Cutting glass substrates with dual-laser beams

In order to improve the cutting quality, a dual-laser-beam method was proposed to cut glass substrates in the current study, where a focused CO₂-laser beam was used to scribe a straight line on the substrate, and a defocused CO₂-laser beam was used to irradiate on the scribing line to generate a tensile stress and separate the substrate. The finite-element-method (FEM) software ANSYS was applied to calculate the temperature distribution and the resulting thermal stress filed. Through experimental study, it concluded that the glass substrate can be separated along an expected path with dual-laser beams and the cutting quality can be improved comparing with the cutting using a defocused laser beam alone. The relation between the cutting speed and the defocused laser power was also investigated in cutting glass with this method.     

Lasers for materials processing: specifications and trends

An overview is given of the types of lasers dominating the field of laser materials processing. The most prominent lasers in this field are the CO₂ and the Nd: YAG laser. The domain of CO₂ lasers is applications which demand high laser powers (up to 30 kW are available at present), whereas the domain of Nd:YAG lasers is micro-machining applications. In the kilowatt range of laser output power, the two types of lasers are in competition. New diffusion-cooled CO₂ laser systems are capable of output laser powers of several kilowatts, with good beam qualities, while still being quite compact. The output power and beam quality of Nd:YAG lasers has been improved in recent years, so that Nd:YAG lasers are now an alternative to CO₂ lasers even in the kilowatt range. This is especially true for applications that demand optical fibre transmission of the laser beam, which is possible with Nd:YAG laser light but not with the longerwavelength light emitted by CO₂ lasers. The main problem in solid-state lasers such as Nd:YAG is the thermal lensing effect and damage due to thermal stresses. In order to reduce thermal loading, cooling has to be enhanced. Several alternative geometries have been proposed to reduce thermal loading and, by this, thermal lensing effects. There are now slab and tube geometries which allow much higher output powers than the conventionally used laser rods. A very new scheme proposes a thin slab whose cooled side is also used as one of the laser mirrors, so that thermal gradients occur mainly in the direction of the beam propagation and not perpendicular to it, as is the case in the other geometries. As well as CO₂ and Nd:YAG lasers, semiconductor laser diodes are very promising for direct use of the emitted light or as pump sources for Nd:YAG and other solid-state lasers. When packaging together thousands of single laser diodes, output powers of several kilowatts can be realized. Major problems are collimation of the highly divergent laser beams and cooling of the laser diode bars.     

半导体的CO2激光退火和合金化

本文主要研究连续CO₂激光对半导体的照射效应。实验结果与理论分析说明,用连续CO₂激光照射可将半导体样片加热到所需的温度。与其它短波长的激光不同,波长为10.6μm的连续CO₂激光照射半导体有如下特点:CO₂激光是借助于自由载流子吸收与半导体耦合;样片在深度方向被均匀加热;激光背面照射可以增强退火效果。连续CO₂激光照射可以固相外延再生长的方式使As离子注入Si的损伤层退火恢复。在再生长的过程中注入的As离子进入替位,电激活率很高,而且不发生杂质再分布。将连续CO₂激光背面照射成功地应用于GaAsFET制备欧姆接触,既可避免激光正面照射对器件结构的破坏,又能得到比热退火为好的电学性能。 关键词：     

Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films

Zirconium dioxide (ZrO₂) thin films were deposited on BK7 glass substrates by the electron beam evaporation method. A continuous wave CO₂ laser was used to anneal the ZrO₂ thin films to investigate whether beneficial changes could be produced. After annealing at different laser scanning speeds by CO₂ laser, weak absorption of the coatings was measured by the surface thermal lensing (STL) technique, and then laser-induced damage threshold (LIDT) was also determined. It was found that the weak absorption decreased first, while the laser scanning speed is below some value, then increased. The LIDT of the ZrO₂ coatings decreased greatly when the laser scanning speeds were below some value. A Nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was defect-initiated both for annealed and as-deposited samples. The influences of post-deposition CO₂ laser annealing on the structural and mechanical properties of the films have also been investigated by X-ray diffraction and ZYGO interferometer. It was found that the microstructure of the ZrO₂ films did not change. The residual stress in ZrO₂ films showed a tendency from tensile to compressive after CO₂ laser annealing, and the variation quantity of the residual stress increased with decreasing laser scanning speed. The residual stress may be mitigated to some extent at proper treatment parameters.     

