Microwave sputtering of conductors and insulators for optical emission and mass spectrometry

A microwave-powered slab-line cavity was used to excite a discharge in low pressure argon or neon and to demonstrate the sputtering of conducting and non-conducting samples by a microwave excited discharge. Both optical emission spectroscopy and mass spectrometry were used as detection systems. The dependence of the signals on gas pressure and net microwave power was investigated.     

Microwave plasma torch mass spectrometry for some rare earth elements

Rare earth elements (REEs) have been widely applied in modern industry and material science due to their special chemical properties and luminescence properties, but their environment pollution problem has also attracted attention. How to trace and control impact of REEs on environment and develop highly sensitive methods for REEs analysis have practical significance. Microwave plasma torch (MPT) is a kind of simple, low power consumption (～200 W) and easily operated plasma generators. When it was coupled with varied mass spectrometers as ion source of mass spectrometry (MS), i.e. MPT-MS can use for the analysis of metal elements in aqueous with the remarkable advantage of only minimal or even no simple pretreatment, and can meet comprehensive requirements of environmental control and water quality monitoring. MPT-MS have also an ability to carry out online real-time monitoring and analysis of water environment. Compared with the traditional ICP-MS, it can obtain more effective information and has higher sensitivity (the detection limit is at sub-ppb level). This paper reviews common methods and research progress of REEs analysis in recent years. Practical applications and advantages of MPT in the analysis of REEs are briefly summarized. Specifically, this paper introduces some work recently done in our group on analysis of REEs by the MPT, including analysis of metal elements distribution in water samples in local Poyang Lake, and general rules of formation and behavior of complex metal ions in the MPT plasma are also proposed afterwards. Through the practically dealing with the Poyang Lake case by the MPT, hopefully this would interest more academia into this area so as to speed up development of the MPT itself.     

Modeling of glow discharge optical emission spectrometry: Calculation of the argon atomic optical emission spectrum

The optical emission spectrum of the argon atomic lines in a glow discharge is calculated, using a collisional–radiative model for argon, which was recently developed (A. Bogaerts et al., Collisional–radiative model for an argon glow discharge, J. Appl. Phys., vol. 84, No 1, 1998). It is shown that the lines corresponding to 4p→4s transitions clearly dominate the spectrum. They are, however, not responsible for the characteristic visible light in the glow discharge, because they are lying between 700 and 1000 nm, which is mainly in the near infrared. The characteristic blue light of the glow discharge is caused by the lines corresponding to 5p→4s transitions (lying in the blue–violet part of the spectrum). Beside these two most important line groups (the so-called `red' and `blue' lines) a large number of other lines are present, making the entire argon spectrum quite complex. The calculated spectrum is compared with experimental spectra from the literature, and excellent qualitative agreement is obtained.The calculated spatial distributions of optical emission lines originating from low excited levels (i.e., 4p, 3d, 5s, 5p, 4d, 6s) show a maximum in the cathode glow, caused by fast argon ion and atom impact excitation, to these levels, and a second maximum in the beginning of the negative glow, due to electron impact excitation. The maximum in the cathode glow is very pronounced for lines originating from the 4p levels, which is in agreement with experimental observations. The higher excited levels are not populated by fast argon ion and atom impact excitation but only by electron impact excitation; hence, lines originating from these levels exhibit only a maximum in the beginning of the negative glow.     

Studies on transport phenomena in electrothermal vaporization sample introduction applied to inductively coupled plasma for optical emission and mass spectrometry

In the present work electrothermal vaporization (ETV) was used in both inductively coupled plasma mass spectrometry (ICP-MS) and optical emission spectrometry (OES) for sample introduction of solution samples. The effect of (Pd + Mg)-nitrate modifier and CaCl₂ matrix/modifier of variable amounts were studied on ETV-ICP-MS signals of Cr, Cu, Fe, Mn and Pb and on ETV-ICP-OES signals of Ag, Cd, Co, Cu, Fe, Ga, Mn and Zn. With the use of matrix-free standard solutions the analytical curves were bent to the signal axes (as expected from earlier studies), which was observed in the 20–800 pg mass range by ICP-MS and in the 1–50 ng mass range by ICP-OES detection. The degree of curvature was, however, different with the use of single element and multi-element standards. When applying the noted chemical modifiers (aerosol carriers) in microgram amounts, linear analytical curves were found in the nearly two orders of magnitude mass ranges. Changes of the CaCl₂ matrix concentration (loaded amount of 2–10 μg Ca) resulted in less than 5% changes in MS signals of 5 elements (each below 1 ng) and OES signals of 22 analytes (each below 15 ng). Exceptions were Pb (ICP-MS) and Cd (ICP-OES), where the sensitivity increase by Pd + Mg modifier was much larger compared to other elements studied. The general conclusions suggest that quantitative analysis with the use of ETV sample introduction requires matrix matching or matrix replacement by appropriate chemical modifier to the specific concentration ranges of analytes. This is a similar requirement to that claimed also by the most commonly used pneumatic nebulization of solutions, if samples with high matrix concentration are concerned.     

