Temperature-programmed evolution of low-energy,rare-gas ions implanted in Si(100)

The implantation and outdiffusion of 100–500 eV helium and argon ions from Si(100) have been studied using mass spectrometry to measure the thermal evolution of He and Ar atoms. Experimentally determined implantation fractions were compared to results from a Monte Carlo simulation. Deviations from the prediction of the binary elastic collision model were observed for Ar at energies less than 300 eV. Hydrogen adsorbed at submonolayer coverages after ion exposure produced a permeable diffusion barrier.     

Theoretical analysis of ion kinetic energies and DLC film deposition by CH4＋ Ar （He） dielectric barrier discharge plasmas

The kinetic energy of ions in dielectric barrier discharge plasmas are analysed theoretically using the model of binary collisions between ions and gas molecules. Langevin equation for ions in other gases, Blanc law for ions in mixed gases, and the two-temperature model for ions at higher reduced field are used to determine the ion mobility. The kinetic energies of ions in CH4 ＋ Ar（He） dielectric barrier discharge plasma at a fixed total gas pressure and various Ar （He） concentrations are calculated. It is found that with increasing Ar （He） concentration in CH4 ＋ Ar （He） from 20% to 83%, the CH4＋ kinetic energy increases from 69.6 （43.9） to 92.1 （128.5）eV, while the Ar＋ （He＋） kinetic energy decreases from 97 （145.2） to 78.8 （75.5）eV. The increase of CH4＋ kinetic energy is responsible for the increase of hardness of diamond-like carbon films deposited by CH4 ＋ Ar （He） dielectric barrier discharge without bias voltage over substrates.     

Quasi-phase matching of high-order harmonic generation at high photon energies using counterpropagating pulses

We extend all-optical quasi-phase matching of high-order harmonic generation into spectral regions where conventional phase matching is not possible. The high laser intensities required to generate harmonics at energy >130 eV, coupled with the resulting high level of ionization, preclude conventional phase matching in all nonlinear media. Selective enhancement factors between 40 and 150 in the flux of harmonics at photon energies around 140 eV are demonstrated using a train of two counterpropagating pulses.     

Bright quasi-phase-matched soft-X-ray harmonic radiation from argon ions

Selective enhancement (>10(3)) of harmonics extending to the water window (approximately 4 nm) generated in an argon gas filled straight bore capillary waveguide is demonstrated. This enhancement is in good agreement with modeling which indicates that multimode quasi-phase-matching is achieved by rapid axial intensity modulations caused by beating between the fundamental and higher-order capillary modes. Substantial pulse energies (>10 nJ per pulse per harmonic order) at wavelengths beyond the carbon K edge (approximately 4.37 nm, approximately 284 eV) up to approximately 360 eV are observed from argon ions for the first time.     

氩气中高次谐波辐射的研究

报道了在４５ｆｓ－２ＴＷ激光装置上以Ａｒ惰性气体为介质产生高次谐波的实验结果,实验中通过研究气体密度和激光能量对谐波辐射的影响,找到了适当的气体密度和激光能量范围,并在Ａｒ气中观察到８１次（９．７ｎｍ）的皆波辐射,这时迄今为止,人们在Ａｒ气中所能观测到的最短波长的谐波辐射,经分析表明,高于５７次的谐波是由Ａｒ离子产生的。     

纳秒强光场下碘甲烷的激光电离中高价离子产生研究

利用25纳秒脉冲Nd-YAG 532 nm的激光,在1011 W cm-2的光场强度下,用飞行时间质谱对不同载气条件下碘甲烷的激光电离过程进行了研究.当利用氩作为载气时,除观察到H+,C+,CH+,CH+3,I+,CH3I+等离子外,还观察到很强的C2+,I2+和I3+离子信号.这些高价离子的最可几平动能分别为55.5 eV,9.5 eV和27 eV.质谱峰形的分裂现象以及不同载气的实验结果表明这些高价离子可能来源于碘甲烷团簇的库仑爆炸过程.     

Ar+ excited aluminium Auger electron emission from Cu-Al alloys

The aluminium Auger electron emission from Cu-Al alloys in solid solution bombarded with 2–16 keV Ar⁺ ions is studied as a function of the Al concentration. A linear law is observed for the intensity of the high energy Auger peak at 76 eV which originates only from the primary asymmetric collisions Ar → Al where two vacancies are created in the 2p level of the Al atom. On the contrary, a parabolic law is found for the intensity of the principal Auger peak at 63.5 eV (one Al 2p vacancy) which originates from the asymmetric collisions Ar → Al and from the symmetric collisions Al → Al together. The proportion of asymmetric collisions among collisions effective for the principal Auger emission from pure aluminium can be deduced from these results. It appears as an increasing function of the bombardment energy: its value is nearly equal to 6% at 10 keV and 18% at 15 keV.     

