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1.
利用直流磁控溅射法,在相同实验条件下成功沉积出了钛掺杂氧化锌(TZO)透明导电薄膜和钛铝共掺杂氧化锌(TAZO)透明导电薄膜,并对两种薄膜的结构、应力和光电性能进行了对比研究.结果表明:两种薄膜均为具有c轴择优取向的六角纤锌矿结构多晶薄膜;TAZO薄膜的导电性能优于TZO薄膜,100 W溅射功率下制备的TZO薄膜的电阻率具有其最小值5.17×10-4 Ω·cm,而相同功率下TAZO薄膜的电阻率为3.88×10-4 Ω·cm;同时TAZO薄膜的光学性能也优于TZO薄膜,所有TAZO薄膜样品的可见光透过率均大于91;,而TZO薄膜的可见光透过率均大于85;.  相似文献   

2.
以不同钛掺杂含量的氧化锌陶瓷靶作为溅射源材料,采用射频磁控溅射工艺在玻璃基片上沉积了Ti掺ZnO(TZO)透明导电薄膜,通过XRD、XPS、分光光度计和霍尔效应测试系统,研究了钛掺杂含量对TZO薄膜微观结构和光电特性的影响.结果表明:所有TZO薄膜均为六角纤锌矿结构,并且具有(002)择优取向,钛掺杂含量对薄膜性能具有明显的影响.当钛掺杂含量为3wt;时,TZO薄膜的结晶质量最好、可见光平均透过率最高、电阻率最低、品质因数最大(748.15 S/cm),具有最佳的光电综合性能.TZO薄膜的光学带隙随钛掺杂含量增加而单调增大.  相似文献   

3.
溅射压强对低阻高透过率掺钛氧化锌透明导电薄膜的影响   总被引:3,自引:2,他引:1  
利用直流磁控溅射法在室温水冷玻璃衬底上制备出了高质量的掺钛氧化锌透明导电薄膜(ZnO: Ti).研究了溅射压强对ZnO: Ti薄膜结构、形貌和光电性能的影响.研究结果表明,溅射压强对ZnO: Ti 薄膜的结构和电阻率有显著影响.X射线衍射(XRD)表明,ZnO: Ti 薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向.在溅射压强为5.0 Pa时,实验获得的ZnO: Ti薄膜电阻率最小值为1.084 ×10~(-4) Ω· cm.实验制备的ZnO: Ti 薄膜具有良好的附着性能,可见光区平均透过率超过91;.ZnO: Ti薄膜可以用作薄膜太阳能电池和液晶显示器的透明电极.  相似文献   

4.
衬底温度是磁控溅射法制备氧化锌薄膜中一个非常重要的工艺指标,探索衬底温度对氧化锌薄膜微结构及光学性能的影响对制备环保型高质量氧化锌紫外屏蔽材料具有重要意义。以质量分数99.99%的氧化锌陶瓷靶为溅射源,利用射频磁控溅射技术在石英衬底上沉积了氧化锌紫外屏蔽薄膜,通过X射线衍射仪、薄膜测厚仪、紫外-可见分光光度计、荧光分光光度计进行测试和表征,研究了不同衬底温度对ZnO薄膜微结构及光学性能的影响。实验结果表明:制备所得薄膜均为六角纤锌矿结构,具有沿(002)晶面择优取向生长的特点,其晶格常数、晶粒尺寸、透过率、光学能隙、可见荧光、结晶质量等都与衬底温度密切相关,当衬底温度为250 ℃,溅射功率160 W,氩气压强0.5 Pa,氩气流速8.3 mL/min,沉积时间60 min时,所得氧化锌薄膜样品取向性最好,晶粒尺寸最大,薄膜结构致密,具有良好的光学性能和结晶质量。  相似文献   

5.
采用磁控溅射结合酸腐蚀法制备掺铝氧化锌透明导电氧化物薄膜,研究关键溅射工艺参数对AZO薄膜腐蚀后性能的影响.研究发现,在较低沉积温度和较大溅射压强条件下,样品腐蚀后可以形成粗糙度和雾度更大的表面形貌,有利于提高电池性能;而溅射功率增加,虽然能提升样品腐蚀后的粗糙度,但雾度的增加则呈现饱和趋势.将具有优良光电性能、不同雾度的AZO薄膜作为前电极制备非晶/微晶硅薄膜双结太阳能电池,发现雾度越大,电池的短路电流密度越大,特别是底电池电流密度越大,从而电池的光电转换效率也获得提高.这一发现有助于通过优化溅射工艺参数来改进AZO薄膜表面形貌和电池性能.  相似文献   