A novel sample introduction system for microwave-induced plasma optical emission spectrometry

A newly developed micro-sampling technique using a discrete sample introduction system (DSIS) has been demonstrated for simultaneous multi-element analysis by microwave-induced plasma optical emission spectrometry (MIP-OES). A microliter volume of sample solution (20 μl) is manually inserted into a Teflon microsampling device and subsequently pumped at low solution uptake rates of <100 μl min⁻¹ to a Meinhard-type concentric nebulizer and then into a 250-W helium plasma. The performance of DSIS-MIP-OES was demonstrated by the determination of major (Na, K, Ca, Mg), minor (Cu, Fe, Zn) and trace (Sr) elements in two clinical standard certified reference materials (serum, hair). Standard microaddition procedures were used to minimize possible matrix interference. The detection limit (3σ) obtained was 10, 30, 50, 100, 10, 5, 20 and 40 ng ml⁻¹ for Ca, Cu, Fe, K, Mg, Na, Sr and Zn, respectively. The method offers relatively good precision (RSD ranged from 5 to 14%) and microsampling capability. Agreement between analytical results and certified values for the test elements was good. The method could be useful as a routine clinical laboratory procedure.     

Quantitative nitrogen analysis by Auger electron spectrometry and glow discharge optical emission spectrometry

Nitrides of refractory metals are investigated as diffusion barriers for Cu metallization. The composition, thermal stability and inter diffusion in layered systems are characterized by depth profile analysis. For the quantification of depth profiles determination of sensitivity factors is essential. For nitrogen and other light elements matrix specific standards are often not available and compound standards are used for calibration. We have investigated the systems Ta–N and Ta–Si–N and for comparison Cr–N by means of Auger electron spectrometry (AES) and glow discharge optical emission spectrometry (GDOES). A non-linear calibration curve for the N/Cr intensity ratio was observed with GDOES in the Cr–N-system, probably caused by self-absorption of the Cr line.     

Evaluation of laser ablation optical emission spectrometry for microanalysis in aluminium samples

This paper presents the first evaluation of laser ablation optical emission spectrometry for elemental microanalysis in solids. All the measurements have been performed on aluminum, a matrix in which elements segregate very easily. The lateral resolution obtained is close to 6 μm. It has been evaluated both by making replicas of the small craters formed in aluminum and by making a profile of the intensity distribution of two lines (Al and Cu) across a sharp junction of these two metals. A strong dependence of the measurement reproducibility on the laser energy fluctuations has been observed. Intrinsic reproducibility of the technique has been evaluated at 8% using a stable laser source. The detection limit is around 4 ppm for Mg and 40 ppm for Cu. This surprisingly high sensitivity is mainly attributed to a very efficient coupling between the UV laser beam and the solid surface, leading to crater depths of around 5 μm for a single laser shot. Calibration curves obtained for Mg and Cu using specially fabricated samples demonstrate that the technique is quantitative and not strongly sensitive to the matrix composition. These results demonstrate the very high potential of laser ablation optical emission spectrometry for elemental microanalysis, opening a wide field of applications for this technique.     

Microwave desolvation for acid sample introduction in inductively coupled plasma atomic emission spectrometry

This study deals with the behaviour of a microwave desolvation system (MWDS) with acid solutions in inductively coupled plasma atomic emission spectrometry. Hydrochloric, nitric, sulphuric and perchloric acids at different concentrations (up to 0.6 mol l⁻¹) have been tested. Sample uptake rate (Q_l) was also varied. The parameters evaluated for each variable were analyte and solvent transport rates and emission intensity. The combination of low acid concentrations (0.05–0.1 mol l⁻¹) and low liquid flows (0.4 ml min⁻¹) leads to the highest analyte transport rate and emission signal and to the lowest solvent transport rate. For Q_l higher than 1.9 ml min⁻¹, the use of an impact bead is advisable. Among the acids tested, sulphuric and perchloric acids give rise to higher emission intensities than hydrochloric acid and nitric acid. Nonetheless, the limits of detection (LODs) obtained with the MWDS are about the same magnitude irrespective of the solution employed. The LODs reached when using the MWDS are similar to those obtained with a desolvation system based on infrared heating of the aerosol.     

