Dielectric relaxation of Al/Lu2O3/Al thin film structures from 10 μHz to 10 MHz

Results of dielectric studies of lutetium sesquioxide layers examined in Al/Lu₂O₃/Al thin film sandwiches are reported. The dielectric measurements were carried out in the frequency range 10⁻⁵–10⁷ Hz and for temperatures from 292 K to 500 K. Results are presented as plots of frequency functions: the capacitance, the dielectric loss factor, tan δ(f) and also on the complex plane as Cole–Cole plots and Nyquist plots. The influence of the external voltage on C(U) and tan δ(U) was examined. Experimental data were analyzed taking into account thin insulating Lu₂O₃ film, near-electrode regions of Al/Lu₂O₃ and Lu₂O₃/Al interfaces and series resistance of electrodes and leads. The parameters of Lu₂O₃ film, near-electrode regions and resistance of contacts and leads were determined.     

Fabrication and ionic conductivity of amorphous Li–Al–Ti–P–O thin film

Li⁺ ion conducting Li–Al–Ti–P–O thin films were fabricated on ITO-glass substrates at various temperatures from 25 to 400 °C by RF magnetron sputtering method. When the substrate temperature is higher than 300 °C, severe destruction of ITO films were confirmed by XRD (X-ray diffraction) and the abrupt transformation of one semi-circle into two semi-circles on the impedance spectra. These as-deposited Li–Al–Ti–P–O solid state electrolyte thin films have an amorphous structure confirmed by XRD and a single semicircle on the impedance spectra. Good transmission higher than 80% in the visible light range of these electrolyte thin films can fulfill the demand of electro-chromic devices. Field emission scanning electron microscopy and atomic force microscopy showed the denser, smoother and more uniform film structure with the enhanced substrate temperature. Measurements of impedance spectra indicate that the gradual increased conductivity of these Li–Al–Ti–P–O thin films with the elevation of substrate temperature from room temperature to 300 °C is originated from the increase of the pre-exponential factor (σ₀). The largest Li-ion conductivity can come to 2.46 × 10^? 5 S cm^? 1. This inorganic solid lithium ion conductor film will have a potential application as an electrolyte layer in the field such as lithium batteries or all-solid-state EC devices.     

Aluminum induced formation of SiGe alloy in Ge/Si/Al thin film structure

In this work, a study of aluminum induced crystallization (AIC) of thin film germanium/silicon/aluminum (Ge/Si/Al) structure on oxidized silicon is presented. The Ge/Si/Al trilayer structure was prepared in three consecutive thin film deposition processes. The AIC was performed in nitrogen at 500 °C within time duration between 1 and 9 h. The progress of crystallization was monitored by optical microscopy, Raman spectroscopy, X-ray diffraction (XRD) and scanning electron microscopy (SEM) combined with energy dispersive X-ray spectroscopy (EDS). It was found that in Ge/Si/Al structure the AIC can lead to formation of SiGe alloy at temperature of 500 °C. This presents an alternative low-temperature formation method of SiGe which is suitable for integration with the conventional Si technology in electronic device fabrication.     

Insights into effects of annealing on microstructure from SnO2 thin films prepared by pulsed delivery

Tin dioxide thin films were prepared by pulsed laser deposition techniques on clean glass substrates, and the thin films were then annealed for 30 min from 50 to 550 °C with a step of 50 °C, respectively. The influence of the annealing temperature on the microstructural and morphological properties of the tin dioxide thin films was investigated using X-ray diffraction, scanning electron microscopy, transmission electron microscopy and selected area electron diffraction. The experimental results showed that the amorphous microstructure almost transformed into a polycrystalline tin dioxide phase exhibiting a preferred orientation related to the (1 1 0), (1 0 1) and (2 1 1) crystal planes with increased temperatures. The thin film annealed at 200 °C demonstrated the best crystalline properties, viz. optimum growth conditions. However, the thin film annealed at 100 °C revealed the minimum average root-mean-square roughness of 20.6 nm with average grain size of 26.6 nm. These findings indicate that the annealing temperature is very important parameter to determining the thin film quality, which involves the phase formation, microstructure and preferred orientation of the thin films.     