Characterization of the laser cleaving on glass sheets with a line-shape laser beam

A CO₂ laser with a line-shape beam was used to cleave a soda-lime glass substrate at various beam-rotation angles to the cutting direction. The stress distribution on the glass substrate cleaved by the laser beam has been analyzed in this study. An uncoupled thermal-elastic analysis was achieved by the ABAQUS software based on the finite element method. The numerical results show that the stress field of the fracture is caused by a complex stress state and the cleavages are significantly affected by the heat diffusion and beam rotation angle. At the rotation angle of zero degree to the cleaving direction, the phenomena of the chip formation have been found due to a large temperature gradient at the cleaving depth of the glass substrate.     

Influence of cw CO2-laser radiation on the amorphous-to-microcrystalline phase transition in a-Si:H films: a Raman spectroscopic study

A detailed Raman spectroscopic study of the amorphous-to-microcrystalline phase transition in hydrogenated silicon thin films on glass substrates is presented. Crystallization is induced by exposing the film surface to a continuous wave CO₂-laser working at 10.6 μm, at constant irradiation time/variable power density and at constant power density/variable irradiation time. The induced crystallization is followed quantitatively by analyzing the Raman spectra of the exposed area. The crystallite size distribution and the film stress are then estimated using a parametric fitting procedure. The pertinent microcrystal geometry of the samples after CO₂-laser treatment has been directly correlated to Raman spectroscopic data. Variations of several spectral features, such as bandwidths and band frequencies have been interpreted in terms of three different mechanisms including the local heating due to the CO₂-laser heating, the reduction of crystallite size and the tensile stress of μc-Si:H films. The results are discussed in the context of recent experimental and theoretical works concerning the bond polarizability.     

CO2-laser photoacoustic detection of gaseous n-pentylacetate

The absorption spectra of gaseous n-pentylacetate were investigated by FT IR spectroscopy as well as CO₂-laser photoacoustic spectroscopy for simulation of the dispersion of a nerve agent (sarin) within a modeled atmospheric boundary layer. Three CO₂-laser emission lines were used for photoacoustic detection of n-pentylacetate with detection limit in the range of 1-3 ppm.     

A DC excited waveguide multibeam CO2 laser using high frequency pre-ionization technique

High power industrial multibeam CO₂ lasers consist of a large number of closely packed parallel glass discharge tubes sharing a common plane parallel resonator. Every discharge tube forms an independent resonator. When discharge tubes of smaller diameter are used and the Fresnel numberN ≪ 1 for all resonators, they operate in waveguide mode. Waveguide modes have excellent discrimination of higher order modes. A DC excited waveguide multibeam CO₂ laser is reported having six glass discharge tubes. Simultaneous excitation of DC discharge in all sections is achieved by producing pre-ionization using an auxiliary high frequency pulsed discharge along with its other advantages. Maximum 170 W output power is obtained with all beams operating in EH₁₁ waveguide mode. The specific power of 28 W/m is much higher as compared to similar AC excited waveguide multibeam CO₂ lasers. Theoretical analysis shows that all resonators of this laser will support only EH₁₁ mode. This laser is successfully used for woodcutting     

Design considerations and scaling laws for high power convective cooled CW CO2 lasers

Various criteria for designing high power convective cooled CO₂ lasers have been discussed. Considering the saturation intensity, optical damage threshold of the optical resonator components and the small-signal gain, the scaling laws for designing high power CW CO₂ lasers have been established. In transverse flow CO₂ lasers having discharge of square cross-section, the discharge lengthL and its widthW for a specific laser powerP (Watt) and gas flow velocityV (cm/s) can be given byL = 1.4 x 10⁴ p ^1/2 V ^-1 cms andW = 0.04P ^1/2 cms. The optimum transmitivity of the output coupler is found to be almost constant (about 60%), independent of the small signal gain and laser power. In fast axial flow CO₂ lasers the gas flow should be divided into several discharge tubes to maintain the flow velocity within sonic limit. The discharge length in this type of laser does not depend explicitly on the laser power, instead it depends on the input power density in the discharge and the gas flow velocity. Various considerations for ensuring better laser beam quality are also discussed.     

