在等离子体源离子注入中靶周围等离子体的行为

在等离子体源离子注入中，将待处理的工件直接放在等离子体内，并在工件上按一定的占空比加脉冲连续式负偏压，我们通过计算，分析了在工件未加负偏压时等离子体对工件的作用，并给出了在工件加上负偏压时注入工件的离子能量的简化分布模型，最后计算了在负偏压脉冲持续时间内离子阵鞘层边界的扩展。     

ECR微波放电氩离子输运过程的研究

建立了电子回旋共振（ＥＣＲ）微波放电等离子体中离子输运过程的蒙特卡罗模型，考虑了离子与中性原子的电荷交换碰撞和弹性碰撞，以及精确依赖于离子能量的电荷交换和动量转移截面，模拟了源于氩气ＥＣＲ微波放电的氩离子向衬底输运的过程，得到与实验报道相符的模拟结果。     

BEHAVIOR OF Ar PLASMA FORMED IN A HIGH DENSITY PLASMA SOURCE-AN ECR REACTOR

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.     

MAGNETIC FIELD GRADIENT EFFECTS ON ION FLUX BEHAVIORS IN ECR PLASMA SOURCES

The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (V_z, V_r, V_θ). The simulation is focused on the magnetic field gradient effects on ion flux behaviors in electron cyclotron resonance plasma sources. The simulation results show that, when the magnetic field gradients increase, electron temperature, plasma density, ionization rate, and ion flux in Z-direction would decrease, while ion energy and plasma potential would increase.     

圆柱模型下电子回旋共振微波等离子体离子输运过程的数值研究

在圆柱模型下，采用Ｍｏｎｔｅ Ｃａｒｌｏ方法模拟了电子回旋共振（ＥＣＲ）微波等离子体源中离子离开放电室后历经中性区、鞘层区以及工件表面二次电子发射形成的虚拟阴极“屏蔽区”，最后被加负偏压的工件表面吸收的全过程．研究了鞘层边界处的衔接问题，得到了光滑自洽的电势分布曲线及工件表面离子的能量分布和角分布，同时讨论了磁场、气压以及二次电子发射对鞘势的影响． 关键词：     

NON-BOLTZMANN ENERGY LEVEL DISTRIBUTIONS OF ARGON ATOMS IN THE INDUCTIVELY COUPLED ARGON PLASMA

Based on collisional and radiative processes occurring in the inductively coupled plasma, non-Boltzmann energy level distributions of argon atoms are calculated under various conditions, by using ideal gas law and solving rate equations.     

离子迴旋共振加热对低杂波电流驱动的影响

离子迴旋共振频率(ICRF)波(ω=2Ω_D)和低杂(LH)波同时进入D-T聚变反应堆等离子体时,ICRF加热产生的高能D离子对LH波存在着较强的Landau阻尼吸收,影响了低杂波驱动电流(LHCD)的效率;提高LH波的频率,可降低加热离子对LH波的阻尼吸收。     

ECR微波等离子体离子输运的数值模拟

建立了ECR微波等离子体源离子输运的平板和圆柱模型,对离子历经的空间区域的输运过程进行了数值研究。采用Monte Carlo(M-C)方法模拟了存在外磁场情况下,离子离开开放电室后历经中性区、鞘层区、最后被加负偏压的工作表面吸收的全过程,考虑了离子与中性粒子的电荷交换碰撞玫弱性散性,统一处理了中性区和鞘层区电势的衔接,采用曲线拟合,电势自洽迭代方法把中性区和鞘层区衔接起来,得到了光滑自治的电势分布曲线和鞘层区不同位置处的速度分布、能量分布及角分布。     

氩气直流放电等离子体中三稳现象的半经典理论

本文从粒子间的电离、复合、激发和去激发等基本相互作用出发,解释了实验中观察到的各类三稳现象,并对更为复杂的现象如分岔、混沌等作了讨论。     

增长反场装置位形维持时间的实验研究

在预电离、空芯变压器功率续流、真空室放电清洗、碳化和蒸钛条件下，得到反场箍缩（ＲＦＰ）和超低安全因子（ＵＬＱ）的实验结果。等离子体性质改善，等离子体电流出现平顶，其幅值增加。杂质被有效控制，等离子体温度增高。     

聚变等离子体中的快离子压强

本文运用Fokker-Planck方程的慢化近似,考虑存在多种离子成份(包括杂质),假定它们具有共同的温度,我们得到了聚变产生的快离子压强的简单封闭形式表示式。表明在典型的工作温度下(～60keV),D-~3He等离子体中聚变产生的快离子压强约为本底热压强的20％,这与D-T等离子体工作在20keV时的比值几乎相同。因此,D-~3He和D-T在它们相应的预期工作温度下,它们各自的快离子压强对总压强的影响是类似的,然而在更高的温度下,这个比值将变得更大。     

