Intense emission from a grid-stabilized plasma cathode

Intense emission from a grid-stabilized plasma cathode based on a glow discharge with an expanded anode area is studied. In the electrode system of the ion source, the potential difference between a large-mesh grid electrode (a hole diameter of 4–6 mm) and cathode and anode plasma reaches 200 V and the glow discharge current is up to 1 A. The current distribution over the electrodes of the plasma cathode is taken, and the dependences of the electron extraction efficiency and electron-emitting-plasma potential on the gas pressure and discharge parameters are obtained. A relationship between the geometric parameters of the grid, cathode plasma potential, and efficiency of electron extraction from the plasma is derived. It is shown that stable intense emission from the plasma cathode can be provided in wide ranges of gas pressure and discharge current by varying the geometry and mesh size of the plasma cathode grid. Discharge contraction in the grid plane at elevated gas pressures is explained. It is assumed that the emitting plasma becomes inhomogeneous due to variation in the thickness of near-electrode layers in the holes of the grid, which makes the distribution of the emission current from the plasma more nonuniform.     

Cold-hollow-cathode arc discharge in crossed electric and magnetic fields

A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10⁻²–10⁻¹ Pa, magnetic-field-and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the inner cathode surface by a discharge over the dielectric surface. The magnetic field influences the arcing voltage and discharge current most significantly. When the plasma conductivity in the cathode region decreases in the electric field direction, the magnetic field increases, causing the discharge current to decline and the discharge voltage to rise. The discharge is quenched when a critical magnetic field depending on the type of gas is reached. Because of the absence of heated elements, the hollow cathode remains efficient for long when an arc is initiated in both inert and chemically active gases.     

Generation of high-energy electrons in a transverse slot-cathode nanosecond discharge at working gas medium pressures

Experimental data for the electrical and optical characteristics of a transverse slot-cathode nanosecond discharge are reported. The discharge is initiated in He at a discharge current of 1–500 A and a working gas pressure in a discharge chamber ranging from 10² to 10⁴ Pa. It is shown that the cathode current density is much (several orders of magnitude) higher than the total current density of an equivalent abnormal discharge. The electrical characteristics of an open discharge and a discharge confined by dielectric walls are found to differ considerably. Electrons passing through the cathode fall region acquire a high energy (on the order of 1 keV) under the given conditions. The fast electron relaxation conditions correlate with the initiation and evolution of the discharge. A pattern of the discharge evolution is derived from experimental data. A way of estimating the coefficient of electron emission from the cathode plasma is suggested.     

用于真空弧等离子体放电阴极温度场测量的多光谱高温计

阴极表面温度是真空弧等离子体放电过程中一个重要参数,对真空弧等离子体的形成、电极腐蚀预测、热传导以及离子源的寿命都有重要影响。真空弧离子源的阴极具有目标小,放电过程快等特点,其温度的测量,对于时间分辨率和空间分辨率要求都很高,阴极表面温度的测量技术的欠缺,使得仅靠理论解析获得的结果难以得到验证。并且等离子体放电过程中测量仪器极易受到弧光的影响,如何避免放电过程中等离子体的辐射也是采用辐射法测量阴极表面温度要考虑的问题。这无疑给其温度场的测试研究带来困难。针对脉冲真空弧等离子体开展阴极表面温度测试实验有着重要意义,在分析了真空弧等离子体放电特性以及背景辐射特性和等离子体放电阴极测温的实际需求,本文基于高速CCD相机研制了一种新型的多光谱高温计。该高温计采用单色高速CCD相机,主要避免RGB彩色相机不能完全滤除背景辐射的弧光。为使用单色CCD相机实现多光谱辐射测温,设计了高温计的光学系统,该系统采用4孔径分光系统。将4种不同波长的滤光片嵌入到1个滤光片中。该研究设计的高温计可用于2 000~6 000 K的等离子体温度测量。并在中国工程物理研究院电子工程研究所进行现场测试,测试过程中将研制的高温计,通过外部触发形式对等离子体放电过程进行跟踪拍摄,高温计完全拍摄到等离子体放电过程。利用真空弧等离子体金属电极阴极放电的实测数据对高温计进行了验证。实验结果表明,设计的新型多光谱高温计能够用于测量真空弧等离子体放电时阴极温度场信息,测量的温度值低于放电电极的沸点温度,与等离子体放电过程中出现气化现象相符,说明高温计测的是等离子体放电阴极的温度。     

Operational characteristics of a plasma cathode with a grid stabilization in a two-stage ion source

The discharge characteristics and the parameters of the cathode plasma in a two-stage ion source with a grid plasma cathode and a magnetic trap in the anode region are investigated. It is shown that an increase in the gas pressure and the accompanying increase in the reverse ion current in the bipolar diode between the cathode and anode plasmas lead to an increase in the cathode plasma potential and a transition of the cathode into the regime of electron emission from the open plasma boundary. The dependence of the ion current extracted from the anode plasma on the area of the exit aperture of the hollow cathode and the mesh size of the grid plasma cathode is explained. The conditions at which the ion emission current from the anode plasma is maximum are determined. The potential difference at the bipolar diode is measured by using the probe method. It is shown that, when the gas pressures reaches a critical value determined by the mesh size of the grid plasma cathode, the discharge passes into a contracted operating mode, in which the ion current extracted from the anode plasma decreases severalfold.     