Investigation of stimulated Brillouin scattering under well-defined interaction conditions

Ruby-laser light scattering was used to gain spatially and temporally resolved information about plasma parameters for nanosecond CO₂ laser-plasma interaction studies. The results confirm a heating model, where heat conduction in dense model plasmas can be described classically. CO₂-laser excited stimulated Brillouin scattering could directly be shown to arise from near thermal level by simultaneous Thomson scattering with a ruby-laser, and turbulence enhanced density fluctuations could be excluded.     

Diffusion of excited state molecules in FIR- and CO2-lasers

Both standing waves in laser oscillators and spatially inhomogenous cross sections of laser beam and pumprate cause a non-uniform distribution of excited state molecules in longitudinal and transversal direction, respectively. This spatial hole burning however is smoothed by diffusion of the excited molecules. The effect of diffusion is investigated theoretically for an optically pumped far infrared laser as well as the corresponding CO₂ pump laser. It is found, that the remaining spatial hole burning in the direction of wave propagation is negligible within CO₂ lasers but not within FIR lasers. Concerning the transversal direction it can be shown that in the FIR laser diffusion takes no effect, whereas the transversal distribution of the excited molecules in the CO₂ laser is significantly influenced by diffusion.FIR ring lasers avoid longitudinal spatial hole burning, which leads to the common assumption that they use the active medium more efficient than conventional standing wave lasers, hence delivering higher output powers. This expected advantage is levelled out to a great extent by diffusion.     

Far infrared stimulated emissions from CO2 laser excited dichloromethane

Six new far-infrared laser frequencies have been obtained in CO₂-laser excited dichloromethane. Competing transitions have enabled assignments to be made to the v₇ band.     

Comparison of Cut Path Deviation Between CO2 and Diode Lasers in Float-Glass Cutting

Laser cutting of glass using the controlled fracture technique leads to cut path deviation at the leading and trailing edges of the float glass sheet. In this technique, thermal stresses are used to induce the crack, and the material is separated along the cutting path by extending the crack. We show that the cut path deviation is partly due to high magnitudes of thermal stresses generated near the sheet edges. The absorption of intense radiation from the CO₂ and diode laser beams in the glass causes local temperature increases and consequently generates different thermal fields and stress distributions due to surface and volumetric heat absorption. In this paper, we report the effect of the CO₂ and diode laser wavelength interaction with the float glass and its effect on the magnitudes of thermal stresses generated near the edges of the glass sheet. We simulate the distribution of the thermal stress and temperature using finite-element analysis software Abaqus and validate it against the experimental data. We show that the CO₂ laser produces a lower surface quality and a larger cut path deviation at the leading and trailing edges of the glass sheet as compared to the diode laser.     

Stable all-optical formation of Bose–Einstein condensate using pointing-stabilized optical trapping beams

By stabilizing the beam pointing of optical trapping beams, we have succeeded in stable formation of Bose–Einstein condensate (BEC) of ⁸⁷Rb with all-optical method. The thermal effect of acousto-optic modulator (AOM) is usually one of the most serious problems to induce beam-pointing instability, especially for high power CO₂ laser. By passing the beam through AOM twice, we have improved the beam pointing from about 4.8 mrad to less than 0.4 mrad, which has been experimentally confirmed to be small enough to stably form BEC at the crossed region of CO₂ lasers as well as to perform experiments using an optical lattice which might have been affected by beam-pointing instability. PACS 32.80.Pj; 42.79.Jq; 03.75.Mn     

Evaluation of fracture toughness of ZrO2 and Si3N4 engineering ceramics following CO2 and fibre laser surface treatment

