Fabrication of optical devices in poly(dimethylsiloxane) by proton microbeam

Optical diffraction grating and micro Fresnel zone plate type structures were fabricated in relatively thin poly(dimethylsiloxane) (PDMS) layers using proton beam writing technique and the performance of these optical devices was tested. PDMS is a commonly used silicon-based organic polymer, optically clear, generally considered to be inert, non-toxic and biocompatible. PDMS has been used as a resist material for direct-write techniques only in very few cases. In this work, PDMS was used as a resist material; the structures were irradiated directly into the polymer. We were looking for a biocompatible, micropatternable polymer in which the chemical structure changes significantly due to proton beam exposure making the polymer capable of proton beam writing. We demonstrated that the change in the structure of the polymer is so significant that there is no need to perform any development processes. The proton irradiation causes refractive index change in the polymer, so diffraction gratings and other optical devices like Fresnel zone plates can be fabricated in this way. The observed high order diffraction patterns prove the high quality of the created optical devices.     

High-resolution X-ray imaging—a powerful nondestructive technique for applications in semiconductor industry

The availability of high-brilliance X-ray sources, high-precision X-ray focusing optics and very efficient CCD area detectors has contributed essentially to the development of transmission X-ray microscopy (TXM) and X-ray computed tomography (XCT) with sub-50 nm resolution. Particularly, the fabrication of high aspect ratio Fresnel zone plates with zone widths approaching 15 nm has contributed to the enormous improvement in spatial resolution during the previous years. Currently, Fresnel zone plates give the ability to reach spatial resolutions of 15 to 20 nm in the soft and of about 30 to 50 nm in the hard X-ray energy range. X-ray microscopes with rotating anode X-ray sources that can be installed in an analytical lab next to a semiconductor fab have been developed recently. These unique TXM/XCT systems provide an important new capability of nondestructive 3D imaging of internal circuit structures without destructive sample preparation such as cross sectioning. These lab systems can be used for failure localization in micro- and nanoelectronic structures and devices, e.g., to visualize voids and residuals in on-chip metal interconnects without physical modification of the chip. Synchrotron radiation experiments have been used to study new processes and materials that have to be introduced into the semiconductor industry. The potential of TXM using synchrotron radiation in the soft X-ray energy range is shown for the nondestructive in situ imaging of void evolution in embedded on-chip copper interconnect structures during electromigration and for the imaging of different types of insulating thin films between the on-chip interconnects (spectromicroscopy).     

Focal Shift of Paraxial Gaussian Beams in a Left-Handed Material Slab Lens

Focal shift is inevitable in conventional lens systems due to the Fresnel number and angular aperture. In this Letter, we demonstrate that there is no focal shift when a paraxial Gaussian beam passes through a left-handed material slab lens without absorption or gain. However, the effect is exhibited in the presence of absorption or gain, and becomes larger as the absorption or gain increases. When the absorption is equal to the gain, the phenomenon of the focal shift caused by the gain is more obvious. In addition, the field distribution is not affected by the absorption or gain and always remains Gaussian both in internal and external focus planes.     

准随机点阵二值化Gabor波带片聚焦特性的数值计算

 Fresnel波带片有多个焦点,作为单色器波长选择元件使用时会受到高级衍射的影响。而Gabor波带片只有一个焦点,有更好的聚焦特性,但制作难度较大,准随机点阵二值化Gabor波带片概念的提出则解决了这个问题。介绍了准随机点阵二值化Gabor波带片的设计,并利用优化的程序分别对Fresnel波带片和准随机点阵二值化Gabor波带片的聚焦特性进行了模拟计算,通过对计算结果进行分析比较,发现准随机点阵二值化Gabor波带片具有抑制高阶衍射的特性。     

离轴非旋转对称叠加方形光斑均匀聚光菲涅尔透镜

针对传统点聚焦菲涅尔透镜聚光分布均匀性差以及聚焦光斑形状与太阳能电池片不匹配的缺点,采用离轴非旋转对称叠加方法进行了方形光斑均匀聚光菲涅尔透镜设计,透镜采用方形非旋转对称结构,设计过程中通过在透镜中心截取一方形小孔来降低聚焦光斑中心辐照度峰值,改善接收面聚光分布,以提高聚光均匀性.采用光线追迹法模拟并分析了小孔边长、离轴偏移量、离轴聚焦距等参量对聚光性能的影响,结果表明:采用该方法设计的透镜聚焦光斑形状为方形,聚光均匀度高达90%.     

