The optimal thickness of transmission-mode GaN photocathode

A 150-nm-thick GaN photocathode with an Mg doping concentration of 1.6× 10¹⁷cm^-3 is activated by Cs/O in ultrahigh vacuum chamber, and quantum efficiency (QE) curve of negative electron affinity transmission-mode (t-mode) GaN photocathode is obtained. The maximum QE reaches 13.0% at 290 nm. According to the t-mode QE equation solved from the diffusion equation, the QE curve is fitted. From the fitting results, the electron escape probability is 0.32, the back-interface recombination velocity is 5× 10⁴ cm·s^-1, and the electron diffusion length is 116 nm. Based on these parameters, the influence of GaN thickness on t-mode QE is simulated. The simulation shows that the optimal thickness of GaN is 90 nm, which is better than the 150-nm GaN.     

The optimal thickness of a transmission-mode GaN photocathode

A 150-nm-thick GaN photocathode with a Mg doping concentration of 1.6×1017cm-3 is activated by Cs/O in an ultrahigh vacuum chamber,and a quantum efficiency(QE) curve of the negative electron affinity transmission-mode(t-mode) of the GaN photocathode is obtained.The maximum QE reaches 13.0% at 290 nm.According to the t-mode QE equation solved from the diffusion equation,the QE curve is fitted.From the fitting results,the electron escape probability is 0.32,the back-interface recombination velocity is 5×104 cm·s-1,and the electron diffusion length is 116 nm.Based on these parameters,the influence of GaN thickness on t-mode QE is simulated.The simulation shows that the optimal thickness of GaN is 90 nm,which is better than the 150-nm GaN.     

超二代像增强器多碱阴极光电发射特性研究

通过测量超二代像增强器多碱阴极的光谱反射率和透射率,根据能量守恒定律计算得到了多碱阴极的光谱吸收率.结果表明,只有当光子的能量大于1.333 eV以后,多碱阴极的吸收率才开始快速增大.这说明多碱阴极的光谱吸收存在一个1.333 eV的长波吸收限,入射光的光子能量如果小于该吸收限,多碱阴极将不吸收.在多碱阴极的表面电子亲合势进一步降低的情况下,多碱阴极光电发射的长波理论阈值由长波吸收限所决定.多碱阴极在吸收光子之后的电子跃迁过程中,跃迁电子的能量增加小于所吸收入射光子的能量,即存在一个"能量损失".光子的能量越高,所激发的跃迁电子所处的能级越高,能量损失越大.同时光子的能量越高,跃迁电子所处的能级越高,电子跃迁的几率越低.多碱阴极的量子效率由吸收率、跃迁几率和跃迁能级、扩散过程中的能量损失等因素共同决定,因此多碱阴极的量子效率存在长波阈的同时也存在短波阈.多碱阴极的量子效率在2.11 eV达到最大值之后,随着光子能量的增加而单调减小,在3.6 eV时,量子效率减小到零.多碱阴极在3.6 eV时的吸收系数仍然很高,但由于电子跃迁的几率低,同时电子扩散过程中的能量损失大,导致尽管多碱阴极对短波具有较高的吸收系数,但量子效率仍然较低.因此对多碱阴极所吸收的光子能量中,转换成为光电导、晶格热振动等其他非光电发射形式能量的比例而言,短波较长波高,对光电发射的贡献率而言,短波较长波低.     

均匀掺杂和梯度掺杂结构GaN光电阴极性能对比研究

高温退火与Cs/O激活是形成负电子亲和势GaN光电阴极的外来诱因,GaN材料本身性能是影响阴极形成的内在因素.针对均匀掺杂和梯度掺杂GaN光电阴极在结构上的不同,结合阴极在激活过程中光电流的变化规律和激活后的量子产额,分析了均匀掺杂和梯度掺杂负电子亲和势GaN光电阴极性能的异同.实验表明,与均匀掺杂结构阴极相比,梯度掺...     

