Epitaxial Properties of Co-Doped ZnO Thin Films Grown by Plasma Assisted Molecular Beam Epitaxy

High quality Co-doped ZnO thin films are grown on single crystalline Al2O3（0001） and ZnO（0001） substrates by oxygen plasma assisted molecular beam epitaxy at a relatively lower substrate temperature of 450℃. The epitaxial conditions are examined with in-situ reflection high energy electron diffraction （RHEED） and ex-situ high resolution x-ray diffraction （HRXRD）. The epitaxial thin films are single crystal at film thickness smaller than 500nm and nominal concentration of Co dopant up to 20%. It is indicated that the Co cation is incorporated into the ZnO matrix as Co^2＋ substituting Zn^2＋ ions. Atomic force microscopy shows smooth surfaces with rms roughness of 1.9 nm. Room-temperature magnetization measurements reveal that the Co-doped ZnO thin films are ferromagnetic with Curie temperatures Tc above room temperature.     

Epitaxial Growth and Magnetic Properties of NiMnAs Films on GaAs Substrates

Single-phase Ni_(0.92)Mn_(1.08) As films with strained C_(1b) symmetry are grown on GaAs(001) substrates. In addition,a preferred epitaxial configuration of(110)-orientated Ni_(0.92)Mn_(1.08) As on(001)-orientated GaAs is revealed by synchrotron radiation measurement. The magnetic properties of the films are found to be significantly influenced by the growth temperature and the optimized growth temperature is determined to be ~370℃. According to the results of x-ray absorption spectroscopy, these phenomena can be attributed to the variation of the local electronic structure of the Mn atoms. Our work provides useful information for the further investigations of NiMnAs, which is a theoretically predicted half-metal.     

On the Possible Magnetic Properties of Ultrathin Mn2GaC Films on Al2O3 Substrates

JETP Letters - The possibility of growth of thin Mn2GaC MAX phase films on Al2O3 substrates with various orientations and their magnetic properties have been studied. The most favorable orientation...     

氮化钛薄膜的光学性能分析

利用磁控溅射法，在不同的工艺条件下制备氮化钛薄膜。详细分析了不同工艺条件下薄膜的光谱选择特性以及相应的光学常数，通过俄歇电子能谱对薄膜的不同深度的元素成分进行了分析，由原子力显微镜测量并处理得到氮化钛薄膜的表面形貌图。结果表明，氮化钛薄膜的光学性能严格依赖于氮和钛原子数比，符合化学计量比的TiN薄膜具有良好的光谱选择性。基底加负偏压溅射可进一步改善薄膜的性能。     

Optical Properties of a Nanocrystalline Co-Doped TiO2 after Various Treatments

Physics of the Solid State - The absorption spectra of cobalt-doped anatase TiO2 nanopowders in the infrared and visible ranges have been studied after various oxidative and reductive treatments....     

Structure Dependence of Magnetic Properties for Annealed GaMnN Films Grown by MOCVD

GaMnN/GaN multilayers and conventional GaMnN single layers are grown by metal-organic chemical vapor deposition. Both kinds of samples show room-temperature ferromagnetism. After thermal annealing, the sample with GaMnN/GaN multilayer structure displays a larger coercivity and better thermal stability compared to the GaMnN single layer. The annealing effects on Vca related defects are observed from photoluminescenee measurements. Moreover, a different magnetic behavior is also found in the annealed GaMnN films grown on different （n-type GaN and p-type GaN） templates. These kinds of structure-dependent magnetic behaviors indicate that defects or carriers transformation introduced during annealing may have important effects on the electronic structure of Mn ions and on the ferromagnetism. Our work may be helpful for further understanding the origin of ferromagnetism in GaN-based diluted magnetic semiconductors.     

单晶硅上化学气相沉积铜薄膜的机理研究

在自行设计、建立的MOCVD系统上,以Cu(hfac)2为反应前驱物在单晶硅上进行铜薄膜的化学气相沉积,并用AFM、SEM对铜核的成长机理进行了研究．结果表明,反应初期,单晶硅上铜核的成长为岛状,反应后期为先层状后岛状．利用XPS对铜薄膜成长的反应机理进行了探讨,由薄膜的Cu2p、Ols、Fls、Si2p谱可推论出,XPS谱中所出现的C=O、OH及CF3／CF2可能为Cu(hfac),当Cu(hfac)2在高温下分解成Cu(hfac)及hfac后,H2还原表面的hfac生成OH基,反应进行一段时间,OH基浓度大到一定的程度后,与Cu(hfac)2热裂解产生的hfac作用生成HO-hfac并脱附,使表面的铜的氧化物被还原以及发生Cu(hfac)2与H2的氧化还原反应．     