The dynamics and kinematics of the electron transfer reactions of CF[image omitted] with Ar

The electron transfer reactions between CF [image omitted] and Ar have been studied using a position-sensitive coincidence time-of-flight mass spectrometer. The spectra show the formation of CF [image omitted], CF [image omitted] and CF [image omitted] ions, accompanied by Ar+ ions, by dissociative and non-dissociative electron transfer reactions. Analysis of the PSCO data shows that the CF [image omitted] and CF [image omitted] ions are formed by reactions of ground state CF [image omitted](2B2) ions. The CF [image omitted] product is formed in high lying vibrational states of its ground electronic state, just below the dissociation asymptote to [image omitted]. The formation of CF [image omitted] proceeds via a sequential mechanism, involving the population of highly excited vibrational levels of the ground electronic state of CF [image omitted] which dissociate to CF [image omitted](2A1) + F when the CF [image omitted] is well separated from the Ar+ ion. No evidence of complexation is observed. The energy dependence of the experimental yield of the CF+ ion is consistent with it arising from a reaction of an electronic excited state of CF [image omitted], as proposed in a previous study of this collision system. The unimolecular dissociation of the reactant dications is also observed and indicates that these ions are predominantly in their ground (2B2) electronic state. The kinetic energy release of this unimolecular reaction indicates the metastable well of the CF [image omitted](2B2) state is approximately 3 eV deep and also shows that CF [image omitted](2B2) ions well below the barrier to charge separation can dissociate on the time-scale of the experiment. This observation implicates predissociation, possibly via a repulsive dication state, as the mechanism for the unimolecular charge separation of the ground state of CF [image omitted].     

Plasma line emission during single-bubble cavitation

Emission lines from transitions between high-energy states of noble-gas atoms (Ne, Ar, Kr, and Xe) and ions (Ar(+), Kr(+), and Xe(+)) formed and excited during single-bubble cavitation in sulfuric acid are reported. The excited states responsible for these emission lines range 8.3 eV (for Xe) to 37.1 eV (for Ar(+)) above the respective ground states. Observation of emission lines allows for identification of intracavity species responsible for light emission; the populated energy levels indicate the plasma generated during cavitation is comprised of highly energetic particles.     

Generation of soft x-ray and water window harmonics using a few-cycle, phase-locked, optical parametric chirped-pulse amplifier

Multimillijoule, few-cycle, carrier-envelope-phase (CEP)-locked, near-IR pulses at 750 nm from an optical parametric chirped-pulse amplifier are applied to the generation of CEP-dependent, soft x-ray high harmonics around the boron K-edge at 188 eV. The dependence on the CEP manifests the phase coherence of high harmonics preserved in the highest-photon energy ever reported. Multimillijoule optical pulses also allow the extension of the cutoff energy up to 325 eV, exceeding the carbon K-edge of the water window. However, in this spectral range, the CEP dependence of harmonic spectra is not observed, suggesting the degradation of temporal coherence due to the heavy ionization of helium atoms.     

Total cross section measurements for charge exchange of He++ ions with He and Ar atoms

Total charge exchange cross sections were measured for He⁺⁺ in He and Ar gas in the energy range from 50 to 540 eV using a single beam apparatus. For He⁺⁺ in He the measured cross section is in agreement with calculations for symmetric resonant charge exchange. For He⁺⁺ in Ar the cross section for charge exchange decreases with decreasing energy below 300 eV. The measured cross section suggests the formation of Ar⁺ ions to be more important at lower energies and the production of Ar⁺⁺ to be dominant at higher energies.     

Modeling of Atomic Displacements in the Bombardment of Copper by Ar and Xe Ions with Near-Sputtering-Threshold Energies

Using the molecular dynamics method, collision-induced cascades are modeled, which are generated in the normal bombardment of a copper crystal (100) by Ar and Xe ions with energies 25, 40, and 50 eV as well as by Xe ions at 15 eV and crystal temperature 300 K. Time dependences are derived for the formation of vacancies and interstitial atoms as a function of depth of the crystal and radiation-adsorption atoms (adatoms) on its surface during the cascade development. The adatoms are shown to contribute considerably to the change in r.m.s. atomic displacement in the thermal stage of the cascade. It is proved that Ar ions produce more adatoms on the surface vacancies while Xe ions do so in the bulk of the crystal below the first atomic layer and exhibit more effective mixing in the [100] direction.     

Die Geschwindigkeitsverteilung von kathodenzerstäubtem Kalium

The differential sputtering ratio (energy spectrum) of polycrystalline potassium sputtered by Ar and Xe ions of 28 keV energy has been measured using surface ionization detection. The spectrum shows a maximum at 0.5 eV and drops to half the maximum value at 2.0 eV. The total sputtering ratio for incident Xe ions is found to be 2.7±1.3 atoms/ion. To check what influence the detector might have on the measured spectrum, different materials and temperatures were used. Below 3 eV the detection probability is energy independent, if the detector is properly heated. Above that energy the measured spectra become uncertain, probably because of the onset of reflexion. Therefore the “focussing energy” of sputtering theory cannot be deduced.     

