基于PDMS的光纤端面微纳结构转移法

微纳光纤传感器将微纳加工与光纤传感技术有机结合,具有重大的科研意义和产业化潜力。现有加工方法无法达到任意复杂三维结构可制备化,从而限制了微纳光纤传感器的发展。介绍了一种新型微纳加工方法,该方法在聚二甲基硅氧烷（PDMS）薄膜上实现微纳结构的制备,之后将薄膜连同微纳结构一同转移到光纤端面,在光纤端面实现人为定义三维立体微纳结构。通过在扫描电镜下对制备的样品进行检测,确认PDMS薄膜及其上三维结构可被无损转移至光纤端面。该方法具有易制备、低成本且可加工三维微纳结构的特点。     

微流控光学透镜阵列内芯表面的电润湿特性测量

采用特定的“导电基片／绝缘膜层”微透镜阵列内芯材料,研究其表面的介质上电润湿（EWOD）特性。利用图像采集与数据处理方法测量了0～60V电压范围内硫酸钠水溶液液滴在“不锈钢基片／Parylene绝缘层”芯片表面的接触角变化数据,通过EWOD理论模型计算得到硫酸钠溶液的表面张力值,此值与理论值相吻合。进而计算了内芯与液滴的界面张力,这种方法可用于一般固液界面张力的测量。     

基于太赫兹超材料的微流体折射率传感器

太赫兹生物医学是目前光谱研究领域的热点,其主要难点在于如何有效避免水分的干扰,进行液相环境下样本的灵敏分析与检测。超材料太赫兹传感器由于具有高灵敏、快速检测、痕量分析等优势,而成为太赫兹生物医学传感领域的重要研究方法。设计加工了一种基于单开口谐振环超材料的太赫兹液相传感芯片,为了有效克服水对太赫兹波的强烈吸收,利用微纳加工技术刻蚀深度为50 μm的流体通道。传感芯片整合了超材料基底与PDMS流道,在THz频段有两个位于0.771和2.129 THz的谐振峰。以水、无水乙醇作为常见化学溶剂进行传感实验,相对于空白传感器本身的THz时域谱而言,液体的加入导致时域峰的相位延迟和幅度减小。同时,由于水的折射率大于乙醇,THz透射频谱结果显示为水的频移改变量大于乙醇,且峰2大于等于峰1。上述结果表明,构建的超材料液相传感芯片是一个灵敏的折射率传感器,也证明了该传感器在测量液态样品方面的可行性。此外,利用该芯片研究了不同浓度的PBS溶液,发现水溶液中加入离子会导致谐振频率红移（以水为参考）,随着离子浓度增加,谐振频率改变量依次增加,10X PBS红移量最大,峰1为22.9 GHz,峰2为30.5 GHz。比较两个谐振峰的传感性能,峰2的传感能力更好,但是峰1对低浓度的离子溶液更加敏感。因此,构建的微流体传感器及检测体系作为一个灵敏的折射率传感器,可开发一个灵敏的无标记THz传感平台,为太赫兹生物医学研究提供新思路。     

高性能三维纳米结构SERS芯片设计、批量制备与痕量汞离子检测

表面增强拉曼散射（SERS）是一种无损、高灵敏、快速检测痕量重金属离子的光谱技术。通过调控和优化纳米结构图案和尺寸可显著增强局域表面等离子体共振（LSPR）与表面等离子体激元（SPP）的耦合以提升电磁场强度,是获得高性能SERS芯片的重要新途径。提出一种用于检测痕量汞离子的新型金属/介质三维周期纳米结构高性能SERS芯片。利用新型应力分化式双层模板纳米压印方法实现了大面积高均一纳米结构SERS芯片的低成本、批量制备。该芯片成功用于痕量汞离子的高灵敏快速检测。采用有限元方法对压印过程界面微区应力进行模拟,通过调控压印模板纵向结构和横向尺寸对模板进行设计。模拟结果表明,纵向有台阶结构的双层模板图案区域呈现高、低两个应力分区,其中,高应力区占图案~72%的面积,其应力均匀性比单层模板提升17%;低应力区分布在图案边缘~28%的区域,可有效减小脱模切应力。当模板横向尺寸从15 mm缩减至7 mm,界面应力整体提升1～2个数量级,将显著提高压印成功率。使用不同横向尺寸的单、双层模板进行压印实验结果表明,尺寸为7 mm的压力分化式双层模板实现了大面积高均一纳米结构的高质量制备,这与模拟结果高度一致。在压印胶纳米结构上构筑金纳米颗粒得到金属/介质三维周期纳米结构SERS芯片。此芯片对罗丹明6G分子的检测极限为2.08×10-12 mol·L-1,增强因子达3×108,检测均一性RSD为8.07%。该芯片对汞离子的探测限浓度仅为10 ppt(5.0×10-11 mol·L-1),浓度线性工作范围为5.0×10-11～5.0×10-5 mol·L-1,跨度达6个数量级,呈现良好的线性关系(R2=0.966),在目前汞离子检测技术中具有显著优势。提出一种通用的高灵敏快速检测痕量物质的SERS芯片设计和制备方法。这种基于光学原理芯片“结构设计-批量制备-实际应用”的研究范式将连接芯片设计和批量制备两个关键点,推动其实际应用。     

