激光等离子体软X射线光源光谱强度测量方法

提出了一种新的探测和测量激光等离子体软X射线源光谱强度的方法。该方法使用通道电子倍增器和定标过的硅光电二极管为探测器 ,前者是非标准探测器 ,后者为标准探测器。应用电荷灵敏前置放大器测量探测器产生的电量 ,并以高分辨率的光谱仪为分光元件 ,在已知光栅效率、通道电子倍增器增益、硅光电二极管能量响应的条件下 ,给出了计算激光等离子体软X射线源在某一波长光谱强度的公式     

中Z元素激光等离子体软X射线辐射特性

通过分析中等Z元素激光等离子体辐射特性,本文获得了丰富的类氧,类氟、类氖等离子线谱、连续谱及谱与原子序数之间关系。     

冷冻靶激光等离子体软X射线源

报道了以固态ＣＯ２作为靶材的一种新型激光等离子体软Ｘ射线源，与常规金属靶激光等离子体软Ｘ射线源相比，它是一种低污染的光源，深入研究正在进行中。     

激光产生等离子体辐射X射线特性研究

本文报导激光等离子体辐射Ｘ射线的测量方法和结果。在“星光”装置上,用１．６μｍ激光辐照Ｎａ／Ｆ和铜靶。用平晶谱仪测量等离子体辐射Ｘ射线绝对强度,并研究了辐射Ｘ射线强度与入射激光功率密度的关系,测量了靶前后辐射强度之比,为光电离机制的Ｘ光激光研究提供了较重要的数据。     

金属等离子体软X光源的研制

一台金属等离子体软Ｘ光源在北京师范大学低能核物理所建成．为该光源配套研制了一台高频、高压恒流充电电源．该光源工作波长为０．８～２ｎｍ，单脉冲能量大于１０Ｊ． A soft X ray source produced by metal plasma has been built in Institute of Low Energy Nuclear Physics. The characters of the source are measured.Its wavelength is 0.8～2.0 nm, pulse energy is 10 J.For this source a high frequence,high voltage power supply with constant current was developed.     

无碎屑激光等离子体软X射线源的研究及应用前景

分析了常规金属靶激光等离子体源产生固体碎屑的原因及其对软Ｘ射线光学元件的危害，介绍了近年来发展起来的无碎屑激光等离子体软Ｘ射线源，归纳了无碎屑激光等离子体软Ｘ射线源的几种形式和特点，并且描述了这种新型光源在软Ｘ射线显微术及光刻术中的应用．     

激光等离子体光源软X射线反射率计

介绍了所研制的激光等离子体光源软X射线反射率计,该反射率计由激光等离子体光源、掠入射光栅单色仪、样品室、真空系统、样品台、光电探测系统和计算机控制系统组成,工作波段8～30 nm,测量样品的最大尺寸为130 mm×120 mm×120 mm(长×宽×高),可以利用这台反射率计对软X射线波段光栅、滤光片和多层膜反射镜等光学元件进行测量和评估。为检验反射率计的性能指标,利用该反射率计对本室研制的软X射线多层膜反射镜的反射率进行了测量,测量结果与理论计算结果符合较好,反射率测量重复性为±0.6%。     

激光等离子体软X射线辐射能谱时间分辨测量研究

利用(国内最近研制成功的)带聚酰亚胺膜底衬的金透射光栅与软X射线条纹相机相配合,(在LF11~#激光装置上)使用波长为0.53μm的激光打靶,测量了平面Au靶软X射线时间分辨能谱。测量结果观察到了金等离子体的O带辐射强度随时间增加的现象。文章计算了光栅的衍射效率,并讨论了影响测量谱的几个关键因素。     

A low debris laser plasma soft X-ray source

Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 μm YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO₂ cryogenic target. Soft X-ray spectra from the CO₂ cryogenic target are obtained. Experimental results of debris measurement from both CO₂ cryogenic and Cu targets demonstrate that the light source based on the CO₂ cryogenic target shows great improvement over conventional metal targets in debris reduction.     

Investigation of contact lithography in the 5–20 nm region with a laser plasma source

In this paper, we present experiments of extreme ultraviolet (EUV) contact lithography based on a compact laser-produced plasma (LPP) and investigated the radiation of the plasma from Cu, Fe, W targets. We measured the depth of development of a polychlorinated methylstyrene (PCMS) resist exposed through a 100 I mm⁻¹ Cu net for times ranging from 10 to 40 minutes using different targets.     

Intensity distribution of a capillary-discharge 46.9 nm soft X-ray laser

We realize a Ne-like Ar 46.9 nm soft X-ray laser pumped by a capillary discharge. The study of the laserpulse-intensity distribution is important for applications of soft X-ray lasers. The intensity distribution demonstrates the gain distribution, plasma radius, and axial plasma density that contribute to the study of the laser-pulse formation. To measure the intensity in different positions of the X-ray laser spot, we moved transversally an X-ray diode (XRD) assembled with a slit. We obtain the onedimensional intensity distribution. We find a laser divergence (FWHM) of 4.0 mrad. According to the gain-guided model, we calculate the intensity distribution. The measured divergence of 4.0 mrad roughly corresponds to a plasma radius a approximately equal to 230–250 μm and on-axis electron density n _e ≈ 8.0?10¹⁸ ?9.0?10¹⁸ cm ^?3. The results of calculations indicate that the divergence of the intensity distribution increases when the plasma radius decreases and the on-axis electron density increases.     

