Fabrication of broadband poly(vinylidene difluoride-trifluroethylene) line-focus ultrasonic transducers for surface acoustic wave measurements of anisotropy of a (1 0 0) silicon wafer

This paper investigates a new method for fabrication of broadband line-focus ultrasonic transducers by sol–gel spin-coating the poly(vinylidene difluoride-trifluroethylene) [P(VDF-TrFE)] copolymer film on a concave fine-polished beryllium copper backing. The ferroelectric hysteresis loops of the P(VDF-TrFE) films spin-coated from different molar ratios of VDF/TrFE, 77/23 and 55/45, were measured to select the better mixture. Owing to the better acoustic matching to water, compared with lead zirconate titanate (PZT), the fabricated transducers show relatively wide bandwidth of approximately 50 MHz with high central frequency of 60 MHz obtained at the focal plane when a fused-quartz acts as a reflecting target. Each one of the two finished transducers has a focal length of 5 mm and a full aperture angle of 90°. After applying the specially developed digital signal processing algorithm to the defocusing experiment data, which is called V(f,z) analysis method based on two-dimensional fast Fourier transform (2-D FFT), the operating frequency can extend from several MHz to over 90 MHz. Surface acoustic wave (SAW) velocities of a typical (1 0 0) silicon wafer was measured along various directions between [1 0 0] and [0 1 0] to represent the anisotropic features.     

Properties and characteristics of P(VDF/TrFE) transducers manufactured by a solution casting method for use in the MHz-range ultrasound in air

Highly effective piezoelectric polymer transducers operating in air at high frequencies have been successfully made by casting a solution of ferroelectric poly(vinylidene fluoride-co-trifluoroethylene) P(VDF/TrFE) directly on a backing metal plate, and their performance has been evaluated. By utilizing this method, it has been possible to develop the three kinds of transducers that operate respectively at 4, 6 and 10 MHz in air. For precise evaluation of the performance of the P(VDF/TrFE) transducers, the absorption loss in air was measured up to 10 MHz. It was confirmed that the empirical formula obtained from the measured absorption values in air at high frequencies was in alignment with its theoretical value. In addition, a high lateral resolution acoustic image of a ROM-Chip (amplitude-image) at 6 MHz in air was successfully displayed using an air coupled concave type P(VDF/TrFE) transducer by bonding an epoxy adhesive.     

Efficient high voltage pulser for piezoelectric air coupled transducer

The design of high voltage pulser for air coupled ultrasound imaging is presented. It is dedicated for air-coupled ultrasound applications when piezoelectric transducer design is used. Two identical N-channel MOSFETs are used together with 1200 V high and low side driver IC. Simple driving pulses’ delay and skew circuit is used to reduce the cross-conduction. Analysis of switch peak current and channel resistance relation to maximum operation frequency and load capacitance is given. PSPICE simulation was used to analyze the gate driver resistance, gate pulse skew, pulse amplitude influence on energy consumption when loaded by capacitive load. Experimental investigation was verified against simulation and theoretical predictions. For 500 pF capacitance, which is most common for piezoelectric air coupled transducers, pulser consumes 650 μJ at 1 kV pulse and 4 μJ at 50 V. Pulser is capable to produce up to 1 MHz pulse trains with positive 50 V–1 kV pulses with up to 10 A peak output current. When loaded by 200 kHz transducer at 1 kV pulse amplitude rise time is 40 ns and fall time is 32 ns which fully satisfies desired 1 MHz bandwidth.     

Improved algorithm for estimation of attenuation along propagation path using backscattered echoes from multiple sources

