靶镜光学质量检测技术的研究

提出了一种利用扫描型哈特曼检测装置检验靶镜光学质量的技术.该装置对传统哈特曼检验装置的光阑进行了改进,通过扫描型哈特曼光阑的旋转扫描,可对被检靶镜全口径范围内连续采样.利用该扫描型哈特曼检测装置对一块口径为270 mm的非球面靶镜的能量集中度和波像差进行了检验,其结果与激光数字波面干涉仪的测量结果相吻合,其中能量集中度的相对测量误差为7.7%,波像差的相对测量误差为10.2%,验证了该检测技术的有效性.     

扫描型哈特曼检测装置研究

 在传统哈特曼检验法基础上研制成功一种扫描型哈特曼检测新装置,可对最大口径为300 mm的聚焦镜在全口径范围内进行采样测量。该检测装置由大口径标准平行光管、扫描式哈特曼光阑、被检聚焦镜、CCD摄像机及计算机组成,在水平和垂直两个径向上开有等间距排列且相互错开半个间距的小孔,并且在步进电机的驱动下绕光轴旋转,可对被检聚焦镜进行全口径连续采样。对有效口径为154 mm的斐索平面干涉仪非球面准直物镜的球差及焦斑能量集中度进行了测量,进而由球差计算得到了波像差,并用干涉法对该准直物镜进行了测量。球差的理论值与测量值最大偏差为14.6%;由新装置测量并计算得到的波像差PV值与干涉法测量并计算得到的PV值偏差为11.5%;实测的80％的能量集中在34 μm的范围内,而计算得到的８０％的能量集中在28 μm之内,最后对结果进行了分析并提出了进一步改进的意见。     

Scanning Hartmann test method and its application to lens aberration measurement

A scanning Hartmann test method is proposed and its measurement principle is described. The scanning Hartmann test setup is formed by modifying the Hartmann screen of the conventional Hartmann test setup. With the rotation of the scanning Hartmann screen and the improved hole arrangement, the whole information of the lens to be tested in the full aperture can be obtained. The measurement accuracy of the aberration is improved and the local error of the lens can be got. In the method, no change of the Hartmann screen is needed for measuring the lenses of different aperture sizes. Experimental results of aberration measurements of two lenses are given to verify the usefulness of the setup.     

Experimental research on application of Hartmann micro-lens array in coherent beam combination of two-dimensional laser array

We demonstrate experimentally the application of a phase error detection method in the coherent beam combination (CBC) of a laser array. The method is based on the Hartmann micro-lens array. Both the piston and tilt errors can be detected and corrected simultaneously by combining this method with adaptive optics-correcting technology. The far-field intensity pattern of the combined beam has high energy concentration and good beam quality. The power encircled in the main lobe of the far-field pattern is 41.3%, and the contrast of the pattern reaches 81.8%. Experimental results show the great potential of the Hartmann phasing method for use in the CBC of a large number of laser beams.     

Ф750mm口径望远镜光学系统的检测(英文)

为了探测更高轨道的空间目标,研制了一台通光口径为Ф750mm的望远镜.该望远镜为主焦点光学系统,由一片二次非球面反射元件和四片透射元件组成,具有大视场(4°),大相对孔径(1∶1.32)和宽光谱(500～800nm)的特点.本文以该望远镜的研制为基础,介绍了其光学系统各个元件的单独检测和系统装调完成后的整体检测方法和过程.采用样板法对系统中的球面透射元件进行了单独检测,采用透射无像差补偿器法对二次非球面反射镜进行了单独检测,采用反射无像差补偿器法对组合起来的透射校正镜组进行了检测,并且对系统装调对准之后的光学系统进行室内平行光管和室外对星观测两种方法进行检测.测量结果均满足设计要求,其中球面透镜的面形误差小于0.1个光圈,反射元件和透射元件非球面表面的面形误差均优于λ/30(λ=632.8nm),透射校正镜组的波像差优于λ/30(λ=632.8nm).光学系统整体检测结果表明,室内和室外检测结果一致,其像面的80%能量集中度直径在4°的全视场范围内均小于2个像元,达到了设计的成像要求.     

