Plasma parameter diagnosis using hydrogen emission spectra of a quartz-chamber 2.45 GHz ECRIS at Peking University

A quartz-chamber 2.45 GHz electron cyclotron resonance ion source(ECRIS) was designed for diagnostic purposes at Peking University [Patent Number: ZL 201110026605.4]. This ion source can produce a maximum 84 m A hydrogen ion beam at 50 k V with a duty factor of 10%. The root-mean-square(RMS) emittance of this beam is less than 0.12π mm mrad. In our initial work,the electron temperature and electron density inside the plasma chamber had been measured with the line intensity ratio of noble gases. Based on these results, the atomic and molecular emission spectra of hydrogen were applied to determine the dissociation degree of hydrogen and the vibrational temperature of hydrogen molecules in the ground state, respectively. Measurements were performed at gas pressures from 4×10~(-4) to 1×10~(-3) Pa and at input peak RF power ranging from 1000 to 1800 W. The dissociation degree of hydrogen in the range of 0.5%-10% and the vibrational temperature of hydrogen molecules in the ground state in the range of 3500-8500 K were obtained. The plasma processes inside this ECRIS chamber were discussed based on these results.     

SECRAL在18GHz频率下产生强流高电荷态离子束的初步结果

A Superconducting ECR ion source with Advanced design in Lanzhou (SECRAL) was successfully built to produce intense beams of highly charged ions for Heavy Ion Research Facility in Lanzhou (HIRFL).The ion source has been optimized to be operated at 28GHz for its maximum performance.The superconducting magnet confinement configuration of the ion source consists of three axial solenoid coils and six sextupole coils with a cold iron structure as field booster and clamping.For 28GHz operation,the magnet assembly can produce peak mirror fields on axis 3.6T at injection,2.2T at extraction and a radial sextupole field of 2.0T at plasma chamber wall.A unique feature of SECRAL is that the three axial solenoid coils are located inside of the sextupole bore in order to reduce the interaction forces between the sextupole coils and the solenoid coils. During the ongoing commissioning phase at 18GHz with a stainless steel chamber,tests with various gases and some metals have been conducted with microwave power less than 3.2kW and it turned out the performance is very promising.Some record ion beam intensities have been produced,for instance,810eμA of O~(7 ),505eμA of Xe~(20 ),306eμA of Xe~(27 ),21eμA of Xe~(34 ),2.4eμA of Xe~(38 ) and so on.To reach better results for highly charged ion beams,further modifications such as an aluminium chamber with better cooling,higher microwave power and a movable extraction system will be done,and also emittance measurements are being prepared.     

A preliminary study of a negative hydrogen PIG-type ion source for the compact cyclotron

A Penning ion gauge (PIG)-type ion source has been used for the generation of negative hydrogen ions (H^-) as the internal ion source of the compact cyclotron. The discharge characteristics of the ion source are systematically studied for hydrogen operation at different discharge currents and gas flow rates on the prototype cyclotron. The preliminary study results for the low DC voltage H^- extraction measurements are presented in this paper. The H^- beam current is measured by the order of magnitude from several tens to hundreds of microamperes at different parameter conditions. The discussion and analysis for the experimental results are good for improving the design and working stability of the ion source.     

A miniaturized 2.45 GHz ECR ion source at Peking University

A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source, which has the ability of producing a tens-m A H+beam, has been built and tested at Peking University(PKU). Its plasma chamber dimension is Φ30 mm×40 mm and the whole size of the ion source is Φ180 mm×130 mm. This source has a unique structure with the whole source body embedded into the extraction system. It can be operated in both continuous wave(CW) mode and pulse mode. In the CW mode, more than 20 m A hydrogen ion beam at 40 k V can be obtained with the microwave power of 180 W and about 1 m A hydrogen ion beam is produced with a microwave power of 10 W. In the pulse mode, more than50 m A hydrogen ion beam with a duty factor of 10% can be extracted when the peak microwave power is 1800 W.     

Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics

A high-density RF ion source is an essential part of a neutral beam injector. In this study, the authors attempt to retrofit an original regular RF ion source reactor by inserting a thin dielectric tube through the symmetric axis of the discharge chamber. With the aid of this inner tube, the reactor is capable of generating a radial magnetic field instead of the original transverse magnetic field, which solves the E × B drift problem in the current RF ion source structure. To study the disturbance of the dielectric tube, a fluid model is introduced to study the plasma parameters with or without the internal dielectric tube, based on the inductively coupled plasma(ICP) reactor. The simulation results show that while introducing the internal dielectric tube into the ICP reactor, both the plasma density and plasma potential have minor influence during the discharge process, and there is good uniformity at the extraction region. The influence of the control parameters reveals that the plasma densities at the extraction region decrease first and subsequently slow down while enhancing the diffusion region.     