Accurately determining the attenuation along the propagation path leading to a region of interest could significantly improve diagnostic ultrasound tissue characterization since tissue characterization requires exact compensation for the frequency-dependent attenuation along the propagation path. In a previous study (JASA, 124:1367, 2008), it was shown that the total attenuation can be determined by using the backscattered echoes from multiple sources. The preliminary computer simulation results, had an average error between ?0.3 and +0.2 dB/MHz for the cases tested with a trend towards increasing error with increasing correlation length (i.e., characteristic size of the tissue microstructure of the scattering medium) and attenuation along the propagation path. Therefore, the goal of this study was to improve the accuracy of previously derived algorithm and reduce the dependence of the algorithm on correlation length and attenuation. In this study, the previous derivations were redone and the assumptions made by the algorithm regarding the scattering properties of the medium and the shape of the backscattered power spectrum were relaxed. The revised algorithm was then verified using computer simulations of five sources (6, 8, 10, 12, and 14 MHz, 50% bandwidth) exposing a homogeneous tissue region. The simulated tissue had microstructure following a Gaussian spatial correlation function (i.e., exp (?0.827(ka_eff)²) where k is the wavenumber) with effective radii, a_eff, of 5–55 μm (one size per simulated case) placed at a density of 250/mm³ (～5 scatterers/resolution cell for 14 MHz transducer). The attenuation of the tissue was also varied from 0.1 to 0.9 dB/cm-MHz. The computer simulations demonstrated that the modifications significantly improved the accuracy of the algorithm resulting in average errors between ?0.04 and 0.1 dB/MHz which is three times better than the error performance of the original algorithm.     

Ultrasound pressure distributions generated by high frequency transducers in large reactors

The performance of an ultrasound reactor chamber relies on the sound pressure level achieved throughout the system. The active volume of a high frequency ultrasound chamber can be determined by the sound pressure penetration and distribution provided by the transducers. This work evaluated the sound pressure levels and uniformity achieved in water by selected commercial scale high frequency plate transducers without and with reflector plates. Sound pressure produced by ultrasonic plate transducers vertically operating at frequencies of 400 kHz (120 W) and 2 MHz (128 W) was characterized with hydrophones in a 2 m long chamber and their effective operating distance across the chamber’s vertical cross section was determined. The 2 MHz transducer produced the highest pressure amplitude near the transducer surface, with a sharp decline of approximately 40% of the sound pressure occurring in the range between 55 and 155 mm from the transducer. The placement of a reflector plate 500 mm from the surface of the transducer was shown to improve the sound pressure uniformity of 2 MHz ultrasound. Ultrasound at 400 kHz was found to penetrate the fluid up to 2 m without significant losses. Furthermore, 400 kHz ultrasound generated a more uniform sound pressure distribution regardless of the presence or absence of a reflector plate. The choice of the transducer distance to the opposite reactor wall therefore depends on the transducer plate frequency selected. Based on pressure measurements in water, large scale 400 kHz reactor designs can consider larger transducer distance to opposite wall and larger active cross-section, and therefore can reach higher volumes than when using 2 MHz transducer plates.     

Novel optical add-drop multiplexer based on dual racetrack resonators

In this paper, we designed and fabricated a four-channel optical add-drop multiplexer (OADM) based on dual racetrack resonators. The size of the fabricated device is only 2400 μm × 500 μm. The fabricated device can effectively and perfectly realize the signals upload and download. The free spectral range (FSR) of OADM is about 15.2 nm. We take the spectral responses near 1555 nm as an example. When the device acts as an optical drop multiplexer, the minimum insertion loss is 4.481 dB and the maximum extinction ratio is 31.931 dB. The maximum adjacent channels crosstalk is -9.845 dB. When the device acts as an optical add multiplexer, the minimum insertion loss is 0.944 dB and all of the extinction ratios are bigger than 25 dB. The maximum crosstalk is -16.531 dB which indicates the crosstalk can be neglected.     

Creaming enhancement in a liter scale ultrasonic reactor at selected transducer configurations and frequencies

Recent research has shown that high frequency ultrasound (0.4–3 MHz), can enhance milkfat separation in small scale systems able to treat only a few milliliters of sample. In this work, the effect of ultrasonic standing waves on milkfat creaming was studied in a 6 L reactor and the influence of different frequencies and transducer configurations in direct contact with the fluid was investigated. A recombined coarse milk emulsion with fat globules stained with oil-red-O dye was selected for the separation trials. Runs were performed with one or two transducers placed in vertical (parallel or perpendicular) and horizontal positions (at the reactor base) at 0.4, 1 and/or 2 MHz (specific energy 8.5 ± 0.6 kJ/kg per transducer). Creaming behavior was assessed by measuring the thickness of the separated cream layer. Other methods supporting this assessment included the measurement of fat content, backscattering, particle size distribution, and microscopy of samples taken at the bottom and top of the reactor. Most efficient creaming was found after treatment at 0.4 MHz in single and double vertical transducer configurations. Among these configurations, a higher separation rate was obtained when sonicating at 0.4 MHz in a vertical perpendicular double transducer setup. The horizontal transducer configuration promoted creaming at 2 MHz only. Fat globule size increase was observed when creaming occurred. This research highlights the potential for enhanced separation of milkfat in larger scale systems from selected transducer configurations in contact with a dairy emulsion, or emulsion splitting in general.     