基于双波长像面数字全息显微的微通道检测

针对微流控芯片通道三维形貌的可视化测量需求,搭建了一套反射式离轴双波长像面数字全息显微测量系统。首先,利用分辨率靶和标准样片对系统的横向、纵向分辨率和放大倍数进行标定实验,结果表明双波长全息显微系统在横向宽度及纵向深度测量中具有较好的准确性和可行性。然后,利用该系统分别对由PDMS材料制成的直通道、圆形小室结构微流控芯片以及硅基底微流控芯片通道进行三维形貌检测,并得到定量结果：直通道结构深度为48.6μm,宽度为75.8μm;圆形小室微通道深度为48.5μm,宽度为76.6μm;硅基底微流控芯片测量得到通道深度为61.6μm。上述结果与白光干涉仪的测量结果具有良好的一致性,说明双波长全息显微系统具有较高的可靠性和准确性,可为微流控芯片微通道检测提供新的成像检测方法。     

自动恒温控制在可见光CCD成像系统中的应用研究

随着高性能CCD传感器的发展,其在空间成像探测系统得到广泛应用。为解决传感器的成像质量和恒温控制问题,采用基于帕尔贴效应的热电制冷（Thermo—ElectricCooling,TEC）技术,以FPGA为控制芯片,运用PID控制算法,实现了小型温度控制系统。实验结果表明,该系统能快速准确地实现恒温控制,可扩展性强,具有一定的应用价值。     

微光夜视系统光晕效应定量表征与建模方法北大核心CSCD

研究了微光夜视系统输出图像中光晕尺寸和灰度分布与系统参数之间的关系,建立了系统光晕效应的定量化表征模型。首先分析了系统输出图像中光晕的产生机理;其次依据微光夜视系统成像原理,通过分析光电阴极产生的光电子数及初角度分布、光电子在光电阴极与微通道板之间的运动、光电子与微通道板非开口壁碰撞后的运动规律及微光成像系统各环节对能量的逐级传递,研究了光晕的定量化表征方法;结合上述理论研究,建立了光晕的数字仿真模型。结果表明:所提出的光晕效应表征模型能够与实验结果中光晕的灰度分布及尺寸较好地吻合;随着强光源能量增大,系统光晕效应越明显,光晕效应对系统成像质量影响越大。     

基于特殊激光微造型工艺的控制方法研究

鉴于激光表面微造型技术加工金属材料时会带来较严重的负面热效应,提出"单脉冲同点间隔多次"的激光微造型新方法.通过对运动控制卡与自制的调Q控制卡的软件编程,利用声光调Q技术及伺服控制,完成了运动控制系统与激光系统的协同控制,从而实现激光加工新方法.整个系统通过工控机集中控制,利用该方法能够高效率加工出微观或宏观的造型形貌,且能显著减少激光加工所带来的热效应负面影响.该控制系统可在摩擦副表面加工出优化设计的微观形貌.经实际加工验证,设备能够满足加工要求且能获得较好的微观形貌和表面质量.     

化学机械抛光中纳米颗粒的作用分析

化学机械抛光（chemical mechanical polishing, CMP）是用于获取原子级平面度的有效手 段.目前，CMP的抛光液通常使用纳米级颗粒来加速切除和优化抛光质量.这类流体的流变性 能必须考虑微极性效应的影响.对考虑微极性效应的运动方程的求解，有助于了解CMP的作用 机理.数值模拟表明，微极性将提高抛光液的等效黏度从而在一定程度上提高其承载能力， 加速材料去除.这在低节距或低转速下尤为明显，体现出其具有尺寸依赖性.通过改变抛光液 中粒子的微极性，用实验研究了微极性效应对CMP中材料去除速率的影响，证明了分析的合 理性. 关键词： 化学机械抛光 微极流体 抛光液 流变特性 材料去除速率     