反射式负电子亲和势GaN光电阴极量子效率衰减机理研究

针对反射式负电子亲和势(NEA) GaN光电阴极量子效率的衰减以及不同波段对应量子效率衰减速度的不同,参照国外给出的NEA GaN光电阴极在反射模式下量子效率曲线随时间的衰减变化情况,利用GaN光电阴极铯氧激活后的表面模型［GaN(Mg):Cs］:O-Cs,结合量子效率衰减过程中表面势垒的变化,研究了反射式NEA GaN光电阴极量子效率的衰减机理. 有效偶极子数量的减小是造成量子效率降低的根本原因,表面I,II势垒形状的变化造成了不同波段对应的量子效率下降速度的不同. 关键词： 负电子亲和势 GaN光电阴极 量子效率 表面势垒     

Photoemission of graded-doping GaN photocathode

We study the photoemission process of graded-doping GaN photocathode and find that the built-in electric fields can increase the escape probability and the effective diffusion length of photo-generated electrons,which results in the enhancement of quantum efficiency.The intervalley scattering mechanism and the lattice scattering mechanism in high electric fields are also investigated.To prevent negative differential mobility from appearing,the surface doping concentration needs to be optimized,and it is calculated to be 3.19×10 17 cm 3.The graded-doping GaN photocathode with higher performance can be realized by further optimizing the doping profile.     

梯度掺杂与均匀掺杂GaN光电阴极的对比研究

为了提高负电子亲和势(NEA)GaN光电阴极的量子效率,利用金属有机化合物化学气相淀积(MOCVD)外延生长了梯度掺杂反射式GaN光电阴极,其掺杂浓度由体内到表面依次为1×10¹⁸ cm^-3,4×10¹⁷ cm^-3,2×10¹⁷ cm^-3和6×10¹⁶ cm^-3,每个掺杂浓度区域的厚度约为45 nm,总的厚度为180 nm.在超高真 关键词： NEA GaN光电阴极 梯度掺杂 量子效率 能带结构     

负电子亲和势GaN光电阴极光谱响应特性研究

针对负电子亲和势（NEA） GaN光电阴极成功激活后的量子效率问题,利用自行研制的紫外光谱响应测试仪器,测试了成功激活的NEA GaN光电阴极的光谱响应,给出了230—400 nm波段内反射模式NEA GaN光电阴极的量子效率曲线.测试结果表明：反射模式下NEA GaN光电阴极在230nm具有高达37.4%的量子效率,在GaN光电阴极阈值365 nm处仍有3.75%的量子效率,230 nm和400 nm之间的抑制比率超过2个数量级.文中还结合国外的研究结果,综合分析了影响量子效率的因素. 关键词： 负电子亲和势 GaN光电阴极 光谱响应 反射模式     

Equivalent Method of Solving Quantum Efficiency of Reflection-Mode Exponential Doping GaAs Photocathode

The mathematical expression of the electron diffusion and drift length LDE of exponential doping photocathode is deduced. In the quantum efficiency equation of the reflection-mode uniform doping cathode, substituting LDE for LD, the equivalent quantum efficiency equation of the reflection-mode exponential doping cathode is obtained. By using the equivalent equation, theoretical simulation and experimental analysis shows that the equivalent index formula and formula-doped cathode quantum efficiency results in line. The equivalent equation avoids complicated calculation, thereby simplifies the process of solving the quantum efficiency of exponential doping photocathode.     

Improvement of photoemission performance of a gradient-doping transmission-mode GaAs photocathode

Two types of transmission-mode GaAs photocathodes grown by molecular beam epitaxy are compared in terms of activation process and spectral response, one has a gradient-doping structure and the other has a uniform-doping structure. The experimental results show that the gradient-doping photocathode can obtain a higher photoemission capability than the uniform-doping one. As a result of the downward graded band-bending structure, the cathode performance parameters, such as the electron average diffusion length and the surface electron escape probability obtained by fitting quantum yield curves, are greater for the gradient-doping photocathode. The electron diffusion length is within a range of from 2.0 to 5.4 μm for doping concentration varying from 10¹⁹ to 10¹⁸ cm^-3 and the electron average diffusion length of the gradient-doping photocathode achieves 3.2 μm.     