Production of particulates from transducer erosion: Implications on food safety

The formation of metallic particulates from erosion was investigated by running a series of transducers at various frequencies in water. Two low frequency transducer sonotrodes were run for 7.5 h at 18 kHz and 20 kHz. Three high frequency plates operating at megasonic frequencies of 0.4 MHz, 1 MHz, and 2 MHz were run over a 7 days period. Electrical conductivity and pH of the solution were measured before and after each run. A portion of the non-sonicated and treated water was partially evaporated to achieve an 80-fold concentration of particles and then sieved through nano-filters of 0.1 μm, 0.05 μm, and 0.01 μm. An aliquot of the evaporated liquid was also completely dried on strips of carbon tape to determine the presence of finer particles post sieving. An aliquot was analyzed for detection of 11 trace elements by Inductively Coupled Plasma Mass Spectroscopy (ICPMS). The filters and carbon tapes were analyzed by FE-SEM imaging to track the presence of metals by EDS (Energy Dispersive Spectroscopy) and measure the particle size and approximate composition of individual particles detected. Light microscopy visualization was used to calculate the area occupied by the particles present in each filter and high resolution photography was used for visualization of sonotrode surfaces. The roughness of all transducers before and after sonication was tested through profilometry. No evidence of formation of nano-particles was found at any tested frequency. High amounts of metallic micron-sized particles at 18 kHz and 20 kHz formed within a day, while after 7 day runs only a few metallic micro particles were detected above 0.4 MHz. Erosion was corroborated by an increase in roughness in the 20 kHz tip after ultrasound. The elemental analysis showed that metal leach occurred but values remained below accepted drinking water limits, even after excessively long exposure to ultrasound. With the proviso that the particles measured here were only characterized in two dimensions and could be nanoparticulate in terms of the third dimension, this research suggests that there are no serious health implications resulting from the formation of nanoparticles under the evaluation conditions. Therefore, high frequency transducer plates can be safely operated in direct contact with foods. However, due to significant production of metallic micro-particulates, redesign of lower frequency sonotrodes and reaction chambers is advised to enable operation in various food processing direct-contact applications.     

Microfluidic acoustic trapping force and stiffness measurement using viscous drag effect

It has recently been demonstrated that it was possible to individually trap 70 μm droplets flowing within a 500 μm wide microfluidic channel by a 24 MHz single element piezo-composite focused transducer. In order to further develop this non-invasive approach as a microfluidic particle manipulation tool of high precision, the trapping force needs to be calibrated to a known force, i.e., viscous drag force arising from the fluid flow in the channel. However, few calibration studies based on fluid viscosity have been carried out with focused acoustic beams for moving objects in microfluidic environments.In this paper, the acoustic trapping force (F_trapping) and the trap stiffness (or compliance k) are experimentally determined for a streaming droplet in a microfluidic channel. F_trapping is calibrated to viscous drag force produced from syringe pumps. Chebyshev-windowed chirp coded excitation sequences sweeping the frequency range from 18 MHz to 30 MHz is utilized to drive the transducer, enabling the beam transmission through the channel/fluid interface for interrogating the droplets inside the channel. The minimum force (F_min,trapping) required for initially immobilizing drifting droplets is determined as a function of pulse repetition frequency (PRF), duty factor (DTF), and input voltage amplitude (V_in) to the transducer. At PRF = 0.1 kHz and DTF = 30%, F_min,trapping is increased from 2.2 nN for V_in = 22 V_pp to 3.8 nN for V_in = 54 V_pp. With a fixed V_in = 54 V_pp and DTF = 30%, F_min,trapping can be varied from 3.8 nN at PRF = 0.1 kHz to 6.7 nN at PRF = 0.5 kHz. These findings indicate that both higher driving voltage and more frequent beam transmission yield stronger traps for holding droplets in motion.The stiffness k can be estimated through linear regression by measuring the trapping force (F_trapping) corresponding to the displacement (x) of a droplet from the trap center. By plotting F_trapping – x curves for certain values of V_in (22/38/54 V_pp) at DTF = 10% and PRF = 0.1 kHz, k is measured to be 0.09, 0.14, and 0.20 nN/μm, respectively. With variable PRF from 0.1 to 0.5 kHz at V_in = 54 V_pp, k is increased from 0.20 to 0.42 nN/μm. It is shown that a higher PRF leads to a more compliant trap formation (or a stronger F_trapping) for a given displacement x. Hence the results suggest that this acoustic trapping method has the potential as a noninvasive manipulation tool for individual moving targets in microfluidics by adjusting the transducer’s excitation parameters.     

