectrum measured with the atomic force acoustic microscopy.Using the reference approach,indentation modulus of SiO_x film for fixed point is obtained.The images of cantilever amplitude are also visualized and analysed when the SiO_x surface is excited at a fixed frequency.The results show that the acoustic amplitude images can reflect the elastic properties of the sample.  相似文献   

16.
In掺杂ZnO薄膜的制备及其特性研究   总被引:15,自引:2,他引:13  
采用射频反应溅射技术在硅(100)衬底上制备了未掺杂和掺In的ZnO薄膜。掠角X射线衍射测试表明,实验中制备的掺In样品为ZnO薄膜。用X射线衍射仪、原子力显微镜和荧光分光光度计分别对两样品的结构、表面形貌和光致发光特性进行了表征,分析了In掺杂对ZnO薄膜的结构和发光特性的影响。与未掺杂ZnO薄膜相比,掺In ZnO薄膜具有高度的C轴择优取向,同时样品的晶格失配较小,与标准ZnO粉末样品之间的晶格失配仅为0.16%;掺In ZnO薄膜表面平滑,表面最大不平整度为7nm。在掺In样品的光致发光谱中观察到了波长位于415nm和433nm处强的蓝紫光双峰,对掺In样品的蓝紫双峰的发光机理进行了讨论,并推测出该蓝紫双峰来源于In替位杂质和Zn填隙杂质缺陷。  相似文献   

17.
The rate of formation of a hydrocarbon film on the surface of a sample subjected to the action of an electron beam is studied at room temperature and in cooling a sample to the liquid nitrogen temperature. The thickness and the optical radiation transmission of such films are measured as functions of the electron beam radiation time, the sample temperature, and the level of vacuum. The film thickness is measured with atomic force microscopy. The absorption of the films is determined by comparing the cathodoluminescence intensities from a pure sample surface and from the surface covered with a film. The experimental results can be used to estimate the film formation rate as a function of the sample temperature and the vacuum and to determine the optical radiation absorption at a wavelength of 300, 360, 550, and 665 nm.  相似文献   

18.
We observe surface plasmon polariton (SPP) refraction on a metal heterostructured sample with a scattered-type scanning near-field optical microscope (SNOM). The sample consists of AI and Au in-plane whose boundary is smooth enough with proper etching time. SPPs excited on the AI film travel to the boundary and a portion of SPPs propagates into the Au film. In addition, interference fringes appear in the SNOM image bent at the boundary. The result is analysed with effective index method and the refracted angle is explained by Shell's law.  相似文献   

19.
In this work, the potential of photoacoustic (PA) technique in the analysis of the formation of polymer films by evaporation from aqueous solutions is explored. Experiments are performed using different aqueous volume fractions of two different polymers, PEDT:PSS and a white liquid glue. The liquid sample is deposited on a metallic substrate attached to a modified PA cell that allows the monitoring of the evaporation process and development of the polymeric film. It is shown that when the thickness of the sample is of the order of the thermal diffusion length, maxima and minima of the PA signal, due to thermal wave interference effects, are observed. In the last stage of the process, the PA signal reaches a stable value which depends on the thickness of the formed film. The kinetics of the polymeric film formation, the dependence of the evaporation rate of the solvent as well as the final thickness of the polymeric film is discussed. These results can be useful in establishing a methodology for the photothermal monitoring and thermal characterization of the development of polymeric films from solutions.  相似文献   

20.
The deformation of a photodeformable film material is studied based as regards the constitutive relations. In the theoretical analysis, a model for the deflection of the laminated sample upon the irradiation of ultraviolet (UV) light is established and the bending moment is deduced. Furthermore, the deflection of the film can be calculated using finite-element analysis (FEA) software. Then the attempt to utilize the superior characteristics including shape memory and large internal force on the application of a micropump is undertaken in our study. The force produced in the reciprocating deformation of the film sample is of potential to activate the pump membrane. A set of experimental devices are designed to test the performance of the membrane in the experiment. The flow volume in a stroke is close to simulation result obtained by FEA.  相似文献   

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