Simulation of electron behavior in PIG ion source for 9 MeV cyclotron

In this paper, we focus on a PIG source for producing intense H-ions inside a 9 MeV cyclotron. The properties of the PIG ion source were simulated for a variety of electric field distributions and magnetic field strengths using a CST particle studio. After analyzing the secondary electron emission (SEE) as a function of both magnetic and electric field strengths, we found that for the modeled PIG geometry, a magnetic field strength of 0.2 T provided the best results in terms of the number of secondary electrons. Furthermore, at 0.2 T, the number of secondary electrons proved to be greatest regardless of the cathode potential. Also, the modified PIG ion source with quartz insulation tubes was tested in a KIRAMS-13 cyclotron by varying the gas flow rate and arc current, respectively. The capacity of the designed ion source was also demonstrated by producing plasma inside the constructed 9 MeV cyclotron. As a result, the ion source is verified as being capable of producing an intense H^- beam and high ion beam current for the desired 9 MeV cyclotron. The simulation results provide experimental constraints for optimizing the strength of the plasma and final ion beam current at a target inside a cyclotron.     

Guiding of Highly Charged Ions through PC Nanocapillaries

Angular distribution and current dependence of the transmitted ion fraction are investigated for 40keV Xe^7＋ bombarding on polycarbonate （PC） nanocapillaries. By measuring the angular distribution of the transmitted ion fraction, a strong guiding effect is found in PC nanocapillaries. Furthermore, with increase of the incident current, a turning point of the transmitted ion fraction is found, which is explained qualitatively by the discharge capacity of the nanocapillaries.     

一台2.45GHz强流中子源

A 2.45GHz microwave-driven ion source is being used to provide 40mA of deuterium ion beam (peak current) for an RFQ accelerator as part of a neutron source system.We have also designed a 60kV electrostatic LEBT using computer simulations.In our experiment,we measured the hydrogen and deuterium ion beam currents as functions of discharge power,gas flow,and magnetic field strength.The required beam current was obtained using leas than 700W of net microwave power with a gas flow of less than 1.5sccm.From the rise time data,it was determined that in order to obtain a high percentage of atomic ions in the beam, the beam extraction should start after 1ms of switching on the microwave power.At steady state,the proton fraction was above 90%.     

Thermal analysis of the CSNS H－ ion source

There are two cooling systems to maintain the thermal stability of the CSNS H^- ion source during its operation： Air-cooling in the source body of the discharging chamber and water-cooling in the flange on which the discharging chamber is installed. The optimal cooling parameters to ensure the operation of the H^- ion source are determined through a thermal analysis. In addition, a transient analysis is also performed to know exactly the transient temperature variation during the whole 40 ms period of the pulsed mode operation of the ion source.     

微波技术对ECR离子源性能的影响

The coupling between microwave generators and ECR ion sources(ECRIS)is a key point for the design of the new generation ECRIS as well as for the optimization of the existing ones.The electromagnetic characterization of the plasma chamber where the ionization phenomena take place is a fundamental starting point to understand and model such process.In such effort the complex structures of the injection and extraction flanges together with the large dimensions of the chamber and the high frequencies that are typically used make impossible an analytical solution and also create great difficulties in the modelling even with state-of- art electromagnetic simulators(CST,HFSS),In the following paper the results of some numerical calculations for the optimum plasma chamber excitation will be presented along with the experimental measurements carried out with the SERSE ion source at INFN-LNS.A campaign of measurements is also planned to further investigate the microwave coupling and the mode excitation,which determines the efficiency of the ECR plasma heating.     

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开发了氢气甚高频(60MHz)容性耦合放电的PIC/MC模型.在模型中考虑了带电粒子(e,H+,H2+,H3+)与H2的21种碰撞反应过程,模拟了氢气甚高频放电射频电场和电势分布以及电子和氢离子(H+,H2+,H3+)粒子密度和平均能量分布,并与频率为13.56MHz的放电结果进行了比较.结果表明,相对于频率13.56MHz的放电,氢气甚高频放电等离子体电势增高,导致两电极附近的电场增强;另外,两鞘层厚度变窄并且电子和H3+离子平均能量减小,其总密度却增加.H3+离子为氢气甚高频放电空间的主要离子,H2+离子密度比H3+离子小约2～3个数量级.     