Emulsification by high frequency ultrasound using piezoelectric transducer: Formation and stability of emulsifier free emulsion

Emulsifier free emulsion was developed with a new patented technique for food and cosmetic applications. This emulsification process dispersed oil droplets in water without any emulsifier. Emulsions were prepared with different vegetable oil ratios 5%, 10% and 15% (v/v) using high frequency ultrasounds generated by piezoelectric ceramic transducer vibrating at 1.7 MHz. The emulsion was prepared with various emulsification times between 0 and 10 h. Oil droplets size was measured by laser granulometry. The pH variation was monitored; electrophoretic mobility and conductivity variation were measured using Zêtasizer equipment during emulsification process. The results revealed that oil droplets average size decreased significantly (p < 0.05) during the first 6 h of emulsification process and that from 160 to 1 μm for emulsions with 5%, 10% and from 400 to 29 μm for emulsion with 15% of initial oil ratio.For all tested oil ratios, pH measurement showed significant decrease and negative electrophoretic mobility showed the accumulation of OH⁻ at oil/water interface leading to droplets stability in the emulsion. The conductivity of emulsions showed a decrease of the ions quantity in solution, which indicated formation of positive charge layer around OH⁻ structure. They constitute a double ionic layer around oil particles providing emulsion stability. This study showed a strong correlation between turbidity measurement and proportion of emulsified oil.     

A buffer direct injection and direct injection readout circuit with mode selection design for infrared focal plane arrays

This paper proposes a solution to the excessive area penalty associated with traditional buffer direct injection (BDI) for single pixel. The proposed solution reduces the area and power consumption of BDI to combine the direct injection (DI) within a shared architecture, while a dual-mode readout circuit expands the functionality and performance of the array readout circuit of infrared sensor. An experimental array of 10 × 8 readout circuits was fabricated using TSMC 2P4M 0.35 μm 5 V technology. Measurements were obtained using a main clock with a frequency of 3 MHz and power consumption of 9.94 mW. The minimum input current was 119 pA in BDI and 1.85 pA in DI. The signal swing was 2 V, the root mean square noise voltage was 1.84 mV, and the signal-to-noise ratio was 60 dB. This approach is applicable to mid- and long-band sensors to increase injection efficiency and resolution.     

Adjustable EDFA gain equalization filter for DWDM channels based on a single LPG excited by flexural acoustic waves

A fast adjustable gain equalization filter for dense wavelength division multiplexing (DWDM) system is reported. The method is based on a single long period fiber grating (LPG) which is excited by means of flexural acoustic waves. The equalization of a typical erbium doped fiber amplifier (EDFA) gain spectrum with a gain flatness of <0.3 dB over a 32 nm bandwidth is demonstrated. The filter adjustment is obtained by choosing different acoustic loads applied to the acousto-optic modulator, which presents a switching time of ～17 μs. A maximum power penalty of 0.84 dB, relatively to the back-to-back signal, was achieved.     