基于光束扫描宽化技术的激光掩模微加工系统

利用Nd∶KGW激光器,采用光束扫描宽化技术和掩模微缩成像方法研制了用于微打标及微型零件雕刻成形的激光掩模微加工系统。系统采用计算机打印的塑料胶片或液晶作掩模,光束扫描面积为（有效掩模面积）30 mm×30 mm。微缩成像系统的缩小倍率分别为8～10倍（f=100 mm透镜）和15～20倍（f=50 mm透镜）。对该系统的加工尺寸和加工精度进行了分析。实验结果表明：系统达到的最小标刻宽度和加工图形精度均为10μm,与分析结果一致。系统的单次加工深度为0.07～0.1μm,最大加工深度为200μm,可满足工业微加工技术的基本要求。     

Controllable fabrication of lotus-leaf-like superhydrophobic surface on copper foil by self-assembly

A novel approach was developed to fabricate a lotus-leaf-like superhydrophobic surface on a copper foil by simple self-assembly method with the assistance of the porous PDMS template which was used to adjust the oxidized parts of the copper foil surface before self-assembly. The results showed a series of beautiful flower-like microstructures resulting from the self-assembly of cupric stearate that were distributed at regular intervals on the as-prepared copper foil surface similar to the papillae of lotus leaf surface. The water contact angle of the as-prepared copper surface was up to 161° and its sliding angle was only 3°. Its great superhydrophobicity could be kept unchanged after 6 months in air. The formation mechanism of the lotus-leaf-like structure was discussed. This simple and low-cost method is expected to be applied to design and prepare complicated superhydrophobic surfaces with beautiful regular microstructures on different substrates such as stainless steel, zinc, and so on.     

A micro/nanocasting method for replicating soft micro/nanosurface structures using a dynamic electrical field

We propose a new electric field-induced micro/nanocasting method to replicate soft patterns using micro/nanocasting techniques without pressure. The process uses an alternating current (AC) electrical field and rotation of one electrode, generating a dynamic electrical field that induces electrokinetic flow motion in a dielectric solution (polydimethylsilane, PDMS). We used a lotus leaf as a replication template and characterised the PDMS flow motion to observe the effects of various process parameters (e.g., electrical field strength, rotation speed of an electrode, and electrode shape). The unstable flow motion was significantly dependent on the processing parameters, especially the rotation speed of the electrode. Using the optimised processing conditions, the replication efficiency was about 88%. We believe that this method has potential for fabricating soft micro/nanosized structures.     

Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices.     

A study on the biological detection chip through the use of PDMS lens for the reinforcement of fluorescence receiving signal

In this study, MEMS process technology is adopted to produce microfluidic chip and PDMS lens. SU-8 thick film photo resist is coated onto silicon wafer surface in two times of spin coating, then through lithography and mold transfer technology, PDMS chip of minimal line width 100 μm and thickness 200 μm is printed. In fluorescence detection aspect, we use objective lens to couple laser optical source to optical fiber, and then have it incident to excite fluorescence sample, the excited fluorescence then passes through filter and detected by optical detector of experiment group and spectrophotometer of reference group. From the experiment result, the Hex fluorescence detection limit of the system is verified to be 1 pmol/5 μl. In addition, we have integrated PDMS lens into microfluidic chip to make generalized detection experiment, it was found that the signal measured by optical embedded type is higher than that of non-embedded type. Meanwhile, the microfluidic chip with double concave lens (135°) and10 mm PDMS focusing lens can be utilized to obtain optimal fluorescence receiving effect. The fluorescence intensity is raised by 2–3 times, and the measurement limit is lowered to 100 fmol/5 μl.     

Biomimetic-inspired highly sensitive flexible capacitive pressure sensor with high-aspect-ratio microstructures

The high sensitivity flexible capacitive pressure sensor (FCPS) manufactured in a fast and efficient way has friendly man-machine interaction function. In this paper, a high-sensitivity FCPS is developed by using a two-step template method to reproduce biomimetic microtower polydimethylsiloxane (PDMS) from the lotus leaf surface. The capacitive sensor is composed of a PDMS dielectric layer and the Cu nanowire electrodes sandwiching in the middle, with a high sensitivity of ~1.207 kPa⁻¹, a low detection limit of less than 0.02 kPa and a fast response time of 61.6 ms. Particularly, the sensing performance can be kept basically unchanged when bent at a 5 mm radius. Moreover, the FCPS can withstand 4000 repeated tests and maintain stable performance, and the sensitivity is almost the same in the process of loading and unloading, suggesting the high robustness. These results demonstrates the FCPSs have potential applications in electronic wearables, human health monitoring and uneven surface applications.     