衬底偏压对ECR等离子体鞘层和离子行为的影响

介绍了电子回旋共振微波放电等离子体中离子向衬底输运的蒙特卡罗模型,该模型考虑了精确依赖于离子能量的电荷交换和动量转移截面以及中性区与鞘层的衔接。     

壁稳氩弧等离子体光谱诊断

本文建立适当的氩弧等离子体柱模型的计算机进行Ａｒ（Ｉ）线的重构，修正了光谱测量中的线翼损失，傍线重叠及自吸现象产生的影响。通过实验。诊断出局部热力学平衡状态下各工作电流的氩弧等离子体温度。     

塞曼效应与边缘离子温度的光谱测量

通过理论推导得到了谱线实际宽度和塞曼展宽之间的关系。在磁感应强度分别为1、2、2．5和3T的情况下，用数值方法进行了求解，用得到的结果拟合出了校正因子随离子温度变化的经验公式和拟合曲线，结果表明：离子温度较低时，塞曼效应对谱线宽度的影响很大，温度较高时，塞曼效应对谱线宽度的影响可以忽略。     

DESTABILIZATION OF THE POLOIDAL ROTATION IN A MULTIPLE ION SPECIES TOKAMAK PLASMA

The destabilization of the poloidal rotation for the species of ions with the poloidally inhomogeneous sources or sinks is studied in multiple ion species tokamak plasmas. Based on the fluid equations, the evolution equation of the poloidal ion rotation speed is derived analytically. The magnitude of the inhomogeneous sources or sinks needed to destabilize the rotation is shown to be proportional to the ion density. It is suggested that the poloidal plasma rotation can be generated by destabilizing the rotation of the minority ions.     

环形等离子体平衡时维持场电流的计算

本文介绍一个计算轴对称任意截面环形等离子体平衡问题的方法。先选定等离子体边界和环电流分布,用有限元方法解平衡方程的边值问题。借助于虚壳原理,得到用平衡方程解表示的能够产生平衡时所需要的维持场的虚壳电流。计算虚壳电流在等离子体区的维持场,以它为根据,采用积分方程开拓,求等离子体区外某位形上的维持场电流分布。解决这个问题的主要困难是当磁场向外开拓时遇到了不适定问题。我们用奇异值分解方法解不适定的Fredholm第一类积分方程。这个方法能容易地找到稳定解,对解决这个平衡问题是简单有效的。我们以七种等离子体截面形状,三种电流分布为具体模型,在三种维持场电流分布位形上给出了维持场电流分布。还给出了维持场形态,维持场总电流与等离子体总电流的比较,并简单讨论了维持场对等离子体整体稳定性的影响。 关键词：     

ION FLUX BEHAVIOR IN HIGH DENSITY PLASMAS

The available electron cyclotron resonance plasma sources have been simulated in two-dimensional configuration space (Z, R) and three-dimensional velocity space (V_z, V_r, V_θ). Using a hybrid model, we treat ions as particles and electrons as fluid. The simulation is specified for plasma parameters of the available apparatus and is focused on the ion flux distributions. For a set of given operating conditions, the spatial distributions of electron temperature, plasma potential, plasma density, ionization rate and the contours map of distributions of particles in different volume cells in velocity space are obtained; statistics on ions that hit the bottom surface are also reported. The distributions of ion flux vectors on different cross-section planes in the plasma are given, and the phenomena of large radial diffusione of ions across magnetic force lines are also demonstrated. Finally, the influences of microwave power and neutral gas pressure on the distributions of ion flux vectors on ZR-plane, ion flux radial distributions and ion currents to all walls have been studied.     

人工神经网络方法预测八面体六卤化物MX~(n-)_6的ν_1和ν_2模的振动频率

利用ＡＮＮ－ＢＰ算法，采用逐步改变训练步长和两个惯性项的权重系数惯性调整策略，分别以单目标和双目标的三层网络对八面体六卤化物ＭＸｎ－６的八面体ν１和ν２模振动频率进行了预测，发现单、双目标下预测的结果相差不大，双目标时权重系数调整得较快，［ＭｏＦ６］２－，［ＢｉＦ６］－和［ＡｕＦ６］２－的振动频率文献值与网络的计算值或预测值相差偏大。     

用于大面积薄膜研究的微波等离子体装置

本文详细介绍了自行研制成的电子回旋共振微波等离子体装置的结构，性能和技术指标。并应用高斯计，法拉第筒和朗缪探针对装置的磁场位形发布和等离子的电流及密度进行了测量。