Ultrasonically enhanced fractionation of milk fat in a litre-scale prototype vessel

The ultrasonic fractionation of milk fat in whole milk to fractions with distinct particle size distributions was demonstrated using a stage-based ultrasound-enhanced gravity separation protocol. Firstly, a single stage ultrasound gravity separation was characterised after various sonication durations (5–20 min) with a mass balance, where defined volume partitions were removed across the height of the separation vessel to determine the fat content and size distribution of fat droplets. Subsequent trials using ultrasound-enhanced gravity separation were carried out in three consecutive stages. Each stage consisted of 5 min sonication, with single and dual transducer configurations at 1 MHz and 2 MHz, followed by aliquot collection for particle size characterisation of the formed layers located at the bottom and top of the vessel. After each sonication stage, gentle removal of the separated fat layer located at the top was performed.Results indicated that ultrasound promoted the formation of a gradient of vertically increasing fat concentration and particle size across the height of the separation vessel, which became more pronounced with extended sonication time. Ultrasound-enhanced fractionation provided fat enriched fractions located at the top of the vessel of up to 13 ± 1% (w/v) with larger globules present in the particle size distributions. In contrast, semi-skim milk fractions located at the bottom of the vessel as low as 1.2 ± 0.01% (w/v) could be produced, containing proportionally smaller sized fat globules. Particle size differentiation was enhanced at higher ultrasound energy input (up to 347 W/L). In particular, dual transducer after three-stage operation at maximum energy input provided highest mean particle size differentiation with up to 0.9 μm reduction in the semi-skim fractions. Higher frequency ultrasound at 2 MHz was more effective in manipulating smaller sized fat globules retained in the later stages of skimming than 1 MHz. While 2 MHz ultrasound removed 59 ± 2% of the fat contained in the initial sample, only 47 ± 2% was removed with 1 MHz after 3 ultrasound-assisted fractionation stages.     

A miniaturized HTS microwave receiver front-end subsystem for radar and communication applications

This paper presents a miniaturized high performance high temperature superconducting (HTS) microwave receiver front-end subsystem, which uses a mini stirling cryocooler to cool a high selective HTS filter and a low noise amplifier (LNA). The HTS filter was miniaturized by using specially designed compact resonators and fabricating with double-sided YBCO films on LAO substrate which has a relatively high permittivity. The LNA was specially designed to work at cryogenic temperature with noise figure of 0.27 dB at 71 K. The mini cryocooler, which is widely used in infrared detectors, has a smaller size (60 mm × 80 mm × 100 mm) and a lighter weight (340 g) than the stirling cryocoolers commonly used in other HTS filter subsystem. The whole front-end subsystem, including a HTS filter, a LNA, a cryocooler and the vacuum chamber, has a size of only φ120 mm × 175 mm and a weight of only 3.3 kg. The microwave devices inside the subsystem are working at 71.8 K with a consumed cooling power of 0.325 W. The center frequency of this subsystem is 925.2 MHz and the bandwidth is 2.7 MHz (which is a fractional bandwidth of 0.2%), with the gain of 19.75 dB at center frequency and the return loss better than ?18.11 dB in the pass band. The stop band rejection is more than 60 dB and the skirt slope is exceeding 120 dB MHz^?1. The noise figure of this subsystem is less than 0.8 dB. This front-end subsystem can be used in radars and communication systems conveniently due to it’s compact size and light weight.     

Readout circuit with dual switching mode design for infrared focal plane arrays

The paper proposes a readout circuit architecture with adjustable integration time for dual-band infrared detectors. The readout circuit uses direct injection to be combined with a capacitive trans-impedance amplifier. The amplifier is sharing between two pixels to reduce the complexity of the readout circuit. The proposed device reduces power consumption and area overhead compared to traditional structures. An experimental chip was fabricated using the TSMC 0.35 μm 2P4 M 5 V process. The resulting unit pixel layout area is 40 μm × 40 μm with input photocurrent ranging from 0.11 pA to 50 nA. CTIA mode is applicable from 0.11 pA to 10 nA, while DI mode is applicable from 3.3 pA to 50 nA. The maximum operating frequency of the chip are 4 MHz. The CTIA output swing is 1.2 V, the DI output swing is 2 V. The signal to noise ratio of the readout circuit is 65 dB and power consumption is less than 9.6 mW.     

Destruction of polylactic acid microcapsules under ultrasound irradiation

Hollow microcapsules have been considered for potential applications as drug or gene carriers. This paper describes an investigation into the mechanical properties of microcapsules with a biocompatible polylactic acid (PLA) shell that can be destroyed using ultrasound irradiation. The microcapsules had a radius of 1 to 25 μm and a shell thickness of 100 nm to 3 μm, and their response to ultrasound pulses with a center frequency of 700 kHz to 2 MHz was investigated. It was found that approximately 50% of capsules with a radius of 20 μm were destroyed using pulses with a pressure amplitude of 50 kPa and a frequency of 700 kHz, which is close to the resonance frequency of the capsules.     