MOCVD生长GaN:Si单晶膜的研究

获得高质量的ｎ型ＧａＮ单晶膜是制作ＧａＮ基光电子器件的关键之一。采用立式ＭＯＣＶＤ系统生长ＧａＮ：Ｓｉ单晶膜,通过优化生长工艺,获得了电子载流于浓度高达２ ×１０１９ｃｍ－３,迁移率达１２０ｃｍ２／Ｖ·ｓ的ｎ型ＧａＮ：Ｓｉ单晶膜;并有效地抑制了ＧａＮ中由深能级引起的黄带发射,大大提高带边发光强度。研究结果还表明：随着Ｓ掺杂量的增大,ＧａＮ：Ｓｉ单晶膜的电子载流于浓度增加,迁移率下降,Ｘ光双晶衍射峰半高宽增大。首次报道了随掺Ｓ量增大,ＧａＮ：Ｓｉ单晶膜的生长速率显著下降的现象。     

Si基沉积ZnO薄膜的光谱特性

利用同步辐射真空紫外光研究了Si基沉积ZnO薄膜的发射光谱、激发光谱及其湿度依赖。首次观测到高于ZnO禁带宽度的发射带（290nm)，并初步指定其来源。     

Influence of CO Admolecules on the Electronic State of Ytterbium Nanofilms Grown on Silicon Substrates

Technical Physics - The adsorption of carbon monoxide (CO) molecules on ytterbium nanofilms from 16 to 200 monolayers thick (61–76 nm) has been studied. The films have been grown on...     

基底材料对磁控共溅射Al-Cu-Fe薄膜特性的影响

 采用磁控共溅射工艺来制备Al-Cu-Fe薄膜,选用抛光状态的纯Al、纯Cu和不同粗糙度的不锈钢基作为基底材料。通过原子力显微镜分析薄膜的表面形貌,利用扫描电镜能谱仪分析薄膜的元素含量;通过MTS纳米力学综合测试系统分析薄膜的结合强度和摩擦因数。分析结果表明：不锈钢作为基底材料的薄膜与基体的结合强度最大,其次为纯铝和纯铜。纯铜基底薄膜的摩擦因数最大,达到0.17,其余两种薄膜的摩擦因数均不大于0.03。而薄膜表面形貌与基底材料的原始形貌有直接的联系,基底原始粗糙度越小,薄膜的表面组织也越细;基底原始粗糙度越大,薄膜表面形成的晶粒的团聚越明显。     

Si衬底上生长的GaAs薄膜中深中心发光的温度效应

测量了Ｓｉ衬底上生长的ＧａＡｓ薄膜中与深中心有关的发光带的变温光谱，研究了０．７８ｅＶ、０．８４ｅＶ和０．９３ｅＶ发光带的峰值位置和发光强度随着温度的变化关系，发现它们的发光强度随温度的变化服从描述非晶半导体中局域态发光的公式。最后讨论了这些发光带的来源。     

Opto-Electronic Properties of MBE-Grown ZnSSe Thin Films on ITO Substrates

The opto-electronic properties of molecular-beam-epitaxy (MBE)-grown ZnSSe thin films on indium-tin-oxide (ITO) glass substrates were investigated in this work. Ultraviolet (UV) photoresponsivity as high as 0.01 A/W and three orders of visible rejection power were demonstrated. The results of d.c. resistivity measurements revealed that the resistivity of the ZnSSe thin films decreased as the crystal size increases and reaches a value of 4.3 × 10¹¹ Ω cm for a thin film grown at the optimized substrate temperature of 290°C. The results of a.c. impedance measurements performed in the frequency range of 40 to 4000 Hz further indicated that the impedance of this alloy thin film can provide a good match with the liquid crystal layer of a liquid crystal light valve for UV imaging applications.     

Thermal Hysteresis in La2/3 Ca1/3 MnO3 Films Grown on Tilted SrTiO3 Substrates and Influence of External Magnetic Field

Thermal hysteresis in the resistivity of La2/3 Cu1/3MnO3 thin films grown on tilted SrTiO3 substrates is simulated by using the random network model on the basis of mixed-phase percolation between metallic and insulating domains, The metallic-insulating transition temperatures during the warming process are lower than those during the cooling process due to the difference in fraction of metallic domains between warming and cooling process. With an external magnetic field, the metallic-insulating transition temperatures shift to a higher value and the resistivities are reduced. The excellent agreement between the simulation and the experimental data further verifies that phase separation plays a crucial role in the transport process of La2/3Ca1/3MnO3 thin films.     