贝塞尔高斯涡旋光束在大气湍流中的传输特性

为了探测更高轨道的空间目标,研制了一台通光口径为Ф750 mm的望远镜.该望远镜为主焦点光学系统,由一片二次非球面反射元件和四片透射元件组成,具有大视场(4°),大相对孔径(1∶1.32)和宽光谱(500~800 nm)的特点.本文以该望远镜的研制为基础,介绍了其光学系统各个元件的单独检测和系统装调完成后的整体检测方法和过程.采用样板法对系统中的球面透射元件进行了单独检测,采用透射无像差补偿器法对二次非球面反射镜进行了单独检测,采用反射无像差补偿器法对组合起来的透射校正镜组进行了检测,并且对系统装调对准之后的光学系统进行室内平行光管和室外对星观测两种方法进行检测.测量结果均满足设计要求,其中球面透镜的面形误差小于0.1个光圈,反射元件和透射元件非球面表面的面形误差均优于λ/30(λ=632.8 nm),透射校正镜组的波像差优于λ/30(λ=632.8nm).光学系统整体检测结果表明,室内和室外检测结果一致,其像面的80% 能量集中度直径在4°的全视场范围内均小于2个像元,达到了设计的成像要求.     

基于改进哈特曼法的眼镜片全孔径屈光度测量

自由曲面镜片的发展和普及,对现有的屈光度测量方法提出了挑战,也要求新的测量方法具有更高的精度以及更好的可靠性。因此,介绍了传统哈特曼检测法测量眼镜片屈光度的测量原理并提出了一种改进方法,对球面单焦点镜片和散光镜片进行仿真测量的屈光度误差均在1%以内。对改进方法与传统方法测量所得到的渐进多焦点自由曲面镜片屈光度分布图的分析结果表明,改进哈特曼检测法相比于传统哈特曼检测法具有测量范围大,精度高的特点,能够准确反映眼镜片的屈光度分布特征。     

基于Shark-Hartmann理论的波前探测技术研究

精确的波前探测是反射镜面型检测及光束波前畸变测量的重要依据,论文根据Shark-Hartmann理论对波前探测技术进行了模拟和实验研究。将平行光经过球面透镜/柱面透镜后形成的球面波/柱面波作为探测波前。实验采用商用的微透镜阵列和CCD搭建Shark-Hartmann传感器,利用实际光束作为参考光,避免了参考光的不准直性对实验的影响。模拟计算结果表明平均曲率误差为13.423 mm,实验结果实现了对球面/柱面/倾斜波的探测及复原。     

Simultaneous Measurement of Refractive Index and Thickness of Transparent Plates by Low Coherence Interferometry

We demonstrate a novel low coherence Michelson interferometer which can provide simultaneous measurement of the refractive index and thickness of transparent plates used as a measured object. Unlike the existing low coherence interferometers reported so far, either an object or a focusing lens aligned on the signal arm is scanned repeatedly by a precise translation stage in synchronization with movement of a reflection mirror on the reference arm. The so-called object or lens scanning method gives us two measured quantities a movement distance of the stage between two light focusing states on the front and rear planes of an object and the corresponding optical path difference. These two measured quantities, result in desirable values of the index and thickness of the object with a short calculation. The measurement accuracy of ≤0.1% is expected for a thickness of more than 1 mm. In the experiment using the object scanning method, the accuracy of 0.3% or less was successfully attained for nearly 1-mm thick plates of fused quartz, sapphire, LiTaO₃ and slide glass.     

Limitations of the Shack–Hartmann sensor for testing optical aspherics

Aspheric lenses and surfaces are increasingly used in modern high-quality optics. Therefore, new measuring methods for an accurate quantification of these aspheres are also necessary. The current approach to quantify aspheres is to apply null systems such as computer-generated holograms as a part of a null lens in a interferometer. An alternative to this method is the Shack–Hartmann wavefront sensor. The dynamic range of this sensor can be adjusted by the optical parameters of the applied microlens array. Hence, large wavefront aberrations can be measured directly without a null lens. However, there are basic limitations in the dynamic range of a Shack–Hartmann sensor (SHS) depending on the curvature of the incident wavefront. In this paper, an analytical expression to determine the strongest wavefront curvature which can be measured with a defined microlens array of an SHS is derived. It allows to calculate the microlens parameters required to measure the wavefront of a test lens. Particularly, the influence of rotational symmetric aspherical wavefront shapes to the dynamic range of an SHS has been studied. A comparison between interferometry and the SHS has been accomplished. Numerical solutions using scalar diffraction theory illustrate the analytical predictions.     