The effect of Tb doped PbTiO3 inducing layer on texture and tunable property of sol–gel derived Pb0.4Sr0.6TiO3 thin films grown on ITO/glass substrate

Highly (1 0 0)-oriented Pb_0.4Sr_0.6TiO₃ (PST40) thin films have been prepared on the Tb doped PbTiO₃ (PTT) thin film coated ITO/glass substrate by sol–gel technique. The PTT inducing layers are (1 0 0)-oriented and can help to control the orientation of PST40 thin films. Crystallization of the PST40 thin film with the PTT inducing layer is more perfect than that without PTT layer due to less distortion in the thin film. The dielectric tunability of the PST40 thin film with PTT layer therefore reaches 65%, which is 85% higher than that without PTT layer. The dielectric loss of the PST thin film is only 0.05. These results indicate that (1 0 0)-oriented Tb doped PbTiO₃ can be used as an inducing layer for highly (1 0 0)-oriented tunable materials on ITO/glass substrate.     

A novel structured plastic substrate for light confinement in thin film silicon solar cells by a geometric optical effect

We present a novel method to achieve light trapping in thin film silicon solar cells. Unlike the commonly used surface textures, such as Asahi U-type TCO, that rely on light scattering phenomena, we employ embossed periodically arranged micro-pyramidal structures with feature sizes much larger than the wavelength of visible light. Angular resolved transmission of light through these substrates indeed showed diffraction patterns, unlike in the case of Asahi U-type substrates, which show angular resolved scattering. Single junction amorphous silicon (a-Si) solar cells made at 125 °C on the embossed structured polycarbonate (PC) substrates showed an increase in current density by 24% compared to a similar solar cell on a flat substrate. The band gap and thickness of the i-layer made by VHF PECVD are 1.9 eV and 270 nm respectively. A double p-layer (nc-Si:H/a-Si:H) was used to make proper contact with ZnO:Al TCO.Numerical modeling, called DokterDEP was performed to fit the dark and light current–voltage parameters and understand the characteristics of the cell. The output parameters from the modeling suggest that the cells have excellent built-in potential (V_bi). However, a rather high recombination voltage, V_μ, affects the FF and short circuit current density (J_sc) for the cells on Asahi as well as for the cells on PC. A rather high parallel resistance ? 1 MΩ cm² (obtained from the modeling) infers that there is no significant shunt leakage, which is often observed for solar cells made at low temperatures on rough substrates. An efficiency of more than 6% for a cell on PC shows enormous potential of this type of light trapping structures.     

Investigations on Sn-doped Ni oxide thin films and their use as optical sensor devices

Tin-doped NiO thin films (5.0, 7.4, and 9.3 at.% Sn) have been prepared by thermal oxidation of vacuum deposited films of pure Ni and Sn elements on glass and silicon substrates. The prepared films were comprehensively characterised by X-ray fluorescence, X-ray diffraction, UV–VIS-NIR absorption spectroscopy, and electrical (ac and dc) measurements. Experimental data indicate that Sn⁴⁺ doping slightly stress the host NiO crystalline structure and change the optical and electrical properties. The electrical and optical behaviours of the Sn-doped NiO films show that they are wide-band semiconductors with band gap 3.69–3.76 eV and have insulating properties. The ac and dc electrical measurements show that it is possible to use Sn-doped NiO as an optical-sensitive oxide in metal-oxide-silicon configurations.     