Synthesis and Photoluminescence Properties of GaAs Nanowires Grown on Fused Quartz Substrates

GaAs nanowires are synthesized on fused quartz substrates by using molecular beam epitaxy via a vapor-liquidsolid mechanism with gold as the catalyst. High resolution-transmission electron microscopy is used to probe crystal quality and growth direction. Miero-photolumineseenee measurements are carried out to examine the optical properties of GaAs NWs. The low-temperature photoluminescenee （PL） emission of nanowires （NWs） has a peak at 1.513eV, 2meV lower than the zinc blende GaAs free exciton energy. The temperature-dependent band gap of NWs is seen to be somewhat different from that observed in bulk OaAs, and the PL rapidly quenches above 150K, with an activation energy of 6.3meV reflecting the presence of the longitudinal twins＇ structure.     

Hall Mobility of As‐Grown Cu2O Thin Films Obtained Via Electrodeposition on Patterned Au Substrates

Hall measurement of an electrodeposited Cu₂O film is rendered difficult as the bilayer structure of semiconductor on top of a conductive substrate obviates the measurement. Here, we propose the use of a patterned Au on glass substrate in line/space configuration for the Hall measurement of electrodeposited Cu₂O. A continuous, (111) oriented Cu₂O film was electrodeposited on 8 μm/2 μm Au‐line/space on glass substrate and Hall measurement was performed. The room temperature Hall measurement of the Cu₂O film on the patterned substrate indicates p‐type conduction with a hole concentration of 2.2 × 10¹⁷ cm^?3 and mobility of 4.7 × 10^?3 cm² V^?1 s^?1. Additionally, the temperature dependent resistivity exhibits a negative slope that is characteristic of a semiconductor. Therefore, the measured electrical characteristics can be attributed to the electrodeposited Cu₂O semiconductor film rather than the conductive substrate. This method can be applied for the Hall measurement of any other electrodeposited semiconductor by optimizing the line/space geometry of the conductive substrate.     

PLD法制备钴掺杂的氧化锌薄膜及其生长形貌和光学性能

用脉冲激光沉积(PLD)方法,在蓝宝石(0001)衬底上,制备了高度c轴取向的Zn1-xCoxO(x=0,0.02,0.05,0.07,0.1)薄膜。X射线衍射(XRD)分析表明,当钴掺杂量≤10mol%时没有出现其他杂峰,即没有出现分相。XPS分析显示Co离子在薄膜中以+2价的形式存在。进一步验证Co2+离子进入ZnO的晶格,对掺钴浓度不同的样品进行了UV-Vis吸收光谱测量。从UV-Vis吸收光谱可以看出随着掺杂浓度的增加,带隙逐渐变窄,证明Co2+取代了Zn2+而进入了ZnO晶格中。从原子力显微镜(AFM)形貌表征可以看出,随着钴掺杂量的提高,ZnO薄膜的表面起伏度有所减小,而且生长晶粒细化,从生长动力学的角度对生长形貌的改善进行了解释。     

Highly Strained Si Films with Ultra-low Dislocation Density Grown on Virtual Substrates of Thin Thickness

By using compositionally graded SiGe films as virtual substrates, tensile strained Si films with the strain of 1.5% and the threading dislocation density less than 1.0 × 10^5 cm-2 are successfully grown in micron size windows by molecular beam epitaxy （MBE）. The thickness of the virtual substrates was only 33Onto. On the surface of the s-Si films no cross-hatched lines resulting from misfit dislocations could be observed. We attribute these results to the edge-induced strain relaxation of the epitaxial films in windows, and the patterned virtual substrates with compositionally graded SiGe films.     

Polarization Induced High A1 Composition A1GaN p-n Junction Grown on Silicon Substrates

Wide bandgap Alx Ga1-x N （x = 0.7-1） p-n junction is realized on a silicon substrate through polarization induced doping. Polarization induced positive charge field is produced by linearly grading from A1N to Al0.7Ga0.3N, and negative charge field is generated by an inverted grading from A10.7Ga0.3N to A1N. The polarization charge field induced hole density is on the order of 10^18 cm^-3 in the graded AIxGaI-xN：Be （x = 0.7-1） p-n junction. Polarization doping provides a feasible way to mass produce lll-nitride devices on silicon substrates.