新型菲涅尔线聚光太阳电池组件特性分析

以PMMA为材料,采用热压成型工艺加工线聚焦菲涅尔聚光棱镜,对在其聚光条件下不同入射角度情况下太阳电池的电流电压特性进行测试,结果表明:该菲涅尔线聚焦棱镜能有效提高太阳电池的单位输出功率,而且具有比较宽泛的集光角的特性,基本满足实际应用的要求.     

Multilevel phase Fresnel zone plate lens as a near-field optical element

We propose and develop a new solid immersion lens (SIL), which is called the multilevel phase Fresnel zone plate lens (FZPL) for the near-field (evanescent wave) microscopy. The simple analysis is presented by using the scalar diffraction theory. The outstanding advantages of this FZPL are that it both focuses incident waves and produces evanescent waves. A FZPL can effectively concentrate the high angle rays important for the high resolution in comparison with the conventional SILs. The optical system equipped with the FZPL is not only simple in the assembly but also effective in making an optical head unit.     

Fourier treatment to the diffractive optical element composed of Fresnel zone and pinholes

Currently, the minimum feature size fabricated is about 15-40 nm. The resolution of Fresnel zone plates is limited by the width of the outermost zone. Although the photon sieves make it possible to focus soft X-rays to spot sizes smaller than the diameter of the smallest pinhole they have low diffraction efficiency. In order to foster strengths and circumvent weaknesses of them, we propose a new model which is composed of Fresnel zone and pinholes and give its fast Fourier algorithm. The simulation results demonstrate that the resolution of photon sieves is not better than that of Fresnel zone plates in low order of local rings. In this case, we can substitute pinholes for Fresnel zone in photon sieves. Resolution is nearly a constant, and also the diffraction efficiency improves.     

Evaluation of the dynamic range and spatial resolution of nonadiabatic optical near-field lithography through fabrication of Fresnel zone plates

Fresnel zone plates (FZPs) were fabricated in order to evaluate the performance of nonadiabatic photolithography by exploiting the localized nature of optical near fields. This novel photolithography scheme could realize FZPs with structures smaller than the wavelength of the light source used for exposure. The FZP for 325-nm-wavelength UV light could focus the incident light to a spot size of 590 nm. An FZP for focusing soft X-rays was also fabricated and, compared to conventional adiabatic photolithography, showed higher-contrast zones over the whole area of the FZP. This method exhibits a high dynamic range and good spatial resolution, and it was free from artifacts due to the interference of the residual propagating exposure light transmitted through the aperture of the photomask.     

Analysis of Fabry-Perot interference effects on the modulation properties of liquid crystal displays

In this paper, we present the analysis of Fabry-Perot interferences in a twisted nematic liquid crystal display (LCD), and its influence on the modulation properties of the device. We develop a theoretical analysis based on the Jones matrix formalism and compare the results with the experimental response of a commercial display. The developed theory considers multiple reflections to derive a new Jones matrix for the display, which accounts for both polarization and Fabry-Perot interference effects. The validity of this treatment is limited to normal incidence illumination, but it is much simpler than other 4 × 4 matrix treatments developed for a general oblique incidence. It is shown that the existence of multiple reflections can be added to previously existing simplified models for the display, resulting in a modified Jones matrix with two new parameters: the Fresnel reflection coefficient r and the voltage independent phase Φ. In addition, a calibration procedure is proposed where the calculation of these two new parameters related with the multiple reflections, can be uncoupled from the calculation of the rest of the parameters, related with the modulation properties. We remark the good agreement between the theoretical results and the experimental measurements.     

