超大尺度线结构光传感器内外参数同时标定

为实现大型自由曲面工件的高精度快速三维测量,设计了一种由超大尺度结构光传感器和两轴导轨构成的三维测量系统。结构光传感器在两轴导轨的带动下获取图像,通过计算得到目标工件的三维坐标。为了将二维图像坐标转换到三维相机坐标,提出一种线结构光传感器内外参数同时标定的方法。该方法使用准一维靶标进行标定,通过获取运动机构平移过程中靶标与激光光条的图像,计算得到线结构光传感器内外参数。实验结果表明,该标定结果可靠,系统的测量误差在0.6mm以内,满足设计需求。标定过程操作简便,靶标制作简单,适合于工业现场标定使用。     

基于二维彩色靶标的结构光三维测量系统快速标定方法

系统标定是基于结构光投影的主动式光学三维面形测量的关键技术之一,同时也是一项复杂和耗时的工作。提出了一种基于RGB彩色模型的系统快速标定新方法。利用一个彩色的二维平面靶标和由投影仪投影的彩色标记特征图像实现了摄像机和投影仪的同时快速标定,对靶标的每个标定姿态位置只需要拍摄一幅图像即可得到该位置的特征参数。与传统方法相比,标定过程简单快捷,所需的数据量较少。利用该方法对一个结构光三维测量系统进行了现场标定,并测量了一个平面和一个半圆柱物体,实验结果中点到拟合平面的最大距离为0.8039mm,平均误差为0.1693mm。利用该系统恢复半圆柱物体的面形与传统标定方法的测量结果符合得很好。实验表明,由该方法获得的结果准确可用,且标定速度快。     

无需系统标定的三维视觉重建北大核心CSCD

为了解决传统三维重建需要依赖系统标定信息的问题,提出了一种基于相位图的不需要系统标定信息的三维视觉重建算法。首先使用结构光测量技术获得被测物体表面的相位图,再利用相位图的横向和纵向空间扭曲特性计算物体表面相对深度信息,最后实现被测物体的三维视觉重建。这种方法可以用在无法进行标定或无法获取标定信息的场合。实验结果表明,当被测物体表面结构简单时,这种方法的三维视觉重建效果较好。并通过对比传统三维重建结果验证了该方法的有效性。     

像散法对微位移和微振动的实时测量

提出了一种通过对光学像散量的检测来实现对物体的微位移和微振动进行实时非接触测量的新方法.该方法采用四象限光电探测器测量由于物体相对于光学系统焦点的偏离而引起的像散量,参照已标定的物体位置与像散量之间的关系,可计算出物体的实际位移或振幅.利用这套系统对压电陶瓷片的振动状态进行了测量,得到了振动的振幅及频率.测量结果表明,该系统的测量灵敏度优于17 nm.     

调制度测量轮廓术的系统标定

调制度测量轮廓术是一种采用垂直测量方式的三维面形测量方法,可以测量表面有剧烈变化区域的复杂物体。提出了一种基于调制度测量轮廓术测量系统的标定方法,其纵向标定是利用几个相互平行的标定平面建立与CCD像面各像素点对应的测量高度与实际高度之间的映射关系,并利用映射关系确定每一像素点对应的映射关系系数,然后建立映射关系系数查找表,存人测量系统中,完成纵向标定。首先分析了测量系统的误差来源,然后给出了标定方法和标定过程,最后给出了实测结果。结果表明,利用提出的系统标定方法可以有效消除调制度测量轮廓术测量系统误差,显著地提高了系统测量精度。     

基于单数码相机的三维视觉测量数据拼接方法

针对大型物体三维形貌视觉测量,提出了一种新的视觉测量三维数据拼接方法。以一台高分辨率数码相机作为全局测量设备,在测量过程中固定不动,并以数码相机坐标系作为全局坐标系。视觉传感器流动到不同位置对物体各子区域进行测量,获得局部坐标系下的三维数据。以一平面靶标为中介将视觉传感器在各位置的局部坐标系统一到全局坐标系下,从而将三维数据统一到全局坐标系下,完成三维拼接。该方法无需在被测物上贴标记,因此适用于任何材质的被测物,且消除了拼接累积误差。实验结果表明,该方法相对拼接误差为0.076%。以Venus石膏像为被测对象,视觉传感器对其三个局部区域进行测量,给出了局部测量结果及拼接结果。     