潘宁源放电的全三维电磁粒子模拟/蒙特卡罗碰撞数值算法研究

深入研究潘宁放电的物理机制, 研制了全三维高品质算法粒子模拟软件(PIC), 设计并添加了相应物理情景的蒙特卡罗碰撞模块(MCC), 并对电子、氢分子离子(H₂⁺)、氢正离子(H⁺)、氢三正离子(H₃⁺)同时进行了跟踪, 成功研制了全三维电磁PIC/MCC数值算法. 结合国内研究较热的潘宁放电模型, 对该算法进行模拟验证. 模拟结果显示: 采用有效的滤波算法能抑制电磁数值噪声, 电子能量呈麦克斯韦分布, 由于电子的径向漂移和加速导致离子源顶端H₂⁺产量较大. 关键词： 潘宁离子源 高品质算法 粒子模拟/蒙特卡罗     

N_2-H_2容性耦合等离子体电非对称效应的particle-in-cell/Monte Carlo模拟

H_2-N_2混合气体电容性耦合射频放电在有机低介电系数材料刻蚀中具潜在研究意义.采用paxticle-incell/Monte Carlo模型模拟了双频(13.56 MHz/27.12 MHz)电压源分别接在结构对称的两个电极上的H_2-N_2容性耦合等离子体特征,研究了其电非对称效应.模拟结果表明,通过调节两谐波间的相位角θ,可以改变其电场、等离子体密度、离子流密度的轴向分布及离子轰击电极的能量分布.当相位角θ为0°时,低频电极(晶片)附近主要离子(H_3~+)的密度最小,离子(H_3~+,H_2~+,H~+)轰击低频电极的流密度及平均能量最高;当θ从0°变化90°时,低频电极的自偏压从-103V到106V近似线性增加,轰击电极的离子流密度变化约±18%,H~+离子轰击低频电极的最大能量约减小2.5倍,轰击电极的平均能量约变化2倍,表明氢离子能量和离子流几乎能独立控制.     

圆筒内氢等离子体非定常化学反应羽流场DSMC分析

利用直接模拟Monte Carlo方法研究圆筒侧壁注入氢等离子体羽流场在8×10^-6s内的非定常流动特性.根据Bird的化学反应模型考虑离解-复合反应模型和电荷转移反应模型.在流场中注入H₂、H、金属原子X、H₂⁺和H⁺五种组分,研究离解-复合反应对流场中粒子分布和密度的影响,结果表明离解-复合反应使H₂数密度降低,H数密度增加,说明在流场中H₂的离解反应速率大于H的复合反应速率.加入电荷转移反应后H₂⁺数密度降低,H⁺数密度增加,对其他组分数密度没有显著影响.     

Computer simulation of a carbon-deposition plasma in CH4

A transport and reaction model of a low-pressure, high-frequency (13.56 MHz) CH₄ plasma used for diamondlike carbon (a-C:H) deposition was developed. The model includes reactions among four molecular species (CH₄, C₂ H₆, C₂H₄, and H₂), five radicals and atom (CH₃, CH₂, CH, C₂H₅, and H), and four ions (CH₄⁺ , CH₃⁺, CH₅⁺, and C ₂H₅⁺). It also accounts for the influence of the sticking coefficient of species at the walls. Calculated values of the dissociation degree for several flow rates are in good agreement with experimental measurements made by quadrupole mass spectroscopy. A simple surface-model based on the hydrogen coverage of surface and ion flux and energy at the substrate surface was established. This model permitted the calculation of the deposition rate on the powered electrode as a function of the power applied to this electrode. Good agreement between experimental and calculated growth rates was obtained when CH₃, C₂H₅, and CH₂ were assumed to participate in film formation, and when hydrogen removal by ion bombardment with variable energy as a function of the power was included in the model     

等离子体放电活化生理盐水杀菌应用研究

等离子体中含有多种活性物种可实现高效安全杀菌,活性物种与生物体相互作用多在水环境下进行.因此等离子体与水的相互作用过程研究掀起了等离子体生物杀菌的新浪潮.本文采用水中阵列放电产生等离子体活化生理盐水,利用所产生的活化生理盐水对大肠杆菌开展了杀菌消毒研究,当等离子体放电时间达到120 s时产生的活化生理盐水与大肠杆菌混合后可使大肠杆菌的存活效率降至0.001%.通过紫外-可见吸收光谱测量及化学氧化还原沉降滴定表明放电电荷及激发态氧化性活性物种与水溶液相互作用,转化为活化生理盐水中长寿命相对稳定存在的H_2O_2和O_3等氧化性物种,与大肠杆菌作用并主导主要杀菌效果.     