用光致荧光研究多碱阴极光电发射机理

本文介绍了多碱光电阴极的特点及其在微光像增强器中的应用,叙述了光致荧光的原理,探索了利用光致荧光方法来研究多碱阴极Na₂KSb膜层电子跃迁几率的方法,并测量了两个不同灵敏度多碱阴极的荧光谱及同一个多碱阴极在工作和非工作两种状态下的荧光谱.测试结果表明,多碱阴极的荧光强度与其电子跃迁的几率及阴极灵敏度成正比,同时多碱阴极在工作状态下,荧光强度比非工作状态下有所降低,原因是一部分跃迁电子逸出多碱阴极产生光电发射,而这部分电子不再回到基态,因此不再发出荧光.另外本文还测量了多碱阴极在不同波长激光激发条件下的荧光谱.结果表明,长波激发与短波激发相比,长波激发所获得的荧光强度更高,这说明长波激发产生跃迁电子的几率高,同时荧光谱峰值波长与激光波长的偏移较小,因此跃迁电子数多且能量损失小,有利于光电发射.将多碱阴极的荧光谱与多碱阴极的量子效率相比较,看出跃迁电子数量和所处能级这两个对光电发射过程有影响的关键因素中,能级因素对光电发射过程的影响更大.但对多碱阴极而言,由于短波激发时的电子跃迁几率低于长波激发时的电子跃迁几率,跃迁电子扩散过程中的能量损失较大,因此短波的量子效率随波长的增加而增加.实践证明,光致荧光是研究多碱阴极光电发射过程的一种有效手段,通过对多碱阴极荧光谱的研究,进一步揭示了多碱阴极的光电发射的机理,为进一步改进工艺和提高多碱阴极的灵敏度提供了重要的参考价值.     

梯度掺杂结构GaN光电阴极的稳定性

利用GaN光电阴极多信息量测试评估系统,对反射式梯度掺杂和均匀掺杂GaN光电阴极样品进行了激活及衰减后的量子效率测试,并测试衰减速率。在同样的衰减时间内,和均匀掺杂样品相比,梯度掺杂样品的衰减比例较小,衰减速率较慢,其原因在于梯度掺杂结构可在其发射层内部产生系列内建电场,致使其能带连续向下弯曲,导致其表面真空能级比均匀掺杂样品下降得更低,发射层表面形成的负电子亲和势更明显,造成发射层内的光生电子更易逸出,阴极量子效率的衰减变慢,从而使其稳定性强于均匀掺杂结构。     

GaN真空面电子源光电发射机理研究

采用Cs源持续、O源断续的交替方法成功激活了GaN光电阴极,原位测试了透射模式下的光谱响应曲线,获得了透射模式下高达13%的量子效率.从一维定态薛定谔方程入手,得到了GaN真空面电子源材料的电子透射系数的表达式.对于一定形状的阴极表面势垒,电子透射系数决定于入射电子能量、表面势垒的高度和宽度.根据具有负电子亲和势(NEA)特性的透射式GaN光电阴极的能带及Cs,O覆盖过程中阴极表面势垒的变化情况,结合双偶极层[CaN(Mg):Cs]:O-Cs表面模型,分析了GaN真空面电子源材料NEA特性的形成原因.研究表明:Cs,O激活过程中形成的双偶极层对电子逸出起促进作用,双偶极层的形成是材料表面真空能级下降的原因. 关键词： GaN 电子源 透射系数 双偶极层     

Quantum efficiency conversion from the reflection-mode GaAs photocathode to the transmission-mode one

In the article, the transmission-mode negative electron affinity GaAs photocathode is compared with the reflection-mode one in structure, working principle and the quantum efficiency equation. The key point to establish relation between the two modes is that the active-layer is in full accord and the biggest difference is that the incident direction of photons is inverse. Based on the relation and difference above, we obtain the electron escape probability P and the spectrum absorption coefficient α of the reflection-mode GaAs photocathode by multilayer film matrix theory. The quantum efficiency of the transmission-mode GaAs photocathode can be estimated through the coefficients P and α of the reflection-mode one. Two groups of samples are analyzed, the one group contains uniform doping reflection-mode and transmission-mode GaAs photocathodes and the other contains exponential doping ones. Through the analysis and curve fitting, we find that the conversion difference of the uniform-doping is about 11.22% while that of the exponential-doping is about 5.46%. Another four groups of samples with exponential-doping active layer are experimentalized and the differences of them are all less than 6%. The results prove the suggested method is feasible and effective and it is more suitable for the conversion of GaAs photocathode with exponential-doping active layer.     