The fracture toughness property (K_1C) of Si₃N₄ and ZrO₂ engineering ceramics was investigated by means of CO₂ and a fibre laser surface treatment. Near surface modifications in the hardness were investigated by employing the Vickers indentation method. Crack lengths and the crack geometry were then measured by using the optical microscopy. A co-ordinate measuring machine was used to investigate the diamond indentations and to measure the lengths of the cracks. Thereafter, computational and analytical methods were employed to determine the K_1C. An increase in the K_1C of both ceramics was found by the CO₂ and the fibre laser surface treatment in comparison to the as-received surfaces. The K_1C of the CO₂ laser radiated surface of the Si₃N₄ was over 3% higher in comparison to that of the fibre laser treated surface. This was by softening of the near surface layer of the Si₃N₄ which comprised of lowering of hardness, which in turn increased the crack resistance. The effects were not similar in ZrO₂ ceramic to that of the Si₃N₄ as the fibre laser radiation in this case had produced an increase of 34% compared to that of the CO₂ laser radiation. This occurred due to propagation of lower crack resulting from the Vickers indentation test during the fibre laser surface treatment which inherently affected the end K_1C through an induced compressive stress layer. The K_1C modification of the two ceramics treated by the CO₂ and the fibre laser was also believed to be influenced by the different laser wavelength and its absorption co-efficient, the beam delivery system as well as the differences in the brightness of the two lasers used.     

Experimental research on axisymmetric folded-combined cavity CO2 laser

Rationality and feasibility of axisymmetric folded-combined cavity CO₂ laser which is reported in this paper have been proved by principle experiments. The laser lays a foundation to manufacture higher power CO₂ lasers whose output power can easily reach 1 kW. Faculas at different positions in free space and facula of nine beams which pass through the beam focusing optics have been obtained. Analyses of the experimental results are made. These analyses lay a foundation for beam transformation, transmission and shaping.     

Simulation of operation of multiwave remote gas-analyzer based on NH3-laser

Numerical analysis of a multiwave path gas-analyzer, based on a NH₃-laser pumped by CO₂-laser radiation, is performed for model detection of concentrations of a series of molecular species such as NH₃, HCN, phosgene, NHO₃, CO₂, and H₂O. The potentialities of the gas analyzer and uncertainty of the gas concentration detection were estimated for a 4 km horizontal atmospheric path. The estimation took into account the absorption of laser radiation by the atmospheric aerosol and molecular gases under study and distortion of the laser beam due to atmospheric turbulence.     

Formation of silver nanoparticles with dielectric shell on the silver-containing glass during laser evaporation and ablation

We demonstrate a new method of silver nanoparticles formation on a silver-containing glass surface due to its irradiation by a pulsed CO₂ and YAG:Nd lasers. The particles are formed as a result of reduction of silver ions from the glass at the edges of a laser torch emerging during evaporation and ablation. The settled particles are then fixed on sample surface by a shell of glass dielectric components. The method allows creating plasmonic nanostructures on the glass surface for sensing applications.     

Self-focusing and defocusing of TEA CO2 laser radiation in NH3

We report on the observation of self-focusing and defocusing of TEA CO₂-laser pulses in NH₃. Self-focusing of the 9R(30) CO₂ laser line resulted in a significant spatial narrowing of the laser beam after propagating through a 100 cm long cell containing NH₃ at a relatively low pressure of 1 Torr. Spatial broadening, characteristics of self-defocusing, has been observed for the 9R(16) CO₂-laser line.     

Laser cleaving on glass sheets with multiple laser beams

A multiple laser system consisting of CO₂ line-shaped and Nd-YAG pulsed lasers was applied to cleave a soda-lime glass substrate in this study. Due to an increase of absorption coefficient of the wavelength of 1.06 μm for Nd-YAG laser on the soda-lime glass at high temperatures, the glass sheets were preheated by the CO₂ line-shaped laser and followed with the pulsed Nd-YAG laser to generate a mixture fracture mode on the substrate. The stress distribution on the glass substrate cleaved by the multiple laser beams has been analyzed. An uncoupled thermal–elastic analysis based on the finite-element method (FEM) was made. The numerical results show that the stress field of the fracture region is caused by a complex stress state and the cleavages are significantly affected by the pulsed laser. A clean cut of the soda-lime glass substrate could be obtained due to a large shear stress state on the cutting direction with the pulsed laser radiated on the glass substrate.