Processing of micro-particles by UV laser irradiation in a field cage

An electric cage-laser micro-turning lathe was realised and applied to contact-free handling and mechanical processing of micro particles. Since particles with diameters of several micrometers cannot be fixed in mechanical chucks, an octode field cage was used to trap and rotate a single particle in a fluid without any mechanical surface contact. A pulsed nitrogen laser of high beam quality focused to about 1 μm in diameter could be adjusted independently of the cage position. The trapping forces (negative dielectrophoresis) acting on a bead of 5 to 15 μm are up to several hundred pN. This and the surrounding fluid damp down the effect of the laser pulses during bead processing. Examples demonstrating the possibilities of this technique are shown. Microsystems with high optical quality were fabricated photolithographically or by laser direct-write chemical vapor deposition (LCVD). Technical and biotechnological applications are discussed. Received: 20 October 1999 / Accepted: 27 October 1999 / Published online: 10 November 1999     

Controlled rotation and orientation of rubrene particles and Escherichia coli using optical tweezers

Optical trapping and rotating of suspended micro-sized rubrene particles were performed using optical tweezers with circularly polarized light. The experimental results show that the rotation speed of the rubrene particles is proportional to the laser power, and the orientation of the rubrene particles can be controlled by the optical tweezers with linearly polarized light. Interestingly, by combining with the rubrene particle, the Escherichia coli (E. coli) can be rotated and oriented by optical tweezers. However, the rotating and orientating are mainly determined by the characteristics of rubrene particles. Our experiment provides a simple and convenient way to orient biological particles even if they are not sensitive to the polarization of the laser beam. Moreover, the rubrene can emit strong fluorescence when excited by the laser at the wavelength of 532 nm, and which can be potential applied to manipulate other particles with the fluorescence characteristics.     

Laser removal of copper particles from silicon wafers using UV, visible and IR radiation

Laser removal of small copper particles from silicon wafer surfaces was carried out using Nd:YAG laser radiation from near-infrared (1064 nm) through visible (532 nm) to ultraviolet (266 nm). It has been found that both 266 nm and 532 nm are successful in removing the particles from the surface whereas 1064 nm was shown to be ineffective in the removal of particles. The damage-threshold laser fluence at 266 nm was much higher than other wavelengths which provides a much wider regime for safe cleaning of the surface without causing any substrate damage. The cleaning efficiency was increased with a shorter wavelength. The effect of laser wavelength in the removal process is discussed by considering the adhesion force of the particle on the surface and the laser-induced cleaning forces for the three wavelengths. Received: 31 May 2000 / Accepted: 14 July 2000 / Published online: 20 June 2001     

Calculation and optical measurement of laser trapping forces on non-spherical particles

Optical trapping, where microscopic particles are trapped and manipulated by light is a powerful and widespread technique, with the single-beam gradient trap (also known as optical tweezers) in use for a large number of biological and other applications. The forces and torques acting on a trapped particle result from the transfer of momentum and angular momentum from the trapping beam to the particle. Despite the apparent simplicity of a laser trap, with a single particle in a single beam, exact calculation of the optical forces and torques acting on particles is difficult. Calculations can be performed using approximate methods, but are only applicable within their ranges of validity, such as for particles much larger than, or much smaller than, the trapping wavelength, and for spherical isotropic particles. This leaves unfortunate gaps, since wavelength-scale particles are of great practical interest because they are readily and strongly trapped and are used to probe interesting microscopic and macroscopic phenomena, and non-spherical or anisotropic particles, biological, crystalline, or other, due to their frequent occurance in nature, and the possibility of rotating such objects or controlling or sensing their orientation. The systematic application of electromagnetic scattering theory can provide a general theory of laser trapping, and render results missing from existing theory. We present here calculations of force and torque on a trapped particle obtained from this theory and discuss the possible applications, including the optical measurement of the force and torque.     

Stereoscopic flow-tagging velocimetry

A laser-based method for measuring the three components of the velocity in a plane simultaneously and instantaneously without seed particles is presented. This is achieved by combining a laser flow-tagging technique with stereoscopic detection, in which the tagged flow is viewed from two different directions. A single CCD camera is employed for this purpose by using a new optical detection system. The flow tagging is performed by two consecutive laser pulses, i.e., “write” and “read” laser pulses. The write laser creates a grid of tracer molecules (NO) by inducing a photodissociation process. The three-dimensional motion of the tracer molecules is measured by a thick read laser sheet. Received: 22 July 1999 / Revised version: 5 August 1999 / Published online: 30 September 1999     

Observing Nanometre Scale Particles with Light Scattering for Manipulation Using Optical Tweezers

Nanometre-scale particles can be manipulated using optical tweezers, but cannot be directly observed. We present a simple method that nanoparticles can be directly observed using optical tweezers combined with dark field microscopy. A laser beam perpendicular to a tightly focused laser beam for trap illuminates specimen and does not enter objective, nanoparticles in focal plane all can be directly observed in dark field because of light scattering. It is implemented that the polystyrene beads of diameter lOOnm can be directly observed and trapped.     