On the Retrograde Motion of Arcs in Magnetic Fields

Experiments are reported which allow the determination of retrograde velocity of individual cathode spots and of the plasma flow in a pulsed discharge using various metals and carbon as cathode materials. For discharge currents from 10 to 40 amps, pressures of 3 mmHg and magnetic field strengths of 6.103G retrograde spot velocities from 30 to approximately 300 m/sec are observed and the corresponding plasma flow velocities are in the range from 4,400 to 8,600 m/sec. On cathode materials with low melting points, the splitting rate of spots and the motion of individual spots is small, whereas under identical conditions the spots on refractory materials are highly mobile, the splitting rate is large, and the lifetime of individual spots is short.     

Penetration of a low-pressure reflex-discharge plasma into a hollow electrode

It is shown experimentally that the plasma of a hollow-cathode reflex discharge is characterized by a nonequilibrium electron velocity distribution. The parameters of the electron distribution, which is approximated by a superposition of two Maxwellian distributions with different temperatures, are estimated. The penetration of the discharge plasma into the hollow cathode at various cathode potentials and a gas pressure of ∼10^{\t− 2} Pa is studied. It is shown that the plasma parameters in the hollow electrode depend not only on the parameters of the reflex-discharge plasma, but also on the magnitude and configuration of the magnetic and electric fields in the plasma expansion region. It is shown that the plasma penetration can be accompanied by quasineutrality violation and the formation of space-charge double layers. Experiments confirm that the ion current from the nonequilibrium plasma exceeds the Bohm current.     

Study of Intense Electron Beams Produced by High-Voltage Pulsed Glow Discharges

We report the generation of high-current-density (20 A/cm2) pulsed electron beams from high-voltage (48-100 kV) glow discharges using cathodes 7.5 cm in diameter. The pulse duration was determined by the energy of the pulse generator and varied between 0.2 ?s and several microseconds, depending on the discharge current. The largest electron beam current (900 A) was obtained with an oxidized aluminum cathode in a helium-oxygen atmosphere. An oxidized magnesium cathode produced similar results, and a molybdenum cathode operated at considerably lower currents. A small-diameter (<1 mm) well-collimated beam of energetic electrons of very high current density (>1 kA/cm2) was also observed to develop in the center of the discharge. Electrostatic probe measurements show that the negative glow plasma density and the electron beam current have a similar spatial distribution. Electron temperatures of 1-1.5 eV were measured at 7 cm from the cathode. The plasma density (8.5 · 1011 cm-3 at 450 A) was found to depend linearly on the discharge current. In discharges at high currents a denser and higher temperature plasma region was observed to develop at approximately 20 cm from the cathode. We have modeled the process of electron beam generation and predicted the energy distribution of the electron beam. More than 95 percent of the electron beam energy is calculated to be within 10 percent of that corresponding to the discharge voltage.     

介质阻挡放电点燃大气压直流均匀放电的光谱研究

由于大气压均匀放电等离子体在工业领域具有广泛的应用前景,为了获得大尺寸的大气压均匀等离子体,采用氩气作为工作气体,在大气压空气环境中利用同轴介质阻挡放电点燃了针-板电极间的大气隙(气隙宽度达到5 cm)直流均匀放电。研究发现,同轴介质阻挡放电能够有效降低针-板电极间的击穿电压。该均匀放电由等离子体柱、等离子体羽、阴极暗区和阴极辉区组成。其中等离子体柱和阴极辉区都是连续放电。而等离子体羽不同位置的放电是不同时的。事实上,等离子体羽放电是由从阴极向着等离子体柱移动的发光光层(即等离子体子弹)叠加而成。利用电学方法测量了放电的伏安特性曲线,发现其与低气压正常辉光放电类似,均具有负斜率。采集了放电的发射光谱,发现存在N₂第二正带系、氩原子和氧原子谱线。通过Boltzmann plot方法对放电等离子体电子激发温度进行了空间分辨测量,发现等离子体柱的电子激发温度比等离子体羽的电子激发温度低。通过分析放电机制,对以上现象进行了定性解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