Design parameters for the separation of fat from natural whole milk in an ultrasonic litre-scale vessel

The separation of milk fat from natural whole milk has been achieved by applying ultrasonic standing waves (1 MHz and/or 2 MHz) in a litre-scale (5 L capacity) batch system. Various design parameters were tested such as power input level, process time, specific energy, transducer–reflector distance and the use of single and dual transducer set-ups. It was found that the efficacy of the treatment depended on the specific energy density input into the system. In this case, a plateau in fat concentration of ∼20% w/v was achieved in the creamed top layer after applying a minimum specific energy of 200 kJ/kg. In addition, the fat separation was enhanced by reducing the transducer reflector distance in the vessel, operating two transducers in a parallel set-up, or by increasing the duration of insonation, resulting in skimmed milk with a fat concentration as low as 1.7% (w/v) using raw milk after 20 min insonation. Dual mode operation with both transducers in parallel as close as 30 mm apart resulted in the fastest creaming and skimming in this study at ∼1.6 g fat/min.     

1.55 μm silicon-based reflection-type waveguide-integrated thermo-optic 2 × 2 switch

In this work a waveguide-integrated 2 × 2 switch operating at the infrared communication wavelength of 1550 nm is proposed and theoretically discussed. The device is based on the total internal reflection (TIR) phenomenon and the thermo-optic effect (TOE) in hydrogenated amorphous silicon (a-Si:H) and crystalline silicon (c-Si). It takes advantage of a bandgap-engineered a-Si:H layer to explore the properties of an optical interface between materials showing similar refractive indexes but different thermo-optic coefficients. In particular, thanks to modern plasma-enhanced chemical vapour deposition (PECVD) techniques, the refractive index of the amorphous film can be properly tailored to match that of c-Si at a given temperature. TIR may be therefore achieved at the interface by acting on the temperature. The device is integrated in a 4 μm-wide and 3 μm-thick single-mode rib waveguide. The substrate is a silicon-on-insulator (SOI) wafer with an oxide thickness of 500 nm. We calculated an output crosstalk always better than 24 dB and insertion losses as low as 3.5 dB.     

Fabrication of single-mode Y-branch waveguides in photosensitive polymer with reduced Y-junction residue

Single-mode small-core (～2 μm × 2 μm) Y-branch waveguide structures in photosensitive polymer have been fabricated. Y-branch waveguides are designed by the beam propagation method and Y-branch waveguides are obtained on development after a cross-linkable negative tone epoxy SU-8 2002 polymer is exposed to UV through a photomask. Optical Adhesive NOA 61 is used as under- and over-clad. The fabrication process is optimized to avoid polymer residue at the Y-junction. The average insertion loss obtained for a 7.2 mm 1 × 2 device at chip-level is ～13 dB at 1550 nm.     

Cavitation mapping by sonochemiluminescence with less bubble displacement induced by acoustic radiation force in a 1.2 MHz HIFU

An acoustic radiation force counterbalanced appliance was employed to map the cavitation distribution in water. The appliance was made up of a focused ultrasound transducer and an aluminum alloy reflector with the exactly same shape. They were centrosymmetry around the focus of the source transducer. Spatial–temporal dynamics of cavitation bubble clouds in the 1.2 MHz ultrasonic field within this appliance were observed in water. And they were mapped by sonochemiluminescence (SCL) recordings and high-speed photography. There were significant differences in spatial distribution and temporal evolution between normal group and counterbalanced group. The reflector could avoid bubble directional displacement induced by acoustic radiation force under certain electric power (⩽50 W). As a result, the SCL intensity in the pre-focal region was larger than that of normal group. In event of high electric power (⩾70 W), most of the bubbles were moving in acoustic streaming. When electric power decreased, bubbles kept stable and showed stripe structure in SCL images. Both stationary bubbles and moving bubbles have been captured, and exhibited analytical potential with respect to bubbles in therapeutic ultrasound.