Superhydrophobicity of polyvinylidene fluoride membrane fabricated by chemical vapor deposition from solution

Due to the chemical stability and flexibility, polyvinylidene fluoride (PVDF) membranes are widely used as the topcoat of architectural membrane structures, roof materials of vehicle, tent fabrics, and so on. Further modified PVDF membrane with superhydrophobic property may be even superior as the coating layer surface. The lotus flower is always considered to be a sacred plant, which can protect itself against water, dirt, and dust. The superhydrophobic surface of lotus leaf is rough, showing the micro- and nanometer scale morphology. In this work, the microreliefs of lotus leaf were mimicked using PVDF membrane and the nanometer scale peaks on the top of the microreliefs were obtained by the method of chemical vapor deposition from solution. The surface morphology of PVDF membrane was investigated by scanning electronic microscopy (SEM) and atomic force microscope (AFM). Elemental composition analysis by X-ray photoelectron spectroscopy (XPS) revealed that the material of the nanostructure of PVDF membrane was polymethylsiloxane. On the lotus-leaf-like PVDF membrane, the water contact angle and sliding angle were 155° and 4°, respectively, exhibiting superhydrophobic property.     

Ultrafast laser machining of tapered microchannels in glass and PDMS

The ability to fabricate tapered microchannels with customizable cross sections in a variety of materials is highly desirable for microfluidic applications. This article examines ultrafast laser machining of tapered microchannel trenches in both hard (soda-lime and borosilicate glasses) and soft (PDMS elastomer) transparent solids. A simple model for channel width and depth as a function of processing parameters and threshold fluence is presented. Estimated channel sizes from the model are in good agreement with experimental results. We also show that the channel depth is a linear function of the number of laser pulses per channel width. All measurement data are found to collapse onto a single curve, which can serve as a useful guide for micromachining of tapered channels in transparent materials.     

ZnO micro-nano composite hydrophobic film prepared bythree-step method

<正>The hydrophobicity of the lotus leaf is mainly due to its surface micro—nano composite structure.In order to mimic the lotus structure,ZnO micro-nano composite hydrophobic films were prepared via the three-step method.On thin buffer films of SiO₂,which were first fabricated on glass substrates by the sol—gel dip-coating method,a ZnO seed layer was deposited via RF magnetron sputtering.Then two different ZnO films,micro-nano and micro-only flowerlike structures,were grown by the hydrothermal method.The prepared films have different hydrophobic properties after surface modification.The structures of the obtained ZnO films were characterized using x-ray diffraction and field-emission scanning electron microscopy.A conclusion that a micro-nano composite structure is more beneficial to hydrophobicity than a micro-only structure was obtained through research into the effect of structure on hydrophobic properties.     

Long term hydrophilic coating on poly(dimethylsiloxane) substrates for microfluidic applications

Poly(dimethylsiloxane) (PDMS) has been used extensively for microfluidic components and as substrates for biological applications. Since the native nature of PDMS is hydrophobic it requires a functionalization step for use in conjunction with aqueous media. Commonly, oxygen plasma treatment is used for the formation of hydrophilic groups on the surface. However, the hydrophilic nature of these surfaces is short lived and the surfaces quickly revert back to their original hydrophobic state. In this work, branched-polyethylenimine (b-PEI) was used for long term modification of plasma treated PDMS surface. Contact angle, X-ray photoelectron spectroscopy (XPS) and Atomic force microscopy (AFM) were used for characterization of the modified surfaces and their stability with time was studied. The results obtained demonstrate that comparatively higher stability, hydrophilic, positively charged surfaces can be obtained after b-PEI treatment. These b-PEI treated PDMS surfaces can be used as fluidic channels for the separation of molecules as well as a substrate for the adherence of bio-molecules or biological cells.     

基于织构表面的摩擦静电发电机制备及其输出性能研究

摩擦电纳米发电机(TENG)是基于摩擦生电和静电感应复合原理将机械能转换为电能的一种新型能源获取方式. 本文采用模板法制备了几种不同参数的聚二甲基硅氧烷(PDMS)微圆柱结构, 并组装成TENG, 实验研究了接触区表面积、外加载荷对TENGs输出性能的影响. 结果表明, 圆形微柱阵列的存在有效提高了TENG的作用面积及电输出性能, 相同载荷下, 电输出随微柱间距离减小而增加, 在间距为15 μm、载荷为5 N时, 输出的平均开路电压和短路电流分别为88 V 和15 μA, 是同等条件下、微柱间距为50 μm电输出的1.5倍以上; 电输出随载荷增加呈准线性增加, ANSYS软件模拟载荷作用下PDMS微圆柱织构的变形行为, 结果表明, 压力作用下, 微圆柱主要发生压缩变形, 基底的变形导致微柱与上电极之间产生侧向摩擦, 从而产生更多电荷, 提升了电输出性能.