Characterization of compact bright soft X-ray source based on picosecond laser plasma

Radiation emission of silicon and aluminum plasmas produced by 40-ps laser pulses with peak intensity above 10¹⁴ W/cm² was studied. High-resolution soft X-rayspectra of H-like and He-like ions were analyzed to determine plasma parameters. We compared the line shape of resonance transitions and their intensity ratios to corresponding dielectronic satellites and the intensities of the intercombination lines of He-like ions with the results of model calculations. Such comparisons gave average values of the electron number density N_e=(1-1.9)×10²¹ cm^-3 and the electron temperature T_e=460–560 eV for Si plasmas and about 560 eV for Al plasmas produced by the first and the second laser harmonics. The plasma size is about 100 μm. According to our estimations, more than 10¹² photons were produced within the resonance line spectral width and in the solid angle 2π during the total decay period. PACS 41.50.+h; 52.25.Os; 52.50.Jm     

Space-resolved soft X-ray emission from laser produced lithium plasma

Space-resolved emission spectroscopy was used to study the evolution of 13.5 nm line intensity and electron temperature of the plasma generated by laser ablation of lithium target. Two emitting regions were observed, their intensities depending on laser fluency. Plasma image is discussed in the frame of a Gaussian model of particle expansion.     

Parametric study of plasma active medium and gain saturation region in a Ne-like soft X-ray laser

Plasmas created by the interaction of high power optical laser with a target surface can be used as a source of soft X-ray lasers. Plasma and pump laser characteristics play significant role in achieving high gain coefficient for such plasma based on soft X-ray lasers. In the present work, the plasma active medium parameters for germanium element at a wavelength of 19.6 nm irradiated by a double-pulse pump laser have been studied using MED103 hydrodynamic code. For this purpose, first, the effects of laser intensity, pulse width and delay time of two pulses on the gain coefficient have been investigated and the optimum conditions for the maximum gain extent of Ne-like germanium soft X-ray laser are obtained. Then, in order to calculate the intensity of such high gain lasers in which Linford equation is invalid, we have adopted the general formula of amplified spontaneous emission intensity, which is valid in all range of intensities even at much higher intensities than saturation intensity. Finally, the soft X-ray laser intensities in the saturated areas for different plasma lengths have been calculated. The results show that the output of soft X-ray laser intensity with 294 cm⁻¹ gain coefficient can reach to about several times saturated intensity by applying a 1–2 mm plasma length as the active medium.     

Collisional excitation soft X-ray laser at 23.6 nm in a laser-produced cylindrical target

We have tested soft X-ray lasing in neon-like germanium with cylindrical targets where wave guiding and plasma confinement may affect lasing. An intense soft X-ray laser beam of 0.05 MW peak power and a narrow beam divergence (8 mrad) was produced at 23.6 nm with a 4 cm long straight cylindrical target of 0.72 mm inner diameter. Bending the cylindrical target to form a toroidal shape increased the lasing intensity by a factor of 3 accompanied with reduction of the beam divergence from 8 to 6 mrad.     

Design of capillary Z-pinch plasma for a soft X-ray laser

An analysis for designing capillary Z-pinch plasma as an alternative active medium of soft X-ray laser is presented. The validity of calculation results are verified by experiment. Namely, the specification of driving current as well as the predicted pinch time is in good agreement with the experimental results. This study also reveals the possibility of reducing the main charging voltage without degrading the performance of the X-ray laser.     

Key methods for intensifying soft X-ray emission from a laser plasma for lithography

A two-pulse two-wave (Nd and CO₂ lasers) scheme is proposed for irradiating a laser target, which ensures the highest factor of laser radiation conversion to the X-ray range (13.5 nm ± 1%). Analytic estimates are obtained for parameters of pulses and of the target made of Xe or Li. Numerical optimization is performed for X-ray emission from a spherical Xe target exposed to a CO₂ laser pulse. The maximal factor of conversion of laser radiation to X rays is ～1%. Angular and spectral characteristics of X-ray radiation are obtained. The flux of fast Xe ions ejected from the target and damaging the Mo/Si coating of X-ray mirrors is estimated.     

Scope of plasma focus with argon as a soft X-ray source

The X-radiation emission from a low energy plasma focus with argon as a filling gas is investigated. Specifically, the attention is paid to determine the system efficiency for argon K-lines and Cu-K/sub /spl alpha// line emission at different filling pressures, and identify the radiation emission region. The highest argon line emission found at 1.5 mbar is about 30 mJ and the corresponding efficiency is 0.0015%. The same pressure is suitable for high Cu-K/sub /spl alpha// emission, which is about 70 mJ in 4/spl pi/ geometry and the system efficiency is 0.003%. The bulk of X-radiation is emitted from the region close to the anode tip, whereas some radiation emission takes place from the formed hot spots along the focus axis. These radiations are found suitable for backlighting in Al (1-1.56 keV) and Ti (2.9-4.96 keV) energy transmission bands.