Characterization of particulates accompanying laser ablation of pressed polytetrafluorethylene (PTFE) targets

We present observations of sub-micron- to micron-sized particles generated by high fluence (≈2 J/cm²) 248-nm laser ablation of pressed polytetrafluorethylene (PTFE) targets in air at atmospheric pressure. The original target material was hydrostatically compressed ≈7 μm PTFE powder, sintered at 275 °C. Collected ejecta due to laser irradiation consists of four basic particle morphologies ranging from small particles 50–200 nm in diameter to larger particles ≈10 μm in diameter. Many particles formed in air carry electric charge. Using charged electrodes we are able to collect charged particles to determine relative numbers of ± charge. We observe roughly equal numbers of positively and negatively charged particles except for the largest particles which were predominantly negative. For a range of particle sizes we are able to measure the sign and magnitude of this charge with a Millikan-oil-drop technique and determine surface charge densities. The implications of these observations with respect to pulsed laser deposition of PTFE thin films and coatings are discussed. Received: 15 January 1999 / Accepted: 18 January 1999 / Published online: 7 April 1999     

Theoretical study of the trapping efficiency of an optical tweezers array system

Optical tweezers have been a valuable research tool since their invention in the 1980s. One of the most important developments in optical tweezers in recent years is the creation of two-dimensional arrays of optical traps. In this paper, a method based on interference is discussed to form gradient laser fields, which may cause the spatial modulation of particle concentration. The parameters related to the optical tweezers array are discussed in detail and simulated by the Matlab software to show the influence of important parameters on the distribution of particle concentration. The spatial redistribution of particles in a laser interference field can also be predicted according to the theoretical analysis.     

Manipulation of Nanoparticles Using Dark-Field-Illumination Optical Tweezers with Compensating Spherical Aberration

Based on our previous investigation of optical tweezers with dark field illumination [Chin. Phys. Left. 25（2008）329] nanoparticles at large trap depth are better viewed in wide field and real time for a long time, but with poor forces. Here we present the mismatched tube length to compensate for spherical aberration of an oil-immersion objective in a glass-water interface in an optical tweezers system for manipulating nanoparticles. In this way, the critical power of stable trapping particles is measured at different trap depths. It is found that trap depth is enlarged for trapping nanoparticles and trapping forces are enhanced at large trap depth. According to the measurement, 70-nm particles are manipulated in three dimensions and observed clearly at large appropriate depth. This will expand applications of optical tweezers in a nanometre-scale colloidal system.     

Submicron particle removal in post-oxide chemical–mechanical planarization (CMP) cleaning

Particle removal models for soft-pad buffing (the second-step polishing with DI water) and mechanical brush-cleaning processes are proposed and the removal forces are evaluated and compared with the average particle adhesion force to the oxide wafer surface resulting from the primary polishing (the first-step polishing with slurry). The hydrodynamic force due to the fluid flow is too small to remove slurry particles by itself and particles are most likely removed from the surfaces by the pad or brush asperity contact forces and the hydrodynamic drag force together. This conclusion is consistent with the experimental observations. Received: 25 January 1999 / Accepted: 18 May 1999 / Published online: 8 September 1999     

Visualization of particle trajectories in the laser shock cleaning process

The laser shock cleaning (LSC) method has recently attracted substantial attention since it can remove micro/nano-scale contaminant particles from a solid surface without direct exposure of the surface to laser irradiation. However, despite the importance of the particle detachment and redeposition mechanisms in the LSC process, the behavior of the particles during the cleaning process has never been analyzed experimentally. In this work, the motion of the micrometer-scale particles detached by a laser-induced plasma/shock wave is visualized by a photoluminescence imaging technique. The technique yields time-resolved particle trajectories under typical conditions of the LSC process, with and without a gas jet blowing. Discussions are made on the behavior of the detached particles and redeposition mechanisms.     

Angular laser cleaning for effective removal of particles. from a solid surface

Laser removal of small particles from a metal surface is carried out by changing the incident angle of the laser beam. It has been found that a dramatic improvement of cleaning efficiency in terms of area and energy is observed when using the laser at glancing angle of incidence as compared to perpendicular. Furthermore substrate damage is greatly reduced and probably eliminated at glancing angles. The process mechanism is discussed by considering the adhesion and the laser-induced cleaning forces for different incident angles. It is shown that there are different laser–matter interactions operating. Received: 25 April 2000 / Accepted: 9 May 2000 / Published online: 5 October 2000     

Electro-hydrodynamic propulsion of counter-rotating Pickering drops

Insulating particles or drops suspended in carrier liquids may start to rotate with a constant frequency when subjected to a uniform DC electric field. This is known as the Quincke rotation electro-hydrodynamic instability. A single isolated rotating particle exhibit no translational motion at low Reynolds number, however interacting rotating particles may move relative to one another. Here we present a simple system consisting of two interacting and deformable Quincke rotating particle covered drops, i.e. deformable Pickering drops. The drops attract one another and spontaneously form a counter-rotating pair that exhibits electro-hydrodynamic driven propulsion at low Reynolds number flow.     