大气压甲烷针-板放电等离子体中粒子密度和反应路径的数值模拟

甲烷针-板放电与重油加氢耦合形成甲烷转化重油加氢,可实现重油高效加氢并增产高附加值低碳烯烃,有实践应用前景和科学研究意义.建立二维流体模型,对大气压甲烷针-板放电等离子体进行数值模拟,得到电场强度、电子温度和粒子密度的空间与轴向分布,总结反应产额并提炼生成各种带电和中性粒子的关键路径.模拟结果表明,CH_3~+和CH_4~+密度与电场强度和电子温度的轴向演化接近且密切相关;CH_5~+和C_2H_5~+密度沿轴向先增大后减小;CH_3与H密度的空间和轴向分布几乎相同;CH_2,C_2H_4与C_2H_5的粒子密度分布在靠近阴极的区域内明显不同而在正柱区内较为相像;电子与CH_4发生电子碰撞电离生成的CH_3~+和CH_4~+,CH_3~+和CH_4~+分别与CH_4发生分子碰撞解离生成C_2H_5~+和CH_5~+;电子与CH_4间的电子碰撞分解是生成CH_3,CH_2,CH和H的主导反应;CH_2与CH_4和电子与C_2H_4发生的反应分别是生成C_2H_4和C_2H_2的关键路径;电子与CH_4间的电子碰撞分解反应和CH_2与CH_4发生的反应的产额各占H_2总产额的52.15%和47.85%.     

Surface hydrogen incorporation and profile broadening caused bysheath expansion in hydrogen plasma immersion ion implantation

Hydrogen plasma immersion ion implantation (PIII) in conjunction with ion-cut is an efficient and economical technique to synthesize silicon-on-insulator (SOI) substrates. Unlike beam-line ion implantation, the PIII hydrogen profile usually exhibits multiple peaks because of different implanted species, such as H⁺, H₂ ⁺, and H₃⁺. In addition, a certain amount of adsorbed hydrogen exists near the surface and the hydrogen in-depth distribution is broader than that of a beam-line implant also as a result of a low-energy component. For the ion-cut process, the broadened hydrogen profile and surface hydrogen can decrease the efficiency of the blistering process, induce uneven exfoliation, and degrade the interfacial quality of the bonded wafer. Hydrogen can adsorb on the wafer surface during the “off-cycle” of the sample voltage pulse and consequently be driven in by ion mixing or diffusion. In order to reduce surface hydrogen incorporation, the implantation time must be short, and this requires an efficient cooling mechanism on the sample stage because a high ion current is needed to implant a high dose in a short time (less than 5 min). Another mechanism of profile broadening is that the expanding sheath creates low-energy ions during PIII. Our experimental and simulation data disclose that profile broadening is less severe for a shorter sample voltage pulsewidth and that good blistering characteristics can be achieved using a long pulse, in spite of a relatively long implantation time of 1 h     

A short history of heavy ion beam probing

The author describes some aspects of research on controlled thermonuclear fusion as an energy source, starting in the late 1950s. There was a need for new diagnostic techniques for studying high temperature plasmas. The author proposed a diagnostic for measuring plasma density by probing a deuterium plasma with a deuterium beam and measuring the proton production from the D-D nuclear reaction. By the mid 1960s, it was possible to do so. After carrying out a D-D measurement, the author suggested switching over to an H₂⁺ beam and looking for an H⁺ signal. The H+ was loud and clear and that was the last of the nuclear measurements. One of the first things done using the molecular break-up of the H₂⁺ to measure the density of the hollow cathode arc plasma was a study of a coherent instability. The frequency response wasn't sufficient to measure the instability directly, so a Langmuir probe was used to detect the instability. The Langmuir probe gave a signal from a fixed spatial location but the beam probe signal was swept across the plasma giving 2D spatial resolution. This was the first detailed mapping of a plasma instability. Attempts to apply the ion beam probe to measuring the plasma current density in the ST Tokamak are described. Heavy ion beam probing measurements using hollow cathode arcs as target plasmas made it possible to measure T_e at low temperatures and to identify space potential fluctuations. Installation of a beam probe on the Laser Initiated Target Experiment are described, along with work on the ELMO Bumpy Torus, the VERSATOR Tokamak, TMX, TEXT, ISX-B, the Ergodic Magnetic Limiter and ATF