6.
张腾  钟志有  汪浩 《人工晶体学报》2013,42(7):1353-1359
以ZnO∶Ga2O3∶TiO2(97wt;∶1.5wt;∶1.5wt;)陶瓷靶作为溅射源,采用射频磁控溅射技术在玻璃衬底上制备了钛镓共掺杂氧化锌(TGZO)透明导电薄膜,通过X射线衍射仪、四探针仪和分光光度计测试表征,研究了溅射功率对TGZO薄膜晶体结构、电学性质和光学性能的影响.结果表明:所有TGZO薄膜均为六角纤锌矿结构,并且具有(002)择优取向,溅射功率对薄膜性能具有明显的影响.当溅射功率为200 W时,TGZO薄膜的结晶质量最好、电阻率最低、平均可见光透射率最高,品质因数最大(1.22×10-2 Ω-1),其光电综合性能最佳.另外,通过光谱拟合方法研究了溅射功率对TGZO薄膜折射率和消光系数的影响,并利用Tauc关系式计算了样品的光学能隙.  相似文献   

7.
溅射功率对直流磁控溅射法沉积TGZO薄膜性能的影响   总被引:2,自引:0,他引:2  
利用直流磁控溅射法在室温水冷玻璃衬底上制备出了高质量的钛镓共掺杂氧化锌(TGZO)透明导电薄膜.研究了溅射功率对TGZO薄膜结构、形貌和光电性能的影响.研究结果表明:溅射功率对TGZO薄膜的结构和电阻率有重要影响.X射线衍射分析表明,TGZO 薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向.在溅射功率为120 W时,实验获得的TGZO薄膜的方块电阻为2.71 Ω/□,此时电阻率具有最小值2.18×10-4 Ω·cm.实验制备的TGZO 薄膜在可见光区范围内平均透过率达到了90;以上.  相似文献   

8.
利用直流磁控溅射法在石英衬底上制备出了高透明导电的掺锆氧化锌(ZnO:Zr)薄膜.研究了衬底温度对ZnO:Zr薄膜结构、形貌及光电性能的影响.XRD表明实验中制备的ZnO:Zr为六方纤锌矿结构的多晶薄膜,具有垂直于衬底方向的c轴择优取向.实验所制备ZnO:Zr薄膜的晶化程度和导电性能对衬底温度有很强的依赖性.当衬底温度为300 ℃时, ZnO:Zr薄膜具有最小电阻率7.58×10-4 Ω·cm,其可见光平均透过率超过了91;.  相似文献   

9.
利用直流磁控溅射法在玻璃衬底上制备了铝铬共掺杂氧化锌(ZACO)透明导电薄膜.通过X射线衍射(XRD)和扫描电镜(SEM)等表征方法对薄膜特性进行测试分析,研究了溅射压强和溅射功率对薄膜生长速率以及光电特性的影响.结果表明,随着溅射气压(1.5~4.5 Pa)的增大,薄膜沿c轴方向的结晶质量提高,薄膜表面更加致密,晶粒大小更加均匀.薄膜生长率随压强的增大而减小,但电阻率先减小后增大.当溅射功率由80 W增大到100 W时,薄膜的生长速率增大,电阻率减小.溅射压强为3.5 Pa,溅射功率为100 W时,薄膜的电阻率达到最小值2.574×10-3 Ω·cm.紫外-可见透射光谱表明,所有薄膜在可见光区的透过率均超过89.9;.  相似文献   

10.
以自制Mg0.2Zn0.8O∶Al陶瓷为靶材,采用室温溅射后续退火磁控溅射工艺制备了Mg0.2Zn0.8O∶Al紫外透明导电薄膜.研究了溅射压强和退火气氛对Mg0.2Zn0.8O∶Al薄膜结构和光电性能的影响.结果表明:溅射氩气压强不影响薄膜的相结构,但对薄膜的取向生长和结晶质量有一定影响;薄膜的方块电阻随溅射压强的增加先大幅减小后有所增大,溅射气压为2.0 Pa时,薄膜的方块电阻最低;不同溅射气压下制备薄膜的透光范围均已扩展到了紫外区域,而且具有85;以上的高透射率,但溅射气压对薄膜的带隙宽度和透光率没有明显影响;室温下溅射制备的薄膜经真空退火处理后其导电性能显著提高,但在空气中退火处理后其导电性能反而有所下降.  相似文献   

11.
Different geophysical data and conclusions of theoretical models, which can give information about the behavior of the solid and liquid cores of the Earth as well as about the existence of a transition layer as a temperature-hysteresis region at a relatively weak first-order phase transition, are compared. It is concluded that liquid inclusions inevitably exist in this region; these inclusions are involved (due to the complex convective processes occurring in the liquid core) in the transport of light materials from some areas of the solid-core surface. The porosity and permeability of the transition layer determine the seismic acoustic inhomogeneities in these areas, which contact the convective flows in the liquid core. In particular, this explains the well-known ??east-west?? effect. Obviously, the model of the crystalline core is not the only possible alternative for a model of a core with a metallic glasslike structure.  相似文献   