Magnetic properties of disordered oxides with iron and manganese ions

Magnetic properties of disordered oxides involving oxide glasses have been investigated. Spin glass-like transition is observed for Fe₂O₃–TeO₂ and MnO–TeO₂ glasses in temperature dependence of dc susceptibility, although magnetic transition does not take place for MnO–TeO₂ glasses with low concentration of manganese ion above 2 K at least. The mechanism of magnetic transition observed for Fe₂O₃–TeO₂ glasses is discussed on the basis of dc susceptibility obtained under conditions of field cooling and zero field cooling, magnetic field dependence of magnetization at low temperatures, and frequency dependence of spin-freezing temperature derived from temperature dependence of ac susceptibility. Magnetic properties of disordered ZnFe₂O₄ thin film prepared by a radio frequency sputtering method have been also studied. The disordered ZnFe₂O₄ thin film exhibits ferrimagnetic behavior with high magnetization even at room temperature. At the same time, the thin film shows spin-freezing at around 320 K. Temperature dependence of nonlinear susceptibility leads to a conclusion that this transition is explainable in terms of superparamagnetism with magnetic interaction among clusters.     

Amorphous silicon diamond based heterojunctions with high rectification ratio

We have fabricated and characterized diamond based heterojunctions composed of homoepitaxial diamond (B-doped film: p type) and hydrogenated amorphous silicon (a-Si:H film: n-type). All devices include an intrinsic amorphous silicon interface (i-a-Si:H). (J–V) characteristics of a-Si:H heterojunctions measured from 300 K to 460 K present a very high rectification ratio (in the range 10⁸–10⁹) and a current density of 10 mA/cm² under 2 V of forward bias. The reverse current up to ? 4 V is below the detection limit in the whole temperature range. The devices present two regimes of operation indicating that more than one mechanism governs the carrier transport. These characteristics are compared with a Schottky barrier diode (SBD) using a tungsten carbide metal on top of the p-type diamond as a Schottky contact. The SBD device exhibits J–V characteristic with an ideality factor n close to one and the heterojunction follows this trend for low bias voltages whereas for bias voltage above 1 V a second regime with larger ideality factors n ~ 3.6 is observed. These results point out the prominent role of transport mechanisms at heterointerface between the a-Si:H layers and the p-type doped diamond which degrades the current injection. The breakdown voltage reached ? 160 V indicating the good quality of the deposited layers.     

Effects of substrate orientation on aluminum grown on MgAl2O4 spinel using molecular beam epitaxy

Al thin films have been grown on single-crystal MgAl₂O₄ spinel substrates using solid source molecular beam epitaxy. The structural properties of Al layers were systematically investigated as a function of substrate orientation. X-ray diffraction reveals that Al layers are coherently grown on both (0 0 1)- and (1 1 1)-oriented spinel substrates. However, scanning electron microscopy and atomic force microscopy show that Al layers on (0 0 1) spinel substrates display smoother surface morphology than those grown on (1 1 1) spinel substrates. Additionally, electron backscatter diffraction and transmission electron microscopy demonstrate the presence of a high density of twin domain structures in Al thin films grown on (1 1 1) spinel substrates.     

Ultra-thin polycrystalline Si layers on glass prepared by aluminum-induced layer exchange

In this work, we present studies of ultra-thin polycrystalline silicon layers (5–100 nm) prepared by the aluminum-induced layer exchange process. Here, a substrate/Al/oxide/amorphous Si layer stack is annealed at temperatures below the eutectic temperature of the Al/Si system of 577 °C, leading to a layer exchange and the crystallization of the amorphous Si. We have studied the process dynamics and grain growth, as well as structural properties of the obtained polycrystalline Si thin films. Furthermore, we derive a theoretical estimate of the grain density and examine characteristic thermal activation energies of the process. The structural properties have been investigated by Raman spectroscopy. A good crystalline quality down to a layer thickness of 10 nm has been observed.     