传送带物体线结构光三维扫描成像系统的位移标定方法研究

在对传送带上物体进行三维扫描成像过程中,位移标定方法的便捷性、准确性对于最终的成像精度和效率有非常重要的影响,但传统的位移标定方法需要已知位移平台或者传送带的运动速度或严格控制两次标定图片中标定板之间的精确位移,使得标定过程较为复杂。论文提出了一种专门用于传送带上物体测量的线结构光三维扫描成像系统的位移标定方法。只需要采集一系列标定板随传送带移动的位移标定图片,从中提取两张帧数间隔大于1的图片并记录对应的帧数,即可对单帧位移进行标定。介绍了该标定方法的基本原理和实现方法,搭建了线扫描单目成像系统,并对双阶梯型精度块进行了三维重建。实验结果表明,方法原理简单,操作便捷,测量速度更快且重建误差小于0.3mm,适用于以传送带作为主要运输工具的各个领域的实时三维测量。     

基于神经网络的视觉系统标定方法

为了解决摄像机标定存在的若干问题 ,根据立体视觉原理 ,提出了基于神经网络的双目视觉系统标定方法。通过对双目摄像机的有效视场分析 ,确定了一次测量面积 ,并把像对视差作为网络输入 ,建立空间点世界坐标与图像坐标非线性映射关系 ,使系统不经过复杂的摄像机内外参数标定 ,就能直接提取物体的三维信息 ,增加了系统的灵活性。实验证明 ,该方法有效可行     

单摄像机虚拟立体视觉测量技术研究

以双目立体视觉传感器三维测量模型为基础,提出了一种用于测量空间三维点坐标的低成本单摄像机模型。该模型利用光学成像,把单摄像机镜像为一对虚拟摄像机,在一个CCD像面上采集到同一物体存在视差的两幅图像,从而恢复空间点的三维信息。讨论了单摄像机传感器测量空间三维点坐标的基本原理,建立了单摄像机传感器的测量模型,克服了双摄像机系统中成本高、切换采集左右摄像机的图像使检测速度减慢等诸多缺陷,为空间三维点的精密测量提供了经济、快速、有效的测量途径。实验表明．传感器可实现约0．8％的相对测量精度．证明了本方案合理、有效。     

莫尔条纹技术的三维测角方法研究

针对传统莫尔条纹技术在测量物体偏转角度中不能对多维角度变化进行测量的问题,采用了一种分区间设计的组合光栅方法,并结合光学自准直成像方法构建了一种新的实验系统装置,利用该系统通过测量莫尔条纹的变化实现了对被测量物体偏转角度的三维测量,对合作光学反射镜的偏转角度测量精度优于1”,绕轴转动测量精度优于2”。     

基于人工神经网络的大量程光纤实时距离干涉测量仪

提出了一种基于人工神经网络的全光纤化大量程实时距离干涉测量仪.采用双正弦相位调制方法,即通过同时调制半导体激光器的波长和干涉仪的光程差实现外差测量.为了扩大干涉仪的测量范围和消除输出信号中的交叉敏感,采用人工神经网络进行信号处理,把两路经过初步解调的干涉信号作为输入样本,物体距离的实际值作为输出样本,对神经网络进行训练,以使其具有良好的推广能力.实验结果表明神经网络的使用不仅扩大了距离的测量范围而且提高了测量精度.     

Optical measurement network for large-scale and shell-like objects

An optical measurement method for large-scale and shell-like objects is proposed and is verified by experiments. The underlying concept is a model-based optical measurement network consisting of multinode three-dimensional (3D) sensors. To achieve this, a synthetic calibration method is presented to enable the measurement. A phase-aided active stereoscopy is thus applied to each node sensor for acquiring partial range images from different viewpoints. The multiple range images are then registered to obtain a 3D reconstructed model, which is compared with the computer-aided design (CAD) model to quantitatively reveal the differences between the two models. Experiment results are also presented to validate the proposed approach.     

基于CCD的石英玻璃管壁厚在线检测系统研究

提出了一种用于石英玻璃管壁厚非接触测量的光电检测技术,研制了石英玻璃管壁厚在线检测系统。在确定检测总体方案的基础上,进行了石英玻璃管厚度检测原理、发射光学系统、CCD器件选择和数据处理系统的研究。根据几何光学中反射与折射定律,利用三角关系建立了石英玻璃管壁厚和光束宽度之间的关系。对实验结果进行了误差分析,验证了方案的可行性,系统测量精度优于±0．01mm。系统调试和实际测量结果表明,研制的系统满足在线非接触测量要求。     

Rapid optical measurement of surface roughness of BiFeO<Subscript>3</Subscript> films for nonvolatile memory application

An optical inspection system for rapid surface roughness measurement of BiFeO₃ (BFO) thin films is developed. It is found that y = −121.45 x + 212.81 is a trend equation for characterizing the surface roughness of BFO thin films. The incident angle of 60◦ is a good candidate for measuring the surface roughness of BFO thin films. The maximum measurement error rate of the optical inspection system developed is less than 2.6%. The savings in inspection time of the surface roughness of BiFeO₃ thin films is up to 90%.     