12.
13.
The model of the pressure-induced first-order phase transition of a metal melt to the metallicglass state considers a thermodynamically nonequilibrium porous near-surface shell of the solid core of the Earth, which contacts cyclonic vortices in the liquid core. Anomalous flows of heat and light-material mass to the mantle from the solid core at these contact points are calculated. These anomalous flows are shown to be comparable with the observed ones under the assumption of a rapid increase in the melt viscosity at pressures of 1–10 Mbar, which is characteristic of a solid core. In this case, the porous layer permeability may be very low.  相似文献   

14.
The magnetic state of the V(39 nm)/20 [V(3 nm)/Fe(3 nm)] nanostructure has been investigated by polarized neutron reflectometry in the temperature range from 1.6 to 30 K in magnetic fields from 0.2 to 15 kOe. The data obtained indicate that the superconductivity of vanadium layers may affect magnetic ordering both over the depth of the structure and in its plane.  相似文献   

15.
Lead iodide (PbI2) shows excellent electronic properties for detection of ionizing radiation. We report the introduction of rare-earth elements and other elements as admixtures during synthesis to study their influence on the quality of single crystals. Synthesized material as well as single crystals have been characterized by measurements of electrical resistivity and low-temperature photo luminescence and index of refraction. The structural quality with respect to polytypes was analysed by electron back scatter diffraction. Makyoh topography was applied for surface studies.  相似文献   

16.
Crystallography Reports - A new approach to simulating the morphology of hierarchical nanocrystals has been proposed on the example of ZnO nanotetrapods. Within this approach, twinning is...  相似文献   

17.
The effect of temperature on the oxalic acid catalyzed sono-hydrolysis of tetramethoxysilane (TMOS) was studied by means of a heat flux calorimetric method. The activation energy of the process was measured as (24.5 ± 0.8) kJ/mol in the temperature range between 10 and 50 °C. The structural characteristics of the resulting sonogels, after long period of aging in saturated conditions, were studied by means of small angle X-ray scattering. The structure can be described as formed by ∼2.7 nm mean size mass fractal-like aggregates (clusters) of primary silica particles of ∼0.3 nm mean size, all imbibed in a liquid phase. The average mass fractal dimension of the clusters was found to be 2.58. The primary particle density was estimated as 2.23 g/cm3, in good agreement with the value frequently quoted for fused silica. The volume fraction of the clusters in the saturated sonogels was estimated as about 28%. The moment in which the meniscus of the liquid phase penetrates into the clusters under rapid evaporation process has been detected by an inflection in the first derivative of the curve of weight loss in a simple thermogravimetric test.  相似文献   

18.
Crystallography Reports - Copper-based alloy items of the III century A.D., found in Burial no. 182 of the Late-Scythian Levadki necropolis in the submountain Crimea, have been investigated. The...  相似文献   

19.
A mathematical model proposed for the Czochralski method has been employed to analyse the stability, to calculate the transitional characteristics of open and closed systems for the case that the PID control is used in the feedback circuit. The method to control the crystallization process by weighing the crystal is analysed in detail. Based on the proposed criterion of quality of the transitional process, an optimum adjustment of the controller for one- and two-channel control is performed.  相似文献   

20.
The pseudohexagonal crystal structure of the mineral catapleiite Na1.5Ca0.2[ZrSi3(O,OH)9] · 2(H2O,F) from the Zhil’naya Valley in the central part of the Khibiny alkaline massif (Kola Peninsula, Russia) is studied by X-ray diffraction (XCalibur-S diffractometer, R = 0.0346): a = 20.100(4), b = 25.673(5), and c = 14.822(3) Å; space group Fdd2, Z = 32, and ρcalcd = 2.76 g/cm3. Fluorine atoms substituting part of H2O molecules in open channels of the crystal structure have been found for the first time in the catapleiite composition by microprobe analysis. The pattern of distribution of Na and Ca atoms over the voids of the mixed anionic framework consisting of Zr-octahedra and three-membered rings of Si-tetrahedra accounts for the pronounced pseudoperiodicity along the a and c axes of the pseudohexagonal unit cell and for the lowering of crystal symmetry to the orthorhombic one. It is shown that part of the hydrogen atoms of water molecules is statistically disordered; their distribution correlates with the pattern of the population of large eight-vertex polyhedra by Na and Ca atoms.  相似文献   

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