同步辐射软X射线能区Ar原子光致电离截面的研究

利用北京同步辐射装置3W1B光束线产生的单色光作为光源,流气式无窗低压强双电离室作为气体容器,选择氩气作为实验气体,使用合适的公式和软件,实验测定了能量从180到2?70eV范围内若干压强点处光致电离截面与能量的关系曲线.发现在氩原子的L吸收边附近光致电离截面与压强有关:压强越低,截面越大.实验结果与理论结果进行了对比,结果表明,在15?0—2?0?5eV能量范围,理论与实验符合良好,但是在氩原子的L吸收边附近由于束线分辨率的原因,理论与实验有一定偏差.     

Multiphoton double ionization of Ar in intense extreme ultraviolet laser fields studied by shot-by-shot photoelectron spectroscopy

Photoelectron spectroscopy has been performed to study the multiphoton double ionization of Ar in an intense extreme ultraviolet laser field (hν ～ 21 eV, ～ 5 TW/cm2), by using a free electron laser (FEL). Three distinct peaks identified in the observed photoelectron spectra clearly show that the double ionization proceeds sequentially via the formation of Ar(+): Ar+hν→Ar (+) + e? and Ar2(+) + 2hν→Ar(+) + e?. Shot-by-shot recording of the photoelectron spectra allows simultaneous monitoring of FEL spectrum and the multiphoton process for each FEL pulse, revealing that the two-photon ionization from Ar(+) is significantly enhanced by intermediate resonances in Ar(+).     

Ar+8轰击石墨表面损伤的扫描隧道显微镜观测研究

报道了用10—112MeV能量的Ar+8离子轰击高定向石墨造成损伤的原子水平观测结果,给出了损伤形貌、损伤大小和损伤数密度.讨论了损伤与表面核能损的关系及损伤过程的可能机制.     

Investigation of the binary model of scattering of 1 keV to 25 eV Ar+ ions from a Cu surface 1

The validity of the binary collision approximation for describing the scattering of low energy Ar ions from a polycrystalline Cu surface was investigated. The Ar ions were incident upon the target surface at an angle of 45° (with respect of the plane of the surface). The range of primary ion energy studied was 1000–25 eV. An ultra-high vacuum magnetic sector mass spectrometer was used to analyze those secondary ions emitted from the specimen surface at an angle of 90° with respect to the primary ion beam. The scattered ions were identified and their energies measured. No significant deviation from the prediction of the binary collision model was found throughout the range of energy studied.     

Observation of the Damage on HOPG Surface Induced by Ar+8 Ions

Highly oriented pyrolytic graphite (HOPG) samples were bombarded by Ar+8 ions with energy range from 10.1 to 112MeV. After bombardment the sample surfaces were observed using a STM and NanoScope. The resultS show that the energetic ion could cause observable praotrusionlike damage on the HOPG surface.The relationship betWeen damage and energy loss, and the possible mechanism of damage process are discussed.     

Sputtering of SiC with low energy He and Ar ions under grazing incidence

The effect of low energy sputtering under grazing incidence upon the surface composition of SiC was investigated by Auger electron spectroscopy. The energy of the sputtering projectiles (He, Ar) varied from 200 to 1500?eV. Peak shifts to the higher energies with increasing argon ion energy were observed for all silicon and carbon Auger transitions. These shifts were explained by enhanced damage of the surface region within the sampling depth of the Auger electrons. The insensitivity of the Auger peak position to the energy of helium ions indicates that the damage state in the surface region does not change with the increasing energy of helium ions. An increase of the carbon concentration with the decrease of the argon energy was observed. The experiments were accompanied by dynamic Monte Carlo simulations by the TRIDYN code.     

The energy spectra of secondary ions emitted during ion bombardment

Secondary ion energy spectra have been measured for singly charged ions emitted from targets irradiated with 43 keV A⁺ ions. Targets studied include the 3d transition metals (Sc, Ti, V, Cr, Fe, Ni) Cu and Zn, Zr, Al and Si and the compounds SiO₂, Al₂O₃, NaCl, KCl. Energy spectra were measured in the energy range 1–600 eV. In several cases a peak in the energy spectrum in the region around 200 eV has been found. This is in addition to the usual low energy peaks in the region of 5–10 eV. In many cases the low energy peak was observed to decay steadily with irradiation time or to increase with oxygen pressure. In the case of the cleanest Zn spectrum, only the high energy peak can be detected. The data are discussed in relation to current models of secondary ion emission. We conclude that, in general, elemental metal targets which are clean are characterised by the high energy peak in the secondary ion energy spectrum. The slower ions emitted have been neutralised by electron exchange processes. The low energy peaks in unclean, partially clean, oxide coated or compound targets (NaCl, KCl) arise because the neutralisation of the slower ions is either not as efficient or is not possible. The secondary ion emission model of Blaise and Slodzian could account for the emission of ions from most targets.