光学全混洗网络互连函数的矩阵描述及其应用

采用自由空间光学互连技术实现的全混洗网络是数字光计算系统的基本互连网络,本文针对全混洗互连函数现有描述方法的不足,引入了描述全混洗互连函数的互连矩阵,并给出了全混洗网络互连矩阵的具体形式,为模拟或验证全混洗网络实验结果提供了理论依据。     

Optical measurement techniques for mobile and large-scale dimensional metrology

Dimensional inspection tasks are often carried out on conventional coordinate measuring machines (CMMs). These CMMs can differ in layout and size depending on the application area. They can have measurement volumes up to 100 m³. However, when measuring large objects it is not always possible to bring a large object to these conventional CMMs. That is why for these applications mobile measuring systems are an ideal solution. These systems often measure the dimensions through optical techniques, like interferometry and optical triangulation. After a short survey of common optical measurement techniques for mobile and large-scale measurements, this paper focuses on two industrial cases where different techniques were used to solve a measurement problem. The first case covers the measurement of a large iron casting with an optical LED-based triangulation system. It was possible to predict problems that would occur with the machining of the part, like unfinished surfaces after milling due to material shortage, and adapt the alignment of the part to prevent these problems. The second case covers the measurement of a double-decker train by means of photogrammetry, as an alternative for the currently used total station. Despite some specific drawbacks of photogrammetry systems it was possible to obtain the same accuracy and to reduce the overall inspection time significantly in comparison with the current situation.     

A novel optical diagnostic technique for analyzing the recrystallization characteristics of polycrystalline silicon thin films following frontside and backside excimer laser irradiation

Excimer laser annealing (ELA) is a widely used technique for producing polycrystalline silicon (poly-Si) thin films. An optical inspection system with simple optical arrangements for rapid measurement of recrystallization results of poly-Si thin films is developed in this study. The recrystallization results after both frontside ELA and backside ELA can be easily visible from the profile of peak power density distribution using the optical inspection system developed with an optimized moving velocity of 0.312 mm/s of the specimen. The method of backside ELA is suggested for batch production of low-temperature polycrystalline silicon thin-film transistors due to higher laser beam utilization efficiency and lower surface roughness of poly-Si films.     

基于三线结构光的相机平面标定方法研究

相机标定技术是结构光三维视觉测量的关键技术之一,结构光系统的相机标定的精度对三维测量的精度有很大影响。首先对三线结构光系统图的相机标定方法进行了分析,简单介绍了工业相机成像的几何模型及标定的原理;其次利用Harris角点检测方法提取特征点坐标,并选用了BP神经网络来校正工业相机的畸变模型,以提高标定算法的优化速度和标定精度;最后采用张正友的平面标定法对校正后的摄像机模型进行标定实验,由实验结果知,该方法具有一定的准确性和有效性,在一定误差范围内,基于神经网络畸变校正的张正友相机标定能够有效提高视觉检测的精度。     

Hybrid measurement system including optical heterodyne and laser microscopy functions using an acoustooptic deflector

The construction of a hybrid measurement system for measuring lateral and vertical dimensions and its applications to industrial inspection are described. This system uses an acoustooptic deflector, and includes optical heterodyne, confocal and non confocal laser scan microscopy functions in one and the same optical device. These functions are used individually or collectively depending on the purpose of the measurement. For example, by using the optical heterodyne and non confocal microscopy functions at the same time, lateral and vertical dimensions can be measured simultaneously.     

Surface roughness characterization of Al-doped zinc oxide thin films using rapid optical measurement

Transparent conductive oxide thin films have been widely investigated in photoelectric devices such as flat panel display (FPD) and solar cells. Al-doped zinc oxide (AZO) thin films have been widely employed in FPD. Measuring the surface roughness of AZO thin films is important before the manufacturing of photoelectric device using AZO thin films because surface roughness of AZO thin films will significantly affect the performance of photoelectric device. Traditional methods to measure surface roughness of AZO thin films are scanning electron microscopy and atomic force microscopy. The disadvantages of these approaches include long lead time and slow measurement speed. To solve this problem, an optical inspection system for rapid measurement of the surface roughness of AZO thin films is developed in this study. It is found that the incident angle of 60° is a good candidate to measure the surface roughness of AZO thin films. Based on the trend equation y=−3.6483x+2.1409, the surface roughness of AZO thin films (y) can be directly deduced from the peak power density (x) using the optical inspection system developed. The maximum measurement-error rate of the optical inspection system developed is less than 8.7%.The saving in inspection time of the surface roughness of AZO thin films is up to 83%.