聚焦法测量梯度折射率透镜的折射率分布

本文针对梯度折射率分布的透镜(以后简称梯析透镜)与光纤在折射率分布上的不同点,对用于光纤及其预制棒测量的聚焦法的原理公式,计算测量方法等进行了重要改进,从而使聚焦法可适用于梯折透镜的测量.本文通过计算机模拟计算,对原理公式及计算方法的准确性和可靠性进行了验证,并同时给出了这一测量方法的精度,最后给出了测量实例及其比较结果.     

同步辐射束流尺寸测量干涉仪的设计与仿真

基于同步光的干涉法,是一种非拦截高精度的束流截面测量手段。相比传统成像法,干涉法可以测量更小的束团尺寸、分辨率更好,较短测量波长下有望获得亚μm级的分辨率,因此在同步辐射光源中得到广泛应用。对合肥光源HLS II的原有同步光干涉装置,提出了将原有的干涉光路中第一面聚焦透镜换成RC结构聚焦反射镜,第二面单透镜换成双胶合透镜,以达到在不改变光路光轴情况下减小色散和几何像差,从而提高光路成像质量的目的。采用几何光路设计方法对成像质量进行评价,并进行物理光学仿真计算,得到测量系统的干涉条纹。仿真结果表明:光学系统成像的艾里斑半径减小约35%,点列图的均方根半径减小了约99%,波前差也减小了约75%,调制传递函数（MTF）的截止频率提高了约65%,采用聚焦反射镜代替原有的聚焦透镜可大幅提升光路成像质量。     

正交狭缝扫描式激光光束质量测量方法研究

传统激光光束质量测量方法在CCD相机靶面前激光光路上加装可调衰减模块,对激光光束进行衰减。但该方法受限于CCD相机像元尺寸限制,难以进行高精度测量。为此该文提出了一种滚轮狭缝式激光光束质量评价方法,在测量时采用狭缝滚轮上的扫描狭缝直接扫描被测激光光束,使用InGaAs探测器配合聚焦透镜进行测量。经过与电机同轴的高精度增量式编码器确保采集位置与采集数据同步,扫描频率根据被测激光脉冲频率和光斑的直径范围可进行调整,该方法对光斑空间采样分辨率优于1 μm。实验结果表明,采用该方法测得的激光M2因子数值与被测激光器提供数值一致,测量不确定度小于10%。     

哈特曼法检测渐进多焦点镜片

介绍了哈特曼法检测眼镜片的测量原理及对远轴光线的屈光度补偿，采用哈特曼法对渐进多焦点镜片进行检测。提出了实验总体方案并得到CCD采样图，通过后续图像处理，理论上可以得到镜片的屈光度分布图。结果表明，哈特曼法检测渐进多焦点镜片结构简单，方便可行。     

多波长广角f-theta透镜光学设计

f-theta透镜作为激光扫描系统中必不可少的部件,对系统工作面尺寸、测量速度、测量精度等起着决定性的作用。为改变以往f-theta透镜扫描范围小、工作波长单一等不足,设计出了一种工作于486 nm~656 nm波段的广角f-theta透镜。通过初级像差分析,确定系统的初级结构参数,利用光学材料的不同色散性能分配合理的光焦度来进行色差校正。设计结果表明:f-theta镜头像散值在像差容限范围内满足平像场要求,f-theta镜头系统最大色差为3 μm,线性畸变误差值不超过0.015%,光能利用率接近90%,聚焦性能接近衍射极限,满足多工作波长、高精度激光打标机的实际需求。     

随机并行梯度下降算法在激光束整形中的应用

为了满足高光束质量要求,校正激光束在传输过程中产生的波前畸变,改善激光位相分布,进而提高聚焦光斑的能量集中度,基于79单元微机械薄膜变形镜（MMDM）搭建了一套激光束整形实验系统。利用随机并行梯度下降（SPGD）算法,分别选择聚焦光斑半径、形心为中心的环围能量比和质心为中心的环围能量比作为算法性能指标,开展了激光束整形实验研究。3种情况下,分别经过58次、197次、133次迭代趋于收敛,但光斑半径作为性能指标时振荡严重;环围能量比从整形前的0.200 5、0.127 7、0.200 5分别增加到整形后的0.669 9、0.733 9、0.864 0。实验结果表明：MMDM用于激光束整形具有良好的效果,光斑半径作为性能指标整形速度最快,其次为质心环围能量比,形心环围能量比最慢;质心环围能量比作为性能指标整形效果最好,其次为形心环围能量比,光斑半径最差。综合比较,质心环围能量比作为性能指标时综合效果最好。     