Properties of flexible heterojunction based on ITO/poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate)/pentacene/Al

The organic solar cell based on poly(3,4-ethylenedioxythiophene)–poly(styrenesulfonate) (PEDOT:PSS)/pentacene (Pc) was fabricated using a flexible polyethyleneterephthalate (PET) substrate coated with conductive ITO layer and aluminum contact film formed on a Pc layer by electron beam deposition. The performed investigations of current–voltage characteristics indicate that the devices operate like Schottky diodes. Under illumination of an ITO/PEDOT:PSS/Pc/Al multilayer structure the photovoltaic effect is measured with open circuit voltages up to 0.5 V, short circuit current of 0.6 μA and fill factor 0.2. The spectral-photocurrent excitation profile covers a full range of visible light (380–700 nm).     

Thin film membrane based on a-SiGe: B and MEMS technology for application in cochlear implants

In this work is presented the fabrication of a thin film membrane as a bio-transducer for aural assistance detection, therefore it will operate at low pressure. The resonant membrane was deposited by PECVD technique at low temperature of deposition T = 270 °C, using SiH₄, GeH₄, and Boron gases. The membrane was suspended on a micromachined crystalline silicon frame obtained by wet chemical etching. The a-SiGe:B film presented a resistivity of 2.46 × 10³ (Ω-cm), resistance of 20.8 kΩ. Using these experimental data we succeeded in designing a simple structure for sensing low pressure variations. The output voltage of the sensor was measured for a range of pressure from 0 to 3000 Pa and at bias voltage of 10 V.     

I–V Characteristics of tris(2,4-pentanedionato)manganese(III) thin films

Amorphous thin films of tris(acetylacetonate)manganese(III) were deposited on Si(P) substrates by thermal sublimation in vacuum. The deposited films were probed with X-ray fluorescence. Their electrical properties were studied as insulators for Al/Mn(acac)₃/Si(P) metal–insulator–semiconductor devices. Those devices were characterized by the measurement of the gate-voltage dependence of their capacitance, from which the relative permittivity (RP) and density of the charges in the insulator were determined. It was found that values of the RP of tris(acetylacetonate)manganese(III) films grown on Si(P) wafers were in the range of 30–40, which can be find applications in gate related technological uses. The dc-electrical conduction in the complex film was studied at room temperature and in temperature range of (293–325 K). It was found that the data of the as-deposited films follow the trap-charge-limited space-charge-limited conductivity (TCL-SCLC) mechanism, while the data of the annealed sample in vacuum of about 10⁻³ Pa at about 100 °C for 10 min obey the Richardson–Schottky (RS) mechanism. The parameters of both mechanisms were determined. It was concluded that the density of charged defects in the insulating film is critically determined the mechanism of the current-transfer.     

The effect of the underlying substrate on crystallization kinetics of TiNi thin films

The crystallization kinetics of amorphous thin TiNi films deposited on SiO₂ (or NaCl)/Al foils substrates were investigated. A dramatic acceleration of the crystallization rate was observed for amorphous attached-substrate films. The acceleration originated from the presence of the thin film/middle-wafer interface which served as a two-dimensional nucleus for the growth of the crystalline phase. In the process of non-isothermal annealing by DSC, apparent activation energies for two kinds of underlying thin TiNi films were determined to be 352.96 and 403.69 kJ/mol, respectively, which was lower than those free-standing films studied in previous works. For the process of isothermal annealing, the crystallization kinetics parameters had remarked drop, reflected from the lower Avrami exponent n (the range of 1.35–2.11) and shorter incubation time τ (the range of 0.1–0.4 min) between 758 and 775 K.     

Structural,magnetic and transport properties of ion beam deposited Co thin films

Magnetic nanostructures display new and interesting physical phenomena and are currently used in a large variety of applications. We studied the structural, magnetic and transport properties of Co thin films deposited by ion beam sputtering. We probed the influence of the buffer layer material (Al, Cu, Ru or Ta) and thickness (10–100 Å) on the structural properties of Co thin films. Using X-ray diffraction we observed that textured fcc Co films can be grown on amorphous Ta as thin as 20 Å but for the other buffer layers no texture is observed. We also studied by magneto-optical Kerr effect (MOKE) the magnetic properties of the Co thin films as a function of Co thickness (100–1000 Å). Finally, the electrical resistivity and anisotropic magnetoresistance (AMR) of our Co thin films (on a Ta buffer) was obtained as a function of Co thickness.     