Deep drilling of metals by femtosecond laser pulses

Results of recent investigations on deep drilling of metals by femtosecond laser pulses are reported. At high laser fluences, well above the ablation threshold, femtosecond lasers can drill deep, high-quality holes in metals without any post-processing or special gas environment. It is shown that for high-quality drilling of metals, the following processes are important: (1) laser-induced optical breakdown of air containing metal vapor and small metal particles (debris) generated by multi-pulse femtosecond laser ablation, (2) transformation of laser pulses into light filaments, and (3) low-fluence finishing. Received: 15 November 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: ch@lzh.de     

An energy approach to the modelling of particle removal by pulsed laser irradiation

An energy model to explain particle removal mechanism has been developed. This model is based on a detailed investigation of contact deformation of a particle on a solid surface, as well as particle motion during the process of substrate surface expansion under uniform laser irradiation. Calculation results show that small particles mainly gain kinetic energy during pulsed laser irradiation, whereas large particles mainly gain elastic deforming potential energy. The particle removal condition is derived from the viewpoint of energy. The relationship of particle removal efficiency with laser fluence and particle size is discussed. Theoretical results are compared with experimental results. Received: 30 July 1998 / Accepted: 14 December 1998 / Published online: 17 March 1999     

用光学方法研究玻璃微珠电流变液颗粒间的相互作用

运用一套适合研究颗粒间相互作用的双光镊系统,通过对粒聚集时间的测量,得出颗粒聚集时间和电场的平方成反比。这是第一次用电流变液颗粒在动态情况下直接验证电偶极子对间的相互作用。发展了一套使用高速CCD摄像机进行扩散波谱（DWS）测量的方法,首次实时测量具有颗粒结构的非各态历经体系的自相关函数,以研究电流变液机理,得到了玻璃微珠电流变液的结构响应时间和力和响应时间;测量了不同电场下体系相关函数的特征衰减时间随时间的变化。在不同电场下测量扩散系数可以反映出相互作用力与电场的平方成正比。     

Laser cleaning of polymer surfaces

We have investigated the removal of small spherical particles from polymer surfaces by means of 193-nm ArF and 248-nm KrF laser light. Polystyrene (PS) particles with diameters in the range of 110 nm to 1700 nm and silica particles (SiO₂) with sizes of 400 nm and 800 nm are successfully removed from two different substrates, polyimide (PI) and polymethylmethacrylate (PMMA). Experiments were performed in air (23 °C, relative humidity 24–28%) and in an environment with a relative humidity (RH) of about 90%. Received: 13 July 2000 / Accepted: 14 July 2000 / Published online: 9 November 2000     

激光捕获技术及其发展

激光捕获技术是利用光辐射力来捕捉、移动和操纵微粒的先进技术。光镊即单光束梯度力光阱是通过在高度会聚的激光束束腰附近所产生的极高的场强梯度来形成皮牛顿量级的力,可以三维地捕获和操纵微小粒子。阐述了激光捕获技术的模型和原理以及系统的基本结构;追踪了激光捕获技术的最新研究进展;介绍了非高斯型光阱、光纤光阱和全息光镊等几种特殊形式,并分析了每种形式的特点。展望了激光捕获技术的发展前景。     

Probing Dual Asymmetric Transverse Spin Angular Momentum in Tightly Focused Vector Beams in Optical Tweezers

The spin-orbit interaction (SOI) of light generated by tight focusing in optical tweezers is regularly employed in generating angular momentum - both spin and orbital - the effects being extensively observed in trapped mesoscopic particles. Specifically, the transverse spin angular momentum (TSAM), which arises due to the longitudinal component of the electromagnetic field generated by tight focusing is of special interest, both in terms of fundamental studies and associated applications. This study provides an effective and optimal strategy for generating TSAM in optical tweezers by tightly focusing first-order radially and azimuthally polarized vector beams with no intrinsic angular momentum (AM) into a refractive index stratified medium. The choice of such input fields ensures that the longitudinal spin angular momentum (LSAM) arising from the electric (magnetic) field for the radial (azimuthal) polarization is zero. As a result, the effects of the electric and magnetic TSAM are exclusively observed separately in the case of input first-order radially and azimuthally polarized vector beams on single optically trapped birefringent particles. This research opens up new and simple avenues for exotic and complex particle manipulation in optical tweezers.