Wavelength table of chromium emission lines in argon glow discharge optical emission spectrometry

A wavelength table of chromium lines emitted from an argon glow discharge plasma, which comprises 2049 atomic and ionic emission lines in the wavelength range of 200–440 nm, is presented. The relative intensities are rather different from the data of published wavelength tables based on arc-excited and spark-excited spectra. Emission lines of Ar, Ti, V, Fe, Ni, and Cu in the neighborhood of the prominent Cr emission lines are also compiled as a table. These tables could be employed for the analytical applications in glow discharge optical emission spectrometry. All of the data are presented as Supplementary Electronic Material. Recieved: 22 December 1999 / Revised: 25 February 2000 / Accepted: 25 February 2000     

Wavelength table of chromium emission lines in argon glow discharge optical emission spectrometry

A wavelength table of chromium lines emitted from an argon glow discharge plasma, which comprises 2049 atomic and ionic emission lines in the wavelength range of 200–440 nm, is presented. The relative intensities are rather different from the data of published wavelength tables based on arc-excited and spark-excited spectra. Emission lines of Ar, Ti, V, Fe, Ni, and Cu in the neighborhood of the prominent Cr emission lines are also compiled as a table. These tables could be employed for the analytical applications in glow discharge optical emission spectrometry. All of the data are presented as Supplementary Electronic Material.     

Multilayer thin-film coatings based on chromium nitride and aluminum nitride: Comparative depth profiling by secondary ion mass spectrometry and glow-discharge optical emission spectrometry

Round-robin characterization is reported on the sputter depth profiling of CrN/AlN multilayer thin-film coatings on nickel alloy by secondary ion mass spectrometry (SIMS) and glow-discharge optical emission spectrometry (GD-OES). It is demonstrated that a CAMECA SIMS 4550 Depth Profiler operated with 3 keV O ₂ ⁺ primary ions provides the best depth resolution and sensitivity. The key factor is sample rotation, which suppresses the negative influence of the surface topography (initial and ion-induced) on the depth profile characteristics.     

Investigation of multi-layered silicate ceramics using laser ablation optical emission spectrometry,laser ablation inductively coupled plasma mass spectrometry,and electron microprobe analysis

The applicability of laser ablation (LA) inductively coupled plasma (ICP) spectrometry for assessing elemental distributions in layered ceramics was investigated and compared with electron probe microanalysis (EPMA). Ordinary glazed wall tiles were employed as model specimens due to their defined structure and composition. They were used for calibration in the analysis of ancient pottery. A qualitative depth profile was acquired by single-spot laser drilling perpendicular to coatings with a Nd:YAG (1064 nm) laser coupled with an ICP optical emission spectrometer (OES). The lower lateral resolution associated with the laser spot diameter of 1.0 mm led to smoothing of the depth profile due to the averaging of local irregularities. In addition, transverse line scans by ablation across the tile section using an ArF* (193 nm) laser coupled with an ICP mass spectrometer (MS) were performed. LA-ICP-OES depth profiles and LA-ICP-MS transverse scans were validated by EPMA section scans and 2D back-scattered electrons images. The LA-ICP-OES acquisition was less dependent on sample surface and layer irregularities, whereas the transverse line scan over the tile section with the small-spot beam offered insight into the micromorphology of the individual layer. The combined approach revealed the occurrence of individual mineral grains, micro-heterogeneities and the character of interfaces between layers.     

Oxygen bomb combustion of biological samples for inductively coupled plasma optical emission spectrometry

A rapid sample preparation method is proposed for decomposition of milk powder, corn bran, bovine and fish tissues, containing certified contents of the analytes. The procedure involves sample combustion in a commercial stainless steel oxygen bomb operating at 25 bar. Most of the samples were decomposed within 5 min. Diluted nitric acid or water-soluble tertiary amines 10% v/v were used as absorption solutions. Calcium, Cu, K, Mg, Na, P, S and Zn were recovered with the bomb washings and determined by inductively coupled plasma optical emission spectrometry (ICP-OES). Ethanol mixed with paraffin was used as a combustion aid to allow complete combustion. A cooling step prior releasing of the bomb valve was employed to increase the efficiency of sample combustion. Iodine was also determined in milk samples spiked with potassium iodide to evaluate the volatilization and collection of iodine in amine CFA-C medium and the feasibility of its determination by ICP-OES with axial view configuration. Most of the element recoveries in the samples were between 91 and 105% and the certified and found contents exhibited a fair agreement at a 95% confidence level.     