High depth of focus by combining annular lenses

In some technological applications, optical systems that produce a high depth of focus and superresolving transversal responses are required. In this paper we present a pupil design consisting in a phase pupil with binary amplitude, that added to a conventional optical system, can accomplish these goals. The pupil function is characterized by a complex amplitude that consists basically in combining two annular lenses with different focal length. Meanwhile the central portion of the pupil has an amplitude equal to 0, the external portion is modulated with two quadratic phases each one covering an annular zone. One of the phases corresponds to a convergent lens and the other to a divergent lens. The effect on the incident wavefront is to redirect the light in front of and behind the best image plane (BIP) producing a widened focus. The evolution of the transverse gain for the extended focus is also studied. Experimental results are given, and they confirm the extended focus and the superresolving behavior of the proposed pupil function.     

Evanescent-field-induced two-photon fluorescence: excitation of macroscopic areas of planar waveguides

Two-photon excitation (TPE) of fluorescence is a powerful tool for separating a faintly emitted fluorescence signal from background excitation noise. Until now TPE has only been accomplished for very small excitation areas of a few square micrometre dimensions since they are readily available in the focal zone of high-power lasers. In this paper we demonstrate, to our knowledge for the first time, two-photon excited fluorescence with planar thin-film waveguide structures of macroscopic excitation areas of the order of square millimetres to square centimetres. Based upon our results, it can be envisaged that the new combination of planar waveguide technology with TPE will become a powerful tool for macroscopic surface-interaction studies. It can also open the way for further improving the sensitivity of biosensing platforms like genomic and proteomic microarrays based upon planar waveguides. Received: 7 November 2001 / Published online: 23 November 2001     

软X射线Bragg-Fresnel二维聚焦镜的设计理论和方法

Ｘ射线Ｂｒａｇｇ－Ｆｒｅｓｎｅｌ元件是近十年发展起来的一种用于Ｘ射线波段的新型光学元件。本文介绍一种具有二维聚焦效能的Ｂｒａｇｇ－Ｆｒｅｓｎｅｌ元件的设计理论和方法。设计中采用衍射理论并用Ｃ语言编制计算机程序系统对衍射图形进行设计。对于使用波长１３．８ｎｍ，入射角５°，使用焦距２００ｍｍ的使用条件，设计结果为３５Ｍｏ／Ｓｉ双层多层膜，周期厚度７．１４ｎｍ，理论反射率约为６０％；衍射图形共４００个环带，最内环半宽度５２．５μｍ，最外环宽度１．３μｍ。     

Influence of modulation formats on FWM noises in FDM optical fiber transmission systems

In long-haul frequency-division-multiplexing (FDM) lightwave transmission systems, transmission characteristics are degraded by four-wave mixing (FWM) in optical fibers. To overcome this problem in equally-spaced (ES) allocations, modified repeated unequally-spaced (RUS) allocations such as equally-spaced RUS (ERUS) and unequally-spaced RUS (URUS) allocations have been already examined.In this paper, we focus on the fact that FWM noises are closely related to modulation formats and frequency allocations. To reduce FWM noises in FDM optical fiber transmission systems, FWM noises are analyzed for ES, RUS, ERUS, and URUS with modulation formats such as non-return-to-zero (NRZ), random return-to-zero (RZ), differential phase-shift keying (DPSK), and bit-phase arranged RZ (BARZ). It is found that FWM noises are lowest in URUS with BARZ.     

Distinguishing between Fraunhofer and Fresnel diffraction by the Young's experiment

Theoretical considerations, simulations and experiments have been carried out to distinguish between Fresnel and the Fraunhofer diffraction regarding the formation of interference patterns by a conventional Young's double-pinhole arrangement with variable separation, which is illuminated by a coherent plane wave. We show that the optical path difference introduced by this setup fits the Fresnel's phase difference between the pinholes. Consequently, it is possible to determine the number of Fresnel zones subtended by a circle centered on one of the pinholes and with radius equals to the pinhole separation. Then, we propose a criterion for distinguishing between Fresnel and Fraunhofer diffraction based on this number of Fresnel zones, which is applicable for diffracting apertures with any shape.     