Hall and giant magnetoimpedance effects in the Co70Fe5Si15B10 metallic glass

The transversal giant magnetoimpedance and the Hall effects of a high magnetic permeability metallic glass, Co₇₀Fe₅Si₁₅B₁₀, were measured as a function of the frequency (f) and amplitude of ac electrical current (I_ac). The room temperature data were obtained for 0.01 ⩽ f ⩽ 100 kHz, 0.5 ⩽ I_ac ⩽ 45 mA and for applied magnetic field (H) varying in the range ±10 kOe. For low frequencies, the H-dependence of the Hall voltage is similar to those measured using dc currents. However, the Hall voltage develops spectra made of two strongly f-dependent symmetrical peaks centered around ±1.6 kOe when the frequency is increased. The anomaly in the Hall voltage was identified as mainly due to a planar Hall effect.     

Characteristics of p-type nanocrystalline silicon thin films developed for window layer of solar cells

Different rf-power and chamber pressures have been used to deposit boron doped hydrogenated silicon films by the PECVD method. The optoelectronic and structural properties of the silicon films have been investigated. With the increase of power and pressure the crystallinity of the films increases while the absorption decreases. As a very thin p-layer is needed in p–i–n thin film solar cells the variation of properties with film thickness has been studied. The fraction of crystallinity and thus dark conductivity vary also with the thickness of the film. Conductivity as high as 2.46 S cm⁻¹ has been achieved for 400 Å thin film while for 3000 Å thick film it is 21 S cm⁻¹. Characterization of these films by XRD, Raman Spectroscopy, TEM and SEM indicate that the grain size, crystalline volume fraction as well as the surface morphology of p-layers depend on the deposition conditions as well as on the thickness of the film. Optical band gap varies from 2.19 eV to 2.63 eV. The thin p-type crystalline silicon film with high conductivity and wide band gap prepared under high power and pressure is suitable for application as window layer for Silicon thin film solar cells.     

Space charge limited conduction in a-(Ge20Se80)1−xSnx thin films

The present paper reports the dc conductivity measurements at high electric fields in vacuum evaporated amorphous thin films of (Ge₂₀Se₈₀)_1−xSn_x glassy alloys where 0 < x < 1. Current–voltage (I–V) characteristics have been measured at various fixed temperatures. In these samples, at low electric fields, ohmic behavior is observed. However, at high electric fields (E ∼ 10⁴ V/cm), non-ohmic behavior is observed. An analysis of the experimental data confirms the presence of space charge limited conduction (SCLC) in the glassy materials studied in the present case. From the fitting of the data to the theory of SCLC, the density of defect states (DOS) near Fermi level is calculated. These results show that the effect of incorporation of Sn in the Ge–Se system is quite different at its low and high concentration. This peculiar role of third element Sn as an impurity in the pure binary Ge₂₀Se₈₀ glassy alloy is also discussed.     

Effect of proton irradiation on electrical properties of a-As2S3

This paper reports the effect of proton irradiation on the electrical properties of a-As₂S₃ in the temperature range of 323–418 K and frequency range 0.1–100 kHz. The variation of transport property is studied with proton irradiation dose (1 × 10¹³ ions/cm² and 1 × 10¹⁵ ions/cm²). It has been observed that proton irradiation changes the dc conductivity (σ_dc), dc activation energy (ΔE_dc) and ac conductivity (σ_ac(ω)). The σ_dc and σ_ac(ω) increases with dose of proton irradiation. The value of frequency exponent (s) decreases with the temperature and irradiation dose. These results are explained in terms of change in density of defect states in these glasses.