Discussions on on-machine measurement of aspheric lens-mold surface

At present, regarding to the machining of aspheric lens mold, there are two major methods to carry out the on-machine measurement (OMM) — contacting method (CM) and non-contacting method (NCM). Here such two methods are reviewed in detail. CM is mainly based on the contacting probe which is scratching aspheric surface of lens mold to achieve profile data. To be efficient, an idea with 45° tilt of probe is proposed for OMM of lens mold by Suzuki. But generally speaking, the contacting OMM is not so efficient and can only deal with axisymmetric aspheric lens mold. On the contrary, NCM mostly uses laser to achieve aspheric profile without any contact. On ultra-precision lathe, laser scanning system or laser interferometer is mounted on the frame of lathe and transfers measurement data to machining system efficiently. However, most NCMs need stable environment and low working noise except instantaneous phase-shifting shearing interferometry (IPSSI). Therefore, a new idea about IPSSI is proposed in this paper to realize OMM of lens molds. Unfortunately, it's also difficult to test the high numerical aperture aspheric or free-form lens molds. By comparison, the newly-developed fringe reflection (FR) method is becoming the promising method because it features the high efficiency and high accuracy. However, this method has not been used for OMM system yet. Much research should be conducted for FR OMM technology.     

基于已知球面波前的Hartmann-Shack传感器结构参量标定

微透镜阵列到CCD的距离是影响Hartmann-Shack波前探测器精度的主要装配误差之一。对该平移装配误差的修正,能够有效减小波前探测误差。理论求解了球面波前通过微透镜引起的子孔径光斑质心移动量与波前探测器结构参数之间的关系,借助该关系能够求出微透镜到CCD之间的实际距离,以其改进波前斜率的计算。实验验证了理论推导的合理性,并对实际装配参数进行标定,得实际距离为24.2 mm。利用标定后的参数重建波前,其相对误差减小20.4%。实验表明该标定方法能够有效提高波前传感器测量准确性。     

Kinoform单透镜的硬X射线聚焦性能

Kinoform单透镜可以高效聚焦硬X射线至纳米量级, 在X射线纳米显微学和纳米光谱学领域有着重要的应用前景. 基于衍射光学和傅里叶光学理论, 给出了X射线经由Kinoform单透镜聚焦的物理模型, 基于数值模拟, 研究了不同材料、光子能量、台阶数量和顶点曲率半径对Kinoform单透镜聚焦性能的影响. 结果表明, 孔径为1 mm的Kinoform单透镜对30 keV的X射线聚焦, 可以得到14 nm焦斑、62 μm焦深, 且可实现4个量级的光强增益和大于30%的光强透过率.     

玻璃基底Wolter-1型X射线聚焦镜研制及测试

Wolter-1型X射线聚焦镜可将掠入射的X射线反射至焦平面处,具有较强的成像探测能力,在天文探测等领域中具有重要作用.通过建立几何模型对反射镜面及反射光线方程进行理论计算,推导出了适用于以玻璃为基底材料的聚焦镜设计参数方程,可用于对此类聚焦镜进行理论设计,依据理论设计,采用具有极高表面光洁度的超薄肖特D263T玻璃经热弯成型后作为反射镜基底,在反射镜表面制备金属铱薄膜作为反射膜研制了Wolter-1型反射镜组,并使用激光三维扫描仪对所研制的聚焦镜片面型进行了测试.测试结果显示,实际镜片面型与理想镜片面型公差在10 μm以内的测试点占总测试点的50%.通过搭建可见光条件下的焦斑测试系统,使用图像采集相机采集焦斑的灰度图像,通过图像分析软件分析计算该灰度图像的灰度分布来定量分析焦斑的能量分布情况,从而确定焦斑特性参数.实验结果显示：研制出的聚焦镜片焦距为1.6 m,焦斑的半能量包围直径为0.33 mm,对应角分辨率为0.7角分.