Array of femtosecond plasma channels in fused silica

We have shown experimentally and confirmed by means of full dimensional (3D + 1) numerical simulations, the possibility to create an array of refractive index modification zones inside a fused silica sample using a 43 fs, 2 mJ, 800 nm laser pulse and a periodic mesh introduced in front of the sample. Robust filaments and the corresponding refractive index modification zones preserve their transverse positions for more than 10 Rayleigh lengths (∼500 μm). Numerical simulations prove that each mesh unit is an independent source of the background energy for a filament formed within this unit. The effect of the simultaneous formation of many extended periodically spaced filaments can be used to accelerate the fabrication of microoptics devices.     

Modeling and design of an optimized patterned electrode liquid crystal microlens array with dielectric slab

To eliminate the occurrence of disclination lines in the hole patterned electrode liquid crystal microlens array (LC MLA), inserting an ultrathin dielectric slab was proved to be an effective method. The thickness of the dielectric slab played an important role in effecting the optical performance of the liquid crystal microlens array device, including the dynamic focal range, focus diameter and symmetry of phase profile. In this paper, we studied the effect of dielectric slab thickness on the optical performance of the liquid crystal microlens array by numerical simulation. It is indicated that the optical performance of the device could be improved by reducing the dielectric slab thickness, assuming that the dielectric slab thickness was larger than the threshold thickness. The dependence of the threshold thickness on some key parameters was investigated and the associated effect on the optical performance by changing these key parameters was also studied. In the end, the approaches to enhance the optical performance, namely the dynamic focal range of the liquid crystal microlens array was proposed and proved to be in effect by numerical simulation results.     

Talbot effect in metallic gratings under Gaussian illumination

Metallic gratings can be found in applications such as optical metrology. Due to their fabrication process, the surface presents a certain roughness. In this work, the effect of roughness on Talbot effect has been analyzed when the grating is illuminated with a Gaussian beam. A model based on Fresnel regime is used in order to determine the intensity distribution in the near field. Contrast of the self-images is obtained and it is found that it decreases in terms of the distance between the grating and the observation plane. When the autocorrelation function of roughness presents a Gaussian behaviour, the diffracted beams are still Gaussian although some of their properties change. For example, the width of the diffracted beams increases with respect to the case of the standard chrome on glass gratings. On the other hand, the power of each diffracted beam is independent on the roughness properties of the surface.     

Passive IR field gradient detection of thermal objects in active Fresnel zones

A dual element Passive-Infrared (PIR) sensor is used with a rotating slit aperture to map a narrow scanning beam on the sensing elements through each lens of a Fresnel lens array. The stimuli generated due to each thermal object fall in the active Fresnel zones in a certain direction based on their locations and temperature variations on the surfaces of the sources. These signals are used to analyze the signatures of stationary thermal objects, their slight movements and thermal field gradient changes of the source surfaces provided the object projected area is less than the area of the active zone. Pattern matching is performed using Dynamic-Time-Warping (DTW) algorithm on STFT reduced length time vectors. The object space is divided into m-active zones that correspond to the Fresnel zones in a Fresnel lens array. Within passive IR region from each of the active zones, the system identifies not only the heat intensity changes but also detects the slight movement of the thermal source. The efficiency of the system is dependent on the number of active Fresnel zones and the angular separation between them. This single node PIR sensor system is designed to cover an angular view of ∼10° × 80° while horizontal Field of View (FOV) is divided into 4 active Fresnel zones. Generally costly Thermal-IR camera is used for thermal analysis. Our system is comparatively less costly and active coverage zones are easily configurable by increasing number of Fresnel lenses.     

菲涅尔波带片-球面结构透镜的成像分析

设计了一种新型的菲涅尔波带片 球面透镜。应用衍射光学方法,从理论上研究了这种透镜的变焦功能和分辨特性。数值结果表明,在衍射空间有两个焦点,改变波带数可以使两个焦点分开任意距离。当波带数足够大时,可以使透射空间只有一个向透镜方向迁移的焦点。与单一的透镜和单一的波带片相比,这种菲涅尔波带片 球面透镜的横向和纵向分辨率同时得到了提高。因此,这种新型的结构透镜可应用于三维成像。