Nonself-sustained arc discharge in anode material vapors

The basic characteristics of the nonself-sustained arc discharge in a vapor of the anode material are studied. The influence of thermoemission parameters of the cathode on volt-ampere characteristics of the discharge is described. It is established that in a free mode of the discharge cathode operation, when the discharge current I_D is lower than the current of the thermoelectron emission from the discharge cathode I_C, the deposition rate of the films q is directly proportional to the discharge current I_D. In the compelled mode of the cathode operation, when I_D>I _C, q~W_D², where W_D=I_D U_D with U_D being the discharge voltage. It is shown that the magnetic field increases the plasma density and changes the density profile from n(x)-1/x² to n(x)-1/x with x being a distance along the flow. The motion of created plasma flow is shown to have a noncollisional character with constant electron temperature of 5-7 eV along the flow. The values of plasma potential and electric field in the flow are determined; the values of cathodic and anodic potential drops in the discharge are evaluated. The angular distributions of ion and neutral fluxes in the created plasma flow are described. It is shown that the plasma flows parameters depend substantially on the working material. With use of crossed electric and magnetic fields, the flow ionization coefficient was enhanced up to 85% for the discharge in Ti vapors, and 35% for the discharge in Cu vapors     

Glow discharge with an annular hollow cathode

A discharge system with peripheral discharge chambers (Penning cells) and common hollow cathode with only one cell supplied with power is studied. It is shown that a jumpwise transition from a dark discharge to a glow discharge is accompanied by the penetration of plasma into the hollow cathode.     

Characteristics of a reflex discharge with a box-shaped cathode cavity and emission properties of the discharge plasma

A new geometrical relationship between the shape and dimensions of the cathode cavity of a reflex discharge with a cold hollow cathode is determined. The discharge characteristics and the emission properties of the discharge plasma are investigated experimentally. The conditions are determined for generating a cathode plasma that is highly inhomogeneous in the radial direction and the possibility of creating such a plasma is demonstrated. The existence of a stationary double electric layer with a potential drop of 14–16 V in the aperture of the cathode cavity is revealed. Specific features of the longitudinal extraction of plasma ions through the wall layer of the reflex and hollow cathodes are considered.     

Extension of the gas-pressure operating range and increase in the lifetime of the plasma cathode grid of an ion source

A new scheme of a gas-discharge system is proposed for a basket-type ion source with a plasma cathode in which the electrons are emitted from the expanded anode part of a constricted hollow-cathode glow discharge bounded by a grid electrode. The modified electrode system of the ion source made it possible to enlarge the surface area of the plasma cathode grid and the aperture of its cells, thereby providing stable ion emission from the discharge plasma within a wide gas-pressure range and substantially (by one order of magnitude) increasing the grid lifetime. The operation of the plasma cathode in the free and forced emission modes is examined, and the energy efficiency of ion generation in the gas-discharge system under study is evaluated.     

The spatial and temporal development of pseudospark switch plasmas

Optical spectroscopy is used to investigate the spatial and temporal development of high-current pseudospark switch plasmas. At a peak discharge current of 12 kA in amplitude and a current reversal of 20%, the electron density is measured from Stark width broadening of the hydrogen Balmer beta line. The peak electron density of ~4×10¹⁵ cm^-3 is measured briefly after the current maximum. The discharge initially starts on the symmetry axis of the cathode hole. A cylindrical plasma column is observed, which is produced mainly by ionizing collisions of beam electrons formed in the hollow cathode during the early part of the discharge. This plasma column rapidly expands in the radial direction, until it contacts the edge of the cathode hole. The same behavior is found when the Balmer beta line intensity is evaluated rather than the line shape. Although statistically distributed, localized bursts of light are found occasionally, an axially symmetric, homogeneous light intensity distribution is always predominant, and the local arcing is merely superimposed on it. These results confirm that the discharge remains diffuse during most of the current pulse     

Generation of a pulsed high-current low-energy beam in a plasma electron source with a self-heated cathode

The transition of a low-current discharge with a self-heated hollow cathode to a high-current discharge is studied, and stability conditions for the latter in the pulsed–periodic mode with a current of 0.1–1.0 kA, pulse width of 0.1–1.0 ms, and a pulse repetition rate of 0.1–1.0 kHz are determined. The thermal conditions of the hollow cathode are analyzed, and the conclusion is drawn that the emission current high density is due to pulsed self-heating of the cathode’s surface layer. Conditions for stable emission from a plasma cathode with a grid acting as a plasma boundary using such a discharge are found at low accelerating voltage (100–200 eV) and a gas pressure of 0.1–0.4 Pa. The density of the ion current from a plasma generated by a pulsed beam with a current of 100 A is found to reach 0.1 A/cm². Probe diagnostics data for the emitting and beam plasmas in the electron source are presented, and a mechanism behind the instability of electron emission from the plasma is suggested on their basis.     