Direct inductively coupled plasma optical emission spectrometry for analysis of waste samarium-cobalt magnets

An analytical procedure for direct determination of Al, Mg, Ti, Cr, Mn, Nb, La, Nd, Eu, Gd, Tb, Dy, Tm, Yb, Lu, Hf, Ni, Cu, Fe, Zr Sm and Co by ICP-OES in waste samarium-cobalt magnets has been developed. The significant influence of the matrix on all determinable components has been shown. The influence of operation parameters (ICP power and nebuliser flow rate) on the matrix effect has been studied using two plasma observation modes (axial and radial). For the first time, the optimal conditions for ICP-OES analysis of waste samarium-cobalt magnets has been substantiated (ICP power 1400 W, nebuliser flow rate 0.5–0.6 L/min). The analytical capabilities of the method have been evaluated using spike recovery test, certified reference materials and comparison with ICP-MS. ICP-OES measurements were performed in the axial mode for trace elements (with concentrations of n·10^?4-n·10^?2 % wt.) and in the radial mode for matrix elements and analytes (with concentrations higher than n·10^?2 % wt.). The limits of quantification (LOQs) were in the range of n·10^?5 wt% for Mn, Zr and Yb and n·10^?4 wt% for Al, Mg, Ti, Cr, Hf, La, Ni, Cu, Tb, Lu, Nb, Fe, Nd, Eu, Gd, Dy and Tm. RSD ranged from 0.2 to 10.6%.     

Modifying argon glow discharges by hydrogen addition: effects on analytical characteristics of optical emission and mass spectrometry detection modes

An overview of the effects produced by the presence of hydrogen in a glow discharge (GD), generated either in argon or in neon, is given. Extensive work related to the addition of hydrogen to GDs, coupled with optical emission spectrometry (OES) and mass spectrometry (MS), has been published in the last few years in an attempt to explain the processes involved in the discharge of mixed gases. Although numerous experimental results have already been explained theoretically, a complete understanding of the effects brought about by mixing hydrogen with argon (or another discharge inert gas) has not been reported yet. The use of theoretical models implemented using a computer has allowed the importance of some collisional and radiative processes in the inert gas plasma when hydrogen is present to be evaluated. This review shows, however, that both experimental work and theoretical work are still needed. The influence of small quantities of hydrogen on discharge parameters, such as electrical current or dc bias voltage, on crater shapes and on sputtering rates is thoroughly reviewed along with the effect on the analytical signals measured by OES and MS. Also, hydrogen-effect corrections needed to carry out proper calibrations for direct solid quantitative analyses are discussed. Figure Hydrogen induced changes in the Ar glow discharge reactions.     

Lineshapes and optical selectivity in high-resolution double-resonance ionization mass spectrometry

Lineshapes expected in high-resolution double-resonance ionization spectroscopy are calculated using the density matrix formalism, integrated over experimentally realistic conditions including atomic velocity and angular distributions as well as laser intensity profiles. The results of these calculations are compared with experimental measurements on the system 4s^{2 1}S₀ → 4s4p ¹P₁ → 4s4d ¹D₁ → ion for calcium. The measurements of lineshape, with a dynamic range of >10⁶, reveal and confirm subtle effects predicted by theory. These include the shape, position and intensity of the laser-induced structure in the spectra and the simultaneous presence of coherent and incoherent excitation processes. The calculations are able to accurately predict isotopic selectivities achieved in experimental resonance ionization measurements and are used to evaluate these values for the detection of minor calcium isotopes, including the radionuclide ⁴¹Ca.     

Measuring metal substrate roughness with glow discharge optical emission spectrometry

Although there are many methods to evaluate metal surface roughness, it is difficult to detect the substrate roughness of coated samples. Depth profile analysis (DPA) is proposed as a new method for the substrate roughness measurement, and glow discharge optical emission spectrometry (GDOES) becomes a candidate in substrate roughness measuring instruments. With this method, the typical roughness parameters R_a (arithmetic mean of the absolute deviation values of the roughness profile) and R_y (maximum value of consecutive peak and valley heights of the roughness profile along the sampling length) can be easily obtained. The principle of this method is discussed and the formulasof the principle are deducted in this paper. Electrodeposited zinc coating on copper substrate specimens is used as an example to explain the measuring process. Copyright © 2007 John Wiley & Sons, Ltd.