负电子亲和势光电阴极量子效率公式的修正

量子效率是表征负电子亲和势（NEA）光电阴极发射性能的最重要的特性参数,准确建立量子效率公式为揭示各个阴极参量对整体性能的影响以及NEA光电阴极的优化设计提供了重要的理论指导.在对NEA光电阴极体内及表面光电发射过程的分析基础上,考虑入射光子能量、表面能带弯曲区以及表面势垒对电子发射的影响,对表面逸出概率和电子衰减长度进行了修正,并利用积分法推导了NEA光电阴极的量子效率公式,其理论预测曲线与实验曲线基本一致,从而验证了修正公式的实用性.为NEA光电阴极的研究提供了有效的理论参考依据. 关键词： 负电子亲和势光电阴极 量子效率 能带弯曲区 衰减长度     

表面势垒对梯度掺杂GaN光电阴极电子逸出几率的影响

研究表面势垒对梯度掺杂GaN光电阴极电子逸出几率的影响.计算梯度掺杂透射式GaN光电阴极的电子能量分布及逸出几率,结果显示梯度掺杂与均匀掺杂相比,可以获得更大的电子逸出几率;I势垒对电子逸出几率的影响显著,而Ⅱ势垒影响较小.利用GaN光电阴极多信息量测试系统,测试两种GaN阴极样品的光电流.实验结果表明,梯度掺杂GaN样品比均匀掺杂电子逸出几率更大;单独进行Cs激活形成的I势垒对电子逸出几率有显著影响,而Cs/O共同激活形成的Ⅱ势垒对其影响较小.     

In-situ multi-information measurement system for preparing gallium nitride photocathode

We introduce the first domestic in-situ multi-information measurement system for a gallium nitride (GaN) photo- cathode. This system can successfully fulfill heat cleaning and activation for GaN in an ultrahigh vacuum environment and produce a GaN photocathode with a negative electron affinity (NEA) status. Information including the heat clean- ing temperature, vacuum degree, photocurrent, electric current of cesium source, oxygen source, and the most important information about the spectral response, or equivalently, the quantum efficiency (QE) can be obtained during prepa- ration. The preparation of a GaN photocathode with this system indicates that the optimal heating temperature in a vacuum is about 700 C. We also develop a method of quickly evaluating the atomically clean surface with the vacuum degree versus wavelength curve to prevent possible secondary contamination when the atomic level cleaning surface is tested with X-ray photoelectron spectroscopy. The photocurrent shows a quick enhancement when the current ratio between the cesium source and oxygen source is 1.025. The spectral response of the GaN photocathode is flat in a wavelength range from 240 nm to 365 nm, and an abrupt decline is observed at 365 nm, which demonstrates that with the in-situ multi-information measurement system the NEA GaN photocathode can be successfully prepared.     

Low-temperature method of cleaning <Emphasis Type="Italic">p</Emphasis>-GaN(0001) surfaces for photoemitters with effective negative electron affinity

The changes in the chemical composition, atomic structure, and electronic properties of the p-GaN(0001) surface upon chemical treatment in an HCl-isopropanol solution and vacuum annealing are investigated by x-ray photoelectron spectroscopy, high-resolution electron energy-loss spectroscopy, and low-energy electron diffraction. It is demonstrated that a considerable part of the surface gallium oxide is removed upon chemical treatment of the GaN surface. Subsequent annealing of the surface under vacuum at temperatures of 400–450°C leads to a decrease in the residual carbon and oxygen contamination to 3–5% of the monolayer. The preparation of a clean p-GaN(0001) surface with a (1×1) structure identical to that of the bulk unit cells is confirmed by the low-energy electron diffraction data. The cesium adsorption on the clean p-GaN surface results in a decrease in the work function by ～2.5 eV and the appearance of an effective negative electron affinity on the surface. The quantum efficiency of the GaN photocathode at a wavelength of 250 nm is equal to 26%.     

用积分法推导NEA光电阴极的量子产额

以“三步发射模型”为基础, 采用积分的方法推导出反射式和透射式负电子亲和势（ Ｎ Ｅ Ａ）光电阴极的量子产额表达式, 其中反射式阴极的表达式和传统的求解扩散方程得出的表达式完全相同, 而根据透射式阴极的表达式绘出的量子产额理论曲线, 和求解扩散方程绘出的曲线基本重合, 与实验曲线也符合得很好。     

Comparison of the photoemission behaviour between negative electron affinity GaAs and GaN photocathodes

In view of the important application of GaAs and GaN photocathodes in electron sources, differences in photoemission behaviour, namely the activation process and quantum yield decay, between the two typical types of III-V compound photocathodes have been investigated using a multi-information measurement system. The activation experiment shows that a surface negative electron affinity state for the GaAs photocathode can be achieved by the necessary Cs-O two-step activation and by Cs activation alone for the GaN photocathode. In addition, a quantum yield decay experiment shows that the GaN photocathode exhibits better stability and a longer lifetime in a demountable vacuum system than the GaAs photocathode. The results mean that GaN photocathodes are more promising candidates for electron source emitter use in comparison with GaAs photocathodes.