The Radio Frequency Hollow Cathode Discharge Induced by the RF Discharge in the Plasma‐Jet Chemical Reactor

In the recent decade an RF driven, low‐pressure plasma reactor with supersonic plasma jet was developed (RPJ). This reactor was successfully used for deposition of thin films of various materials. The deposition of thin films indicates that the properties of the deposited films are dependent on the sputtering or reactive sputtering processes appearing inside the nozzle (hollow athode). The nozzle (hollow athode) fabricated of different kinds of materials and alloys works both as a cathode of the radio frequency (RF) hollow cathode discharge and as a nozzle for plasma jet channel generation as well. The RF hollow cathode discharge is a secondary discharge, which is induced by the primary RF plasma generated in the reactor chamber. The present paper deals with the experimental study of this RF hollow cathode discharge. The stress is laid on the investigation of the axial distribution of discharge parameters and sputtering processes inside the nozzle. On the base of experiments, the simple model of the axial distribution of the investigated RF hollow cathode discharge has been developed.     

筒形溅射阴极的磁场优化及其高功率放电特性研究

基于高功率脉冲磁控溅射(HiPIMS)技术开发的筒形溅射阴极,配合电磁系统可有效地提升等离子体的输运效率.然而电磁系统的引入反作用于筒内放电特性,从而使靶面放电面积和放电强度无法同时维持.鉴于此,本文通过调整磁场布局,研究了靶面切向(横向)磁场和法向(纵向)磁场对靶面放电的作用规律,优化后靶面切向磁场分布更加均匀,磁场强度高于40 mT的靶面区域占比由51%增至67%,同时法向峰值强度外移,强度由73 mT增至96 mT.采用Ar/Cr体系放电发现:相同工艺条件下,优化后的溅射阴极辉光变亮,靶电流增大,放电面积变宽,放电特性得到显著提升.利用等离子体整体模型仿真和发射光谱仪检测发现优化后离子电流和光谱强度得到明显提升,Cr粒子密度提高一倍,增至2.6×10^20 m^–3,且离化率上升至92.1%,同时输出离子通量提高近一倍,实现了靶面放电与离子输出的双促进.     

Transition of Discharge Mode of a Local Hollow Cathode Discharge

The discharge characteristics of hollow cathode discharge in argon in a cylindrical cavity are investigated experi- mentally. The voltage-current （V - I） characteristics and the light emission are measured. It is found that the discharge plasma is localized inside the hollow cavity, with an extensive Faraday dark space between the cathode and the anode. The discharge develops from predischarge to abnormal glow discharge, the hollow cathode effect （HCE） and a hybrid mode as the discharge current increases. The onset of the HCE is found for the first time by the transition from abnormal glow discharge together with a significant decrease in the slope of the V - I curve which shows a positive differential resistivity. The voltage increases proportionally with the current when the HCE is reached.     

Phenomenological model of the unstable stage of a vacuum spark discharge

A model of the unstable stage of a spark discharge in vacuum is proposed, which describes all typical manifestations of this stage, including current spikes in the diode, an increase in the potential at the cathode flame front, collective acceleration of ions in vacuum and plasma diodes, change in the cathode erosion mechanism, and the emergence of electron microbeams with a high current density at the anode. It is shown that these processes are associated with the formation of a charged electron layer of a spatially inhomogeneous plasma at the cathode flame boundary at the unstable stage of the spark discharge in vacuum. The emergence of this layer is associated with a limited emissive ability of the plasma at the cathode flame front during its expansion in vacuum. This leads to disruption of the plasma (field-induced emission of electron from the boundary region of the flame) and the formation of a short-lived charged plasma, viz., high-density ion cluster at the cathode flame boundary. The estimates obtained using this model are in good agreement with the experimental data on physical processes at the unstable stage of a vacuum spark discharge.     

Current-voltage characteristics of a reflex discharge with a hollow cathode and self-heating electrode

Results are presented from experimental studies of the current-voltage characteristics of a reflex discharge with a self-heating electrode used in a source of atomic hydrogen. The processes occurring in a discharge cell and governing the main features of the characteristics obtained are investigated theoretically. An explanation of the general features of the discharge is proposed. It is shown that an abrupt decrease in the discharge voltage with increasing hydrogen flow rate is associated with penetration of the plasma into the hollow cathode and the ignition of a hollow cathode discharge. It is demonstrated that, as the discharge current increases, the glow discharge gradually transforms into an arc discharge with a heated cathode.